12/17/2010	12:04:56 AM	Helium valve closed
12/17/2010	12:04:56 AM	PH3 valve closed
12/17/2010	12:04:56 AM	Main Vac valve closed
12/17/2010	12:04:56 AM	Bypass valve closed
12/17/2010	12:04:56 AM	H2 valve opened
12/17/2010	12:04:56 AM	BCl3 valve opened
12/17/2010	12:04:56 AM	SiCl4 pre valve opened
12/17/2010	12:04:56 AM	SiCl4 post valve opened
12/17/2010	12:04:56 AM	Bubbler valve opened
12/17/2010	12:04:56 AM	Helium MFC set to  0.000000
12/17/2010	12:04:56 AM	H2 MFC set to  500.000000
12/17/2010	12:04:56 AM	BCl3 MFC set to  12.000000
12/17/2010	12:04:56 AM	PHl3 MFC set to  0.000000
12/17/2010	12:04:56 AM	SiCl4 MFC set to  50.000000
12/17/2010	12:04:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	12:04:56 AM	Tube furnace set to 1000
12/17/2010	12:34:56 AM	H2 valve closed
12/17/2010	12:34:56 AM	BCl3 valve closed
12/17/2010	12:34:56 AM	PH3 valve closed
12/17/2010	12:34:56 AM	SiCl4 pre valve closed
12/17/2010	12:34:56 AM	SiCl4 post valve closed
12/17/2010	12:34:56 AM	Main Vac valve closed
12/17/2010	12:34:56 AM	Bypass valve closed
12/17/2010	12:34:56 AM	Helium valve opened
12/17/2010	12:34:56 AM	Bubbler valve opened
12/17/2010	12:34:56 AM	Helium MFC set to  500.000000
12/17/2010	12:34:56 AM	H2 MFC set to  0.000000
12/17/2010	12:34:56 AM	BCl3 MFC set to  0.000000
12/17/2010	12:34:56 AM	PHl3 MFC set to  0.000000
12/17/2010	12:34:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	12:34:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	12:34:56 AM	Tube furnace set to 0
12/17/2010	12:54:56 AM	Helium valve closed
12/17/2010	12:54:56 AM	H2 valve closed
12/17/2010	12:54:56 AM	BCl3 valve closed
12/17/2010	12:54:56 AM	PH3 valve closed
12/17/2010	12:54:56 AM	SiCl4 pre valve closed
12/17/2010	12:54:56 AM	SiCl4 post valve closed
12/17/2010	12:54:56 AM	Main Vac valve closed
12/17/2010	12:54:56 AM	Bypass valve closed
12/17/2010	12:54:56 AM	Bubbler valve closed
12/17/2010	12:54:56 AM	Helium MFC set to  0.000000
12/17/2010	12:54:56 AM	H2 MFC set to  0.000000
12/17/2010	12:54:56 AM	BCl3 MFC set to  0.000000
12/17/2010	12:54:56 AM	PHl3 MFC set to  0.000000
12/17/2010	12:54:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	12:54:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	12:54:56 AM	Tube furnace set to 0
12/17/2010	12:54:56 AM	Run finished at 12:54 AM
12/17/2010	1:13:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:13:37 AM	Recipe started at 1:13 AM
12/17/2010	1:13:37 AM	Helium valve closed
12/17/2010	1:13:37 AM	H2 valve closed
12/17/2010	1:13:37 AM	BCl3 valve closed
12/17/2010	1:13:37 AM	PH3 valve closed
12/17/2010	1:13:37 AM	SiCl4 pre valve closed
12/17/2010	1:13:37 AM	SiCl4 post valve closed
12/17/2010	1:13:37 AM	Main Vac valve closed
12/17/2010	1:13:37 AM	Bubbler valve closed
12/17/2010	1:13:37 AM	Bypass valve opened
12/17/2010	1:13:37 AM	Helium MFC set to  0.000000
12/17/2010	1:13:37 AM	H2 MFC set to  0.000000
12/17/2010	1:13:37 AM	BCl3 MFC set to  0.000000
12/17/2010	1:13:37 AM	PHl3 MFC set to  0.000000
12/17/2010	1:13:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:13:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:13:37 AM	Tube furnace set to 0
12/17/2010	1:14:37 AM	Helium valve closed
12/17/2010	1:14:37 AM	H2 valve closed
12/17/2010	1:14:37 AM	BCl3 valve closed
12/17/2010	1:14:37 AM	PH3 valve closed
12/17/2010	1:14:37 AM	SiCl4 pre valve closed
12/17/2010	1:14:37 AM	SiCl4 post valve closed
12/17/2010	1:14:37 AM	Bubbler valve closed
12/17/2010	1:14:37 AM	Main Vac valve opened
12/17/2010	1:14:37 AM	Bypass valve opened
12/17/2010	1:14:37 AM	Helium MFC set to  0.000000
12/17/2010	1:14:37 AM	H2 MFC set to  0.000000
12/17/2010	1:14:37 AM	BCl3 MFC set to  0.000000
12/17/2010	1:14:37 AM	PHl3 MFC set to  0.000000
12/17/2010	1:14:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:14:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:14:37 AM	Tube furnace set to 0
12/17/2010	1:14:37 AM	Run finished at 1:14 AM
12/17/2010	1:14:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:15:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	1:16:05 AM	Recipe started at 1:15 AM
12/17/2010	1:16:05 AM	Helium valve closed
12/17/2010	1:16:05 AM	H2 valve closed
12/17/2010	1:16:05 AM	BCl3 valve closed
12/17/2010	1:16:05 AM	PH3 valve closed
12/17/2010	1:16:05 AM	SiCl4 pre valve closed
12/17/2010	1:16:05 AM	SiCl4 post valve closed
12/17/2010	1:16:05 AM	Main Vac valve closed
12/17/2010	1:16:05 AM	Bubbler valve closed
12/17/2010	1:16:05 AM	Bypass valve opened
12/17/2010	1:16:05 AM	Helium MFC set to  0.000000
12/17/2010	1:16:05 AM	H2 MFC set to  0.000000
12/17/2010	1:16:05 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:05 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:05 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:05 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:05 AM	Tube furnace set to 0
12/17/2010	1:16:05 AM	Helium valve closed
12/17/2010	1:16:05 AM	H2 valve closed
12/17/2010	1:16:05 AM	BCl3 valve closed
12/17/2010	1:16:05 AM	PH3 valve closed
12/17/2010	1:16:05 AM	SiCl4 pre valve closed
12/17/2010	1:16:05 AM	SiCl4 post valve closed
12/17/2010	1:16:05 AM	Bubbler valve closed
12/17/2010	1:16:05 AM	Main Vac valve opened
12/17/2010	1:16:05 AM	Bypass valve opened
12/17/2010	1:16:05 AM	Helium MFC set to  0.000000
12/17/2010	1:16:05 AM	H2 MFC set to  0.000000
12/17/2010	1:16:05 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:05 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:05 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:05 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:05 AM	Tube furnace set to 0
12/17/2010	1:16:07 AM	Run aborted at 1:16 AM
12/17/2010	1:16:07 AM	Helium valve closed
12/17/2010	1:16:07 AM	H2 valve closed
12/17/2010	1:16:07 AM	BCl3 valve closed
12/17/2010	1:16:07 AM	PH3 valve closed
12/17/2010	1:16:07 AM	SiCl4 pre valve closed
12/17/2010	1:16:07 AM	SiCl4 post valve closed
12/17/2010	1:16:07 AM	Bypass valve closed
12/17/2010	1:16:07 AM	Main Vac valve closed
12/17/2010	1:16:07 AM	Bubbler valve closed
12/17/2010	1:16:07 AM	Helium MFC set to  0.000000
12/17/2010	1:16:07 AM	H2 MFC set to  0.000000
12/17/2010	1:16:07 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:07 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:07 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:07 AM	Tube furnace set to 0
12/17/2010	1:16:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	1:16:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:16:23 AM	Recipe started at 1:16 AM
12/17/2010	1:16:23 AM	Helium valve closed
12/17/2010	1:16:23 AM	H2 valve closed
12/17/2010	1:16:23 AM	BCl3 valve closed
12/17/2010	1:16:23 AM	PH3 valve closed
12/17/2010	1:16:23 AM	SiCl4 pre valve closed
12/17/2010	1:16:23 AM	SiCl4 post valve closed
12/17/2010	1:16:23 AM	Main Vac valve closed
12/17/2010	1:16:23 AM	Bubbler valve closed
12/17/2010	1:16:23 AM	Bypass valve opened
12/17/2010	1:16:23 AM	Helium MFC set to  0.000000
12/17/2010	1:16:23 AM	H2 MFC set to  0.000000
12/17/2010	1:16:23 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:23 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:23 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:23 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:23 AM	Tube furnace set to 0
12/17/2010	1:16:23 AM	Helium valve closed
12/17/2010	1:16:23 AM	H2 valve closed
12/17/2010	1:16:23 AM	BCl3 valve closed
12/17/2010	1:16:23 AM	PH3 valve closed
12/17/2010	1:16:23 AM	SiCl4 pre valve closed
12/17/2010	1:16:23 AM	SiCl4 post valve closed
12/17/2010	1:16:23 AM	Bubbler valve closed
12/17/2010	1:16:23 AM	Main Vac valve opened
12/17/2010	1:16:23 AM	Bypass valve opened
12/17/2010	1:16:23 AM	Helium MFC set to  0.000000
12/17/2010	1:16:23 AM	H2 MFC set to  0.000000
12/17/2010	1:16:23 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:23 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:23 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:23 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:23 AM	Tube furnace set to 0
12/17/2010	1:16:24 AM	Run finished at 1:16 AM
12/17/2010	1:16:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:16:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	1:16:51 AM	Recipe started at 1:16 AM
12/17/2010	1:16:51 AM	Helium valve closed
12/17/2010	1:16:51 AM	H2 valve closed
12/17/2010	1:16:51 AM	BCl3 valve closed
12/17/2010	1:16:51 AM	PH3 valve closed
12/17/2010	1:16:51 AM	SiCl4 pre valve closed
12/17/2010	1:16:51 AM	SiCl4 post valve closed
12/17/2010	1:16:51 AM	Main Vac valve closed
12/17/2010	1:16:51 AM	Bubbler valve closed
12/17/2010	1:16:51 AM	Bypass valve opened
12/17/2010	1:16:51 AM	Helium MFC set to  0.000000
12/17/2010	1:16:51 AM	H2 MFC set to  0.000000
12/17/2010	1:16:51 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:51 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:51 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:51 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:51 AM	Tube furnace set to 0
12/17/2010	1:16:52 AM	Helium valve closed
12/17/2010	1:16:52 AM	H2 valve closed
12/17/2010	1:16:52 AM	BCl3 valve closed
12/17/2010	1:16:52 AM	PH3 valve closed
12/17/2010	1:16:52 AM	SiCl4 pre valve closed
12/17/2010	1:16:52 AM	SiCl4 post valve closed
12/17/2010	1:16:52 AM	Bubbler valve closed
12/17/2010	1:16:52 AM	Main Vac valve opened
12/17/2010	1:16:52 AM	Bypass valve opened
12/17/2010	1:16:52 AM	Helium MFC set to  0.000000
12/17/2010	1:16:52 AM	H2 MFC set to  0.000000
12/17/2010	1:16:52 AM	BCl3 MFC set to  0.000000
12/17/2010	1:16:52 AM	PHl3 MFC set to  0.000000
12/17/2010	1:16:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:16:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:16:52 AM	Tube furnace set to 0
12/17/2010	1:17:52 AM	H2 valve closed
12/17/2010	1:17:52 AM	BCl3 valve closed
12/17/2010	1:17:52 AM	PH3 valve closed
12/17/2010	1:17:52 AM	SiCl4 pre valve closed
12/17/2010	1:17:52 AM	SiCl4 post valve closed
12/17/2010	1:17:52 AM	Bubbler valve closed
12/17/2010	1:17:52 AM	Helium valve opened
12/17/2010	1:17:52 AM	Main Vac valve opened
12/17/2010	1:17:52 AM	Bypass valve opened
12/17/2010	1:17:52 AM	Helium MFC set to  100.000000
12/17/2010	1:17:52 AM	H2 MFC set to  0.000000
12/17/2010	1:17:52 AM	BCl3 MFC set to  0.000000
12/17/2010	1:17:52 AM	PHl3 MFC set to  0.000000
12/17/2010	1:17:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:17:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:17:52 AM	Tube furnace set to 0
12/17/2010	1:18:52 AM	Helium valve closed
12/17/2010	1:18:52 AM	H2 valve closed
12/17/2010	1:18:52 AM	BCl3 valve closed
12/17/2010	1:18:52 AM	PH3 valve closed
12/17/2010	1:18:52 AM	SiCl4 pre valve closed
12/17/2010	1:18:52 AM	SiCl4 post valve closed
12/17/2010	1:18:52 AM	Bubbler valve closed
12/17/2010	1:18:52 AM	Main Vac valve opened
12/17/2010	1:18:52 AM	Bypass valve opened
12/17/2010	1:18:52 AM	Helium MFC set to  0.000000
12/17/2010	1:18:52 AM	H2 MFC set to  0.000000
12/17/2010	1:18:52 AM	BCl3 MFC set to  0.000000
12/17/2010	1:18:52 AM	PHl3 MFC set to  0.000000
12/17/2010	1:18:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:18:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:18:52 AM	Tube furnace set to 0
12/17/2010	1:19:52 AM	H2 valve closed
12/17/2010	1:19:52 AM	BCl3 valve closed
12/17/2010	1:19:52 AM	PH3 valve closed
12/17/2010	1:19:52 AM	SiCl4 pre valve closed
12/17/2010	1:19:52 AM	SiCl4 post valve closed
12/17/2010	1:19:52 AM	Bubbler valve closed
12/17/2010	1:19:52 AM	Helium valve opened
12/17/2010	1:19:52 AM	Main Vac valve opened
12/17/2010	1:19:52 AM	Bypass valve opened
12/17/2010	1:19:52 AM	Helium MFC set to  100.000000
12/17/2010	1:19:52 AM	H2 MFC set to  0.000000
12/17/2010	1:19:52 AM	BCl3 MFC set to  0.000000
12/17/2010	1:19:52 AM	PHl3 MFC set to  0.000000
12/17/2010	1:19:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:19:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:19:52 AM	Tube furnace set to 0
12/17/2010	1:20:52 AM	Helium valve closed
12/17/2010	1:20:52 AM	H2 valve closed
12/17/2010	1:20:52 AM	BCl3 valve closed
12/17/2010	1:20:52 AM	PH3 valve closed
12/17/2010	1:20:52 AM	SiCl4 pre valve closed
12/17/2010	1:20:52 AM	SiCl4 post valve closed
12/17/2010	1:20:52 AM	Bubbler valve closed
12/17/2010	1:20:52 AM	Main Vac valve opened
12/17/2010	1:20:52 AM	Bypass valve opened
12/17/2010	1:20:52 AM	Helium MFC set to  0.000000
12/17/2010	1:20:52 AM	H2 MFC set to  0.000000
12/17/2010	1:20:52 AM	BCl3 MFC set to  0.000000
12/17/2010	1:20:52 AM	PHl3 MFC set to  0.000000
12/17/2010	1:20:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:20:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:20:53 AM	Tube furnace set to 0
12/17/2010	1:21:53 AM	H2 valve closed
12/17/2010	1:21:53 AM	BCl3 valve closed
12/17/2010	1:21:53 AM	PH3 valve closed
12/17/2010	1:21:53 AM	SiCl4 pre valve closed
12/17/2010	1:21:53 AM	SiCl4 post valve closed
12/17/2010	1:21:53 AM	Bubbler valve closed
12/17/2010	1:21:53 AM	Helium valve opened
12/17/2010	1:21:53 AM	Main Vac valve opened
12/17/2010	1:21:53 AM	Bypass valve opened
12/17/2010	1:21:53 AM	Helium MFC set to  100.000000
12/17/2010	1:21:53 AM	H2 MFC set to  0.000000
12/17/2010	1:21:53 AM	BCl3 MFC set to  0.000000
12/17/2010	1:21:53 AM	PHl3 MFC set to  0.000000
12/17/2010	1:21:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:21:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:21:53 AM	Tube furnace set to 0
12/17/2010	1:22:53 AM	Helium valve closed
12/17/2010	1:22:53 AM	H2 valve closed
12/17/2010	1:22:53 AM	BCl3 valve closed
12/17/2010	1:22:53 AM	PH3 valve closed
12/17/2010	1:22:53 AM	SiCl4 pre valve closed
12/17/2010	1:22:53 AM	SiCl4 post valve closed
12/17/2010	1:22:53 AM	Bubbler valve closed
12/17/2010	1:22:53 AM	Main Vac valve opened
12/17/2010	1:22:53 AM	Bypass valve opened
12/17/2010	1:22:53 AM	Helium MFC set to  0.000000
12/17/2010	1:22:53 AM	H2 MFC set to  0.000000
12/17/2010	1:22:53 AM	BCl3 MFC set to  0.000000
12/17/2010	1:22:53 AM	PHl3 MFC set to  0.000000
12/17/2010	1:22:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:22:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:22:53 AM	Tube furnace set to 0
12/17/2010	1:23:53 AM	H2 valve closed
12/17/2010	1:23:53 AM	BCl3 valve closed
12/17/2010	1:23:53 AM	PH3 valve closed
12/17/2010	1:23:53 AM	SiCl4 pre valve closed
12/17/2010	1:23:53 AM	SiCl4 post valve closed
12/17/2010	1:23:53 AM	Bubbler valve closed
12/17/2010	1:23:53 AM	Helium valve opened
12/17/2010	1:23:53 AM	Main Vac valve opened
12/17/2010	1:23:53 AM	Bypass valve opened
12/17/2010	1:23:53 AM	Helium MFC set to  100.000000
12/17/2010	1:23:53 AM	H2 MFC set to  0.000000
12/17/2010	1:23:53 AM	BCl3 MFC set to  0.000000
12/17/2010	1:23:53 AM	PHl3 MFC set to  0.000000
12/17/2010	1:23:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:23:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:23:53 AM	Tube furnace set to 0
12/17/2010	1:24:53 AM	Helium valve closed
12/17/2010	1:24:53 AM	H2 valve closed
12/17/2010	1:24:53 AM	BCl3 valve closed
12/17/2010	1:24:53 AM	PH3 valve closed
12/17/2010	1:24:53 AM	SiCl4 pre valve closed
12/17/2010	1:24:53 AM	SiCl4 post valve closed
12/17/2010	1:24:53 AM	Bubbler valve closed
12/17/2010	1:24:53 AM	Main Vac valve opened
12/17/2010	1:24:53 AM	Bypass valve opened
12/17/2010	1:24:53 AM	Helium MFC set to  0.000000
12/17/2010	1:24:53 AM	H2 MFC set to  0.000000
12/17/2010	1:24:53 AM	BCl3 MFC set to  0.000000
12/17/2010	1:24:53 AM	PHl3 MFC set to  0.000000
12/17/2010	1:24:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:24:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:24:53 AM	Tube furnace set to 0
12/17/2010	1:25:53 AM	H2 valve closed
12/17/2010	1:25:53 AM	BCl3 valve closed
12/17/2010	1:25:53 AM	PH3 valve closed
12/17/2010	1:25:53 AM	SiCl4 pre valve closed
12/17/2010	1:25:53 AM	SiCl4 post valve closed
12/17/2010	1:25:53 AM	Bubbler valve closed
12/17/2010	1:25:53 AM	Helium valve opened
12/17/2010	1:25:53 AM	Main Vac valve opened
12/17/2010	1:25:53 AM	Bypass valve opened
12/17/2010	1:25:53 AM	Helium MFC set to  100.000000
12/17/2010	1:25:53 AM	H2 MFC set to  0.000000
12/17/2010	1:25:53 AM	BCl3 MFC set to  0.000000
12/17/2010	1:25:53 AM	PHl3 MFC set to  0.000000
12/17/2010	1:25:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:25:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:25:54 AM	Tube furnace set to 0
12/17/2010	1:26:54 AM	Helium valve closed
12/17/2010	1:26:54 AM	H2 valve closed
12/17/2010	1:26:54 AM	BCl3 valve closed
12/17/2010	1:26:54 AM	PH3 valve closed
12/17/2010	1:26:54 AM	SiCl4 pre valve closed
12/17/2010	1:26:54 AM	SiCl4 post valve closed
12/17/2010	1:26:54 AM	Bubbler valve closed
12/17/2010	1:26:54 AM	Main Vac valve opened
12/17/2010	1:26:54 AM	Bypass valve opened
12/17/2010	1:26:54 AM	Helium MFC set to  0.000000
12/17/2010	1:26:54 AM	H2 MFC set to  0.000000
12/17/2010	1:26:54 AM	BCl3 MFC set to  0.000000
12/17/2010	1:26:54 AM	PHl3 MFC set to  0.000000
12/17/2010	1:26:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:26:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:26:54 AM	Tube furnace set to 0
12/17/2010	1:27:54 AM	H2 valve closed
12/17/2010	1:27:54 AM	BCl3 valve closed
12/17/2010	1:27:54 AM	PH3 valve closed
12/17/2010	1:27:54 AM	SiCl4 pre valve closed
12/17/2010	1:27:54 AM	SiCl4 post valve closed
12/17/2010	1:27:54 AM	Bubbler valve closed
12/17/2010	1:27:54 AM	Helium valve opened
12/17/2010	1:27:54 AM	Main Vac valve opened
12/17/2010	1:27:54 AM	Bypass valve opened
12/17/2010	1:27:54 AM	Helium MFC set to  100.000000
12/17/2010	1:27:54 AM	H2 MFC set to  0.000000
12/17/2010	1:27:54 AM	BCl3 MFC set to  0.000000
12/17/2010	1:27:54 AM	PHl3 MFC set to  0.000000
12/17/2010	1:27:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:27:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:27:54 AM	Tube furnace set to 0
12/17/2010	1:28:54 AM	Helium valve closed
12/17/2010	1:28:54 AM	H2 valve closed
12/17/2010	1:28:54 AM	BCl3 valve closed
12/17/2010	1:28:54 AM	PH3 valve closed
12/17/2010	1:28:54 AM	SiCl4 pre valve closed
12/17/2010	1:28:54 AM	SiCl4 post valve closed
12/17/2010	1:28:54 AM	Bubbler valve closed
12/17/2010	1:28:54 AM	Main Vac valve opened
12/17/2010	1:28:54 AM	Bypass valve opened
12/17/2010	1:28:54 AM	Helium MFC set to  0.000000
12/17/2010	1:28:54 AM	H2 MFC set to  0.000000
12/17/2010	1:28:54 AM	BCl3 MFC set to  0.000000
12/17/2010	1:28:54 AM	PHl3 MFC set to  0.000000
12/17/2010	1:28:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:28:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:28:54 AM	Tube furnace set to 0
12/17/2010	1:29:54 AM	H2 valve closed
12/17/2010	1:29:54 AM	BCl3 valve closed
12/17/2010	1:29:54 AM	PH3 valve closed
12/17/2010	1:29:54 AM	SiCl4 pre valve closed
12/17/2010	1:29:54 AM	SiCl4 post valve closed
12/17/2010	1:29:54 AM	Bubbler valve closed
12/17/2010	1:29:54 AM	Helium valve opened
12/17/2010	1:29:54 AM	Main Vac valve opened
12/17/2010	1:29:54 AM	Bypass valve opened
12/17/2010	1:29:54 AM	Helium MFC set to  100.000000
12/17/2010	1:29:54 AM	H2 MFC set to  0.000000
12/17/2010	1:29:54 AM	BCl3 MFC set to  0.000000
12/17/2010	1:29:54 AM	PHl3 MFC set to  0.000000
12/17/2010	1:29:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:29:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:29:54 AM	Tube furnace set to 0
12/17/2010	1:30:54 AM	Helium valve closed
12/17/2010	1:30:54 AM	H2 valve closed
12/17/2010	1:30:54 AM	BCl3 valve closed
12/17/2010	1:30:54 AM	PH3 valve closed
12/17/2010	1:30:54 AM	SiCl4 pre valve closed
12/17/2010	1:30:54 AM	SiCl4 post valve closed
12/17/2010	1:30:54 AM	Bubbler valve closed
12/17/2010	1:30:54 AM	Main Vac valve opened
12/17/2010	1:30:54 AM	Bypass valve opened
12/17/2010	1:30:54 AM	Helium MFC set to  0.000000
12/17/2010	1:30:54 AM	H2 MFC set to  0.000000
12/17/2010	1:30:54 AM	BCl3 MFC set to  0.000000
12/17/2010	1:30:54 AM	PHl3 MFC set to  0.000000
12/17/2010	1:30:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:30:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:30:55 AM	Tube furnace set to 0
12/17/2010	1:31:55 AM	H2 valve closed
12/17/2010	1:31:55 AM	BCl3 valve closed
12/17/2010	1:31:55 AM	PH3 valve closed
12/17/2010	1:31:55 AM	SiCl4 pre valve closed
12/17/2010	1:31:55 AM	SiCl4 post valve closed
12/17/2010	1:31:55 AM	Bubbler valve closed
12/17/2010	1:31:55 AM	Helium valve opened
12/17/2010	1:31:55 AM	Main Vac valve opened
12/17/2010	1:31:55 AM	Bypass valve opened
12/17/2010	1:31:55 AM	Helium MFC set to  100.000000
12/17/2010	1:31:55 AM	H2 MFC set to  0.000000
12/17/2010	1:31:55 AM	BCl3 MFC set to  0.000000
12/17/2010	1:31:55 AM	PHl3 MFC set to  0.000000
12/17/2010	1:31:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:31:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:31:55 AM	Tube furnace set to 0
12/17/2010	1:32:55 AM	Helium valve closed
12/17/2010	1:32:55 AM	H2 valve closed
12/17/2010	1:32:55 AM	BCl3 valve closed
12/17/2010	1:32:55 AM	PH3 valve closed
12/17/2010	1:32:55 AM	SiCl4 pre valve closed
12/17/2010	1:32:55 AM	SiCl4 post valve closed
12/17/2010	1:32:55 AM	Bubbler valve closed
12/17/2010	1:32:55 AM	Main Vac valve opened
12/17/2010	1:32:55 AM	Bypass valve opened
12/17/2010	1:32:55 AM	Helium MFC set to  0.000000
12/17/2010	1:32:55 AM	H2 MFC set to  0.000000
12/17/2010	1:32:55 AM	BCl3 MFC set to  0.000000
12/17/2010	1:32:55 AM	PHl3 MFC set to  0.000000
12/17/2010	1:32:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:32:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:32:55 AM	Tube furnace set to 0
12/17/2010	1:33:55 AM	H2 valve closed
12/17/2010	1:33:55 AM	BCl3 valve closed
12/17/2010	1:33:55 AM	PH3 valve closed
12/17/2010	1:33:55 AM	SiCl4 pre valve closed
12/17/2010	1:33:55 AM	SiCl4 post valve closed
12/17/2010	1:33:55 AM	Bubbler valve closed
12/17/2010	1:33:55 AM	Helium valve opened
12/17/2010	1:33:55 AM	Main Vac valve opened
12/17/2010	1:33:55 AM	Bypass valve opened
12/17/2010	1:33:55 AM	Helium MFC set to  100.000000
12/17/2010	1:33:55 AM	H2 MFC set to  0.000000
12/17/2010	1:33:55 AM	BCl3 MFC set to  0.000000
12/17/2010	1:33:55 AM	PHl3 MFC set to  0.000000
12/17/2010	1:33:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:33:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:33:55 AM	Tube furnace set to 0
12/17/2010	1:34:55 AM	Helium valve closed
12/17/2010	1:34:55 AM	H2 valve closed
12/17/2010	1:34:55 AM	BCl3 valve closed
12/17/2010	1:34:55 AM	PH3 valve closed
12/17/2010	1:34:55 AM	SiCl4 pre valve closed
12/17/2010	1:34:55 AM	SiCl4 post valve closed
12/17/2010	1:34:55 AM	Bubbler valve closed
12/17/2010	1:34:55 AM	Main Vac valve opened
12/17/2010	1:34:55 AM	Bypass valve opened
12/17/2010	1:34:55 AM	Helium MFC set to  0.000000
12/17/2010	1:34:55 AM	H2 MFC set to  0.000000
12/17/2010	1:34:55 AM	BCl3 MFC set to  0.000000
12/17/2010	1:34:55 AM	PHl3 MFC set to  0.000000
12/17/2010	1:34:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:34:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:34:55 AM	Tube furnace set to 0
12/17/2010	1:35:55 AM	H2 valve closed
12/17/2010	1:35:55 AM	BCl3 valve closed
12/17/2010	1:35:55 AM	PH3 valve closed
12/17/2010	1:35:55 AM	SiCl4 pre valve closed
12/17/2010	1:35:55 AM	SiCl4 post valve closed
12/17/2010	1:35:55 AM	Bubbler valve closed
12/17/2010	1:35:55 AM	Helium valve opened
12/17/2010	1:35:55 AM	Main Vac valve opened
12/17/2010	1:35:55 AM	Bypass valve opened
12/17/2010	1:35:55 AM	Helium MFC set to  100.000000
12/17/2010	1:35:55 AM	H2 MFC set to  0.000000
12/17/2010	1:35:55 AM	BCl3 MFC set to  0.000000
12/17/2010	1:35:55 AM	PHl3 MFC set to  0.000000
12/17/2010	1:35:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:35:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:35:55 AM	Tube furnace set to 0
12/17/2010	1:36:56 AM	Helium valve closed
12/17/2010	1:36:56 AM	H2 valve closed
12/17/2010	1:36:56 AM	BCl3 valve closed
12/17/2010	1:36:56 AM	PH3 valve closed
12/17/2010	1:36:56 AM	SiCl4 pre valve closed
12/17/2010	1:36:56 AM	SiCl4 post valve closed
12/17/2010	1:36:56 AM	Bubbler valve closed
12/17/2010	1:36:56 AM	Main Vac valve opened
12/17/2010	1:36:56 AM	Bypass valve opened
12/17/2010	1:36:56 AM	Helium MFC set to  0.000000
12/17/2010	1:36:56 AM	H2 MFC set to  0.000000
12/17/2010	1:36:56 AM	BCl3 MFC set to  0.000000
12/17/2010	1:36:56 AM	PHl3 MFC set to  0.000000
12/17/2010	1:36:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	1:36:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:36:56 AM	Tube furnace set to 0
12/17/2010	1:36:57 AM	Run finished at 1:36 AM
12/17/2010	1:36:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:03:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:03:14 AM	Recipe started at 9:03 AM
12/17/2010	9:03:14 AM	Helium valve closed
12/17/2010	9:03:14 AM	H2 valve closed
12/17/2010	9:03:14 AM	BCl3 valve closed
12/17/2010	9:03:14 AM	PH3 valve closed
12/17/2010	9:03:14 AM	SiCl4 pre valve closed
12/17/2010	9:03:14 AM	SiCl4 post valve closed
12/17/2010	9:03:14 AM	Main Vac valve closed
12/17/2010	9:03:14 AM	Bubbler valve closed
12/17/2010	9:03:14 AM	Bypass valve opened
12/17/2010	9:03:14 AM	Helium MFC set to  0.000000
12/17/2010	9:03:14 AM	H2 MFC set to  0.000000
12/17/2010	9:03:14 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:14 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:14 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:14 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:03:14 AM	Tube furnace set to 0
12/17/2010	9:03:14 AM	Helium valve closed
12/17/2010	9:03:14 AM	H2 valve closed
12/17/2010	9:03:14 AM	BCl3 valve closed
12/17/2010	9:03:14 AM	PH3 valve closed
12/17/2010	9:03:14 AM	SiCl4 pre valve closed
12/17/2010	9:03:14 AM	SiCl4 post valve closed
12/17/2010	9:03:14 AM	Bubbler valve closed
12/17/2010	9:03:14 AM	Main Vac valve opened
12/17/2010	9:03:14 AM	Bypass valve opened
12/17/2010	9:03:14 AM	Helium MFC set to  0.000000
12/17/2010	9:03:14 AM	H2 MFC set to  0.000000
12/17/2010	9:03:14 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:14 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:14 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:14 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:03:14 AM	Tube furnace set to 0
12/17/2010	9:03:16 AM	Run aborted at 9:03 AM
12/17/2010	9:03:16 AM	Helium valve closed
12/17/2010	9:03:16 AM	H2 valve closed
12/17/2010	9:03:16 AM	BCl3 valve closed
12/17/2010	9:03:16 AM	PH3 valve closed
12/17/2010	9:03:16 AM	SiCl4 pre valve closed
12/17/2010	9:03:16 AM	SiCl4 post valve closed
12/17/2010	9:03:16 AM	Bypass valve closed
12/17/2010	9:03:16 AM	Main Vac valve closed
12/17/2010	9:03:16 AM	Bubbler valve closed
12/17/2010	9:03:16 AM	Helium MFC set to  0.000000
12/17/2010	9:03:16 AM	H2 MFC set to  0.000000
12/17/2010	9:03:16 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:16 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:16 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:16 AM	Tube furnace set to 0
12/17/2010	9:03:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:03:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:03:20 AM	Recipe started at 9:03 AM
12/17/2010	9:03:20 AM	Helium valve closed
12/17/2010	9:03:20 AM	H2 valve closed
12/17/2010	9:03:20 AM	BCl3 valve closed
12/17/2010	9:03:20 AM	PH3 valve closed
12/17/2010	9:03:20 AM	SiCl4 pre valve closed
12/17/2010	9:03:20 AM	SiCl4 post valve closed
12/17/2010	9:03:20 AM	Main Vac valve closed
12/17/2010	9:03:20 AM	Bubbler valve closed
12/17/2010	9:03:20 AM	Bypass valve opened
12/17/2010	9:03:20 AM	Helium MFC set to  0.000000
12/17/2010	9:03:20 AM	H2 MFC set to  0.000000
12/17/2010	9:03:20 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:20 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:03:20 AM	Tube furnace set to 0
12/17/2010	9:03:20 AM	Helium valve closed
12/17/2010	9:03:20 AM	H2 valve closed
12/17/2010	9:03:20 AM	BCl3 valve closed
12/17/2010	9:03:20 AM	PH3 valve closed
12/17/2010	9:03:20 AM	SiCl4 pre valve closed
12/17/2010	9:03:20 AM	SiCl4 post valve closed
12/17/2010	9:03:20 AM	Bubbler valve closed
12/17/2010	9:03:20 AM	Main Vac valve opened
12/17/2010	9:03:20 AM	Bypass valve opened
12/17/2010	9:03:20 AM	Helium MFC set to  0.000000
12/17/2010	9:03:20 AM	H2 MFC set to  0.000000
12/17/2010	9:03:20 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:20 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:03:20 AM	Tube furnace set to 0
12/17/2010	9:03:21 AM	Run finished at 9:03 AM
12/17/2010	9:03:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:03:29 AM	Bypass valve closed
12/17/2010	9:03:30 AM	Main Vac valve closed
12/17/2010	9:03:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:03:54 AM	Recipe started at 9:03 AM
12/17/2010	9:03:54 AM	H2 valve closed
12/17/2010	9:03:54 AM	BCl3 valve closed
12/17/2010	9:03:54 AM	PH3 valve closed
12/17/2010	9:03:54 AM	SiCl4 pre valve closed
12/17/2010	9:03:54 AM	SiCl4 post valve closed
12/17/2010	9:03:54 AM	Main Vac valve closed
12/17/2010	9:03:54 AM	Bypass valve closed
12/17/2010	9:03:54 AM	Bubbler valve closed
12/17/2010	9:03:54 AM	Helium valve opened
12/17/2010	9:03:54 AM	Helium MFC set to  500.000000
12/17/2010	9:03:54 AM	H2 MFC set to  0.000000
12/17/2010	9:03:54 AM	BCl3 MFC set to  0.000000
12/17/2010	9:03:54 AM	PHl3 MFC set to  0.000000
12/17/2010	9:03:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:03:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:03:54 AM	Tube furnace set to 0
12/17/2010	9:05:14 AM	Helium valve closed
12/17/2010	9:05:14 AM	H2 valve closed
12/17/2010	9:05:14 AM	BCl3 valve closed
12/17/2010	9:05:14 AM	PH3 valve closed
12/17/2010	9:05:14 AM	SiCl4 pre valve closed
12/17/2010	9:05:14 AM	SiCl4 post valve closed
12/17/2010	9:05:14 AM	Main Vac valve closed
12/17/2010	9:05:14 AM	Bypass valve closed
12/17/2010	9:05:14 AM	Bubbler valve closed
12/17/2010	9:05:14 AM	Helium MFC set to  0.000000
12/17/2010	9:05:14 AM	H2 MFC set to  0.000000
12/17/2010	9:05:14 AM	BCl3 MFC set to  0.000000
12/17/2010	9:05:14 AM	PHl3 MFC set to  0.000000
12/17/2010	9:05:14 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:05:14 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:05:14 AM	Tube furnace set to 0
12/17/2010	9:05:14 AM	Run finished at 9:05 AM
12/17/2010	9:05:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:07:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:07:22 AM	Recipe started at 9:07 AM
12/17/2010	9:07:22 AM	Helium valve closed
12/17/2010	9:07:22 AM	H2 valve closed
12/17/2010	9:07:22 AM	BCl3 valve closed
12/17/2010	9:07:22 AM	PH3 valve closed
12/17/2010	9:07:22 AM	SiCl4 pre valve closed
12/17/2010	9:07:22 AM	SiCl4 post valve closed
12/17/2010	9:07:22 AM	Main Vac valve closed
12/17/2010	9:07:22 AM	Bubbler valve closed
12/17/2010	9:07:22 AM	Bypass valve opened
12/17/2010	9:07:22 AM	Helium MFC set to  0.000000
12/17/2010	9:07:22 AM	H2 MFC set to  0.000000
12/17/2010	9:07:22 AM	BCl3 MFC set to  0.000000
12/17/2010	9:07:22 AM	PHl3 MFC set to  0.000000
12/17/2010	9:07:22 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:07:22 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:07:22 AM	Tube furnace set to 0
12/17/2010	9:08:19 AM	Helium valve closed
12/17/2010	9:08:19 AM	H2 valve closed
12/17/2010	9:08:19 AM	BCl3 valve closed
12/17/2010	9:08:19 AM	PH3 valve closed
12/17/2010	9:08:19 AM	SiCl4 pre valve closed
12/17/2010	9:08:19 AM	SiCl4 post valve closed
12/17/2010	9:08:19 AM	Bubbler valve closed
12/17/2010	9:08:19 AM	Main Vac valve opened
12/17/2010	9:08:19 AM	Bypass valve opened
12/17/2010	9:08:19 AM	Helium MFC set to  0.000000
12/17/2010	9:08:19 AM	H2 MFC set to  0.000000
12/17/2010	9:08:19 AM	BCl3 MFC set to  0.000000
12/17/2010	9:08:19 AM	PHl3 MFC set to  0.000000
12/17/2010	9:08:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:08:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:08:20 AM	Tube furnace set to 0
12/17/2010	9:08:20 AM	Run finished at 9:08 AM
12/17/2010	9:08:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:09:20 AM	Bypass valve closed
12/17/2010	9:09:20 AM	Main Vac valve closed
12/17/2010	9:09:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:09:47 AM	Recipe started at 9:09 AM
12/17/2010	9:09:47 AM	H2 valve closed
12/17/2010	9:09:47 AM	BCl3 valve closed
12/17/2010	9:09:47 AM	PH3 valve closed
12/17/2010	9:09:47 AM	SiCl4 pre valve closed
12/17/2010	9:09:47 AM	SiCl4 post valve closed
12/17/2010	9:09:47 AM	Main Vac valve closed
12/17/2010	9:09:47 AM	Bypass valve closed
12/17/2010	9:09:47 AM	Bubbler valve closed
12/17/2010	9:09:47 AM	Helium valve opened
12/17/2010	9:09:47 AM	Helium MFC set to  500.000000
12/17/2010	9:09:47 AM	H2 MFC set to  0.000000
12/17/2010	9:09:47 AM	BCl3 MFC set to  0.000000
12/17/2010	9:09:47 AM	PHl3 MFC set to  0.000000
12/17/2010	9:09:47 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:09:47 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:09:48 AM	Tube furnace set to 0
12/17/2010	9:09:59 AM	Run aborted at 9:09 AM
12/17/2010	9:09:59 AM	Helium valve closed
12/17/2010	9:09:59 AM	H2 valve closed
12/17/2010	9:09:59 AM	BCl3 valve closed
12/17/2010	9:09:59 AM	PH3 valve closed
12/17/2010	9:09:59 AM	SiCl4 pre valve closed
12/17/2010	9:09:59 AM	SiCl4 post valve closed
12/17/2010	9:09:59 AM	Bypass valve closed
12/17/2010	9:09:59 AM	Main Vac valve closed
12/17/2010	9:09:59 AM	Bubbler valve closed
12/17/2010	9:09:59 AM	Helium MFC set to  0.000000
12/17/2010	9:09:59 AM	H2 MFC set to  0.000000
12/17/2010	9:09:59 AM	BCl3 MFC set to  0.000000
12/17/2010	9:09:59 AM	PHl3 MFC set to  0.000000
12/17/2010	9:09:59 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:09:59 AM	Tube furnace set to 0
12/17/2010	9:09:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:10:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:10:02 AM	Recipe started at 9:10 AM
12/17/2010	9:10:02 AM	Helium valve closed
12/17/2010	9:10:02 AM	H2 valve closed
12/17/2010	9:10:02 AM	BCl3 valve closed
12/17/2010	9:10:02 AM	PH3 valve closed
12/17/2010	9:10:02 AM	SiCl4 pre valve closed
12/17/2010	9:10:02 AM	SiCl4 post valve closed
12/17/2010	9:10:02 AM	Main Vac valve closed
12/17/2010	9:10:02 AM	Bubbler valve closed
12/17/2010	9:10:02 AM	Bypass valve opened
12/17/2010	9:10:02 AM	Helium MFC set to  0.000000
12/17/2010	9:10:02 AM	H2 MFC set to  0.000000
12/17/2010	9:10:02 AM	BCl3 MFC set to  0.000000
12/17/2010	9:10:02 AM	PHl3 MFC set to  0.000000
12/17/2010	9:10:02 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:10:02 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:10:02 AM	Tube furnace set to 0
12/17/2010	9:10:18 AM	Helium valve closed
12/17/2010	9:10:18 AM	H2 valve closed
12/17/2010	9:10:18 AM	BCl3 valve closed
12/17/2010	9:10:18 AM	PH3 valve closed
12/17/2010	9:10:18 AM	SiCl4 pre valve closed
12/17/2010	9:10:18 AM	SiCl4 post valve closed
12/17/2010	9:10:18 AM	Bubbler valve closed
12/17/2010	9:10:18 AM	Main Vac valve opened
12/17/2010	9:10:18 AM	Bypass valve opened
12/17/2010	9:10:18 AM	Helium MFC set to  0.000000
12/17/2010	9:10:18 AM	H2 MFC set to  0.000000
12/17/2010	9:10:18 AM	BCl3 MFC set to  0.000000
12/17/2010	9:10:18 AM	PHl3 MFC set to  0.000000
12/17/2010	9:10:18 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:10:18 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:10:18 AM	Tube furnace set to 0
12/17/2010	9:10:18 AM	Run finished at 9:10 AM
12/17/2010	9:10:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:10:53 AM	Bypass valve closed
12/17/2010	9:10:54 AM	Main Vac valve closed
12/17/2010	9:11:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:11:05 AM	Recipe started at 9:11 AM
12/17/2010	9:11:05 AM	H2 valve closed
12/17/2010	9:11:05 AM	BCl3 valve closed
12/17/2010	9:11:05 AM	PH3 valve closed
12/17/2010	9:11:05 AM	SiCl4 pre valve closed
12/17/2010	9:11:05 AM	SiCl4 post valve closed
12/17/2010	9:11:05 AM	Main Vac valve closed
12/17/2010	9:11:05 AM	Bypass valve closed
12/17/2010	9:11:05 AM	Bubbler valve closed
12/17/2010	9:11:05 AM	Helium valve opened
12/17/2010	9:11:05 AM	Helium MFC set to  500.000000
12/17/2010	9:11:05 AM	H2 MFC set to  0.000000
12/17/2010	9:11:05 AM	BCl3 MFC set to  0.000000
12/17/2010	9:11:05 AM	PHl3 MFC set to  0.000000
12/17/2010	9:11:05 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:11:05 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:11:05 AM	Tube furnace set to 0
12/17/2010	9:12:25 AM	Helium valve closed
12/17/2010	9:12:25 AM	H2 valve closed
12/17/2010	9:12:25 AM	BCl3 valve closed
12/17/2010	9:12:25 AM	PH3 valve closed
12/17/2010	9:12:25 AM	SiCl4 pre valve closed
12/17/2010	9:12:25 AM	SiCl4 post valve closed
12/17/2010	9:12:25 AM	Main Vac valve closed
12/17/2010	9:12:25 AM	Bypass valve closed
12/17/2010	9:12:25 AM	Bubbler valve closed
12/17/2010	9:12:25 AM	Helium MFC set to  0.000000
12/17/2010	9:12:25 AM	H2 MFC set to  0.000000
12/17/2010	9:12:25 AM	BCl3 MFC set to  0.000000
12/17/2010	9:12:25 AM	PHl3 MFC set to  0.000000
12/17/2010	9:12:25 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:12:25 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:12:25 AM	Tube furnace set to 0
12/17/2010	9:12:25 AM	Run finished at 9:12 AM
12/17/2010	9:12:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:14:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:14:44 AM	Recipe started at 9:14 AM
12/17/2010	9:14:44 AM	Helium valve closed
12/17/2010	9:14:44 AM	H2 valve closed
12/17/2010	9:14:44 AM	BCl3 valve closed
12/17/2010	9:14:44 AM	PH3 valve closed
12/17/2010	9:14:44 AM	SiCl4 pre valve closed
12/17/2010	9:14:44 AM	SiCl4 post valve closed
12/17/2010	9:14:44 AM	Main Vac valve closed
12/17/2010	9:14:44 AM	Bubbler valve closed
12/17/2010	9:14:44 AM	Bypass valve opened
12/17/2010	9:14:44 AM	Helium MFC set to  0.000000
12/17/2010	9:14:44 AM	H2 MFC set to  0.000000
12/17/2010	9:14:44 AM	BCl3 MFC set to  0.000000
12/17/2010	9:14:44 AM	PHl3 MFC set to  0.000000
12/17/2010	9:14:44 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:14:44 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:14:44 AM	Tube furnace set to 0
12/17/2010	9:15:41 AM	Helium valve closed
12/17/2010	9:15:41 AM	H2 valve closed
12/17/2010	9:15:41 AM	BCl3 valve closed
12/17/2010	9:15:41 AM	PH3 valve closed
12/17/2010	9:15:41 AM	SiCl4 pre valve closed
12/17/2010	9:15:41 AM	SiCl4 post valve closed
12/17/2010	9:15:41 AM	Bubbler valve closed
12/17/2010	9:15:41 AM	Main Vac valve opened
12/17/2010	9:15:41 AM	Bypass valve opened
12/17/2010	9:15:41 AM	Helium MFC set to  0.000000
12/17/2010	9:15:41 AM	H2 MFC set to  0.000000
12/17/2010	9:15:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:15:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:15:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:15:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:15:41 AM	Tube furnace set to 0
12/17/2010	9:15:42 AM	Run finished at 9:15 AM
12/17/2010	9:15:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:18:36 AM	Main Vac valve closed
12/17/2010	9:18:37 AM	Bypass valve closed
12/17/2010	9:18:51 AM	Bypass valve opened
12/17/2010	9:18:52 AM	Main Vac valve opened
12/17/2010	9:19:13 AM	Bypass valve closed
12/17/2010	9:19:13 AM	Main Vac valve closed
12/17/2010	9:19:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:19:21 AM	Recipe started at 9:19 AM
12/17/2010	9:19:21 AM	H2 valve closed
12/17/2010	9:19:21 AM	BCl3 valve closed
12/17/2010	9:19:21 AM	PH3 valve closed
12/17/2010	9:19:21 AM	SiCl4 pre valve closed
12/17/2010	9:19:21 AM	SiCl4 post valve closed
12/17/2010	9:19:21 AM	Main Vac valve closed
12/17/2010	9:19:21 AM	Bypass valve closed
12/17/2010	9:19:21 AM	Bubbler valve closed
12/17/2010	9:19:21 AM	Helium valve opened
12/17/2010	9:19:21 AM	Helium MFC set to  500.000000
12/17/2010	9:19:21 AM	H2 MFC set to  0.000000
12/17/2010	9:19:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:19:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:19:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:19:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:19:22 AM	Tube furnace set to 0
12/17/2010	9:20:30 AM	Helium valve closed
12/17/2010	9:20:30 AM	H2 valve closed
12/17/2010	9:20:30 AM	BCl3 valve closed
12/17/2010	9:20:30 AM	PH3 valve closed
12/17/2010	9:20:30 AM	SiCl4 pre valve closed
12/17/2010	9:20:30 AM	SiCl4 post valve closed
12/17/2010	9:20:30 AM	Main Vac valve closed
12/17/2010	9:20:30 AM	Bypass valve closed
12/17/2010	9:20:30 AM	Bubbler valve closed
12/17/2010	9:20:30 AM	Helium MFC set to  0.000000
12/17/2010	9:20:30 AM	H2 MFC set to  0.000000
12/17/2010	9:20:30 AM	BCl3 MFC set to  0.000000
12/17/2010	9:20:30 AM	PHl3 MFC set to  0.000000
12/17/2010	9:20:30 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:20:30 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:20:30 AM	Tube furnace set to 0
12/17/2010	9:20:30 AM	Run finished at 9:20 AM
12/17/2010	9:20:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:29:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:29:25 AM	Recipe started at 9:29 AM
12/17/2010	9:29:25 AM	Helium valve closed
12/17/2010	9:29:25 AM	H2 valve closed
12/17/2010	9:29:25 AM	BCl3 valve closed
12/17/2010	9:29:25 AM	PH3 valve closed
12/17/2010	9:29:25 AM	SiCl4 pre valve closed
12/17/2010	9:29:25 AM	SiCl4 post valve closed
12/17/2010	9:29:25 AM	Main Vac valve closed
12/17/2010	9:29:25 AM	Bubbler valve closed
12/17/2010	9:29:25 AM	Bypass valve opened
12/17/2010	9:29:25 AM	Helium MFC set to  0.000000
12/17/2010	9:29:25 AM	H2 MFC set to  0.000000
12/17/2010	9:29:25 AM	BCl3 MFC set to  0.000000
12/17/2010	9:29:25 AM	PHl3 MFC set to  0.000000
12/17/2010	9:29:25 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:29:25 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:29:25 AM	Tube furnace set to 0
12/17/2010	9:30:23 AM	Helium valve closed
12/17/2010	9:30:23 AM	H2 valve closed
12/17/2010	9:30:23 AM	BCl3 valve closed
12/17/2010	9:30:23 AM	PH3 valve closed
12/17/2010	9:30:23 AM	SiCl4 pre valve closed
12/17/2010	9:30:23 AM	SiCl4 post valve closed
12/17/2010	9:30:23 AM	Bubbler valve closed
12/17/2010	9:30:24 AM	Main Vac valve opened
12/17/2010	9:30:24 AM	Bypass valve opened
12/17/2010	9:30:24 AM	Helium MFC set to  0.000000
12/17/2010	9:30:24 AM	H2 MFC set to  0.000000
12/17/2010	9:30:24 AM	BCl3 MFC set to  0.000000
12/17/2010	9:30:24 AM	PHl3 MFC set to  0.000000
12/17/2010	9:30:24 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:30:24 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:30:24 AM	Tube furnace set to 0
12/17/2010	9:30:24 AM	Run finished at 9:30 AM
12/17/2010	9:30:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:31:02 AM	Helium MFC set to  100.000000
12/17/2010	9:31:04 AM	Helium valve opened
12/17/2010	9:33:09 AM	Helium valve closed
12/17/2010	9:33:13 AM	Helium MFC set to  100.000000
12/17/2010	9:33:35 AM	Bypass valve closed
12/17/2010	9:33:35 AM	Main Vac valve closed
12/17/2010	9:33:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:33:53 AM	Recipe started at 9:33 AM
12/17/2010	9:33:53 AM	Helium valve closed
12/17/2010	9:33:53 AM	H2 valve closed
12/17/2010	9:33:53 AM	BCl3 valve closed
12/17/2010	9:33:53 AM	PH3 valve closed
12/17/2010	9:33:53 AM	SiCl4 pre valve closed
12/17/2010	9:33:53 AM	SiCl4 post valve closed
12/17/2010	9:33:53 AM	Main Vac valve closed
12/17/2010	9:33:53 AM	Bubbler valve closed
12/17/2010	9:33:53 AM	Bypass valve opened
12/17/2010	9:33:53 AM	Helium MFC set to  0.000000
12/17/2010	9:33:53 AM	H2 MFC set to  0.000000
12/17/2010	9:33:53 AM	BCl3 MFC set to  0.000000
12/17/2010	9:33:53 AM	PHl3 MFC set to  0.000000
12/17/2010	9:33:53 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:33:53 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:33:54 AM	Tube furnace set to 0
12/17/2010	9:33:54 AM	Helium valve closed
12/17/2010	9:33:54 AM	H2 valve closed
12/17/2010	9:33:54 AM	BCl3 valve closed
12/17/2010	9:33:54 AM	PH3 valve closed
12/17/2010	9:33:54 AM	SiCl4 pre valve closed
12/17/2010	9:33:54 AM	SiCl4 post valve closed
12/17/2010	9:33:54 AM	Bubbler valve closed
12/17/2010	9:33:54 AM	Main Vac valve opened
12/17/2010	9:33:54 AM	Bypass valve opened
12/17/2010	9:33:54 AM	Helium MFC set to  0.000000
12/17/2010	9:33:54 AM	H2 MFC set to  0.000000
12/17/2010	9:33:54 AM	BCl3 MFC set to  0.000000
12/17/2010	9:33:54 AM	PHl3 MFC set to  0.000000
12/17/2010	9:33:54 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:33:54 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:33:54 AM	Tube furnace set to 0
12/17/2010	9:33:54 AM	Run finished at 9:33 AM
12/17/2010	9:33:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:34:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:34:38 AM	Recipe started at 9:34 AM
12/17/2010	9:34:38 AM	Helium valve closed
12/17/2010	9:34:38 AM	H2 valve closed
12/17/2010	9:34:38 AM	BCl3 valve closed
12/17/2010	9:34:38 AM	PH3 valve closed
12/17/2010	9:34:38 AM	SiCl4 pre valve closed
12/17/2010	9:34:38 AM	SiCl4 post valve closed
12/17/2010	9:34:38 AM	Main Vac valve closed
12/17/2010	9:34:38 AM	Bubbler valve closed
12/17/2010	9:34:38 AM	Bypass valve opened
12/17/2010	9:34:38 AM	Helium MFC set to  0.000000
12/17/2010	9:34:38 AM	H2 MFC set to  0.000000
12/17/2010	9:34:38 AM	BCl3 MFC set to  0.000000
12/17/2010	9:34:38 AM	PHl3 MFC set to  0.000000
12/17/2010	9:34:38 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:34:38 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:34:38 AM	Tube furnace set to 0
12/17/2010	9:34:39 AM	Helium valve closed
12/17/2010	9:34:39 AM	H2 valve closed
12/17/2010	9:34:39 AM	BCl3 valve closed
12/17/2010	9:34:39 AM	PH3 valve closed
12/17/2010	9:34:39 AM	SiCl4 pre valve closed
12/17/2010	9:34:39 AM	SiCl4 post valve closed
12/17/2010	9:34:39 AM	Bubbler valve closed
12/17/2010	9:34:39 AM	Main Vac valve opened
12/17/2010	9:34:39 AM	Bypass valve opened
12/17/2010	9:34:39 AM	Helium MFC set to  0.000000
12/17/2010	9:34:39 AM	H2 MFC set to  0.000000
12/17/2010	9:34:39 AM	BCl3 MFC set to  0.000000
12/17/2010	9:34:39 AM	PHl3 MFC set to  0.000000
12/17/2010	9:34:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:34:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:34:39 AM	Tube furnace set to 0
12/17/2010	9:35:39 AM	H2 valve closed
12/17/2010	9:35:39 AM	BCl3 valve closed
12/17/2010	9:35:39 AM	PH3 valve closed
12/17/2010	9:35:39 AM	SiCl4 pre valve closed
12/17/2010	9:35:39 AM	SiCl4 post valve closed
12/17/2010	9:35:39 AM	Bubbler valve closed
12/17/2010	9:35:39 AM	Helium valve opened
12/17/2010	9:35:39 AM	Main Vac valve opened
12/17/2010	9:35:39 AM	Bypass valve opened
12/17/2010	9:35:39 AM	Helium MFC set to  100.000000
12/17/2010	9:35:39 AM	H2 MFC set to  0.000000
12/17/2010	9:35:39 AM	BCl3 MFC set to  0.000000
12/17/2010	9:35:39 AM	PHl3 MFC set to  0.000000
12/17/2010	9:35:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:35:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:35:39 AM	Tube furnace set to 0
12/17/2010	9:36:39 AM	Helium valve closed
12/17/2010	9:36:39 AM	H2 valve closed
12/17/2010	9:36:39 AM	BCl3 valve closed
12/17/2010	9:36:39 AM	PH3 valve closed
12/17/2010	9:36:39 AM	SiCl4 pre valve closed
12/17/2010	9:36:39 AM	SiCl4 post valve closed
12/17/2010	9:36:39 AM	Bubbler valve closed
12/17/2010	9:36:39 AM	Main Vac valve opened
12/17/2010	9:36:39 AM	Bypass valve opened
12/17/2010	9:36:39 AM	Helium MFC set to  0.000000
12/17/2010	9:36:39 AM	H2 MFC set to  0.000000
12/17/2010	9:36:39 AM	BCl3 MFC set to  0.000000
12/17/2010	9:36:39 AM	PHl3 MFC set to  0.000000
12/17/2010	9:36:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:36:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:36:39 AM	Tube furnace set to 0
12/17/2010	9:37:39 AM	H2 valve closed
12/17/2010	9:37:39 AM	BCl3 valve closed
12/17/2010	9:37:39 AM	PH3 valve closed
12/17/2010	9:37:39 AM	SiCl4 pre valve closed
12/17/2010	9:37:39 AM	SiCl4 post valve closed
12/17/2010	9:37:39 AM	Bubbler valve closed
12/17/2010	9:37:39 AM	Helium valve opened
12/17/2010	9:37:39 AM	Main Vac valve opened
12/17/2010	9:37:39 AM	Bypass valve opened
12/17/2010	9:37:39 AM	Helium MFC set to  100.000000
12/17/2010	9:37:39 AM	H2 MFC set to  0.000000
12/17/2010	9:37:39 AM	BCl3 MFC set to  0.000000
12/17/2010	9:37:39 AM	PHl3 MFC set to  0.000000
12/17/2010	9:37:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:37:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:37:39 AM	Tube furnace set to 0
12/17/2010	9:38:39 AM	Helium valve closed
12/17/2010	9:38:39 AM	H2 valve closed
12/17/2010	9:38:39 AM	BCl3 valve closed
12/17/2010	9:38:39 AM	PH3 valve closed
12/17/2010	9:38:39 AM	SiCl4 pre valve closed
12/17/2010	9:38:39 AM	SiCl4 post valve closed
12/17/2010	9:38:39 AM	Bubbler valve closed
12/17/2010	9:38:39 AM	Main Vac valve opened
12/17/2010	9:38:39 AM	Bypass valve opened
12/17/2010	9:38:39 AM	Helium MFC set to  0.000000
12/17/2010	9:38:39 AM	H2 MFC set to  0.000000
12/17/2010	9:38:39 AM	BCl3 MFC set to  0.000000
12/17/2010	9:38:39 AM	PHl3 MFC set to  0.000000
12/17/2010	9:38:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:38:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:38:39 AM	Tube furnace set to 0
12/17/2010	9:39:39 AM	H2 valve closed
12/17/2010	9:39:39 AM	BCl3 valve closed
12/17/2010	9:39:39 AM	PH3 valve closed
12/17/2010	9:39:39 AM	SiCl4 pre valve closed
12/17/2010	9:39:40 AM	SiCl4 post valve closed
12/17/2010	9:39:40 AM	Bubbler valve closed
12/17/2010	9:39:40 AM	Helium valve opened
12/17/2010	9:39:40 AM	Main Vac valve opened
12/17/2010	9:39:40 AM	Bypass valve opened
12/17/2010	9:39:40 AM	Helium MFC set to  100.000000
12/17/2010	9:39:40 AM	H2 MFC set to  0.000000
12/17/2010	9:39:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:39:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:39:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:39:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:39:40 AM	Tube furnace set to 0
12/17/2010	9:40:40 AM	Helium valve closed
12/17/2010	9:40:40 AM	H2 valve closed
12/17/2010	9:40:40 AM	BCl3 valve closed
12/17/2010	9:40:40 AM	PH3 valve closed
12/17/2010	9:40:40 AM	SiCl4 pre valve closed
12/17/2010	9:40:40 AM	SiCl4 post valve closed
12/17/2010	9:40:40 AM	Bubbler valve closed
12/17/2010	9:40:40 AM	Main Vac valve opened
12/17/2010	9:40:40 AM	Bypass valve opened
12/17/2010	9:40:40 AM	Helium MFC set to  0.000000
12/17/2010	9:40:40 AM	H2 MFC set to  0.000000
12/17/2010	9:40:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:40:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:40:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:40:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:40:40 AM	Tube furnace set to 0
12/17/2010	9:41:40 AM	H2 valve closed
12/17/2010	9:41:40 AM	BCl3 valve closed
12/17/2010	9:41:40 AM	PH3 valve closed
12/17/2010	9:41:40 AM	SiCl4 pre valve closed
12/17/2010	9:41:40 AM	SiCl4 post valve closed
12/17/2010	9:41:40 AM	Bubbler valve closed
12/17/2010	9:41:40 AM	Helium valve opened
12/17/2010	9:41:40 AM	Main Vac valve opened
12/17/2010	9:41:40 AM	Bypass valve opened
12/17/2010	9:41:40 AM	Helium MFC set to  100.000000
12/17/2010	9:41:40 AM	H2 MFC set to  0.000000
12/17/2010	9:41:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:41:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:41:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:41:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:41:40 AM	Tube furnace set to 0
12/17/2010	9:42:40 AM	Helium valve closed
12/17/2010	9:42:40 AM	H2 valve closed
12/17/2010	9:42:40 AM	BCl3 valve closed
12/17/2010	9:42:40 AM	PH3 valve closed
12/17/2010	9:42:40 AM	SiCl4 pre valve closed
12/17/2010	9:42:40 AM	SiCl4 post valve closed
12/17/2010	9:42:40 AM	Bubbler valve closed
12/17/2010	9:42:40 AM	Main Vac valve opened
12/17/2010	9:42:40 AM	Bypass valve opened
12/17/2010	9:42:40 AM	Helium MFC set to  0.000000
12/17/2010	9:42:40 AM	H2 MFC set to  0.000000
12/17/2010	9:42:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:42:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:42:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:42:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:42:40 AM	Tube furnace set to 0
12/17/2010	9:43:40 AM	H2 valve closed
12/17/2010	9:43:40 AM	BCl3 valve closed
12/17/2010	9:43:40 AM	PH3 valve closed
12/17/2010	9:43:40 AM	SiCl4 pre valve closed
12/17/2010	9:43:40 AM	SiCl4 post valve closed
12/17/2010	9:43:40 AM	Bubbler valve closed
12/17/2010	9:43:40 AM	Helium valve opened
12/17/2010	9:43:40 AM	Main Vac valve opened
12/17/2010	9:43:40 AM	Bypass valve opened
12/17/2010	9:43:40 AM	Helium MFC set to  100.000000
12/17/2010	9:43:40 AM	H2 MFC set to  0.000000
12/17/2010	9:43:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:43:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:43:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:43:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:43:40 AM	Tube furnace set to 0
12/17/2010	9:44:40 AM	Helium valve closed
12/17/2010	9:44:40 AM	H2 valve closed
12/17/2010	9:44:40 AM	BCl3 valve closed
12/17/2010	9:44:40 AM	PH3 valve closed
12/17/2010	9:44:40 AM	SiCl4 pre valve closed
12/17/2010	9:44:40 AM	SiCl4 post valve closed
12/17/2010	9:44:40 AM	Bubbler valve closed
12/17/2010	9:44:40 AM	Main Vac valve opened
12/17/2010	9:44:40 AM	Bypass valve opened
12/17/2010	9:44:40 AM	Helium MFC set to  0.000000
12/17/2010	9:44:40 AM	H2 MFC set to  0.000000
12/17/2010	9:44:40 AM	BCl3 MFC set to  0.000000
12/17/2010	9:44:40 AM	PHl3 MFC set to  0.000000
12/17/2010	9:44:40 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:44:40 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:44:41 AM	Tube furnace set to 0
12/17/2010	9:45:41 AM	H2 valve closed
12/17/2010	9:45:41 AM	BCl3 valve closed
12/17/2010	9:45:41 AM	PH3 valve closed
12/17/2010	9:45:41 AM	SiCl4 pre valve closed
12/17/2010	9:45:41 AM	SiCl4 post valve closed
12/17/2010	9:45:41 AM	Bubbler valve closed
12/17/2010	9:45:41 AM	Helium valve opened
12/17/2010	9:45:41 AM	Main Vac valve opened
12/17/2010	9:45:41 AM	Bypass valve opened
12/17/2010	9:45:41 AM	Helium MFC set to  100.000000
12/17/2010	9:45:41 AM	H2 MFC set to  0.000000
12/17/2010	9:45:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:45:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:45:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:45:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:45:41 AM	Tube furnace set to 0
12/17/2010	9:46:41 AM	Helium valve closed
12/17/2010	9:46:41 AM	H2 valve closed
12/17/2010	9:46:41 AM	BCl3 valve closed
12/17/2010	9:46:41 AM	PH3 valve closed
12/17/2010	9:46:41 AM	SiCl4 pre valve closed
12/17/2010	9:46:41 AM	SiCl4 post valve closed
12/17/2010	9:46:41 AM	Bubbler valve closed
12/17/2010	9:46:41 AM	Main Vac valve opened
12/17/2010	9:46:41 AM	Bypass valve opened
12/17/2010	9:46:41 AM	Helium MFC set to  0.000000
12/17/2010	9:46:41 AM	H2 MFC set to  0.000000
12/17/2010	9:46:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:46:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:46:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:46:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:46:41 AM	Tube furnace set to 0
12/17/2010	9:47:41 AM	H2 valve closed
12/17/2010	9:47:41 AM	BCl3 valve closed
12/17/2010	9:47:41 AM	PH3 valve closed
12/17/2010	9:47:41 AM	SiCl4 pre valve closed
12/17/2010	9:47:41 AM	SiCl4 post valve closed
12/17/2010	9:47:41 AM	Bubbler valve closed
12/17/2010	9:47:41 AM	Helium valve opened
12/17/2010	9:47:41 AM	Main Vac valve opened
12/17/2010	9:47:41 AM	Bypass valve opened
12/17/2010	9:47:41 AM	Helium MFC set to  100.000000
12/17/2010	9:47:41 AM	H2 MFC set to  0.000000
12/17/2010	9:47:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:47:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:47:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:47:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:47:41 AM	Tube furnace set to 0
12/17/2010	9:48:41 AM	Helium valve closed
12/17/2010	9:48:41 AM	H2 valve closed
12/17/2010	9:48:41 AM	BCl3 valve closed
12/17/2010	9:48:41 AM	PH3 valve closed
12/17/2010	9:48:41 AM	SiCl4 pre valve closed
12/17/2010	9:48:41 AM	SiCl4 post valve closed
12/17/2010	9:48:41 AM	Bubbler valve closed
12/17/2010	9:48:41 AM	Main Vac valve opened
12/17/2010	9:48:41 AM	Bypass valve opened
12/17/2010	9:48:41 AM	Helium MFC set to  0.000000
12/17/2010	9:48:41 AM	H2 MFC set to  0.000000
12/17/2010	9:48:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:48:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:48:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:48:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:48:41 AM	Tube furnace set to 0
12/17/2010	9:49:41 AM	H2 valve closed
12/17/2010	9:49:41 AM	BCl3 valve closed
12/17/2010	9:49:41 AM	PH3 valve closed
12/17/2010	9:49:41 AM	SiCl4 pre valve closed
12/17/2010	9:49:41 AM	SiCl4 post valve closed
12/17/2010	9:49:41 AM	Bubbler valve closed
12/17/2010	9:49:41 AM	Helium valve opened
12/17/2010	9:49:41 AM	Main Vac valve opened
12/17/2010	9:49:41 AM	Bypass valve opened
12/17/2010	9:49:41 AM	Helium MFC set to  100.000000
12/17/2010	9:49:41 AM	H2 MFC set to  0.000000
12/17/2010	9:49:41 AM	BCl3 MFC set to  0.000000
12/17/2010	9:49:41 AM	PHl3 MFC set to  0.000000
12/17/2010	9:49:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:49:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:49:42 AM	Tube furnace set to 0
12/17/2010	9:50:19 AM	Run aborted at 9:50 AM
12/17/2010	9:50:19 AM	Helium valve closed
12/17/2010	9:50:19 AM	H2 valve closed
12/17/2010	9:50:19 AM	BCl3 valve closed
12/17/2010	9:50:19 AM	PH3 valve closed
12/17/2010	9:50:19 AM	SiCl4 pre valve closed
12/17/2010	9:50:19 AM	SiCl4 post valve closed
12/17/2010	9:50:19 AM	Bypass valve closed
12/17/2010	9:50:19 AM	Main Vac valve closed
12/17/2010	9:50:19 AM	Bubbler valve closed
12/17/2010	9:50:19 AM	Helium MFC set to  0.000000
12/17/2010	9:50:19 AM	H2 MFC set to  0.000000
12/17/2010	9:50:19 AM	BCl3 MFC set to  0.000000
12/17/2010	9:50:19 AM	PHl3 MFC set to  0.000000
12/17/2010	9:50:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:50:19 AM	Tube furnace set to 0
12/17/2010	9:50:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:50:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:50:21 AM	Recipe started at 9:50 AM
12/17/2010	9:50:21 AM	Helium valve closed
12/17/2010	9:50:21 AM	H2 valve closed
12/17/2010	9:50:21 AM	BCl3 valve closed
12/17/2010	9:50:21 AM	PH3 valve closed
12/17/2010	9:50:21 AM	SiCl4 pre valve closed
12/17/2010	9:50:21 AM	SiCl4 post valve closed
12/17/2010	9:50:21 AM	Main Vac valve closed
12/17/2010	9:50:21 AM	Bubbler valve closed
12/17/2010	9:50:21 AM	Bypass valve opened
12/17/2010	9:50:21 AM	Helium MFC set to  0.000000
12/17/2010	9:50:21 AM	H2 MFC set to  0.000000
12/17/2010	9:50:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:50:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:50:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:50:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:50:21 AM	Tube furnace set to 0
12/17/2010	9:50:21 AM	Helium valve closed
12/17/2010	9:50:21 AM	H2 valve closed
12/17/2010	9:50:21 AM	BCl3 valve closed
12/17/2010	9:50:21 AM	PH3 valve closed
12/17/2010	9:50:21 AM	SiCl4 pre valve closed
12/17/2010	9:50:21 AM	SiCl4 post valve closed
12/17/2010	9:50:21 AM	Bubbler valve closed
12/17/2010	9:50:21 AM	Main Vac valve opened
12/17/2010	9:50:21 AM	Bypass valve opened
12/17/2010	9:50:21 AM	Helium MFC set to  0.000000
12/17/2010	9:50:21 AM	H2 MFC set to  0.000000
12/17/2010	9:50:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:50:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:50:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:50:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:50:22 AM	Tube furnace set to 0
12/17/2010	9:50:22 AM	Run finished at 9:50 AM
12/17/2010	9:50:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:50:58 AM	Main Vac valve closed
12/17/2010	9:50:59 AM	Bypass valve closed
12/17/2010	9:51:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:51:25 AM	Recipe started at 9:51 AM
12/17/2010	9:51:25 AM	Helium valve closed
12/17/2010	9:51:25 AM	H2 valve closed
12/17/2010	9:51:25 AM	BCl3 valve closed
12/17/2010	9:51:25 AM	PH3 valve closed
12/17/2010	9:51:25 AM	SiCl4 pre valve closed
12/17/2010	9:51:25 AM	SiCl4 post valve closed
12/17/2010	9:51:25 AM	Main Vac valve closed
12/17/2010	9:51:25 AM	Bubbler valve closed
12/17/2010	9:51:25 AM	Bypass valve opened
12/17/2010	9:51:25 AM	Helium MFC set to  0.000000
12/17/2010	9:51:25 AM	H2 MFC set to  0.000000
12/17/2010	9:51:25 AM	BCl3 MFC set to  0.000000
12/17/2010	9:51:25 AM	PHl3 MFC set to  0.000000
12/17/2010	9:51:25 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:51:25 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:51:25 AM	Tube furnace set to 0
12/17/2010	9:51:26 AM	Helium valve closed
12/17/2010	9:51:26 AM	H2 valve closed
12/17/2010	9:51:26 AM	BCl3 valve closed
12/17/2010	9:51:26 AM	PH3 valve closed
12/17/2010	9:51:26 AM	SiCl4 pre valve closed
12/17/2010	9:51:26 AM	SiCl4 post valve closed
12/17/2010	9:51:26 AM	Bubbler valve closed
12/17/2010	9:51:26 AM	Main Vac valve opened
12/17/2010	9:51:26 AM	Bypass valve opened
12/17/2010	9:51:26 AM	Helium MFC set to  0.000000
12/17/2010	9:51:26 AM	H2 MFC set to  0.000000
12/17/2010	9:51:26 AM	BCl3 MFC set to  0.000000
12/17/2010	9:51:26 AM	PHl3 MFC set to  0.000000
12/17/2010	9:51:26 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:51:26 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:51:26 AM	Tube furnace set to 0
12/17/2010	9:51:26 AM	Run finished at 9:51 AM
12/17/2010	9:51:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:51:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:51:46 AM	Recipe started at 9:51 AM
12/17/2010	9:51:46 AM	Helium valve closed
12/17/2010	9:51:46 AM	H2 valve closed
12/17/2010	9:51:46 AM	BCl3 valve closed
12/17/2010	9:51:46 AM	PH3 valve closed
12/17/2010	9:51:46 AM	SiCl4 pre valve closed
12/17/2010	9:51:46 AM	SiCl4 post valve closed
12/17/2010	9:51:46 AM	Main Vac valve closed
12/17/2010	9:51:46 AM	Bubbler valve closed
12/17/2010	9:51:46 AM	Bypass valve opened
12/17/2010	9:51:46 AM	Helium MFC set to  0.000000
12/17/2010	9:51:46 AM	H2 MFC set to  0.000000
12/17/2010	9:51:46 AM	BCl3 MFC set to  0.000000
12/17/2010	9:51:46 AM	PHl3 MFC set to  0.000000
12/17/2010	9:51:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:51:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:51:46 AM	Tube furnace set to 0
12/17/2010	9:51:46 AM	Helium valve closed
12/17/2010	9:51:46 AM	H2 valve closed
12/17/2010	9:51:46 AM	BCl3 valve closed
12/17/2010	9:51:46 AM	PH3 valve closed
12/17/2010	9:51:46 AM	SiCl4 pre valve closed
12/17/2010	9:51:46 AM	SiCl4 post valve closed
12/17/2010	9:51:46 AM	Bubbler valve closed
12/17/2010	9:51:46 AM	Main Vac valve opened
12/17/2010	9:51:46 AM	Bypass valve opened
12/17/2010	9:51:46 AM	Helium MFC set to  0.000000
12/17/2010	9:51:46 AM	H2 MFC set to  0.000000
12/17/2010	9:51:46 AM	BCl3 MFC set to  0.000000
12/17/2010	9:51:46 AM	PHl3 MFC set to  0.000000
12/17/2010	9:51:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:51:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:51:46 AM	Tube furnace set to 0
12/17/2010	9:52:46 AM	H2 valve closed
12/17/2010	9:52:46 AM	BCl3 valve closed
12/17/2010	9:52:46 AM	PH3 valve closed
12/17/2010	9:52:46 AM	SiCl4 pre valve closed
12/17/2010	9:52:46 AM	SiCl4 post valve closed
12/17/2010	9:52:46 AM	Bubbler valve closed
12/17/2010	9:52:46 AM	Helium valve opened
12/17/2010	9:52:46 AM	Main Vac valve opened
12/17/2010	9:52:46 AM	Bypass valve opened
12/17/2010	9:52:46 AM	Helium MFC set to  100.000000
12/17/2010	9:52:46 AM	H2 MFC set to  0.000000
12/17/2010	9:52:46 AM	BCl3 MFC set to  0.000000
12/17/2010	9:52:46 AM	PHl3 MFC set to  0.000000
12/17/2010	9:52:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:52:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:52:46 AM	Tube furnace set to 0
12/17/2010	9:53:18 AM	Run aborted at 9:53 AM
12/17/2010	9:53:18 AM	Helium valve closed
12/17/2010	9:53:18 AM	H2 valve closed
12/17/2010	9:53:18 AM	BCl3 valve closed
12/17/2010	9:53:18 AM	PH3 valve closed
12/17/2010	9:53:18 AM	SiCl4 pre valve closed
12/17/2010	9:53:18 AM	SiCl4 post valve closed
12/17/2010	9:53:18 AM	Bypass valve closed
12/17/2010	9:53:18 AM	Main Vac valve closed
12/17/2010	9:53:18 AM	Bubbler valve closed
12/17/2010	9:53:18 AM	Helium MFC set to  0.000000
12/17/2010	9:53:18 AM	H2 MFC set to  0.000000
12/17/2010	9:53:18 AM	BCl3 MFC set to  0.000000
12/17/2010	9:53:18 AM	PHl3 MFC set to  0.000000
12/17/2010	9:53:18 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:53:18 AM	Tube furnace set to 0
12/17/2010	9:53:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:53:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:53:20 AM	Recipe started at 9:53 AM
12/17/2010	9:53:21 AM	Helium valve closed
12/17/2010	9:53:21 AM	H2 valve closed
12/17/2010	9:53:21 AM	BCl3 valve closed
12/17/2010	9:53:21 AM	PH3 valve closed
12/17/2010	9:53:21 AM	SiCl4 pre valve closed
12/17/2010	9:53:21 AM	SiCl4 post valve closed
12/17/2010	9:53:21 AM	Main Vac valve closed
12/17/2010	9:53:21 AM	Bubbler valve closed
12/17/2010	9:53:21 AM	Bypass valve opened
12/17/2010	9:53:21 AM	Helium MFC set to  0.000000
12/17/2010	9:53:21 AM	H2 MFC set to  0.000000
12/17/2010	9:53:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:53:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:53:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:53:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:53:21 AM	Tube furnace set to 0
12/17/2010	9:53:21 AM	Helium valve closed
12/17/2010	9:53:21 AM	H2 valve closed
12/17/2010	9:53:21 AM	BCl3 valve closed
12/17/2010	9:53:21 AM	PH3 valve closed
12/17/2010	9:53:21 AM	SiCl4 pre valve closed
12/17/2010	9:53:21 AM	SiCl4 post valve closed
12/17/2010	9:53:21 AM	Bubbler valve closed
12/17/2010	9:53:21 AM	Main Vac valve opened
12/17/2010	9:53:21 AM	Bypass valve opened
12/17/2010	9:53:21 AM	Helium MFC set to  0.000000
12/17/2010	9:53:21 AM	H2 MFC set to  0.000000
12/17/2010	9:53:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:53:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:53:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:53:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:53:21 AM	Tube furnace set to 0
12/17/2010	9:53:21 AM	Run finished at 9:53 AM
12/17/2010	9:53:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:53:57 AM	Bypass valve closed
12/17/2010	9:53:57 AM	Main Vac valve closed
12/17/2010	9:54:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:54:21 AM	Recipe started at 9:54 AM
12/17/2010	9:54:21 AM	Helium valve closed
12/17/2010	9:54:21 AM	H2 valve closed
12/17/2010	9:54:21 AM	BCl3 valve closed
12/17/2010	9:54:21 AM	PH3 valve closed
12/17/2010	9:54:21 AM	SiCl4 pre valve closed
12/17/2010	9:54:21 AM	SiCl4 post valve closed
12/17/2010	9:54:21 AM	Main Vac valve closed
12/17/2010	9:54:21 AM	Bubbler valve closed
12/17/2010	9:54:21 AM	Bypass valve opened
12/17/2010	9:54:21 AM	Helium MFC set to  0.000000
12/17/2010	9:54:21 AM	H2 MFC set to  0.000000
12/17/2010	9:54:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:54:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:54:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:54:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:54:21 AM	Tube furnace set to 0
12/17/2010	9:54:21 AM	Helium valve closed
12/17/2010	9:54:21 AM	H2 valve closed
12/17/2010	9:54:21 AM	BCl3 valve closed
12/17/2010	9:54:21 AM	PH3 valve closed
12/17/2010	9:54:21 AM	SiCl4 pre valve closed
12/17/2010	9:54:21 AM	SiCl4 post valve closed
12/17/2010	9:54:21 AM	Bubbler valve closed
12/17/2010	9:54:21 AM	Main Vac valve opened
12/17/2010	9:54:21 AM	Bypass valve opened
12/17/2010	9:54:21 AM	Helium MFC set to  0.000000
12/17/2010	9:54:21 AM	H2 MFC set to  0.000000
12/17/2010	9:54:21 AM	BCl3 MFC set to  0.000000
12/17/2010	9:54:21 AM	PHl3 MFC set to  0.000000
12/17/2010	9:54:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:54:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:54:22 AM	Tube furnace set to 0
12/17/2010	9:54:22 AM	Run finished at 9:54 AM
12/17/2010	9:54:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:54:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:54:36 AM	Recipe started at 9:54 AM
12/17/2010	9:54:36 AM	Helium valve closed
12/17/2010	9:54:36 AM	H2 valve closed
12/17/2010	9:54:36 AM	BCl3 valve closed
12/17/2010	9:54:36 AM	PH3 valve closed
12/17/2010	9:54:36 AM	SiCl4 pre valve closed
12/17/2010	9:54:36 AM	SiCl4 post valve closed
12/17/2010	9:54:36 AM	Main Vac valve closed
12/17/2010	9:54:36 AM	Bubbler valve closed
12/17/2010	9:54:36 AM	Bypass valve opened
12/17/2010	9:54:36 AM	Helium MFC set to  0.000000
12/17/2010	9:54:36 AM	H2 MFC set to  0.000000
12/17/2010	9:54:36 AM	BCl3 MFC set to  0.000000
12/17/2010	9:54:36 AM	PHl3 MFC set to  0.000000
12/17/2010	9:54:36 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:54:36 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:54:36 AM	Tube furnace set to 0
12/17/2010	9:54:36 AM	Helium valve closed
12/17/2010	9:54:36 AM	H2 valve closed
12/17/2010	9:54:36 AM	BCl3 valve closed
12/17/2010	9:54:36 AM	PH3 valve closed
12/17/2010	9:54:36 AM	SiCl4 pre valve closed
12/17/2010	9:54:36 AM	SiCl4 post valve closed
12/17/2010	9:54:36 AM	Bubbler valve closed
12/17/2010	9:54:36 AM	Main Vac valve opened
12/17/2010	9:54:36 AM	Bypass valve opened
12/17/2010	9:54:36 AM	Helium MFC set to  0.000000
12/17/2010	9:54:36 AM	H2 MFC set to  0.000000
12/17/2010	9:54:36 AM	BCl3 MFC set to  0.000000
12/17/2010	9:54:36 AM	PHl3 MFC set to  0.000000
12/17/2010	9:54:36 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:54:36 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:54:37 AM	Tube furnace set to 0
12/17/2010	9:55:37 AM	H2 valve closed
12/17/2010	9:55:37 AM	BCl3 valve closed
12/17/2010	9:55:37 AM	PH3 valve closed
12/17/2010	9:55:37 AM	SiCl4 pre valve closed
12/17/2010	9:55:37 AM	SiCl4 post valve closed
12/17/2010	9:55:37 AM	Bubbler valve closed
12/17/2010	9:55:37 AM	Helium valve opened
12/17/2010	9:55:37 AM	Main Vac valve opened
12/17/2010	9:55:37 AM	Bypass valve opened
12/17/2010	9:55:37 AM	Helium MFC set to  100.000000
12/17/2010	9:55:37 AM	H2 MFC set to  0.000000
12/17/2010	9:55:37 AM	BCl3 MFC set to  0.000000
12/17/2010	9:55:37 AM	PHl3 MFC set to  0.000000
12/17/2010	9:55:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:55:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:55:37 AM	Tube furnace set to 0
12/17/2010	9:56:37 AM	Helium valve closed
12/17/2010	9:56:37 AM	H2 valve closed
12/17/2010	9:56:37 AM	BCl3 valve closed
12/17/2010	9:56:37 AM	PH3 valve closed
12/17/2010	9:56:37 AM	SiCl4 pre valve closed
12/17/2010	9:56:37 AM	SiCl4 post valve closed
12/17/2010	9:56:37 AM	Bubbler valve closed
12/17/2010	9:56:37 AM	Main Vac valve opened
12/17/2010	9:56:37 AM	Bypass valve opened
12/17/2010	9:56:37 AM	Helium MFC set to  0.000000
12/17/2010	9:56:37 AM	H2 MFC set to  0.000000
12/17/2010	9:56:37 AM	BCl3 MFC set to  0.000000
12/17/2010	9:56:37 AM	PHl3 MFC set to  0.000000
12/17/2010	9:56:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:56:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:56:37 AM	Tube furnace set to 0
12/17/2010	9:57:37 AM	H2 valve closed
12/17/2010	9:57:37 AM	BCl3 valve closed
12/17/2010	9:57:37 AM	PH3 valve closed
12/17/2010	9:57:37 AM	SiCl4 pre valve closed
12/17/2010	9:57:37 AM	SiCl4 post valve closed
12/17/2010	9:57:37 AM	Bubbler valve closed
12/17/2010	9:57:37 AM	Helium valve opened
12/17/2010	9:57:37 AM	Main Vac valve opened
12/17/2010	9:57:37 AM	Bypass valve opened
12/17/2010	9:57:37 AM	Helium MFC set to  100.000000
12/17/2010	9:57:37 AM	H2 MFC set to  0.000000
12/17/2010	9:57:37 AM	BCl3 MFC set to  0.000000
12/17/2010	9:57:37 AM	PHl3 MFC set to  0.000000
12/17/2010	9:57:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:57:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:57:37 AM	Tube furnace set to 0
12/17/2010	9:58:37 AM	Helium valve closed
12/17/2010	9:58:37 AM	H2 valve closed
12/17/2010	9:58:37 AM	BCl3 valve closed
12/17/2010	9:58:37 AM	PH3 valve closed
12/17/2010	9:58:37 AM	SiCl4 pre valve closed
12/17/2010	9:58:37 AM	SiCl4 post valve closed
12/17/2010	9:58:37 AM	Bubbler valve closed
12/17/2010	9:58:37 AM	Main Vac valve opened
12/17/2010	9:58:37 AM	Bypass valve opened
12/17/2010	9:58:37 AM	Helium MFC set to  0.000000
12/17/2010	9:58:37 AM	H2 MFC set to  0.000000
12/17/2010	9:58:37 AM	BCl3 MFC set to  0.000000
12/17/2010	9:58:37 AM	PHl3 MFC set to  0.000000
12/17/2010	9:58:37 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:58:37 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:58:37 AM	Tube furnace set to 0
12/17/2010	9:59:29 AM	Run aborted at 9:59 AM
12/17/2010	9:59:29 AM	Helium valve closed
12/17/2010	9:59:29 AM	H2 valve closed
12/17/2010	9:59:29 AM	BCl3 valve closed
12/17/2010	9:59:29 AM	PH3 valve closed
12/17/2010	9:59:29 AM	SiCl4 pre valve closed
12/17/2010	9:59:29 AM	SiCl4 post valve closed
12/17/2010	9:59:29 AM	Bypass valve closed
12/17/2010	9:59:29 AM	Main Vac valve closed
12/17/2010	9:59:29 AM	Bubbler valve closed
12/17/2010	9:59:29 AM	Helium MFC set to  0.000000
12/17/2010	9:59:29 AM	H2 MFC set to  0.000000
12/17/2010	9:59:29 AM	BCl3 MFC set to  0.000000
12/17/2010	9:59:29 AM	PHl3 MFC set to  0.000000
12/17/2010	9:59:29 AM	SiCl4 MFC set to  0.000000
12/17/2010	9:59:29 AM	Tube furnace set to 0
12/17/2010	9:59:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:59:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:00:10 AM	Recipe started at 10:00 AM
12/17/2010	10:00:10 AM	Helium valve closed
12/17/2010	10:00:10 AM	H2 valve closed
12/17/2010	10:00:10 AM	BCl3 valve closed
12/17/2010	10:00:10 AM	PH3 valve closed
12/17/2010	10:00:10 AM	SiCl4 pre valve closed
12/17/2010	10:00:10 AM	SiCl4 post valve closed
12/17/2010	10:00:10 AM	Main Vac valve closed
12/17/2010	10:00:10 AM	Bubbler valve closed
12/17/2010	10:00:10 AM	Bypass valve opened
12/17/2010	10:00:10 AM	Helium MFC set to  0.000000
12/17/2010	10:00:10 AM	H2 MFC set to  0.000000
12/17/2010	10:00:10 AM	BCl3 MFC set to  0.000000
12/17/2010	10:00:10 AM	PHl3 MFC set to  0.000000
12/17/2010	10:00:10 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:00:10 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:00:10 AM	Tube furnace set to 0
12/17/2010	10:00:10 AM	Helium valve closed
12/17/2010	10:00:10 AM	H2 valve closed
12/17/2010	10:00:10 AM	BCl3 valve closed
12/17/2010	10:00:10 AM	PH3 valve closed
12/17/2010	10:00:10 AM	SiCl4 pre valve closed
12/17/2010	10:00:10 AM	SiCl4 post valve closed
12/17/2010	10:00:10 AM	Bubbler valve closed
12/17/2010	10:00:10 AM	Main Vac valve opened
12/17/2010	10:00:10 AM	Bypass valve opened
12/17/2010	10:00:10 AM	Helium MFC set to  0.000000
12/17/2010	10:00:10 AM	H2 MFC set to  0.000000
12/17/2010	10:00:10 AM	BCl3 MFC set to  0.000000
12/17/2010	10:00:10 AM	PHl3 MFC set to  0.000000
12/17/2010	10:00:10 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:00:10 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:00:10 AM	Tube furnace set to 0
12/17/2010	10:01:10 AM	H2 valve closed
12/17/2010	10:01:10 AM	BCl3 valve closed
12/17/2010	10:01:10 AM	PH3 valve closed
12/17/2010	10:01:10 AM	SiCl4 pre valve closed
12/17/2010	10:01:10 AM	SiCl4 post valve closed
12/17/2010	10:01:10 AM	Bubbler valve closed
12/17/2010	10:01:10 AM	Helium valve opened
12/17/2010	10:01:10 AM	Main Vac valve opened
12/17/2010	10:01:10 AM	Bypass valve opened
12/17/2010	10:01:10 AM	Helium MFC set to  100.000000
12/17/2010	10:01:10 AM	H2 MFC set to  0.000000
12/17/2010	10:01:10 AM	BCl3 MFC set to  0.000000
12/17/2010	10:01:10 AM	PHl3 MFC set to  0.000000
12/17/2010	10:01:10 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:01:10 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:01:11 AM	Tube furnace set to 0
12/17/2010	10:02:11 AM	Helium valve closed
12/17/2010	10:02:11 AM	H2 valve closed
12/17/2010	10:02:11 AM	BCl3 valve closed
12/17/2010	10:02:11 AM	PH3 valve closed
12/17/2010	10:02:11 AM	SiCl4 pre valve closed
12/17/2010	10:02:11 AM	SiCl4 post valve closed
12/17/2010	10:02:11 AM	Bubbler valve closed
12/17/2010	10:02:11 AM	Main Vac valve opened
12/17/2010	10:02:11 AM	Bypass valve opened
12/17/2010	10:02:11 AM	Helium MFC set to  0.000000
12/17/2010	10:02:11 AM	H2 MFC set to  0.000000
12/17/2010	10:02:11 AM	BCl3 MFC set to  0.000000
12/17/2010	10:02:11 AM	PHl3 MFC set to  0.000000
12/17/2010	10:02:11 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:02:11 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:02:11 AM	Tube furnace set to 0
12/17/2010	10:03:11 AM	H2 valve closed
12/17/2010	10:03:11 AM	BCl3 valve closed
12/17/2010	10:03:11 AM	PH3 valve closed
12/17/2010	10:03:11 AM	SiCl4 pre valve closed
12/17/2010	10:03:11 AM	SiCl4 post valve closed
12/17/2010	10:03:11 AM	Bubbler valve closed
12/17/2010	10:03:11 AM	Helium valve opened
12/17/2010	10:03:11 AM	Main Vac valve opened
12/17/2010	10:03:11 AM	Bypass valve opened
12/17/2010	10:03:11 AM	Helium MFC set to  100.000000
12/17/2010	10:03:11 AM	H2 MFC set to  0.000000
12/17/2010	10:03:11 AM	BCl3 MFC set to  0.000000
12/17/2010	10:03:11 AM	PHl3 MFC set to  0.000000
12/17/2010	10:03:11 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:03:11 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:03:11 AM	Tube furnace set to 0
12/17/2010	10:04:11 AM	Helium valve closed
12/17/2010	10:04:11 AM	H2 valve closed
12/17/2010	10:04:11 AM	BCl3 valve closed
12/17/2010	10:04:11 AM	PH3 valve closed
12/17/2010	10:04:11 AM	SiCl4 pre valve closed
12/17/2010	10:04:11 AM	SiCl4 post valve closed
12/17/2010	10:04:11 AM	Bubbler valve closed
12/17/2010	10:04:11 AM	Main Vac valve opened
12/17/2010	10:04:11 AM	Bypass valve opened
12/17/2010	10:04:11 AM	Helium MFC set to  0.000000
12/17/2010	10:04:11 AM	H2 MFC set to  0.000000
12/17/2010	10:04:11 AM	BCl3 MFC set to  0.000000
12/17/2010	10:04:11 AM	PHl3 MFC set to  0.000000
12/17/2010	10:04:11 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:04:11 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:04:11 AM	Tube furnace set to 0
12/17/2010	10:05:11 AM	H2 valve closed
12/17/2010	10:05:11 AM	BCl3 valve closed
12/17/2010	10:05:11 AM	PH3 valve closed
12/17/2010	10:05:11 AM	SiCl4 pre valve closed
12/17/2010	10:05:11 AM	SiCl4 post valve closed
12/17/2010	10:05:11 AM	Bubbler valve closed
12/17/2010	10:05:11 AM	Helium valve opened
12/17/2010	10:05:11 AM	Main Vac valve opened
12/17/2010	10:05:11 AM	Bypass valve opened
12/17/2010	10:05:11 AM	Helium MFC set to  100.000000
12/17/2010	10:05:11 AM	H2 MFC set to  0.000000
12/17/2010	10:05:11 AM	BCl3 MFC set to  0.000000
12/17/2010	10:05:11 AM	PHl3 MFC set to  0.000000
12/17/2010	10:05:11 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:05:11 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:05:11 AM	Tube furnace set to 0
12/17/2010	10:06:11 AM	Helium valve closed
12/17/2010	10:06:11 AM	H2 valve closed
12/17/2010	10:06:11 AM	BCl3 valve closed
12/17/2010	10:06:11 AM	PH3 valve closed
12/17/2010	10:06:11 AM	SiCl4 pre valve closed
12/17/2010	10:06:11 AM	SiCl4 post valve closed
12/17/2010	10:06:11 AM	Bubbler valve closed
12/17/2010	10:06:11 AM	Main Vac valve opened
12/17/2010	10:06:11 AM	Bypass valve opened
12/17/2010	10:06:11 AM	Helium MFC set to  0.000000
12/17/2010	10:06:11 AM	H2 MFC set to  0.000000
12/17/2010	10:06:11 AM	BCl3 MFC set to  0.000000
12/17/2010	10:06:11 AM	PHl3 MFC set to  0.000000
12/17/2010	10:06:11 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:06:11 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:06:12 AM	Tube furnace set to 0
12/17/2010	10:07:12 AM	H2 valve closed
12/17/2010	10:07:12 AM	BCl3 valve closed
12/17/2010	10:07:12 AM	PH3 valve closed
12/17/2010	10:07:12 AM	SiCl4 pre valve closed
12/17/2010	10:07:12 AM	SiCl4 post valve closed
12/17/2010	10:07:12 AM	Bubbler valve closed
12/17/2010	10:07:12 AM	Helium valve opened
12/17/2010	10:07:12 AM	Main Vac valve opened
12/17/2010	10:07:12 AM	Bypass valve opened
12/17/2010	10:07:12 AM	Helium MFC set to  100.000000
12/17/2010	10:07:12 AM	H2 MFC set to  0.000000
12/17/2010	10:07:12 AM	BCl3 MFC set to  0.000000
12/17/2010	10:07:12 AM	PHl3 MFC set to  0.000000
12/17/2010	10:07:12 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:07:12 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:07:12 AM	Tube furnace set to 0
12/17/2010	10:08:12 AM	Helium valve closed
12/17/2010	10:08:12 AM	H2 valve closed
12/17/2010	10:08:12 AM	BCl3 valve closed
12/17/2010	10:08:12 AM	PH3 valve closed
12/17/2010	10:08:12 AM	SiCl4 pre valve closed
12/17/2010	10:08:12 AM	SiCl4 post valve closed
12/17/2010	10:08:12 AM	Bubbler valve closed
12/17/2010	10:08:12 AM	Main Vac valve opened
12/17/2010	10:08:12 AM	Bypass valve opened
12/17/2010	10:08:12 AM	Helium MFC set to  0.000000
12/17/2010	10:08:12 AM	H2 MFC set to  0.000000
12/17/2010	10:08:12 AM	BCl3 MFC set to  0.000000
12/17/2010	10:08:12 AM	PHl3 MFC set to  0.000000
12/17/2010	10:08:12 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:08:12 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:08:12 AM	Tube furnace set to 0
12/17/2010	10:09:07 AM	Run aborted at 10:09 AM
12/17/2010	10:09:07 AM	Helium valve closed
12/17/2010	10:09:07 AM	H2 valve closed
12/17/2010	10:09:07 AM	BCl3 valve closed
12/17/2010	10:09:07 AM	PH3 valve closed
12/17/2010	10:09:07 AM	SiCl4 pre valve closed
12/17/2010	10:09:07 AM	SiCl4 post valve closed
12/17/2010	10:09:07 AM	Bypass valve closed
12/17/2010	10:09:07 AM	Main Vac valve closed
12/17/2010	10:09:07 AM	Bubbler valve closed
12/17/2010	10:09:07 AM	Helium MFC set to  0.000000
12/17/2010	10:09:07 AM	H2 MFC set to  0.000000
12/17/2010	10:09:07 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:07 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:07 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:07 AM	Tube furnace set to 0
12/17/2010	10:09:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:09:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:09:09 AM	Recipe started at 10:09 AM
12/17/2010	10:09:09 AM	Helium valve closed
12/17/2010	10:09:09 AM	H2 valve closed
12/17/2010	10:09:09 AM	BCl3 valve closed
12/17/2010	10:09:09 AM	PH3 valve closed
12/17/2010	10:09:09 AM	SiCl4 pre valve closed
12/17/2010	10:09:09 AM	SiCl4 post valve closed
12/17/2010	10:09:09 AM	Main Vac valve closed
12/17/2010	10:09:09 AM	Bubbler valve closed
12/17/2010	10:09:09 AM	Bypass valve opened
12/17/2010	10:09:09 AM	Helium MFC set to  0.000000
12/17/2010	10:09:09 AM	H2 MFC set to  0.000000
12/17/2010	10:09:09 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:09 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:09 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:09 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:09 AM	Tube furnace set to 0
12/17/2010	10:09:10 AM	Helium valve closed
12/17/2010	10:09:10 AM	H2 valve closed
12/17/2010	10:09:10 AM	BCl3 valve closed
12/17/2010	10:09:10 AM	PH3 valve closed
12/17/2010	10:09:10 AM	SiCl4 pre valve closed
12/17/2010	10:09:10 AM	SiCl4 post valve closed
12/17/2010	10:09:10 AM	Bubbler valve closed
12/17/2010	10:09:10 AM	Main Vac valve opened
12/17/2010	10:09:10 AM	Bypass valve opened
12/17/2010	10:09:10 AM	Helium MFC set to  0.000000
12/17/2010	10:09:10 AM	H2 MFC set to  0.000000
12/17/2010	10:09:10 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:10 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:10 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:10 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:10 AM	Tube furnace set to 0
12/17/2010	10:09:10 AM	Run finished at 10:09 AM
12/17/2010	10:09:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:09:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:09:52 AM	Recipe started at 10:09 AM
12/17/2010	10:09:52 AM	Helium valve closed
12/17/2010	10:09:52 AM	H2 valve closed
12/17/2010	10:09:52 AM	BCl3 valve closed
12/17/2010	10:09:52 AM	PH3 valve closed
12/17/2010	10:09:52 AM	SiCl4 pre valve closed
12/17/2010	10:09:52 AM	SiCl4 post valve closed
12/17/2010	10:09:52 AM	Main Vac valve closed
12/17/2010	10:09:52 AM	Bubbler valve closed
12/17/2010	10:09:52 AM	Bypass valve opened
12/17/2010	10:09:52 AM	Helium MFC set to  0.000000
12/17/2010	10:09:52 AM	H2 MFC set to  0.000000
12/17/2010	10:09:52 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:52 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:52 AM	Tube furnace set to 0
12/17/2010	10:09:52 AM	Helium valve closed
12/17/2010	10:09:52 AM	H2 valve closed
12/17/2010	10:09:52 AM	BCl3 valve closed
12/17/2010	10:09:52 AM	PH3 valve closed
12/17/2010	10:09:52 AM	SiCl4 pre valve closed
12/17/2010	10:09:52 AM	SiCl4 post valve closed
12/17/2010	10:09:52 AM	Bubbler valve closed
12/17/2010	10:09:52 AM	Main Vac valve opened
12/17/2010	10:09:52 AM	Bypass valve opened
12/17/2010	10:09:52 AM	Helium MFC set to  0.000000
12/17/2010	10:09:52 AM	H2 MFC set to  0.000000
12/17/2010	10:09:52 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:52 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:52 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:52 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:52 AM	Tube furnace set to 0
12/17/2010	10:09:53 AM	Run finished at 10:09 AM
12/17/2010	10:09:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:09:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	10:09:55 AM	Recipe started at 10:09 AM
12/17/2010	10:09:55 AM	H2 valve closed
12/17/2010	10:09:55 AM	BCl3 valve closed
12/17/2010	10:09:55 AM	PH3 valve closed
12/17/2010	10:09:55 AM	SiCl4 pre valve closed
12/17/2010	10:09:55 AM	SiCl4 post valve closed
12/17/2010	10:09:55 AM	Main Vac valve closed
12/17/2010	10:09:55 AM	Bypass valve closed
12/17/2010	10:09:55 AM	Bubbler valve closed
12/17/2010	10:09:55 AM	Helium valve opened
12/17/2010	10:09:55 AM	Helium MFC set to  500.000000
12/17/2010	10:09:55 AM	H2 MFC set to  0.000000
12/17/2010	10:09:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:09:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:09:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:56 AM	Tube furnace set to 0
12/17/2010	10:11:15 AM	Helium valve closed
12/17/2010	10:11:15 AM	H2 valve closed
12/17/2010	10:11:15 AM	BCl3 valve closed
12/17/2010	10:11:15 AM	PH3 valve closed
12/17/2010	10:11:15 AM	SiCl4 pre valve closed
12/17/2010	10:11:15 AM	SiCl4 post valve closed
12/17/2010	10:11:15 AM	Main Vac valve closed
12/17/2010	10:11:15 AM	Bypass valve closed
12/17/2010	10:11:15 AM	Bubbler valve closed
12/17/2010	10:11:15 AM	Helium MFC set to  0.000000
12/17/2010	10:11:15 AM	H2 MFC set to  0.000000
12/17/2010	10:11:15 AM	BCl3 MFC set to  0.000000
12/17/2010	10:11:15 AM	PHl3 MFC set to  0.000000
12/17/2010	10:11:15 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:11:15 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:11:15 AM	Tube furnace set to 0
12/17/2010	10:11:16 AM	Run finished at 10:11 AM
12/17/2010	10:11:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	10:16:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:16:39 AM	Recipe started at 10:16 AM
12/17/2010	10:16:39 AM	Helium valve closed
12/17/2010	10:16:39 AM	H2 valve closed
12/17/2010	10:16:39 AM	BCl3 valve closed
12/17/2010	10:16:39 AM	PH3 valve closed
12/17/2010	10:16:39 AM	SiCl4 pre valve closed
12/17/2010	10:16:39 AM	SiCl4 post valve closed
12/17/2010	10:16:39 AM	Main Vac valve closed
12/17/2010	10:16:39 AM	Bubbler valve closed
12/17/2010	10:16:39 AM	Bypass valve opened
12/17/2010	10:16:39 AM	Helium MFC set to  0.000000
12/17/2010	10:16:39 AM	H2 MFC set to  0.000000
12/17/2010	10:16:39 AM	BCl3 MFC set to  0.000000
12/17/2010	10:16:39 AM	PHl3 MFC set to  0.000000
12/17/2010	10:16:39 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:16:39 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:16:39 AM	Tube furnace set to 0
12/17/2010	10:16:59 AM	Run aborted at 10:16 AM
12/17/2010	10:16:59 AM	Helium valve closed
12/17/2010	10:16:59 AM	H2 valve closed
12/17/2010	10:17:00 AM	BCl3 valve closed
12/17/2010	10:17:00 AM	PH3 valve closed
12/17/2010	10:17:00 AM	SiCl4 pre valve closed
12/17/2010	10:17:00 AM	SiCl4 post valve closed
12/17/2010	10:17:00 AM	Bypass valve closed
12/17/2010	10:17:00 AM	Main Vac valve closed
12/17/2010	10:17:00 AM	Bubbler valve closed
12/17/2010	10:17:00 AM	Helium MFC set to  0.000000
12/17/2010	10:17:00 AM	H2 MFC set to  0.000000
12/17/2010	10:17:00 AM	BCl3 MFC set to  0.000000
12/17/2010	10:17:00 AM	PHl3 MFC set to  0.000000
12/17/2010	10:17:00 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:17:00 AM	Tube furnace set to 0
12/17/2010	10:17:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:17:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	10:17:01 AM	Recipe started at 10:17 AM
12/17/2010	10:17:01 AM	H2 valve closed
12/17/2010	10:17:01 AM	BCl3 valve closed
12/17/2010	10:17:01 AM	PH3 valve closed
12/17/2010	10:17:01 AM	SiCl4 pre valve closed
12/17/2010	10:17:01 AM	SiCl4 post valve closed
12/17/2010	10:17:01 AM	Main Vac valve closed
12/17/2010	10:17:01 AM	Bypass valve closed
12/17/2010	10:17:01 AM	Bubbler valve closed
12/17/2010	10:17:01 AM	Helium valve opened
12/17/2010	10:17:01 AM	Helium MFC set to  500.000000
12/17/2010	10:17:01 AM	H2 MFC set to  0.000000
12/17/2010	10:17:01 AM	BCl3 MFC set to  0.000000
12/17/2010	10:17:01 AM	PHl3 MFC set to  0.000000
12/17/2010	10:17:01 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:17:01 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:17:01 AM	Tube furnace set to 0
12/17/2010	10:17:04 AM	Helium valve closed
12/17/2010	10:17:04 AM	H2 valve closed
12/17/2010	10:17:04 AM	BCl3 valve closed
12/17/2010	10:17:04 AM	PH3 valve closed
12/17/2010	10:17:04 AM	SiCl4 pre valve closed
12/17/2010	10:17:04 AM	SiCl4 post valve closed
12/17/2010	10:17:04 AM	Main Vac valve closed
12/17/2010	10:17:04 AM	Bypass valve closed
12/17/2010	10:17:04 AM	Bubbler valve closed
12/17/2010	10:17:04 AM	Helium MFC set to  0.000000
12/17/2010	10:17:04 AM	H2 MFC set to  0.000000
12/17/2010	10:17:04 AM	BCl3 MFC set to  0.000000
12/17/2010	10:17:04 AM	PHl3 MFC set to  0.000000
12/17/2010	10:17:04 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:17:04 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:17:04 AM	Tube furnace set to 0
12/17/2010	10:17:05 AM	Run finished at 10:17 AM
12/17/2010	10:17:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	10:18:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:18:55 AM	Recipe started at 10:18 AM
12/17/2010	10:18:55 AM	Helium valve closed
12/17/2010	10:18:55 AM	H2 valve closed
12/17/2010	10:18:55 AM	BCl3 valve closed
12/17/2010	10:18:55 AM	PH3 valve closed
12/17/2010	10:18:55 AM	SiCl4 pre valve closed
12/17/2010	10:18:55 AM	SiCl4 post valve closed
12/17/2010	10:18:55 AM	Main Vac valve closed
12/17/2010	10:18:55 AM	Bubbler valve closed
12/17/2010	10:18:55 AM	Bypass valve opened
12/17/2010	10:18:55 AM	Helium MFC set to  0.000000
12/17/2010	10:18:55 AM	H2 MFC set to  0.000000
12/17/2010	10:18:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:18:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:18:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:18:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:18:55 AM	Tube furnace set to 0
12/17/2010	10:19:58 AM	Helium valve closed
12/17/2010	10:19:58 AM	H2 valve closed
12/17/2010	10:19:58 AM	BCl3 valve closed
12/17/2010	10:19:58 AM	PH3 valve closed
12/17/2010	10:19:58 AM	SiCl4 pre valve closed
12/17/2010	10:19:58 AM	SiCl4 post valve closed
12/17/2010	10:19:58 AM	Bubbler valve closed
12/17/2010	10:19:58 AM	Main Vac valve opened
12/17/2010	10:19:58 AM	Bypass valve opened
12/17/2010	10:19:58 AM	Helium MFC set to  0.000000
12/17/2010	10:19:58 AM	H2 MFC set to  0.000000
12/17/2010	10:19:58 AM	BCl3 MFC set to  0.000000
12/17/2010	10:19:58 AM	PHl3 MFC set to  0.000000
12/17/2010	10:19:58 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:19:58 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:19:58 AM	Tube furnace set to 0
12/17/2010	10:19:58 AM	Run finished at 10:19 AM
12/17/2010	10:19:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:20:18 AM	Bypass valve closed
12/17/2010	10:20:19 AM	Main Vac valve closed
12/17/2010	10:20:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:20:30 AM	Recipe started at 10:20 AM
12/17/2010	10:20:30 AM	Helium valve closed
12/17/2010	10:20:30 AM	H2 valve closed
12/17/2010	10:20:30 AM	BCl3 valve closed
12/17/2010	10:20:30 AM	PH3 valve closed
12/17/2010	10:20:30 AM	SiCl4 pre valve closed
12/17/2010	10:20:30 AM	SiCl4 post valve closed
12/17/2010	10:20:30 AM	Main Vac valve closed
12/17/2010	10:20:30 AM	Bubbler valve closed
12/17/2010	10:20:30 AM	Bypass valve opened
12/17/2010	10:20:30 AM	Helium MFC set to  0.000000
12/17/2010	10:20:30 AM	H2 MFC set to  0.000000
12/17/2010	10:20:30 AM	BCl3 MFC set to  0.000000
12/17/2010	10:20:30 AM	PHl3 MFC set to  0.000000
12/17/2010	10:20:30 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:20:30 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:20:30 AM	Tube furnace set to 0
12/17/2010	10:20:31 AM	Helium valve closed
12/17/2010	10:20:31 AM	H2 valve closed
12/17/2010	10:20:31 AM	BCl3 valve closed
12/17/2010	10:20:31 AM	PH3 valve closed
12/17/2010	10:20:31 AM	SiCl4 pre valve closed
12/17/2010	10:20:31 AM	SiCl4 post valve closed
12/17/2010	10:20:31 AM	Bubbler valve closed
12/17/2010	10:20:31 AM	Main Vac valve opened
12/17/2010	10:20:31 AM	Bypass valve opened
12/17/2010	10:20:31 AM	Helium MFC set to  0.000000
12/17/2010	10:20:31 AM	H2 MFC set to  0.000000
12/17/2010	10:20:31 AM	BCl3 MFC set to  0.000000
12/17/2010	10:20:31 AM	PHl3 MFC set to  0.000000
12/17/2010	10:20:31 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:20:31 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:20:31 AM	Tube furnace set to 0
12/17/2010	10:20:31 AM	Run finished at 10:20 AM
12/17/2010	10:20:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:20:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:20:54 AM	Recipe started at 10:20 AM
12/17/2010	10:20:54 AM	Helium valve closed
12/17/2010	10:20:54 AM	H2 valve closed
12/17/2010	10:20:54 AM	BCl3 valve closed
12/17/2010	10:20:54 AM	PH3 valve closed
12/17/2010	10:20:55 AM	SiCl4 pre valve closed
12/17/2010	10:20:55 AM	SiCl4 post valve closed
12/17/2010	10:20:55 AM	Main Vac valve closed
12/17/2010	10:20:55 AM	Bubbler valve closed
12/17/2010	10:20:55 AM	Bypass valve opened
12/17/2010	10:20:55 AM	Helium MFC set to  0.000000
12/17/2010	10:20:55 AM	H2 MFC set to  0.000000
12/17/2010	10:20:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:20:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:20:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:20:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:20:55 AM	Tube furnace set to 0
12/17/2010	10:20:55 AM	Helium valve closed
12/17/2010	10:20:55 AM	H2 valve closed
12/17/2010	10:20:55 AM	BCl3 valve closed
12/17/2010	10:20:55 AM	PH3 valve closed
12/17/2010	10:20:55 AM	SiCl4 pre valve closed
12/17/2010	10:20:55 AM	SiCl4 post valve closed
12/17/2010	10:20:55 AM	Bubbler valve closed
12/17/2010	10:20:55 AM	Main Vac valve opened
12/17/2010	10:20:55 AM	Bypass valve opened
12/17/2010	10:20:55 AM	Helium MFC set to  0.000000
12/17/2010	10:20:55 AM	H2 MFC set to  0.000000
12/17/2010	10:20:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:20:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:20:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:20:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:20:55 AM	Tube furnace set to 0
12/17/2010	10:21:55 AM	H2 valve closed
12/17/2010	10:21:55 AM	BCl3 valve closed
12/17/2010	10:21:55 AM	PH3 valve closed
12/17/2010	10:21:55 AM	SiCl4 pre valve closed
12/17/2010	10:21:55 AM	SiCl4 post valve closed
12/17/2010	10:21:55 AM	Bubbler valve closed
12/17/2010	10:21:55 AM	Helium valve opened
12/17/2010	10:21:55 AM	Main Vac valve opened
12/17/2010	10:21:55 AM	Bypass valve opened
12/17/2010	10:21:55 AM	Helium MFC set to  100.000000
12/17/2010	10:21:55 AM	H2 MFC set to  0.000000
12/17/2010	10:21:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:21:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:21:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:21:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:21:55 AM	Tube furnace set to 0
12/17/2010	10:22:55 AM	Helium valve closed
12/17/2010	10:22:55 AM	H2 valve closed
12/17/2010	10:22:55 AM	BCl3 valve closed
12/17/2010	10:22:55 AM	PH3 valve closed
12/17/2010	10:22:55 AM	SiCl4 pre valve closed
12/17/2010	10:22:55 AM	SiCl4 post valve closed
12/17/2010	10:22:55 AM	Bubbler valve closed
12/17/2010	10:22:55 AM	Main Vac valve opened
12/17/2010	10:22:55 AM	Bypass valve opened
12/17/2010	10:22:55 AM	Helium MFC set to  0.000000
12/17/2010	10:22:55 AM	H2 MFC set to  0.000000
12/17/2010	10:22:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:22:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:22:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:22:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:22:56 AM	Tube furnace set to 0
12/17/2010	10:23:56 AM	H2 valve closed
12/17/2010	10:23:56 AM	BCl3 valve closed
12/17/2010	10:23:56 AM	PH3 valve closed
12/17/2010	10:23:56 AM	SiCl4 pre valve closed
12/17/2010	10:23:56 AM	SiCl4 post valve closed
12/17/2010	10:23:56 AM	Bubbler valve closed
12/17/2010	10:23:56 AM	Helium valve opened
12/17/2010	10:23:56 AM	Main Vac valve opened
12/17/2010	10:23:56 AM	Bypass valve opened
12/17/2010	10:23:56 AM	Helium MFC set to  100.000000
12/17/2010	10:23:56 AM	H2 MFC set to  0.000000
12/17/2010	10:23:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:23:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:23:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:23:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:23:56 AM	Tube furnace set to 0
12/17/2010	10:24:56 AM	Helium valve closed
12/17/2010	10:24:56 AM	H2 valve closed
12/17/2010	10:24:56 AM	BCl3 valve closed
12/17/2010	10:24:56 AM	PH3 valve closed
12/17/2010	10:24:56 AM	SiCl4 pre valve closed
12/17/2010	10:24:56 AM	SiCl4 post valve closed
12/17/2010	10:24:56 AM	Bubbler valve closed
12/17/2010	10:24:56 AM	Main Vac valve opened
12/17/2010	10:24:56 AM	Bypass valve opened
12/17/2010	10:24:56 AM	Helium MFC set to  0.000000
12/17/2010	10:24:56 AM	H2 MFC set to  0.000000
12/17/2010	10:24:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:24:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:24:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:24:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:24:56 AM	Tube furnace set to 0
12/17/2010	10:25:56 AM	H2 valve closed
12/17/2010	10:25:56 AM	BCl3 valve closed
12/17/2010	10:25:56 AM	PH3 valve closed
12/17/2010	10:25:56 AM	SiCl4 pre valve closed
12/17/2010	10:25:56 AM	SiCl4 post valve closed
12/17/2010	10:25:56 AM	Bubbler valve closed
12/17/2010	10:25:56 AM	Helium valve opened
12/17/2010	10:25:56 AM	Main Vac valve opened
12/17/2010	10:25:56 AM	Bypass valve opened
12/17/2010	10:25:56 AM	Helium MFC set to  100.000000
12/17/2010	10:25:56 AM	H2 MFC set to  0.000000
12/17/2010	10:25:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:25:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:25:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:25:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:25:56 AM	Tube furnace set to 0
12/17/2010	10:26:19 AM	Run aborted at 10:26 AM
12/17/2010	10:26:19 AM	Helium valve closed
12/17/2010	10:26:19 AM	H2 valve closed
12/17/2010	10:26:19 AM	BCl3 valve closed
12/17/2010	10:26:19 AM	PH3 valve closed
12/17/2010	10:26:19 AM	SiCl4 pre valve closed
12/17/2010	10:26:19 AM	SiCl4 post valve closed
12/17/2010	10:26:19 AM	Bypass valve closed
12/17/2010	10:26:19 AM	Main Vac valve closed
12/17/2010	10:26:19 AM	Bubbler valve closed
12/17/2010	10:26:19 AM	Helium MFC set to  0.000000
12/17/2010	10:26:19 AM	H2 MFC set to  0.000000
12/17/2010	10:26:19 AM	BCl3 MFC set to  0.000000
12/17/2010	10:26:19 AM	PHl3 MFC set to  0.000000
12/17/2010	10:26:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:26:19 AM	Tube furnace set to 0
12/17/2010	10:26:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:26:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:26:20 AM	Recipe started at 10:26 AM
12/17/2010	10:26:20 AM	Helium valve closed
12/17/2010	10:26:21 AM	H2 valve closed
12/17/2010	10:26:21 AM	BCl3 valve closed
12/17/2010	10:26:21 AM	PH3 valve closed
12/17/2010	10:26:21 AM	SiCl4 pre valve closed
12/17/2010	10:26:21 AM	SiCl4 post valve closed
12/17/2010	10:26:21 AM	Main Vac valve closed
12/17/2010	10:26:21 AM	Bubbler valve closed
12/17/2010	10:26:21 AM	Bypass valve opened
12/17/2010	10:26:21 AM	Helium MFC set to  0.000000
12/17/2010	10:26:21 AM	H2 MFC set to  0.000000
12/17/2010	10:26:21 AM	BCl3 MFC set to  0.000000
12/17/2010	10:26:21 AM	PHl3 MFC set to  0.000000
12/17/2010	10:26:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:26:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:26:21 AM	Tube furnace set to 0
12/17/2010	10:26:21 AM	Helium valve closed
12/17/2010	10:26:21 AM	H2 valve closed
12/17/2010	10:26:21 AM	BCl3 valve closed
12/17/2010	10:26:21 AM	PH3 valve closed
12/17/2010	10:26:21 AM	SiCl4 pre valve closed
12/17/2010	10:26:21 AM	SiCl4 post valve closed
12/17/2010	10:26:21 AM	Bubbler valve closed
12/17/2010	10:26:21 AM	Main Vac valve opened
12/17/2010	10:26:21 AM	Bypass valve opened
12/17/2010	10:26:21 AM	Helium MFC set to  0.000000
12/17/2010	10:26:21 AM	H2 MFC set to  0.000000
12/17/2010	10:26:21 AM	BCl3 MFC set to  0.000000
12/17/2010	10:26:21 AM	PHl3 MFC set to  0.000000
12/17/2010	10:26:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:26:21 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:26:21 AM	Tube furnace set to 0
12/17/2010	10:26:21 AM	Run finished at 10:26 AM
12/17/2010	10:26:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:26:54 AM	Main Vac valve closed
12/17/2010	10:26:56 AM	Bypass valve closed
12/17/2010	10:27:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:27:16 AM	Recipe started at 10:27 AM
12/17/2010	10:27:16 AM	Helium valve closed
12/17/2010	10:27:16 AM	H2 valve closed
12/17/2010	10:27:16 AM	BCl3 valve closed
12/17/2010	10:27:16 AM	PH3 valve closed
12/17/2010	10:27:16 AM	SiCl4 pre valve closed
12/17/2010	10:27:16 AM	SiCl4 post valve closed
12/17/2010	10:27:16 AM	Main Vac valve closed
12/17/2010	10:27:16 AM	Bubbler valve closed
12/17/2010	10:27:16 AM	Bypass valve opened
12/17/2010	10:27:16 AM	Helium MFC set to  0.000000
12/17/2010	10:27:16 AM	H2 MFC set to  0.000000
12/17/2010	10:27:16 AM	BCl3 MFC set to  0.000000
12/17/2010	10:27:16 AM	PHl3 MFC set to  0.000000
12/17/2010	10:27:16 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:27:16 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:27:16 AM	Tube furnace set to 0
12/17/2010	10:27:16 AM	Helium valve closed
12/17/2010	10:27:16 AM	H2 valve closed
12/17/2010	10:27:16 AM	BCl3 valve closed
12/17/2010	10:27:16 AM	PH3 valve closed
12/17/2010	10:27:16 AM	SiCl4 pre valve closed
12/17/2010	10:27:16 AM	SiCl4 post valve closed
12/17/2010	10:27:16 AM	Bubbler valve closed
12/17/2010	10:27:16 AM	Main Vac valve opened
12/17/2010	10:27:16 AM	Bypass valve opened
12/17/2010	10:27:16 AM	Helium MFC set to  0.000000
12/17/2010	10:27:16 AM	H2 MFC set to  0.000000
12/17/2010	10:27:16 AM	BCl3 MFC set to  0.000000
12/17/2010	10:27:16 AM	PHl3 MFC set to  0.000000
12/17/2010	10:27:16 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:27:16 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:27:16 AM	Tube furnace set to 0
12/17/2010	10:27:17 AM	Run finished at 10:27 AM
12/17/2010	10:27:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:27:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:27:48 AM	Recipe started at 10:27 AM
12/17/2010	10:27:48 AM	Helium valve closed
12/17/2010	10:27:48 AM	H2 valve closed
12/17/2010	10:27:48 AM	BCl3 valve closed
12/17/2010	10:27:48 AM	PH3 valve closed
12/17/2010	10:27:48 AM	SiCl4 pre valve closed
12/17/2010	10:27:48 AM	SiCl4 post valve closed
12/17/2010	10:27:48 AM	Main Vac valve closed
12/17/2010	10:27:48 AM	Bubbler valve closed
12/17/2010	10:27:48 AM	Bypass valve opened
12/17/2010	10:27:48 AM	Helium MFC set to  0.000000
12/17/2010	10:27:48 AM	H2 MFC set to  0.000000
12/17/2010	10:27:48 AM	BCl3 MFC set to  0.000000
12/17/2010	10:27:48 AM	PHl3 MFC set to  0.000000
12/17/2010	10:27:48 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:27:48 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:27:48 AM	Tube furnace set to 0
12/17/2010	10:27:48 AM	Helium valve closed
12/17/2010	10:27:48 AM	H2 valve closed
12/17/2010	10:27:48 AM	BCl3 valve closed
12/17/2010	10:27:48 AM	PH3 valve closed
12/17/2010	10:27:48 AM	SiCl4 pre valve closed
12/17/2010	10:27:48 AM	SiCl4 post valve closed
12/17/2010	10:27:48 AM	Bubbler valve closed
12/17/2010	10:27:48 AM	Main Vac valve opened
12/17/2010	10:27:48 AM	Bypass valve opened
12/17/2010	10:27:48 AM	Helium MFC set to  0.000000
12/17/2010	10:27:48 AM	H2 MFC set to  0.000000
12/17/2010	10:27:48 AM	BCl3 MFC set to  0.000000
12/17/2010	10:27:48 AM	PHl3 MFC set to  0.000000
12/17/2010	10:27:48 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:27:48 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:27:48 AM	Tube furnace set to 0
12/17/2010	10:28:48 AM	H2 valve closed
12/17/2010	10:28:48 AM	BCl3 valve closed
12/17/2010	10:28:48 AM	PH3 valve closed
12/17/2010	10:28:48 AM	SiCl4 pre valve closed
12/17/2010	10:28:48 AM	SiCl4 post valve closed
12/17/2010	10:28:48 AM	Bubbler valve closed
12/17/2010	10:28:48 AM	Helium valve opened
12/17/2010	10:28:48 AM	Main Vac valve opened
12/17/2010	10:28:48 AM	Bypass valve opened
12/17/2010	10:28:48 AM	Helium MFC set to  100.000000
12/17/2010	10:28:48 AM	H2 MFC set to  0.000000
12/17/2010	10:28:48 AM	BCl3 MFC set to  0.000000
12/17/2010	10:28:48 AM	PHl3 MFC set to  0.000000
12/17/2010	10:28:48 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:28:48 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:28:48 AM	Tube furnace set to 0
12/17/2010	10:29:48 AM	Helium valve closed
12/17/2010	10:29:48 AM	H2 valve closed
12/17/2010	10:29:48 AM	BCl3 valve closed
12/17/2010	10:29:48 AM	PH3 valve closed
12/17/2010	10:29:48 AM	SiCl4 pre valve closed
12/17/2010	10:29:48 AM	SiCl4 post valve closed
12/17/2010	10:29:48 AM	Bubbler valve closed
12/17/2010	10:29:48 AM	Main Vac valve opened
12/17/2010	10:29:48 AM	Bypass valve opened
12/17/2010	10:29:48 AM	Helium MFC set to  0.000000
12/17/2010	10:29:48 AM	H2 MFC set to  0.000000
12/17/2010	10:29:48 AM	BCl3 MFC set to  0.000000
12/17/2010	10:29:48 AM	PHl3 MFC set to  0.000000
12/17/2010	10:29:48 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:29:48 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:29:49 AM	Tube furnace set to 0
12/17/2010	10:30:49 AM	H2 valve closed
12/17/2010	10:30:49 AM	BCl3 valve closed
12/17/2010	10:30:49 AM	PH3 valve closed
12/17/2010	10:30:49 AM	SiCl4 pre valve closed
12/17/2010	10:30:49 AM	SiCl4 post valve closed
12/17/2010	10:30:49 AM	Bubbler valve closed
12/17/2010	10:30:49 AM	Helium valve opened
12/17/2010	10:30:49 AM	Main Vac valve opened
12/17/2010	10:30:49 AM	Bypass valve opened
12/17/2010	10:30:49 AM	Helium MFC set to  100.000000
12/17/2010	10:30:49 AM	H2 MFC set to  0.000000
12/17/2010	10:30:49 AM	BCl3 MFC set to  0.000000
12/17/2010	10:30:49 AM	PHl3 MFC set to  0.000000
12/17/2010	10:30:49 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:30:49 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:30:49 AM	Tube furnace set to 0
12/17/2010	10:31:49 AM	Helium valve closed
12/17/2010	10:31:49 AM	H2 valve closed
12/17/2010	10:31:49 AM	BCl3 valve closed
12/17/2010	10:31:49 AM	PH3 valve closed
12/17/2010	10:31:49 AM	SiCl4 pre valve closed
12/17/2010	10:31:49 AM	SiCl4 post valve closed
12/17/2010	10:31:49 AM	Bubbler valve closed
12/17/2010	10:31:49 AM	Main Vac valve opened
12/17/2010	10:31:49 AM	Bypass valve opened
12/17/2010	10:31:49 AM	Helium MFC set to  0.000000
12/17/2010	10:31:49 AM	H2 MFC set to  0.000000
12/17/2010	10:31:49 AM	BCl3 MFC set to  0.000000
12/17/2010	10:31:49 AM	PHl3 MFC set to  0.000000
12/17/2010	10:31:49 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:31:49 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:31:49 AM	Tube furnace set to 0
12/17/2010	10:32:12 AM	Run aborted at 10:32 AM
12/17/2010	10:32:12 AM	Helium valve closed
12/17/2010	10:32:12 AM	H2 valve closed
12/17/2010	10:32:12 AM	BCl3 valve closed
12/17/2010	10:32:12 AM	PH3 valve closed
12/17/2010	10:32:12 AM	SiCl4 pre valve closed
12/17/2010	10:32:12 AM	SiCl4 post valve closed
12/17/2010	10:32:12 AM	Bypass valve closed
12/17/2010	10:32:12 AM	Main Vac valve closed
12/17/2010	10:32:12 AM	Bubbler valve closed
12/17/2010	10:32:12 AM	Helium MFC set to  0.000000
12/17/2010	10:32:12 AM	H2 MFC set to  0.000000
12/17/2010	10:32:12 AM	BCl3 MFC set to  0.000000
12/17/2010	10:32:12 AM	PHl3 MFC set to  0.000000
12/17/2010	10:32:12 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:32:12 AM	Tube furnace set to 0
12/17/2010	10:32:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:32:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:32:14 AM	Recipe started at 10:32 AM
12/17/2010	10:32:14 AM	Helium valve closed
12/17/2010	10:32:14 AM	H2 valve closed
12/17/2010	10:32:14 AM	BCl3 valve closed
12/17/2010	10:32:14 AM	PH3 valve closed
12/17/2010	10:32:14 AM	SiCl4 pre valve closed
12/17/2010	10:32:14 AM	SiCl4 post valve closed
12/17/2010	10:32:14 AM	Main Vac valve closed
12/17/2010	10:32:14 AM	Bubbler valve closed
12/17/2010	10:32:14 AM	Bypass valve opened
12/17/2010	10:32:14 AM	Helium MFC set to  0.000000
12/17/2010	10:32:14 AM	H2 MFC set to  0.000000
12/17/2010	10:32:14 AM	BCl3 MFC set to  0.000000
12/17/2010	10:32:14 AM	PHl3 MFC set to  0.000000
12/17/2010	10:32:14 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:32:14 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:32:14 AM	Tube furnace set to 0
12/17/2010	10:32:15 AM	Helium valve closed
12/17/2010	10:32:15 AM	H2 valve closed
12/17/2010	10:32:15 AM	BCl3 valve closed
12/17/2010	10:32:15 AM	PH3 valve closed
12/17/2010	10:32:15 AM	SiCl4 pre valve closed
12/17/2010	10:32:15 AM	SiCl4 post valve closed
12/17/2010	10:32:15 AM	Bubbler valve closed
12/17/2010	10:32:15 AM	Main Vac valve opened
12/17/2010	10:32:15 AM	Bypass valve opened
12/17/2010	10:32:15 AM	Helium MFC set to  0.000000
12/17/2010	10:32:15 AM	H2 MFC set to  0.000000
12/17/2010	10:32:15 AM	BCl3 MFC set to  0.000000
12/17/2010	10:32:15 AM	PHl3 MFC set to  0.000000
12/17/2010	10:32:15 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:32:15 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:32:15 AM	Tube furnace set to 0
12/17/2010	10:32:15 AM	Run finished at 10:32 AM
12/17/2010	10:32:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:32:36 AM	Bypass valve closed
12/17/2010	10:32:36 AM	Main Vac valve closed
12/17/2010	10:33:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:33:06 AM	Recipe started at 10:33 AM
12/17/2010	10:33:06 AM	Helium valve closed
12/17/2010	10:33:06 AM	H2 valve closed
12/17/2010	10:33:06 AM	BCl3 valve closed
12/17/2010	10:33:06 AM	PH3 valve closed
12/17/2010	10:33:06 AM	SiCl4 pre valve closed
12/17/2010	10:33:06 AM	SiCl4 post valve closed
12/17/2010	10:33:06 AM	Main Vac valve closed
12/17/2010	10:33:06 AM	Bubbler valve closed
12/17/2010	10:33:06 AM	Bypass valve opened
12/17/2010	10:33:06 AM	Helium MFC set to  0.000000
12/17/2010	10:33:06 AM	H2 MFC set to  0.000000
12/17/2010	10:33:06 AM	BCl3 MFC set to  0.000000
12/17/2010	10:33:06 AM	PHl3 MFC set to  0.000000
12/17/2010	10:33:06 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:33:06 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:33:06 AM	Tube furnace set to 0
12/17/2010	10:33:06 AM	Helium valve closed
12/17/2010	10:33:06 AM	H2 valve closed
12/17/2010	10:33:06 AM	BCl3 valve closed
12/17/2010	10:33:06 AM	PH3 valve closed
12/17/2010	10:33:06 AM	SiCl4 pre valve closed
12/17/2010	10:33:06 AM	SiCl4 post valve closed
12/17/2010	10:33:06 AM	Bubbler valve closed
12/17/2010	10:33:06 AM	Main Vac valve opened
12/17/2010	10:33:06 AM	Bypass valve opened
12/17/2010	10:33:06 AM	Helium MFC set to  0.000000
12/17/2010	10:33:07 AM	H2 MFC set to  0.000000
12/17/2010	10:33:07 AM	BCl3 MFC set to  0.000000
12/17/2010	10:33:07 AM	PHl3 MFC set to  0.000000
12/17/2010	10:33:07 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:33:07 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:33:07 AM	Tube furnace set to 0
12/17/2010	10:33:07 AM	Run finished at 10:33 AM
12/17/2010	10:33:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	10:33:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:33:22 AM	Recipe started at 10:33 AM
12/17/2010	10:33:22 AM	Helium valve closed
12/17/2010	10:33:22 AM	H2 valve closed
12/17/2010	10:33:22 AM	BCl3 valve closed
12/17/2010	10:33:22 AM	PH3 valve closed
12/17/2010	10:33:22 AM	SiCl4 pre valve closed
12/17/2010	10:33:22 AM	SiCl4 post valve closed
12/17/2010	10:33:22 AM	Main Vac valve closed
12/17/2010	10:33:22 AM	Bubbler valve closed
12/17/2010	10:33:22 AM	Bypass valve opened
12/17/2010	10:33:22 AM	Helium MFC set to  0.000000
12/17/2010	10:33:22 AM	H2 MFC set to  0.000000
12/17/2010	10:33:22 AM	BCl3 MFC set to  0.000000
12/17/2010	10:33:22 AM	PHl3 MFC set to  0.000000
12/17/2010	10:33:22 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:33:22 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:33:22 AM	Tube furnace set to 0
12/17/2010	10:33:22 AM	Helium valve closed
12/17/2010	10:33:22 AM	H2 valve closed
12/17/2010	10:33:22 AM	BCl3 valve closed
12/17/2010	10:33:22 AM	PH3 valve closed
12/17/2010	10:33:22 AM	SiCl4 pre valve closed
12/17/2010	10:33:22 AM	SiCl4 post valve closed
12/17/2010	10:33:22 AM	Bubbler valve closed
12/17/2010	10:33:22 AM	Main Vac valve opened
12/17/2010	10:33:22 AM	Bypass valve opened
12/17/2010	10:33:22 AM	Helium MFC set to  0.000000
12/17/2010	10:33:22 AM	H2 MFC set to  0.000000
12/17/2010	10:33:22 AM	BCl3 MFC set to  0.000000
12/17/2010	10:33:22 AM	PHl3 MFC set to  0.000000
12/17/2010	10:33:22 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:33:22 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:33:22 AM	Tube furnace set to 0
12/17/2010	10:34:21 AM	Run aborted at 10:34 AM
12/17/2010	10:34:21 AM	Helium valve closed
12/17/2010	10:34:21 AM	H2 valve closed
12/17/2010	10:34:21 AM	BCl3 valve closed
12/17/2010	10:34:21 AM	PH3 valve closed
12/17/2010	10:34:21 AM	SiCl4 pre valve closed
12/17/2010	10:34:21 AM	SiCl4 post valve closed
12/17/2010	10:34:21 AM	Bypass valve closed
12/17/2010	10:34:21 AM	Main Vac valve closed
12/17/2010	10:34:21 AM	Bubbler valve closed
12/17/2010	10:34:21 AM	Helium MFC set to  0.000000
12/17/2010	10:34:21 AM	H2 MFC set to  0.000000
12/17/2010	10:34:21 AM	BCl3 MFC set to  0.000000
12/17/2010	10:34:21 AM	PHl3 MFC set to  0.000000
12/17/2010	10:34:21 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:34:21 AM	Tube furnace set to 0
12/17/2010	10:34:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:34:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:34:54 AM	Recipe started at 10:34 AM
12/17/2010	10:34:54 AM	Helium valve closed
12/17/2010	10:34:54 AM	H2 valve closed
12/17/2010	10:34:54 AM	BCl3 valve closed
12/17/2010	10:34:54 AM	PH3 valve closed
12/17/2010	10:34:54 AM	SiCl4 pre valve closed
12/17/2010	10:34:54 AM	SiCl4 post valve closed
12/17/2010	10:34:54 AM	Main Vac valve closed
12/17/2010	10:34:54 AM	Bubbler valve closed
12/17/2010	10:34:54 AM	Bypass valve opened
12/17/2010	10:34:54 AM	Helium MFC set to  0.000000
12/17/2010	10:34:54 AM	H2 MFC set to  0.000000
12/17/2010	10:34:54 AM	BCl3 MFC set to  0.000000
12/17/2010	10:34:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:34:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:34:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:34:55 AM	Tube furnace set to 0
12/17/2010	10:34:55 AM	Helium valve closed
12/17/2010	10:34:55 AM	H2 valve closed
12/17/2010	10:34:55 AM	BCl3 valve closed
12/17/2010	10:34:55 AM	PH3 valve closed
12/17/2010	10:34:55 AM	SiCl4 pre valve closed
12/17/2010	10:34:55 AM	SiCl4 post valve closed
12/17/2010	10:34:55 AM	Bubbler valve closed
12/17/2010	10:34:55 AM	Main Vac valve opened
12/17/2010	10:34:55 AM	Bypass valve opened
12/17/2010	10:34:55 AM	Helium MFC set to  0.000000
12/17/2010	10:34:55 AM	H2 MFC set to  0.000000
12/17/2010	10:34:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:34:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:34:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:34:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:34:55 AM	Tube furnace set to 0
12/17/2010	10:35:55 AM	H2 valve closed
12/17/2010	10:35:55 AM	BCl3 valve closed
12/17/2010	10:35:55 AM	PH3 valve closed
12/17/2010	10:35:55 AM	SiCl4 pre valve closed
12/17/2010	10:35:55 AM	SiCl4 post valve closed
12/17/2010	10:35:55 AM	Bubbler valve closed
12/17/2010	10:35:55 AM	Helium valve opened
12/17/2010	10:35:55 AM	Main Vac valve opened
12/17/2010	10:35:55 AM	Bypass valve opened
12/17/2010	10:35:55 AM	Helium MFC set to  100.000000
12/17/2010	10:35:55 AM	H2 MFC set to  0.000000
12/17/2010	10:35:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:35:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:35:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:35:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:35:55 AM	Tube furnace set to 0
12/17/2010	10:36:55 AM	Helium valve closed
12/17/2010	10:36:55 AM	H2 valve closed
12/17/2010	10:36:55 AM	BCl3 valve closed
12/17/2010	10:36:55 AM	PH3 valve closed
12/17/2010	10:36:55 AM	SiCl4 pre valve closed
12/17/2010	10:36:55 AM	SiCl4 post valve closed
12/17/2010	10:36:55 AM	Bubbler valve closed
12/17/2010	10:36:55 AM	Main Vac valve opened
12/17/2010	10:36:55 AM	Bypass valve opened
12/17/2010	10:36:55 AM	Helium MFC set to  0.000000
12/17/2010	10:36:55 AM	H2 MFC set to  0.000000
12/17/2010	10:36:55 AM	BCl3 MFC set to  0.000000
12/17/2010	10:36:55 AM	PHl3 MFC set to  0.000000
12/17/2010	10:36:55 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:36:55 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:36:55 AM	Tube furnace set to 0
12/17/2010	10:37:55 AM	H2 valve closed
12/17/2010	10:37:55 AM	BCl3 valve closed
12/17/2010	10:37:56 AM	PH3 valve closed
12/17/2010	10:37:56 AM	SiCl4 pre valve closed
12/17/2010	10:37:56 AM	SiCl4 post valve closed
12/17/2010	10:37:56 AM	Bubbler valve closed
12/17/2010	10:37:56 AM	Helium valve opened
12/17/2010	10:37:56 AM	Main Vac valve opened
12/17/2010	10:37:56 AM	Bypass valve opened
12/17/2010	10:37:56 AM	Helium MFC set to  100.000000
12/17/2010	10:37:56 AM	H2 MFC set to  0.000000
12/17/2010	10:37:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:37:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:37:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:37:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:37:56 AM	Tube furnace set to 0
12/17/2010	10:38:56 AM	Helium valve closed
12/17/2010	10:38:56 AM	H2 valve closed
12/17/2010	10:38:56 AM	BCl3 valve closed
12/17/2010	10:38:56 AM	PH3 valve closed
12/17/2010	10:38:56 AM	SiCl4 pre valve closed
12/17/2010	10:38:56 AM	SiCl4 post valve closed
12/17/2010	10:38:56 AM	Bubbler valve closed
12/17/2010	10:38:56 AM	Main Vac valve opened
12/17/2010	10:38:56 AM	Bypass valve opened
12/17/2010	10:38:56 AM	Helium MFC set to  0.000000
12/17/2010	10:38:56 AM	H2 MFC set to  0.000000
12/17/2010	10:38:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:38:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:38:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:38:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:38:56 AM	Tube furnace set to 0
12/17/2010	10:39:56 AM	H2 valve closed
12/17/2010	10:39:56 AM	BCl3 valve closed
12/17/2010	10:39:56 AM	PH3 valve closed
12/17/2010	10:39:56 AM	SiCl4 pre valve closed
12/17/2010	10:39:56 AM	SiCl4 post valve closed
12/17/2010	10:39:56 AM	Bubbler valve closed
12/17/2010	10:39:56 AM	Helium valve opened
12/17/2010	10:39:56 AM	Main Vac valve opened
12/17/2010	10:39:56 AM	Bypass valve opened
12/17/2010	10:39:56 AM	Helium MFC set to  100.000000
12/17/2010	10:39:56 AM	H2 MFC set to  0.000000
12/17/2010	10:39:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:39:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:39:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:39:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:39:56 AM	Tube furnace set to 0
12/17/2010	10:40:56 AM	Helium valve closed
12/17/2010	10:40:56 AM	H2 valve closed
12/17/2010	10:40:56 AM	BCl3 valve closed
12/17/2010	10:40:56 AM	PH3 valve closed
12/17/2010	10:40:56 AM	SiCl4 pre valve closed
12/17/2010	10:40:56 AM	SiCl4 post valve closed
12/17/2010	10:40:56 AM	Bubbler valve closed
12/17/2010	10:40:56 AM	Main Vac valve opened
12/17/2010	10:40:56 AM	Bypass valve opened
12/17/2010	10:40:56 AM	Helium MFC set to  0.000000
12/17/2010	10:40:56 AM	H2 MFC set to  0.000000
12/17/2010	10:40:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:40:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:40:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:40:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:40:56 AM	Tube furnace set to 0
12/17/2010	10:41:56 AM	H2 valve closed
12/17/2010	10:41:56 AM	BCl3 valve closed
12/17/2010	10:41:56 AM	PH3 valve closed
12/17/2010	10:41:56 AM	SiCl4 pre valve closed
12/17/2010	10:41:56 AM	SiCl4 post valve closed
12/17/2010	10:41:56 AM	Bubbler valve closed
12/17/2010	10:41:56 AM	Helium valve opened
12/17/2010	10:41:56 AM	Main Vac valve opened
12/17/2010	10:41:56 AM	Bypass valve opened
12/17/2010	10:41:56 AM	Helium MFC set to  100.000000
12/17/2010	10:41:56 AM	H2 MFC set to  0.000000
12/17/2010	10:41:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:41:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:41:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:41:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:41:56 AM	Tube furnace set to 0
12/17/2010	10:42:56 AM	Helium valve closed
12/17/2010	10:42:56 AM	H2 valve closed
12/17/2010	10:42:56 AM	BCl3 valve closed
12/17/2010	10:42:56 AM	PH3 valve closed
12/17/2010	10:42:56 AM	SiCl4 pre valve closed
12/17/2010	10:42:56 AM	SiCl4 post valve closed
12/17/2010	10:42:56 AM	Bubbler valve closed
12/17/2010	10:42:56 AM	Main Vac valve opened
12/17/2010	10:42:56 AM	Bypass valve opened
12/17/2010	10:42:56 AM	Helium MFC set to  0.000000
12/17/2010	10:42:56 AM	H2 MFC set to  0.000000
12/17/2010	10:42:56 AM	BCl3 MFC set to  0.000000
12/17/2010	10:42:56 AM	PHl3 MFC set to  0.000000
12/17/2010	10:42:56 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:42:56 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:42:57 AM	Tube furnace set to 0
12/17/2010	10:43:57 AM	H2 valve closed
12/17/2010	10:43:57 AM	BCl3 valve closed
12/17/2010	10:43:57 AM	PH3 valve closed
12/17/2010	10:43:57 AM	SiCl4 pre valve closed
12/17/2010	10:43:57 AM	SiCl4 post valve closed
12/17/2010	10:43:57 AM	Bubbler valve closed
12/17/2010	10:43:57 AM	Helium valve opened
12/17/2010	10:43:57 AM	Main Vac valve opened
12/17/2010	10:43:57 AM	Bypass valve opened
12/17/2010	10:43:57 AM	Helium MFC set to  100.000000
12/17/2010	10:43:57 AM	H2 MFC set to  0.000000
12/17/2010	10:43:57 AM	BCl3 MFC set to  0.000000
12/17/2010	10:43:57 AM	PHl3 MFC set to  0.000000
12/17/2010	10:43:57 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:43:57 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:43:57 AM	Tube furnace set to 0
12/17/2010	10:44:57 AM	Helium valve closed
12/17/2010	10:44:57 AM	H2 valve closed
12/17/2010	10:44:57 AM	BCl3 valve closed
12/17/2010	10:44:57 AM	PH3 valve closed
12/17/2010	10:44:57 AM	SiCl4 pre valve closed
12/17/2010	10:44:57 AM	SiCl4 post valve closed
12/17/2010	10:44:57 AM	Bubbler valve closed
12/17/2010	10:44:57 AM	Main Vac valve opened
12/17/2010	10:44:57 AM	Bypass valve opened
12/17/2010	10:44:57 AM	Helium MFC set to  0.000000
12/17/2010	10:44:57 AM	H2 MFC set to  0.000000
12/17/2010	10:44:57 AM	BCl3 MFC set to  0.000000
12/17/2010	10:44:57 AM	PHl3 MFC set to  0.000000
12/17/2010	10:44:57 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:44:57 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:44:57 AM	Tube furnace set to 0
12/17/2010	10:45:57 AM	H2 valve closed
12/17/2010	10:45:57 AM	BCl3 valve closed
12/17/2010	10:45:57 AM	PH3 valve closed
12/17/2010	10:45:57 AM	SiCl4 pre valve closed
12/17/2010	10:45:57 AM	SiCl4 post valve closed
12/17/2010	10:45:57 AM	Bubbler valve closed
12/17/2010	10:45:57 AM	Helium valve opened
12/17/2010	10:45:57 AM	Main Vac valve opened
12/17/2010	10:45:57 AM	Bypass valve opened
12/17/2010	10:45:57 AM	Helium MFC set to  100.000000
12/17/2010	10:45:57 AM	H2 MFC set to  0.000000
12/17/2010	10:45:57 AM	BCl3 MFC set to  0.000000
12/17/2010	10:45:57 AM	PHl3 MFC set to  0.000000
12/17/2010	10:45:57 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:45:57 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:45:57 AM	Tube furnace set to 0
12/17/2010	10:46:57 AM	Helium valve closed
12/17/2010	10:46:57 AM	H2 valve closed
12/17/2010	10:46:57 AM	BCl3 valve closed
12/17/2010	10:46:57 AM	PH3 valve closed
12/17/2010	10:46:57 AM	SiCl4 pre valve closed
12/17/2010	10:46:57 AM	SiCl4 post valve closed
12/17/2010	10:46:57 AM	Bubbler valve closed
12/17/2010	10:46:57 AM	Main Vac valve opened
12/17/2010	10:46:57 AM	Bypass valve opened
12/17/2010	10:46:57 AM	Helium MFC set to  0.000000
12/17/2010	10:46:57 AM	H2 MFC set to  0.000000
12/17/2010	10:46:57 AM	BCl3 MFC set to  0.000000
12/17/2010	10:46:57 AM	PHl3 MFC set to  0.000000
12/17/2010	10:46:57 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:46:57 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:46:57 AM	Tube furnace set to 0
12/17/2010	10:47:57 AM	H2 valve closed
12/17/2010	10:47:57 AM	BCl3 valve closed
12/17/2010	10:47:57 AM	PH3 valve closed
12/17/2010	10:47:57 AM	SiCl4 pre valve closed
12/17/2010	10:47:57 AM	SiCl4 post valve closed
12/17/2010	10:47:57 AM	Bubbler valve closed
12/17/2010	10:47:57 AM	Helium valve opened
12/17/2010	10:47:57 AM	Main Vac valve opened
12/17/2010	10:47:57 AM	Bypass valve opened
12/17/2010	10:47:57 AM	Helium MFC set to  100.000000
12/17/2010	10:47:57 AM	H2 MFC set to  0.000000
12/17/2010	10:47:57 AM	BCl3 MFC set to  0.000000
12/17/2010	10:47:57 AM	PHl3 MFC set to  0.000000
12/17/2010	10:47:57 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:47:57 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:47:58 AM	Tube furnace set to 0
12/17/2010	10:48:58 AM	Helium valve closed
12/17/2010	10:48:58 AM	H2 valve closed
12/17/2010	10:48:58 AM	BCl3 valve closed
12/17/2010	10:48:58 AM	PH3 valve closed
12/17/2010	10:48:58 AM	SiCl4 pre valve closed
12/17/2010	10:48:58 AM	SiCl4 post valve closed
12/17/2010	10:48:58 AM	Bubbler valve closed
12/17/2010	10:48:58 AM	Main Vac valve opened
12/17/2010	10:48:58 AM	Bypass valve opened
12/17/2010	10:48:58 AM	Helium MFC set to  0.000000
12/17/2010	10:48:58 AM	H2 MFC set to  0.000000
12/17/2010	10:48:58 AM	BCl3 MFC set to  0.000000
12/17/2010	10:48:58 AM	PHl3 MFC set to  0.000000
12/17/2010	10:48:58 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:48:58 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:48:58 AM	Tube furnace set to 0
12/17/2010	10:49:46 AM	Run aborted at 10:49 AM
12/17/2010	10:49:46 AM	Helium valve closed
12/17/2010	10:49:46 AM	H2 valve closed
12/17/2010	10:49:46 AM	BCl3 valve closed
12/17/2010	10:49:46 AM	PH3 valve closed
12/17/2010	10:49:46 AM	SiCl4 pre valve closed
12/17/2010	10:49:46 AM	SiCl4 post valve closed
12/17/2010	10:49:46 AM	Bypass valve closed
12/17/2010	10:49:46 AM	Main Vac valve closed
12/17/2010	10:49:46 AM	Bubbler valve closed
12/17/2010	10:49:46 AM	Helium MFC set to  0.000000
12/17/2010	10:49:46 AM	H2 MFC set to  0.000000
12/17/2010	10:49:46 AM	BCl3 MFC set to  0.000000
12/17/2010	10:49:46 AM	PHl3 MFC set to  0.000000
12/17/2010	10:49:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:49:46 AM	Tube furnace set to 0
12/17/2010	10:49:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:50:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:50:18 AM	Recipe started at 10:50 AM
12/17/2010	10:50:18 AM	Helium valve closed
12/17/2010	10:50:18 AM	H2 valve closed
12/17/2010	10:50:18 AM	BCl3 valve closed
12/17/2010	10:50:18 AM	PH3 valve closed
12/17/2010	10:50:18 AM	SiCl4 pre valve closed
12/17/2010	10:50:18 AM	SiCl4 post valve closed
12/17/2010	10:50:18 AM	Main Vac valve closed
12/17/2010	10:50:18 AM	Bubbler valve closed
12/17/2010	10:50:18 AM	Bypass valve opened
12/17/2010	10:50:18 AM	Helium MFC set to  0.000000
12/17/2010	10:50:18 AM	H2 MFC set to  0.000000
12/17/2010	10:50:18 AM	BCl3 MFC set to  0.000000
12/17/2010	10:50:18 AM	PHl3 MFC set to  0.000000
12/17/2010	10:50:18 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:50:18 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:50:19 AM	Tube furnace set to 0
12/17/2010	10:50:19 AM	Helium valve closed
12/17/2010	10:50:19 AM	H2 valve closed
12/17/2010	10:50:19 AM	BCl3 valve closed
12/17/2010	10:50:19 AM	PH3 valve closed
12/17/2010	10:50:19 AM	SiCl4 pre valve closed
12/17/2010	10:50:19 AM	SiCl4 post valve closed
12/17/2010	10:50:19 AM	Bubbler valve closed
12/17/2010	10:50:19 AM	Main Vac valve opened
12/17/2010	10:50:19 AM	Bypass valve opened
12/17/2010	10:50:19 AM	Helium MFC set to  0.000000
12/17/2010	10:50:19 AM	H2 MFC set to  0.000000
12/17/2010	10:50:19 AM	BCl3 MFC set to  0.000000
12/17/2010	10:50:19 AM	PHl3 MFC set to  0.000000
12/17/2010	10:50:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:50:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:50:19 AM	Tube furnace set to 0
12/17/2010	10:51:19 AM	H2 valve closed
12/17/2010	10:51:19 AM	BCl3 valve closed
12/17/2010	10:51:19 AM	PH3 valve closed
12/17/2010	10:51:19 AM	SiCl4 pre valve closed
12/17/2010	10:51:19 AM	SiCl4 post valve closed
12/17/2010	10:51:19 AM	Bubbler valve closed
12/17/2010	10:51:19 AM	Helium valve opened
12/17/2010	10:51:19 AM	Main Vac valve opened
12/17/2010	10:51:19 AM	Bypass valve opened
12/17/2010	10:51:19 AM	Helium MFC set to  100.000000
12/17/2010	10:51:19 AM	H2 MFC set to  0.000000
12/17/2010	10:51:19 AM	BCl3 MFC set to  0.000000
12/17/2010	10:51:19 AM	PHl3 MFC set to  0.000000
12/17/2010	10:51:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:51:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:51:19 AM	Tube furnace set to 0
12/17/2010	10:52:19 AM	Helium valve closed
12/17/2010	10:52:19 AM	H2 valve closed
12/17/2010	10:52:19 AM	BCl3 valve closed
12/17/2010	10:52:19 AM	PH3 valve closed
12/17/2010	10:52:19 AM	SiCl4 pre valve closed
12/17/2010	10:52:19 AM	SiCl4 post valve closed
12/17/2010	10:52:19 AM	Bubbler valve closed
12/17/2010	10:52:19 AM	Main Vac valve opened
12/17/2010	10:52:19 AM	Bypass valve opened
12/17/2010	10:52:19 AM	Helium MFC set to  0.000000
12/17/2010	10:52:19 AM	H2 MFC set to  0.000000
12/17/2010	10:52:19 AM	BCl3 MFC set to  0.000000
12/17/2010	10:52:19 AM	PHl3 MFC set to  0.000000
12/17/2010	10:52:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:52:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:52:19 AM	Tube furnace set to 0
12/17/2010	10:53:19 AM	H2 valve closed
12/17/2010	10:53:19 AM	BCl3 valve closed
12/17/2010	10:53:19 AM	PH3 valve closed
12/17/2010	10:53:19 AM	SiCl4 pre valve closed
12/17/2010	10:53:19 AM	SiCl4 post valve closed
12/17/2010	10:53:19 AM	Bubbler valve closed
12/17/2010	10:53:19 AM	Helium valve opened
12/17/2010	10:53:19 AM	Main Vac valve opened
12/17/2010	10:53:19 AM	Bypass valve opened
12/17/2010	10:53:19 AM	Helium MFC set to  100.000000
12/17/2010	10:53:19 AM	H2 MFC set to  0.000000
12/17/2010	10:53:19 AM	BCl3 MFC set to  0.000000
12/17/2010	10:53:19 AM	PHl3 MFC set to  0.000000
12/17/2010	10:53:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:53:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:53:20 AM	Tube furnace set to 0
12/17/2010	10:54:20 AM	Helium valve closed
12/17/2010	10:54:20 AM	H2 valve closed
12/17/2010	10:54:20 AM	BCl3 valve closed
12/17/2010	10:54:20 AM	PH3 valve closed
12/17/2010	10:54:20 AM	SiCl4 pre valve closed
12/17/2010	10:54:20 AM	SiCl4 post valve closed
12/17/2010	10:54:20 AM	Bubbler valve closed
12/17/2010	10:54:20 AM	Main Vac valve opened
12/17/2010	10:54:20 AM	Bypass valve opened
12/17/2010	10:54:20 AM	Helium MFC set to  0.000000
12/17/2010	10:54:20 AM	H2 MFC set to  0.000000
12/17/2010	10:54:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:54:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:54:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:54:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:54:20 AM	Tube furnace set to 0
12/17/2010	10:55:20 AM	H2 valve closed
12/17/2010	10:55:20 AM	BCl3 valve closed
12/17/2010	10:55:20 AM	PH3 valve closed
12/17/2010	10:55:20 AM	SiCl4 pre valve closed
12/17/2010	10:55:20 AM	SiCl4 post valve closed
12/17/2010	10:55:20 AM	Bubbler valve closed
12/17/2010	10:55:20 AM	Helium valve opened
12/17/2010	10:55:20 AM	Main Vac valve opened
12/17/2010	10:55:20 AM	Bypass valve opened
12/17/2010	10:55:20 AM	Helium MFC set to  100.000000
12/17/2010	10:55:20 AM	H2 MFC set to  0.000000
12/17/2010	10:55:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:55:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:55:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:55:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:55:20 AM	Tube furnace set to 0
12/17/2010	10:56:20 AM	Helium valve closed
12/17/2010	10:56:20 AM	H2 valve closed
12/17/2010	10:56:20 AM	BCl3 valve closed
12/17/2010	10:56:20 AM	PH3 valve closed
12/17/2010	10:56:20 AM	SiCl4 pre valve closed
12/17/2010	10:56:20 AM	SiCl4 post valve closed
12/17/2010	10:56:20 AM	Bubbler valve closed
12/17/2010	10:56:20 AM	Main Vac valve opened
12/17/2010	10:56:20 AM	Bypass valve opened
12/17/2010	10:56:20 AM	Helium MFC set to  0.000000
12/17/2010	10:56:20 AM	H2 MFC set to  0.000000
12/17/2010	10:56:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:56:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:56:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:56:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:56:20 AM	Tube furnace set to 0
12/17/2010	10:57:20 AM	H2 valve closed
12/17/2010	10:57:20 AM	BCl3 valve closed
12/17/2010	10:57:20 AM	PH3 valve closed
12/17/2010	10:57:20 AM	SiCl4 pre valve closed
12/17/2010	10:57:20 AM	SiCl4 post valve closed
12/17/2010	10:57:20 AM	Bubbler valve closed
12/17/2010	10:57:20 AM	Helium valve opened
12/17/2010	10:57:20 AM	Main Vac valve opened
12/17/2010	10:57:20 AM	Bypass valve opened
12/17/2010	10:57:20 AM	Helium MFC set to  100.000000
12/17/2010	10:57:20 AM	H2 MFC set to  0.000000
12/17/2010	10:57:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:57:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:57:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:57:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:57:20 AM	Tube furnace set to 0
12/17/2010	10:58:20 AM	Helium valve closed
12/17/2010	10:58:20 AM	H2 valve closed
12/17/2010	10:58:20 AM	BCl3 valve closed
12/17/2010	10:58:20 AM	PH3 valve closed
12/17/2010	10:58:20 AM	SiCl4 pre valve closed
12/17/2010	10:58:20 AM	SiCl4 post valve closed
12/17/2010	10:58:20 AM	Bubbler valve closed
12/17/2010	10:58:20 AM	Main Vac valve opened
12/17/2010	10:58:20 AM	Bypass valve opened
12/17/2010	10:58:20 AM	Helium MFC set to  0.000000
12/17/2010	10:58:20 AM	H2 MFC set to  0.000000
12/17/2010	10:58:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:58:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:58:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:58:20 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:58:21 AM	Tube furnace set to 0
12/17/2010	10:59:20 AM	Run aborted at 10:59 AM
12/17/2010	10:59:20 AM	Helium valve closed
12/17/2010	10:59:20 AM	H2 valve closed
12/17/2010	10:59:20 AM	BCl3 valve closed
12/17/2010	10:59:20 AM	PH3 valve closed
12/17/2010	10:59:20 AM	SiCl4 pre valve closed
12/17/2010	10:59:20 AM	SiCl4 post valve closed
12/17/2010	10:59:20 AM	Bypass valve closed
12/17/2010	10:59:20 AM	Main Vac valve closed
12/17/2010	10:59:20 AM	Bubbler valve closed
12/17/2010	10:59:20 AM	Helium MFC set to  0.000000
12/17/2010	10:59:20 AM	H2 MFC set to  0.000000
12/17/2010	10:59:20 AM	BCl3 MFC set to  0.000000
12/17/2010	10:59:20 AM	PHl3 MFC set to  0.000000
12/17/2010	10:59:20 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:59:20 AM	Tube furnace set to 0
12/17/2010	10:59:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:59:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:59:45 AM	Recipe started at 10:59 AM
12/17/2010	10:59:46 AM	Helium valve closed
12/17/2010	10:59:46 AM	H2 valve closed
12/17/2010	10:59:46 AM	BCl3 valve closed
12/17/2010	10:59:46 AM	PH3 valve closed
12/17/2010	10:59:46 AM	SiCl4 pre valve closed
12/17/2010	10:59:46 AM	SiCl4 post valve closed
12/17/2010	10:59:46 AM	Main Vac valve closed
12/17/2010	10:59:46 AM	Bubbler valve closed
12/17/2010	10:59:46 AM	Bypass valve opened
12/17/2010	10:59:46 AM	Helium MFC set to  0.000000
12/17/2010	10:59:46 AM	H2 MFC set to  0.000000
12/17/2010	10:59:46 AM	BCl3 MFC set to  0.000000
12/17/2010	10:59:46 AM	PHl3 MFC set to  0.000000
12/17/2010	10:59:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:59:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:59:46 AM	Tube furnace set to 0
12/17/2010	10:59:46 AM	Helium valve closed
12/17/2010	10:59:46 AM	H2 valve closed
12/17/2010	10:59:46 AM	BCl3 valve closed
12/17/2010	10:59:46 AM	PH3 valve closed
12/17/2010	10:59:46 AM	SiCl4 pre valve closed
12/17/2010	10:59:46 AM	SiCl4 post valve closed
12/17/2010	10:59:46 AM	Bubbler valve closed
12/17/2010	10:59:46 AM	Main Vac valve opened
12/17/2010	10:59:46 AM	Bypass valve opened
12/17/2010	10:59:46 AM	Helium MFC set to  0.000000
12/17/2010	10:59:46 AM	H2 MFC set to  0.000000
12/17/2010	10:59:46 AM	BCl3 MFC set to  0.000000
12/17/2010	10:59:46 AM	PHl3 MFC set to  0.000000
12/17/2010	10:59:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	10:59:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:59:46 AM	Tube furnace set to 0
12/17/2010	11:00:46 AM	H2 valve closed
12/17/2010	11:00:46 AM	BCl3 valve closed
12/17/2010	11:00:46 AM	PH3 valve closed
12/17/2010	11:00:46 AM	SiCl4 pre valve closed
12/17/2010	11:00:46 AM	SiCl4 post valve closed
12/17/2010	11:00:46 AM	Bubbler valve closed
12/17/2010	11:00:46 AM	Helium valve opened
12/17/2010	11:00:46 AM	Main Vac valve opened
12/17/2010	11:00:46 AM	Bypass valve opened
12/17/2010	11:00:46 AM	Helium MFC set to  100.000000
12/17/2010	11:00:46 AM	H2 MFC set to  0.000000
12/17/2010	11:00:46 AM	BCl3 MFC set to  0.000000
12/17/2010	11:00:46 AM	PHl3 MFC set to  0.000000
12/17/2010	11:00:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:00:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:00:46 AM	Tube furnace set to 0
12/17/2010	11:01:46 AM	Helium valve closed
12/17/2010	11:01:46 AM	H2 valve closed
12/17/2010	11:01:46 AM	BCl3 valve closed
12/17/2010	11:01:46 AM	PH3 valve closed
12/17/2010	11:01:46 AM	SiCl4 pre valve closed
12/17/2010	11:01:46 AM	SiCl4 post valve closed
12/17/2010	11:01:46 AM	Bubbler valve closed
12/17/2010	11:01:46 AM	Main Vac valve opened
12/17/2010	11:01:46 AM	Bypass valve opened
12/17/2010	11:01:46 AM	Helium MFC set to  0.000000
12/17/2010	11:01:46 AM	H2 MFC set to  0.000000
12/17/2010	11:01:46 AM	BCl3 MFC set to  0.000000
12/17/2010	11:01:46 AM	PHl3 MFC set to  0.000000
12/17/2010	11:01:46 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:01:46 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:01:47 AM	Tube furnace set to 0
12/17/2010	11:02:13 AM	Run aborted at 11:02 AM
12/17/2010	11:02:13 AM	Helium valve closed
12/17/2010	11:02:13 AM	H2 valve closed
12/17/2010	11:02:13 AM	BCl3 valve closed
12/17/2010	11:02:13 AM	PH3 valve closed
12/17/2010	11:02:13 AM	SiCl4 pre valve closed
12/17/2010	11:02:13 AM	SiCl4 post valve closed
12/17/2010	11:02:13 AM	Bypass valve closed
12/17/2010	11:02:13 AM	Main Vac valve closed
12/17/2010	11:02:13 AM	Bubbler valve closed
12/17/2010	11:02:13 AM	Helium MFC set to  0.000000
12/17/2010	11:02:13 AM	H2 MFC set to  0.000000
12/17/2010	11:02:13 AM	BCl3 MFC set to  0.000000
12/17/2010	11:02:13 AM	PHl3 MFC set to  0.000000
12/17/2010	11:02:13 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:02:13 AM	Tube furnace set to 0
12/17/2010	11:02:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	11:02:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	11:02:15 AM	Recipe started at 11:02 AM
12/17/2010	11:02:15 AM	Helium valve closed
12/17/2010	11:02:15 AM	H2 valve closed
12/17/2010	11:02:15 AM	BCl3 valve closed
12/17/2010	11:02:15 AM	PH3 valve closed
12/17/2010	11:02:15 AM	SiCl4 pre valve closed
12/17/2010	11:02:15 AM	SiCl4 post valve closed
12/17/2010	11:02:15 AM	Main Vac valve closed
12/17/2010	11:02:15 AM	Bubbler valve closed
12/17/2010	11:02:15 AM	Bypass valve opened
12/17/2010	11:02:15 AM	Helium MFC set to  0.000000
12/17/2010	11:02:15 AM	H2 MFC set to  0.000000
12/17/2010	11:02:15 AM	BCl3 MFC set to  0.000000
12/17/2010	11:02:15 AM	PHl3 MFC set to  0.000000
12/17/2010	11:02:15 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:02:15 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:02:15 AM	Tube furnace set to 0
12/17/2010	11:02:16 AM	Helium valve closed
12/17/2010	11:02:16 AM	H2 valve closed
12/17/2010	11:02:16 AM	BCl3 valve closed
12/17/2010	11:02:16 AM	PH3 valve closed
12/17/2010	11:02:16 AM	SiCl4 pre valve closed
12/17/2010	11:02:16 AM	SiCl4 post valve closed
12/17/2010	11:02:16 AM	Bubbler valve closed
12/17/2010	11:02:16 AM	Main Vac valve opened
12/17/2010	11:02:16 AM	Bypass valve opened
12/17/2010	11:02:16 AM	Helium MFC set to  0.000000
12/17/2010	11:02:16 AM	H2 MFC set to  0.000000
12/17/2010	11:02:16 AM	BCl3 MFC set to  0.000000
12/17/2010	11:02:16 AM	PHl3 MFC set to  0.000000
12/17/2010	11:02:16 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:02:16 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:02:16 AM	Tube furnace set to 0
12/17/2010	11:02:16 AM	Run finished at 11:02 AM
12/17/2010	11:02:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	11:03:19 AM	Recipe started at 11:03 AM
12/17/2010	11:03:19 AM	Helium valve closed
12/17/2010	11:03:19 AM	BCl3 valve closed
12/17/2010	11:03:19 AM	PH3 valve closed
12/17/2010	11:03:19 AM	SiCl4 pre valve closed
12/17/2010	11:03:19 AM	SiCl4 post valve closed
12/17/2010	11:03:19 AM	Main Vac valve closed
12/17/2010	11:03:19 AM	Bypass valve closed
12/17/2010	11:03:19 AM	Bubbler valve closed
12/17/2010	11:03:19 AM	H2 valve opened
12/17/2010	11:03:19 AM	Helium MFC set to  0.000000
12/17/2010	11:03:19 AM	H2 MFC set to  500.000000
12/17/2010	11:03:19 AM	BCl3 MFC set to  0.000000
12/17/2010	11:03:19 AM	PHl3 MFC set to  0.000000
12/17/2010	11:03:19 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:03:19 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:03:19 AM	Tube furnace set to 0
12/17/2010	11:04:41 AM	Helium valve closed
12/17/2010	11:04:41 AM	BCl3 valve closed
12/17/2010	11:04:41 AM	PH3 valve closed
12/17/2010	11:04:41 AM	SiCl4 pre valve closed
12/17/2010	11:04:41 AM	SiCl4 post valve closed
12/17/2010	11:04:41 AM	Main Vac valve closed
12/17/2010	11:04:41 AM	Bypass valve closed
12/17/2010	11:04:41 AM	H2 valve opened
12/17/2010	11:04:41 AM	Bubbler valve opened
12/17/2010	11:04:41 AM	Helium MFC set to  0.000000
12/17/2010	11:04:41 AM	H2 MFC set to  500.000000
12/17/2010	11:04:41 AM	BCl3 MFC set to  0.000000
12/17/2010	11:04:41 AM	PHl3 MFC set to  0.000000
12/17/2010	11:04:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:04:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:04:41 AM	Tube furnace set to 1000
12/17/2010	11:24:41 AM	Helium valve closed
12/17/2010	11:24:41 AM	PH3 valve closed
12/17/2010	11:24:41 AM	Main Vac valve closed
12/17/2010	11:24:41 AM	Bypass valve closed
12/17/2010	11:24:41 AM	H2 valve opened
12/17/2010	11:24:41 AM	BCl3 valve opened
12/17/2010	11:24:41 AM	SiCl4 pre valve opened
12/17/2010	11:24:41 AM	SiCl4 post valve opened
12/17/2010	11:24:41 AM	Bubbler valve opened
12/17/2010	11:24:41 AM	Helium MFC set to  0.000000
12/17/2010	11:24:41 AM	H2 MFC set to  500.000000
12/17/2010	11:24:41 AM	BCl3 MFC set to  12.000000
12/17/2010	11:24:41 AM	PHl3 MFC set to  0.000000
12/17/2010	11:24:41 AM	SiCl4 MFC set to  50.000000
12/17/2010	11:24:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:24:41 AM	Tube furnace set to 1000
12/17/2010	11:54:41 AM	H2 valve closed
12/17/2010	11:54:41 AM	BCl3 valve closed
12/17/2010	11:54:41 AM	PH3 valve closed
12/17/2010	11:54:41 AM	SiCl4 pre valve closed
12/17/2010	11:54:41 AM	SiCl4 post valve closed
12/17/2010	11:54:41 AM	Main Vac valve closed
12/17/2010	11:54:41 AM	Bypass valve closed
12/17/2010	11:54:41 AM	Helium valve opened
12/17/2010	11:54:41 AM	Bubbler valve opened
12/17/2010	11:54:41 AM	Helium MFC set to  500.000000
12/17/2010	11:54:41 AM	H2 MFC set to  0.000000
12/17/2010	11:54:41 AM	BCl3 MFC set to  0.000000
12/17/2010	11:54:41 AM	PHl3 MFC set to  0.000000
12/17/2010	11:54:41 AM	SiCl4 MFC set to  0.000000
12/17/2010	11:54:41 AM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:54:42 AM	Tube furnace set to 0
12/17/2010	12:14:41 PM	Helium valve closed
12/17/2010	12:14:42 PM	H2 valve closed
12/17/2010	12:14:42 PM	BCl3 valve closed
12/17/2010	12:14:42 PM	PH3 valve closed
12/17/2010	12:14:42 PM	SiCl4 pre valve closed
12/17/2010	12:14:42 PM	SiCl4 post valve closed
12/17/2010	12:14:42 PM	Main Vac valve closed
12/17/2010	12:14:42 PM	Bypass valve closed
12/17/2010	12:14:42 PM	Bubbler valve closed
12/17/2010	12:14:42 PM	Helium MFC set to  0.000000
12/17/2010	12:14:42 PM	H2 MFC set to  0.000000
12/17/2010	12:14:42 PM	BCl3 MFC set to  0.000000
12/17/2010	12:14:42 PM	PHl3 MFC set to  0.000000
12/17/2010	12:14:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	12:14:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	12:14:42 PM	Tube furnace set to 0
12/17/2010	12:14:42 PM	Run finished at 12:14 PM
12/17/2010	1:49:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:49:14 PM	Recipe started at 1:49 PM
12/17/2010	1:49:14 PM	Helium valve closed
12/17/2010	1:49:14 PM	H2 valve closed
12/17/2010	1:49:14 PM	BCl3 valve closed
12/17/2010	1:49:14 PM	PH3 valve closed
12/17/2010	1:49:14 PM	SiCl4 pre valve closed
12/17/2010	1:49:14 PM	SiCl4 post valve closed
12/17/2010	1:49:14 PM	Main Vac valve closed
12/17/2010	1:49:14 PM	Bubbler valve closed
12/17/2010	1:49:14 PM	Bypass valve opened
12/17/2010	1:49:14 PM	Helium MFC set to  0.000000
12/17/2010	1:49:14 PM	H2 MFC set to  0.000000
12/17/2010	1:49:14 PM	BCl3 MFC set to  0.000000
12/17/2010	1:49:14 PM	PHl3 MFC set to  0.000000
12/17/2010	1:49:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:49:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:49:14 PM	Tube furnace set to 0
12/17/2010	1:50:12 PM	Helium valve closed
12/17/2010	1:50:12 PM	H2 valve closed
12/17/2010	1:50:12 PM	BCl3 valve closed
12/17/2010	1:50:12 PM	PH3 valve closed
12/17/2010	1:50:12 PM	SiCl4 pre valve closed
12/17/2010	1:50:12 PM	SiCl4 post valve closed
12/17/2010	1:50:12 PM	Bubbler valve closed
12/17/2010	1:50:12 PM	Main Vac valve opened
12/17/2010	1:50:12 PM	Bypass valve opened
12/17/2010	1:50:12 PM	Helium MFC set to  0.000000
12/17/2010	1:50:12 PM	H2 MFC set to  0.000000
12/17/2010	1:50:12 PM	BCl3 MFC set to  0.000000
12/17/2010	1:50:12 PM	PHl3 MFC set to  0.000000
12/17/2010	1:50:12 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:50:12 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:50:12 PM	Tube furnace set to 0
12/17/2010	1:50:12 PM	Run finished at 1:50 PM
12/17/2010	1:50:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	1:50:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	1:50:48 PM	Recipe started at 1:50 PM
12/17/2010	1:50:48 PM	Helium valve closed
12/17/2010	1:50:48 PM	H2 valve closed
12/17/2010	1:50:48 PM	BCl3 valve closed
12/17/2010	1:50:48 PM	PH3 valve closed
12/17/2010	1:50:48 PM	SiCl4 pre valve closed
12/17/2010	1:50:48 PM	SiCl4 post valve closed
12/17/2010	1:50:48 PM	Main Vac valve closed
12/17/2010	1:50:48 PM	Bubbler valve closed
12/17/2010	1:50:48 PM	Bypass valve opened
12/17/2010	1:50:48 PM	Helium MFC set to  0.000000
12/17/2010	1:50:48 PM	H2 MFC set to  0.000000
12/17/2010	1:50:48 PM	BCl3 MFC set to  0.000000
12/17/2010	1:50:48 PM	PHl3 MFC set to  0.000000
12/17/2010	1:50:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:50:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:50:48 PM	Tube furnace set to 0
12/17/2010	1:50:48 PM	Helium valve closed
12/17/2010	1:50:48 PM	H2 valve closed
12/17/2010	1:50:48 PM	BCl3 valve closed
12/17/2010	1:50:48 PM	PH3 valve closed
12/17/2010	1:50:48 PM	SiCl4 pre valve closed
12/17/2010	1:50:48 PM	SiCl4 post valve closed
12/17/2010	1:50:48 PM	Bubbler valve closed
12/17/2010	1:50:48 PM	Main Vac valve opened
12/17/2010	1:50:48 PM	Bypass valve opened
12/17/2010	1:50:48 PM	Helium MFC set to  0.000000
12/17/2010	1:50:48 PM	H2 MFC set to  0.000000
12/17/2010	1:50:48 PM	BCl3 MFC set to  0.000000
12/17/2010	1:50:48 PM	PHl3 MFC set to  0.000000
12/17/2010	1:50:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:50:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:50:49 PM	Tube furnace set to 0
12/17/2010	1:51:49 PM	H2 valve closed
12/17/2010	1:51:49 PM	BCl3 valve closed
12/17/2010	1:51:49 PM	PH3 valve closed
12/17/2010	1:51:49 PM	SiCl4 pre valve closed
12/17/2010	1:51:49 PM	SiCl4 post valve closed
12/17/2010	1:51:49 PM	Bubbler valve closed
12/17/2010	1:51:49 PM	Helium valve opened
12/17/2010	1:51:49 PM	Main Vac valve opened
12/17/2010	1:51:49 PM	Bypass valve opened
12/17/2010	1:51:49 PM	Helium MFC set to  100.000000
12/17/2010	1:51:49 PM	H2 MFC set to  0.000000
12/17/2010	1:51:49 PM	BCl3 MFC set to  0.000000
12/17/2010	1:51:49 PM	PHl3 MFC set to  0.000000
12/17/2010	1:51:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:51:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:51:49 PM	Tube furnace set to 0
12/17/2010	1:52:49 PM	Helium valve closed
12/17/2010	1:52:49 PM	H2 valve closed
12/17/2010	1:52:49 PM	BCl3 valve closed
12/17/2010	1:52:49 PM	PH3 valve closed
12/17/2010	1:52:49 PM	SiCl4 pre valve closed
12/17/2010	1:52:49 PM	SiCl4 post valve closed
12/17/2010	1:52:49 PM	Bubbler valve closed
12/17/2010	1:52:49 PM	Main Vac valve opened
12/17/2010	1:52:49 PM	Bypass valve opened
12/17/2010	1:52:49 PM	Helium MFC set to  0.000000
12/17/2010	1:52:49 PM	H2 MFC set to  0.000000
12/17/2010	1:52:49 PM	BCl3 MFC set to  0.000000
12/17/2010	1:52:49 PM	PHl3 MFC set to  0.000000
12/17/2010	1:52:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:52:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:52:49 PM	Tube furnace set to 0
12/17/2010	1:53:49 PM	H2 valve closed
12/17/2010	1:53:49 PM	BCl3 valve closed
12/17/2010	1:53:49 PM	PH3 valve closed
12/17/2010	1:53:49 PM	SiCl4 pre valve closed
12/17/2010	1:53:49 PM	SiCl4 post valve closed
12/17/2010	1:53:49 PM	Bubbler valve closed
12/17/2010	1:53:49 PM	Helium valve opened
12/17/2010	1:53:49 PM	Main Vac valve opened
12/17/2010	1:53:49 PM	Bypass valve opened
12/17/2010	1:53:49 PM	Helium MFC set to  100.000000
12/17/2010	1:53:49 PM	H2 MFC set to  0.000000
12/17/2010	1:53:49 PM	BCl3 MFC set to  0.000000
12/17/2010	1:53:49 PM	PHl3 MFC set to  0.000000
12/17/2010	1:53:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:53:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:53:49 PM	Tube furnace set to 0
12/17/2010	1:54:49 PM	Helium valve closed
12/17/2010	1:54:49 PM	H2 valve closed
12/17/2010	1:54:49 PM	BCl3 valve closed
12/17/2010	1:54:49 PM	PH3 valve closed
12/17/2010	1:54:49 PM	SiCl4 pre valve closed
12/17/2010	1:54:49 PM	SiCl4 post valve closed
12/17/2010	1:54:49 PM	Bubbler valve closed
12/17/2010	1:54:49 PM	Main Vac valve opened
12/17/2010	1:54:49 PM	Bypass valve opened
12/17/2010	1:54:49 PM	Helium MFC set to  0.000000
12/17/2010	1:54:49 PM	H2 MFC set to  0.000000
12/17/2010	1:54:49 PM	BCl3 MFC set to  0.000000
12/17/2010	1:54:49 PM	PHl3 MFC set to  0.000000
12/17/2010	1:54:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:54:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:54:49 PM	Tube furnace set to 0
12/17/2010	1:55:49 PM	H2 valve closed
12/17/2010	1:55:49 PM	BCl3 valve closed
12/17/2010	1:55:49 PM	PH3 valve closed
12/17/2010	1:55:49 PM	SiCl4 pre valve closed
12/17/2010	1:55:49 PM	SiCl4 post valve closed
12/17/2010	1:55:49 PM	Bubbler valve closed
12/17/2010	1:55:49 PM	Helium valve opened
12/17/2010	1:55:49 PM	Main Vac valve opened
12/17/2010	1:55:49 PM	Bypass valve opened
12/17/2010	1:55:49 PM	Helium MFC set to  100.000000
12/17/2010	1:55:49 PM	H2 MFC set to  0.000000
12/17/2010	1:55:49 PM	BCl3 MFC set to  0.000000
12/17/2010	1:55:49 PM	PHl3 MFC set to  0.000000
12/17/2010	1:55:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:55:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:55:50 PM	Tube furnace set to 0
12/17/2010	1:56:50 PM	Helium valve closed
12/17/2010	1:56:50 PM	H2 valve closed
12/17/2010	1:56:50 PM	BCl3 valve closed
12/17/2010	1:56:50 PM	PH3 valve closed
12/17/2010	1:56:50 PM	SiCl4 pre valve closed
12/17/2010	1:56:50 PM	SiCl4 post valve closed
12/17/2010	1:56:50 PM	Bubbler valve closed
12/17/2010	1:56:50 PM	Main Vac valve opened
12/17/2010	1:56:50 PM	Bypass valve opened
12/17/2010	1:56:50 PM	Helium MFC set to  0.000000
12/17/2010	1:56:50 PM	H2 MFC set to  0.000000
12/17/2010	1:56:50 PM	BCl3 MFC set to  0.000000
12/17/2010	1:56:50 PM	PHl3 MFC set to  0.000000
12/17/2010	1:56:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:56:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:56:50 PM	Tube furnace set to 0
12/17/2010	1:57:50 PM	H2 valve closed
12/17/2010	1:57:50 PM	BCl3 valve closed
12/17/2010	1:57:50 PM	PH3 valve closed
12/17/2010	1:57:50 PM	SiCl4 pre valve closed
12/17/2010	1:57:50 PM	SiCl4 post valve closed
12/17/2010	1:57:50 PM	Bubbler valve closed
12/17/2010	1:57:50 PM	Helium valve opened
12/17/2010	1:57:50 PM	Main Vac valve opened
12/17/2010	1:57:50 PM	Bypass valve opened
12/17/2010	1:57:50 PM	Helium MFC set to  100.000000
12/17/2010	1:57:50 PM	H2 MFC set to  0.000000
12/17/2010	1:57:50 PM	BCl3 MFC set to  0.000000
12/17/2010	1:57:50 PM	PHl3 MFC set to  0.000000
12/17/2010	1:57:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:57:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:57:50 PM	Tube furnace set to 0
12/17/2010	1:58:50 PM	Helium valve closed
12/17/2010	1:58:50 PM	H2 valve closed
12/17/2010	1:58:50 PM	BCl3 valve closed
12/17/2010	1:58:50 PM	PH3 valve closed
12/17/2010	1:58:50 PM	SiCl4 pre valve closed
12/17/2010	1:58:50 PM	SiCl4 post valve closed
12/17/2010	1:58:50 PM	Bubbler valve closed
12/17/2010	1:58:50 PM	Main Vac valve opened
12/17/2010	1:58:50 PM	Bypass valve opened
12/17/2010	1:58:50 PM	Helium MFC set to  0.000000
12/17/2010	1:58:50 PM	H2 MFC set to  0.000000
12/17/2010	1:58:50 PM	BCl3 MFC set to  0.000000
12/17/2010	1:58:50 PM	PHl3 MFC set to  0.000000
12/17/2010	1:58:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:58:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:58:50 PM	Tube furnace set to 0
12/17/2010	1:59:50 PM	H2 valve closed
12/17/2010	1:59:50 PM	BCl3 valve closed
12/17/2010	1:59:50 PM	PH3 valve closed
12/17/2010	1:59:50 PM	SiCl4 pre valve closed
12/17/2010	1:59:50 PM	SiCl4 post valve closed
12/17/2010	1:59:50 PM	Bubbler valve closed
12/17/2010	1:59:50 PM	Helium valve opened
12/17/2010	1:59:50 PM	Main Vac valve opened
12/17/2010	1:59:50 PM	Bypass valve opened
12/17/2010	1:59:50 PM	Helium MFC set to  100.000000
12/17/2010	1:59:50 PM	H2 MFC set to  0.000000
12/17/2010	1:59:50 PM	BCl3 MFC set to  0.000000
12/17/2010	1:59:50 PM	PHl3 MFC set to  0.000000
12/17/2010	1:59:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	1:59:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	1:59:50 PM	Tube furnace set to 0
12/17/2010	2:00:50 PM	Helium valve closed
12/17/2010	2:00:50 PM	H2 valve closed
12/17/2010	2:00:50 PM	BCl3 valve closed
12/17/2010	2:00:50 PM	PH3 valve closed
12/17/2010	2:00:50 PM	SiCl4 pre valve closed
12/17/2010	2:00:50 PM	SiCl4 post valve closed
12/17/2010	2:00:50 PM	Bubbler valve closed
12/17/2010	2:00:50 PM	Main Vac valve opened
12/17/2010	2:00:50 PM	Bypass valve opened
12/17/2010	2:00:50 PM	Helium MFC set to  0.000000
12/17/2010	2:00:50 PM	H2 MFC set to  0.000000
12/17/2010	2:00:50 PM	BCl3 MFC set to  0.000000
12/17/2010	2:00:50 PM	PHl3 MFC set to  0.000000
12/17/2010	2:00:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:00:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:00:51 PM	Tube furnace set to 0
12/17/2010	2:01:51 PM	H2 valve closed
12/17/2010	2:01:51 PM	BCl3 valve closed
12/17/2010	2:01:51 PM	PH3 valve closed
12/17/2010	2:01:51 PM	SiCl4 pre valve closed
12/17/2010	2:01:51 PM	SiCl4 post valve closed
12/17/2010	2:01:51 PM	Bubbler valve closed
12/17/2010	2:01:51 PM	Helium valve opened
12/17/2010	2:01:51 PM	Main Vac valve opened
12/17/2010	2:01:51 PM	Bypass valve opened
12/17/2010	2:01:51 PM	Helium MFC set to  100.000000
12/17/2010	2:01:51 PM	H2 MFC set to  0.000000
12/17/2010	2:01:51 PM	BCl3 MFC set to  0.000000
12/17/2010	2:01:51 PM	PHl3 MFC set to  0.000000
12/17/2010	2:01:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:01:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:01:51 PM	Tube furnace set to 0
12/17/2010	2:02:51 PM	Helium valve closed
12/17/2010	2:02:51 PM	H2 valve closed
12/17/2010	2:02:51 PM	BCl3 valve closed
12/17/2010	2:02:51 PM	PH3 valve closed
12/17/2010	2:02:51 PM	SiCl4 pre valve closed
12/17/2010	2:02:51 PM	SiCl4 post valve closed
12/17/2010	2:02:51 PM	Bubbler valve closed
12/17/2010	2:02:51 PM	Main Vac valve opened
12/17/2010	2:02:51 PM	Bypass valve opened
12/17/2010	2:02:51 PM	Helium MFC set to  0.000000
12/17/2010	2:02:51 PM	H2 MFC set to  0.000000
12/17/2010	2:02:51 PM	BCl3 MFC set to  0.000000
12/17/2010	2:02:51 PM	PHl3 MFC set to  0.000000
12/17/2010	2:02:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:02:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:02:51 PM	Tube furnace set to 0
12/17/2010	2:03:00 PM	Run aborted at 2:03 PM
12/17/2010	2:03:00 PM	Helium valve closed
12/17/2010	2:03:00 PM	H2 valve closed
12/17/2010	2:03:00 PM	BCl3 valve closed
12/17/2010	2:03:00 PM	PH3 valve closed
12/17/2010	2:03:00 PM	SiCl4 pre valve closed
12/17/2010	2:03:00 PM	SiCl4 post valve closed
12/17/2010	2:03:00 PM	Bypass valve closed
12/17/2010	2:03:00 PM	Main Vac valve closed
12/17/2010	2:03:00 PM	Bubbler valve closed
12/17/2010	2:03:00 PM	Helium MFC set to  0.000000
12/17/2010	2:03:00 PM	H2 MFC set to  0.000000
12/17/2010	2:03:00 PM	BCl3 MFC set to  0.000000
12/17/2010	2:03:00 PM	PHl3 MFC set to  0.000000
12/17/2010	2:03:00 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:03:00 PM	Tube furnace set to 0
12/17/2010	2:03:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	2:03:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	2:03:03 PM	Recipe started at 2:03 PM
12/17/2010	2:03:03 PM	Helium valve closed
12/17/2010	2:03:03 PM	H2 valve closed
12/17/2010	2:03:03 PM	BCl3 valve closed
12/17/2010	2:03:03 PM	PH3 valve closed
12/17/2010	2:03:03 PM	SiCl4 pre valve closed
12/17/2010	2:03:03 PM	SiCl4 post valve closed
12/17/2010	2:03:03 PM	Main Vac valve closed
12/17/2010	2:03:03 PM	Bubbler valve closed
12/17/2010	2:03:03 PM	Bypass valve opened
12/17/2010	2:03:03 PM	Helium MFC set to  0.000000
12/17/2010	2:03:03 PM	H2 MFC set to  0.000000
12/17/2010	2:03:03 PM	BCl3 MFC set to  0.000000
12/17/2010	2:03:03 PM	PHl3 MFC set to  0.000000
12/17/2010	2:03:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:03:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:03:03 PM	Tube furnace set to 0
12/17/2010	2:03:03 PM	Helium valve closed
12/17/2010	2:03:03 PM	H2 valve closed
12/17/2010	2:03:03 PM	BCl3 valve closed
12/17/2010	2:03:03 PM	PH3 valve closed
12/17/2010	2:03:03 PM	SiCl4 pre valve closed
12/17/2010	2:03:03 PM	SiCl4 post valve closed
12/17/2010	2:03:03 PM	Bubbler valve closed
12/17/2010	2:03:03 PM	Main Vac valve opened
12/17/2010	2:03:03 PM	Bypass valve opened
12/17/2010	2:03:03 PM	Helium MFC set to  0.000000
12/17/2010	2:03:03 PM	H2 MFC set to  0.000000
12/17/2010	2:03:03 PM	BCl3 MFC set to  0.000000
12/17/2010	2:03:03 PM	PHl3 MFC set to  0.000000
12/17/2010	2:03:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:03:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:03:03 PM	Tube furnace set to 0
12/17/2010	2:03:04 PM	Run finished at 2:03 PM
12/17/2010	2:03:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	2:03:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	2:03:33 PM	Recipe started at 2:03 PM
12/17/2010	2:03:33 PM	Helium valve closed
12/17/2010	2:03:33 PM	H2 valve closed
12/17/2010	2:03:33 PM	BCl3 valve closed
12/17/2010	2:03:33 PM	PH3 valve closed
12/17/2010	2:03:33 PM	SiCl4 pre valve closed
12/17/2010	2:03:33 PM	SiCl4 post valve closed
12/17/2010	2:03:33 PM	Main Vac valve closed
12/17/2010	2:03:33 PM	Bubbler valve closed
12/17/2010	2:03:33 PM	Bypass valve opened
12/17/2010	2:03:33 PM	Helium MFC set to  0.000000
12/17/2010	2:03:33 PM	H2 MFC set to  0.000000
12/17/2010	2:03:33 PM	BCl3 MFC set to  0.000000
12/17/2010	2:03:33 PM	PHl3 MFC set to  0.000000
12/17/2010	2:03:33 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:03:33 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:03:33 PM	Tube furnace set to 0
12/17/2010	2:03:34 PM	Helium valve closed
12/17/2010	2:03:34 PM	H2 valve closed
12/17/2010	2:03:34 PM	BCl3 valve closed
12/17/2010	2:03:34 PM	PH3 valve closed
12/17/2010	2:03:34 PM	SiCl4 pre valve closed
12/17/2010	2:03:34 PM	SiCl4 post valve closed
12/17/2010	2:03:34 PM	Bubbler valve closed
12/17/2010	2:03:34 PM	Main Vac valve opened
12/17/2010	2:03:34 PM	Bypass valve opened
12/17/2010	2:03:34 PM	Helium MFC set to  0.000000
12/17/2010	2:03:34 PM	H2 MFC set to  0.000000
12/17/2010	2:03:34 PM	BCl3 MFC set to  0.000000
12/17/2010	2:03:34 PM	PHl3 MFC set to  0.000000
12/17/2010	2:03:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:03:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:03:34 PM	Tube furnace set to 0
12/17/2010	2:04:34 PM	H2 valve closed
12/17/2010	2:04:34 PM	BCl3 valve closed
12/17/2010	2:04:34 PM	PH3 valve closed
12/17/2010	2:04:34 PM	SiCl4 pre valve closed
12/17/2010	2:04:34 PM	SiCl4 post valve closed
12/17/2010	2:04:34 PM	Bubbler valve closed
12/17/2010	2:04:34 PM	Helium valve opened
12/17/2010	2:04:34 PM	Main Vac valve opened
12/17/2010	2:04:34 PM	Bypass valve opened
12/17/2010	2:04:34 PM	Helium MFC set to  100.000000
12/17/2010	2:04:34 PM	H2 MFC set to  0.000000
12/17/2010	2:04:34 PM	BCl3 MFC set to  0.000000
12/17/2010	2:04:34 PM	PHl3 MFC set to  0.000000
12/17/2010	2:04:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:04:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:04:34 PM	Tube furnace set to 0
12/17/2010	2:05:34 PM	Helium valve closed
12/17/2010	2:05:34 PM	H2 valve closed
12/17/2010	2:05:34 PM	BCl3 valve closed
12/17/2010	2:05:34 PM	PH3 valve closed
12/17/2010	2:05:34 PM	SiCl4 pre valve closed
12/17/2010	2:05:34 PM	SiCl4 post valve closed
12/17/2010	2:05:34 PM	Bubbler valve closed
12/17/2010	2:05:34 PM	Main Vac valve opened
12/17/2010	2:05:34 PM	Bypass valve opened
12/17/2010	2:05:34 PM	Helium MFC set to  0.000000
12/17/2010	2:05:34 PM	H2 MFC set to  0.000000
12/17/2010	2:05:34 PM	BCl3 MFC set to  0.000000
12/17/2010	2:05:34 PM	PHl3 MFC set to  0.000000
12/17/2010	2:05:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:05:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:05:34 PM	Tube furnace set to 0
12/17/2010	2:06:34 PM	H2 valve closed
12/17/2010	2:06:34 PM	BCl3 valve closed
12/17/2010	2:06:34 PM	PH3 valve closed
12/17/2010	2:06:34 PM	SiCl4 pre valve closed
12/17/2010	2:06:34 PM	SiCl4 post valve closed
12/17/2010	2:06:34 PM	Bubbler valve closed
12/17/2010	2:06:34 PM	Helium valve opened
12/17/2010	2:06:34 PM	Main Vac valve opened
12/17/2010	2:06:34 PM	Bypass valve opened
12/17/2010	2:06:34 PM	Helium MFC set to  100.000000
12/17/2010	2:06:34 PM	H2 MFC set to  0.000000
12/17/2010	2:06:34 PM	BCl3 MFC set to  0.000000
12/17/2010	2:06:34 PM	PHl3 MFC set to  0.000000
12/17/2010	2:06:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:06:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:06:34 PM	Tube furnace set to 0
12/17/2010	2:07:34 PM	Helium valve closed
12/17/2010	2:07:34 PM	H2 valve closed
12/17/2010	2:07:34 PM	BCl3 valve closed
12/17/2010	2:07:34 PM	PH3 valve closed
12/17/2010	2:07:34 PM	SiCl4 pre valve closed
12/17/2010	2:07:34 PM	SiCl4 post valve closed
12/17/2010	2:07:34 PM	Bubbler valve closed
12/17/2010	2:07:34 PM	Main Vac valve opened
12/17/2010	2:07:34 PM	Bypass valve opened
12/17/2010	2:07:34 PM	Helium MFC set to  0.000000
12/17/2010	2:07:34 PM	H2 MFC set to  0.000000
12/17/2010	2:07:34 PM	BCl3 MFC set to  0.000000
12/17/2010	2:07:34 PM	PHl3 MFC set to  0.000000
12/17/2010	2:07:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:07:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:07:35 PM	Tube furnace set to 0
12/17/2010	2:08:35 PM	H2 valve closed
12/17/2010	2:08:35 PM	BCl3 valve closed
12/17/2010	2:08:35 PM	PH3 valve closed
12/17/2010	2:08:35 PM	SiCl4 pre valve closed
12/17/2010	2:08:35 PM	SiCl4 post valve closed
12/17/2010	2:08:35 PM	Bubbler valve closed
12/17/2010	2:08:35 PM	Helium valve opened
12/17/2010	2:08:35 PM	Main Vac valve opened
12/17/2010	2:08:35 PM	Bypass valve opened
12/17/2010	2:08:35 PM	Helium MFC set to  100.000000
12/17/2010	2:08:35 PM	H2 MFC set to  0.000000
12/17/2010	2:08:35 PM	BCl3 MFC set to  0.000000
12/17/2010	2:08:35 PM	PHl3 MFC set to  0.000000
12/17/2010	2:08:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:08:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:08:35 PM	Tube furnace set to 0
12/17/2010	2:09:35 PM	Helium valve closed
12/17/2010	2:09:35 PM	H2 valve closed
12/17/2010	2:09:35 PM	BCl3 valve closed
12/17/2010	2:09:35 PM	PH3 valve closed
12/17/2010	2:09:35 PM	SiCl4 pre valve closed
12/17/2010	2:09:35 PM	SiCl4 post valve closed
12/17/2010	2:09:35 PM	Bubbler valve closed
12/17/2010	2:09:35 PM	Main Vac valve opened
12/17/2010	2:09:35 PM	Bypass valve opened
12/17/2010	2:09:35 PM	Helium MFC set to  0.000000
12/17/2010	2:09:35 PM	H2 MFC set to  0.000000
12/17/2010	2:09:35 PM	BCl3 MFC set to  0.000000
12/17/2010	2:09:35 PM	PHl3 MFC set to  0.000000
12/17/2010	2:09:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:09:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:09:35 PM	Tube furnace set to 0
12/17/2010	2:10:35 PM	H2 valve closed
12/17/2010	2:10:35 PM	BCl3 valve closed
12/17/2010	2:10:35 PM	PH3 valve closed
12/17/2010	2:10:35 PM	SiCl4 pre valve closed
12/17/2010	2:10:35 PM	SiCl4 post valve closed
12/17/2010	2:10:35 PM	Bubbler valve closed
12/17/2010	2:10:35 PM	Helium valve opened
12/17/2010	2:10:35 PM	Main Vac valve opened
12/17/2010	2:10:35 PM	Bypass valve opened
12/17/2010	2:10:35 PM	Helium MFC set to  100.000000
12/17/2010	2:10:35 PM	H2 MFC set to  0.000000
12/17/2010	2:10:35 PM	BCl3 MFC set to  0.000000
12/17/2010	2:10:35 PM	PHl3 MFC set to  0.000000
12/17/2010	2:10:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:10:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:10:35 PM	Tube furnace set to 0
12/17/2010	2:11:35 PM	Helium valve closed
12/17/2010	2:11:35 PM	H2 valve closed
12/17/2010	2:11:35 PM	BCl3 valve closed
12/17/2010	2:11:35 PM	PH3 valve closed
12/17/2010	2:11:35 PM	SiCl4 pre valve closed
12/17/2010	2:11:35 PM	SiCl4 post valve closed
12/17/2010	2:11:35 PM	Bubbler valve closed
12/17/2010	2:11:35 PM	Main Vac valve opened
12/17/2010	2:11:35 PM	Bypass valve opened
12/17/2010	2:11:35 PM	Helium MFC set to  0.000000
12/17/2010	2:11:35 PM	H2 MFC set to  0.000000
12/17/2010	2:11:35 PM	BCl3 MFC set to  0.000000
12/17/2010	2:11:35 PM	PHl3 MFC set to  0.000000
12/17/2010	2:11:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:11:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:11:35 PM	Tube furnace set to 0
12/17/2010	2:12:35 PM	H2 valve closed
12/17/2010	2:12:35 PM	BCl3 valve closed
12/17/2010	2:12:35 PM	PH3 valve closed
12/17/2010	2:12:35 PM	SiCl4 pre valve closed
12/17/2010	2:12:35 PM	SiCl4 post valve closed
12/17/2010	2:12:35 PM	Bubbler valve closed
12/17/2010	2:12:35 PM	Helium valve opened
12/17/2010	2:12:35 PM	Main Vac valve opened
12/17/2010	2:12:35 PM	Bypass valve opened
12/17/2010	2:12:35 PM	Helium MFC set to  100.000000
12/17/2010	2:12:35 PM	H2 MFC set to  0.000000
12/17/2010	2:12:35 PM	BCl3 MFC set to  0.000000
12/17/2010	2:12:35 PM	PHl3 MFC set to  0.000000
12/17/2010	2:12:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:12:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:12:36 PM	Tube furnace set to 0
12/17/2010	2:13:36 PM	Helium valve closed
12/17/2010	2:13:36 PM	H2 valve closed
12/17/2010	2:13:36 PM	BCl3 valve closed
12/17/2010	2:13:36 PM	PH3 valve closed
12/17/2010	2:13:36 PM	SiCl4 pre valve closed
12/17/2010	2:13:36 PM	SiCl4 post valve closed
12/17/2010	2:13:36 PM	Bubbler valve closed
12/17/2010	2:13:36 PM	Main Vac valve opened
12/17/2010	2:13:36 PM	Bypass valve opened
12/17/2010	2:13:36 PM	Helium MFC set to  0.000000
12/17/2010	2:13:36 PM	H2 MFC set to  0.000000
12/17/2010	2:13:36 PM	BCl3 MFC set to  0.000000
12/17/2010	2:13:36 PM	PHl3 MFC set to  0.000000
12/17/2010	2:13:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:13:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:13:36 PM	Tube furnace set to 0
12/17/2010	2:14:36 PM	H2 valve closed
12/17/2010	2:14:36 PM	BCl3 valve closed
12/17/2010	2:14:36 PM	PH3 valve closed
12/17/2010	2:14:36 PM	SiCl4 pre valve closed
12/17/2010	2:14:36 PM	SiCl4 post valve closed
12/17/2010	2:14:36 PM	Bubbler valve closed
12/17/2010	2:14:36 PM	Helium valve opened
12/17/2010	2:14:36 PM	Main Vac valve opened
12/17/2010	2:14:36 PM	Bypass valve opened
12/17/2010	2:14:36 PM	Helium MFC set to  100.000000
12/17/2010	2:14:36 PM	H2 MFC set to  0.000000
12/17/2010	2:14:36 PM	BCl3 MFC set to  0.000000
12/17/2010	2:14:36 PM	PHl3 MFC set to  0.000000
12/17/2010	2:14:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:14:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:14:36 PM	Tube furnace set to 0
12/17/2010	2:15:36 PM	Helium valve closed
12/17/2010	2:15:36 PM	H2 valve closed
12/17/2010	2:15:36 PM	BCl3 valve closed
12/17/2010	2:15:36 PM	PH3 valve closed
12/17/2010	2:15:36 PM	SiCl4 pre valve closed
12/17/2010	2:15:36 PM	SiCl4 post valve closed
12/17/2010	2:15:36 PM	Bubbler valve closed
12/17/2010	2:15:36 PM	Main Vac valve opened
12/17/2010	2:15:36 PM	Bypass valve opened
12/17/2010	2:15:36 PM	Helium MFC set to  0.000000
12/17/2010	2:15:36 PM	H2 MFC set to  0.000000
12/17/2010	2:15:36 PM	BCl3 MFC set to  0.000000
12/17/2010	2:15:36 PM	PHl3 MFC set to  0.000000
12/17/2010	2:15:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:15:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:15:36 PM	Tube furnace set to 0
12/17/2010	2:16:36 PM	H2 valve closed
12/17/2010	2:16:36 PM	BCl3 valve closed
12/17/2010	2:16:36 PM	PH3 valve closed
12/17/2010	2:16:36 PM	SiCl4 pre valve closed
12/17/2010	2:16:36 PM	SiCl4 post valve closed
12/17/2010	2:16:36 PM	Bubbler valve closed
12/17/2010	2:16:36 PM	Helium valve opened
12/17/2010	2:16:36 PM	Main Vac valve opened
12/17/2010	2:16:36 PM	Bypass valve opened
12/17/2010	2:16:36 PM	Helium MFC set to  100.000000
12/17/2010	2:16:36 PM	H2 MFC set to  0.000000
12/17/2010	2:16:36 PM	BCl3 MFC set to  0.000000
12/17/2010	2:16:36 PM	PHl3 MFC set to  0.000000
12/17/2010	2:16:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:16:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:16:36 PM	Tube furnace set to 0
12/17/2010	2:17:36 PM	Helium valve closed
12/17/2010	2:17:36 PM	H2 valve closed
12/17/2010	2:17:36 PM	BCl3 valve closed
12/17/2010	2:17:36 PM	PH3 valve closed
12/17/2010	2:17:36 PM	SiCl4 pre valve closed
12/17/2010	2:17:36 PM	SiCl4 post valve closed
12/17/2010	2:17:36 PM	Bubbler valve closed
12/17/2010	2:17:36 PM	Main Vac valve opened
12/17/2010	2:17:36 PM	Bypass valve opened
12/17/2010	2:17:36 PM	Helium MFC set to  0.000000
12/17/2010	2:17:36 PM	H2 MFC set to  0.000000
12/17/2010	2:17:36 PM	BCl3 MFC set to  0.000000
12/17/2010	2:17:36 PM	PHl3 MFC set to  0.000000
12/17/2010	2:17:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:17:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:17:36 PM	Tube furnace set to 0
12/17/2010	2:18:36 PM	H2 valve closed
12/17/2010	2:18:36 PM	BCl3 valve closed
12/17/2010	2:18:36 PM	PH3 valve closed
12/17/2010	2:18:36 PM	SiCl4 pre valve closed
12/17/2010	2:18:37 PM	SiCl4 post valve closed
12/17/2010	2:18:37 PM	Bubbler valve closed
12/17/2010	2:18:37 PM	Helium valve opened
12/17/2010	2:18:37 PM	Main Vac valve opened
12/17/2010	2:18:37 PM	Bypass valve opened
12/17/2010	2:18:37 PM	Helium MFC set to  100.000000
12/17/2010	2:18:37 PM	H2 MFC set to  0.000000
12/17/2010	2:18:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:18:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:18:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:18:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:18:37 PM	Tube furnace set to 0
12/17/2010	2:19:37 PM	Helium valve closed
12/17/2010	2:19:37 PM	H2 valve closed
12/17/2010	2:19:37 PM	BCl3 valve closed
12/17/2010	2:19:37 PM	PH3 valve closed
12/17/2010	2:19:37 PM	SiCl4 pre valve closed
12/17/2010	2:19:37 PM	SiCl4 post valve closed
12/17/2010	2:19:37 PM	Bubbler valve closed
12/17/2010	2:19:37 PM	Main Vac valve opened
12/17/2010	2:19:37 PM	Bypass valve opened
12/17/2010	2:19:37 PM	Helium MFC set to  0.000000
12/17/2010	2:19:37 PM	H2 MFC set to  0.000000
12/17/2010	2:19:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:19:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:19:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:19:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:19:37 PM	Tube furnace set to 0
12/17/2010	2:20:37 PM	H2 valve closed
12/17/2010	2:20:37 PM	BCl3 valve closed
12/17/2010	2:20:37 PM	PH3 valve closed
12/17/2010	2:20:37 PM	SiCl4 pre valve closed
12/17/2010	2:20:37 PM	SiCl4 post valve closed
12/17/2010	2:20:37 PM	Bubbler valve closed
12/17/2010	2:20:37 PM	Helium valve opened
12/17/2010	2:20:37 PM	Main Vac valve opened
12/17/2010	2:20:37 PM	Bypass valve opened
12/17/2010	2:20:37 PM	Helium MFC set to  100.000000
12/17/2010	2:20:37 PM	H2 MFC set to  0.000000
12/17/2010	2:20:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:20:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:20:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:20:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:20:37 PM	Tube furnace set to 0
12/17/2010	2:21:37 PM	Helium valve closed
12/17/2010	2:21:37 PM	H2 valve closed
12/17/2010	2:21:37 PM	BCl3 valve closed
12/17/2010	2:21:37 PM	PH3 valve closed
12/17/2010	2:21:37 PM	SiCl4 pre valve closed
12/17/2010	2:21:37 PM	SiCl4 post valve closed
12/17/2010	2:21:37 PM	Bubbler valve closed
12/17/2010	2:21:37 PM	Main Vac valve opened
12/17/2010	2:21:37 PM	Bypass valve opened
12/17/2010	2:21:37 PM	Helium MFC set to  0.000000
12/17/2010	2:21:37 PM	H2 MFC set to  0.000000
12/17/2010	2:21:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:21:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:21:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:21:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:21:37 PM	Tube furnace set to 0
12/17/2010	2:22:37 PM	H2 valve closed
12/17/2010	2:22:37 PM	BCl3 valve closed
12/17/2010	2:22:37 PM	PH3 valve closed
12/17/2010	2:22:37 PM	SiCl4 pre valve closed
12/17/2010	2:22:37 PM	SiCl4 post valve closed
12/17/2010	2:22:37 PM	Bubbler valve closed
12/17/2010	2:22:37 PM	Helium valve opened
12/17/2010	2:22:37 PM	Main Vac valve opened
12/17/2010	2:22:37 PM	Bypass valve opened
12/17/2010	2:22:37 PM	Helium MFC set to  100.000000
12/17/2010	2:22:37 PM	H2 MFC set to  0.000000
12/17/2010	2:22:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:22:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:22:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:22:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:22:37 PM	Tube furnace set to 0
12/17/2010	2:23:37 PM	Helium valve closed
12/17/2010	2:23:37 PM	H2 valve closed
12/17/2010	2:23:37 PM	BCl3 valve closed
12/17/2010	2:23:37 PM	PH3 valve closed
12/17/2010	2:23:37 PM	SiCl4 pre valve closed
12/17/2010	2:23:37 PM	SiCl4 post valve closed
12/17/2010	2:23:37 PM	Bubbler valve closed
12/17/2010	2:23:37 PM	Main Vac valve opened
12/17/2010	2:23:37 PM	Bypass valve opened
12/17/2010	2:23:37 PM	Helium MFC set to  0.000000
12/17/2010	2:23:37 PM	H2 MFC set to  0.000000
12/17/2010	2:23:37 PM	BCl3 MFC set to  0.000000
12/17/2010	2:23:37 PM	PHl3 MFC set to  0.000000
12/17/2010	2:23:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:23:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:23:38 PM	Tube furnace set to 0
12/17/2010	2:23:39 PM	Run finished at 2:23 PM
12/17/2010	2:23:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	2:42:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	2:42:58 PM	Recipe started at 2:42 PM
12/17/2010	2:42:58 PM	Helium valve closed
12/17/2010	2:42:58 PM	H2 valve closed
12/17/2010	2:42:58 PM	BCl3 valve closed
12/17/2010	2:42:58 PM	PH3 valve closed
12/17/2010	2:42:58 PM	SiCl4 pre valve closed
12/17/2010	2:42:58 PM	SiCl4 post valve closed
12/17/2010	2:42:58 PM	Main Vac valve closed
12/17/2010	2:42:58 PM	Bubbler valve closed
12/17/2010	2:42:58 PM	Bypass valve opened
12/17/2010	2:42:58 PM	Helium MFC set to  0.000000
12/17/2010	2:42:58 PM	H2 MFC set to  0.000000
12/17/2010	2:42:58 PM	BCl3 MFC set to  0.000000
12/17/2010	2:42:58 PM	PHl3 MFC set to  0.000000
12/17/2010	2:42:58 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:42:58 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:42:58 PM	Tube furnace set to 0
12/17/2010	2:42:58 PM	Helium valve closed
12/17/2010	2:42:58 PM	H2 valve closed
12/17/2010	2:42:58 PM	BCl3 valve closed
12/17/2010	2:42:58 PM	PH3 valve closed
12/17/2010	2:42:58 PM	SiCl4 pre valve closed
12/17/2010	2:42:58 PM	SiCl4 post valve closed
12/17/2010	2:42:58 PM	Bubbler valve closed
12/17/2010	2:42:58 PM	Main Vac valve opened
12/17/2010	2:42:58 PM	Bypass valve opened
12/17/2010	2:42:58 PM	Helium MFC set to  0.000000
12/17/2010	2:42:58 PM	H2 MFC set to  0.000000
12/17/2010	2:42:58 PM	BCl3 MFC set to  0.000000
12/17/2010	2:42:58 PM	PHl3 MFC set to  0.000000
12/17/2010	2:42:58 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:42:58 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:42:59 PM	Tube furnace set to 0
12/17/2010	2:43:59 PM	H2 valve closed
12/17/2010	2:43:59 PM	BCl3 valve closed
12/17/2010	2:43:59 PM	PH3 valve closed
12/17/2010	2:43:59 PM	SiCl4 pre valve closed
12/17/2010	2:43:59 PM	SiCl4 post valve closed
12/17/2010	2:43:59 PM	Bubbler valve closed
12/17/2010	2:43:59 PM	Helium valve opened
12/17/2010	2:43:59 PM	Main Vac valve opened
12/17/2010	2:43:59 PM	Bypass valve opened
12/17/2010	2:43:59 PM	Helium MFC set to  100.000000
12/17/2010	2:43:59 PM	H2 MFC set to  0.000000
12/17/2010	2:43:59 PM	BCl3 MFC set to  0.000000
12/17/2010	2:43:59 PM	PHl3 MFC set to  0.000000
12/17/2010	2:43:59 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:43:59 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:43:59 PM	Tube furnace set to 0
12/17/2010	2:44:59 PM	Helium valve closed
12/17/2010	2:44:59 PM	H2 valve closed
12/17/2010	2:44:59 PM	BCl3 valve closed
12/17/2010	2:44:59 PM	PH3 valve closed
12/17/2010	2:44:59 PM	SiCl4 pre valve closed
12/17/2010	2:44:59 PM	SiCl4 post valve closed
12/17/2010	2:44:59 PM	Bubbler valve closed
12/17/2010	2:44:59 PM	Main Vac valve opened
12/17/2010	2:44:59 PM	Bypass valve opened
12/17/2010	2:44:59 PM	Helium MFC set to  0.000000
12/17/2010	2:44:59 PM	H2 MFC set to  0.000000
12/17/2010	2:44:59 PM	BCl3 MFC set to  0.000000
12/17/2010	2:44:59 PM	PHl3 MFC set to  0.000000
12/17/2010	2:44:59 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:44:59 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:44:59 PM	Tube furnace set to 0
12/17/2010	2:45:59 PM	H2 valve closed
12/17/2010	2:45:59 PM	BCl3 valve closed
12/17/2010	2:45:59 PM	PH3 valve closed
12/17/2010	2:45:59 PM	SiCl4 pre valve closed
12/17/2010	2:45:59 PM	SiCl4 post valve closed
12/17/2010	2:45:59 PM	Bubbler valve closed
12/17/2010	2:45:59 PM	Helium valve opened
12/17/2010	2:45:59 PM	Main Vac valve opened
12/17/2010	2:45:59 PM	Bypass valve opened
12/17/2010	2:45:59 PM	Helium MFC set to  100.000000
12/17/2010	2:45:59 PM	H2 MFC set to  0.000000
12/17/2010	2:45:59 PM	BCl3 MFC set to  0.000000
12/17/2010	2:45:59 PM	PHl3 MFC set to  0.000000
12/17/2010	2:45:59 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:45:59 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:45:59 PM	Tube furnace set to 0
12/17/2010	2:46:59 PM	Helium valve closed
12/17/2010	2:46:59 PM	H2 valve closed
12/17/2010	2:46:59 PM	BCl3 valve closed
12/17/2010	2:46:59 PM	PH3 valve closed
12/17/2010	2:46:59 PM	SiCl4 pre valve closed
12/17/2010	2:46:59 PM	SiCl4 post valve closed
12/17/2010	2:46:59 PM	Bubbler valve closed
12/17/2010	2:46:59 PM	Main Vac valve opened
12/17/2010	2:46:59 PM	Bypass valve opened
12/17/2010	2:46:59 PM	Helium MFC set to  0.000000
12/17/2010	2:46:59 PM	H2 MFC set to  0.000000
12/17/2010	2:46:59 PM	BCl3 MFC set to  0.000000
12/17/2010	2:46:59 PM	PHl3 MFC set to  0.000000
12/17/2010	2:46:59 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:46:59 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:46:59 PM	Tube furnace set to 0
12/17/2010	2:47:45 PM	Run aborted at 2:47 PM
12/17/2010	2:47:45 PM	Helium valve closed
12/17/2010	2:47:45 PM	H2 valve closed
12/17/2010	2:47:45 PM	BCl3 valve closed
12/17/2010	2:47:45 PM	PH3 valve closed
12/17/2010	2:47:45 PM	SiCl4 pre valve closed
12/17/2010	2:47:45 PM	SiCl4 post valve closed
12/17/2010	2:47:45 PM	Bypass valve closed
12/17/2010	2:47:45 PM	Main Vac valve closed
12/17/2010	2:47:45 PM	Bubbler valve closed
12/17/2010	2:47:45 PM	Helium MFC set to  0.000000
12/17/2010	2:47:45 PM	H2 MFC set to  0.000000
12/17/2010	2:47:45 PM	BCl3 MFC set to  0.000000
12/17/2010	2:47:45 PM	PHl3 MFC set to  0.000000
12/17/2010	2:47:45 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:47:46 PM	Tube furnace set to 0
12/17/2010	2:47:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	2:47:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	2:47:49 PM	Recipe started at 2:47 PM
12/17/2010	2:47:49 PM	Helium valve closed
12/17/2010	2:47:49 PM	H2 valve closed
12/17/2010	2:47:49 PM	BCl3 valve closed
12/17/2010	2:47:49 PM	PH3 valve closed
12/17/2010	2:47:49 PM	SiCl4 pre valve closed
12/17/2010	2:47:49 PM	SiCl4 post valve closed
12/17/2010	2:47:49 PM	Main Vac valve closed
12/17/2010	2:47:49 PM	Bubbler valve closed
12/17/2010	2:47:49 PM	Bypass valve opened
12/17/2010	2:47:49 PM	Helium MFC set to  0.000000
12/17/2010	2:47:49 PM	H2 MFC set to  0.000000
12/17/2010	2:47:49 PM	BCl3 MFC set to  0.000000
12/17/2010	2:47:49 PM	PHl3 MFC set to  0.000000
12/17/2010	2:47:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:47:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:47:49 PM	Tube furnace set to 0
12/17/2010	2:47:49 PM	Helium valve closed
12/17/2010	2:47:49 PM	H2 valve closed
12/17/2010	2:47:49 PM	BCl3 valve closed
12/17/2010	2:47:49 PM	PH3 valve closed
12/17/2010	2:47:49 PM	SiCl4 pre valve closed
12/17/2010	2:47:49 PM	SiCl4 post valve closed
12/17/2010	2:47:49 PM	Bubbler valve closed
12/17/2010	2:47:49 PM	Main Vac valve opened
12/17/2010	2:47:49 PM	Bypass valve opened
12/17/2010	2:47:49 PM	Helium MFC set to  0.000000
12/17/2010	2:47:49 PM	H2 MFC set to  0.000000
12/17/2010	2:47:49 PM	BCl3 MFC set to  0.000000
12/17/2010	2:47:49 PM	PHl3 MFC set to  0.000000
12/17/2010	2:47:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:47:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:47:49 PM	Tube furnace set to 0
12/17/2010	2:47:49 PM	Run finished at 2:47 PM
12/17/2010	2:47:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	2:48:08 PM	Recipe started at 2:48 PM
12/17/2010	2:48:08 PM	Helium valve closed
12/17/2010	2:48:08 PM	BCl3 valve closed
12/17/2010	2:48:08 PM	PH3 valve closed
12/17/2010	2:48:08 PM	SiCl4 pre valve closed
12/17/2010	2:48:08 PM	SiCl4 post valve closed
12/17/2010	2:48:08 PM	Main Vac valve closed
12/17/2010	2:48:08 PM	Bypass valve closed
12/17/2010	2:48:08 PM	Bubbler valve closed
12/17/2010	2:48:08 PM	H2 valve opened
12/17/2010	2:48:08 PM	Helium MFC set to  0.000000
12/17/2010	2:48:08 PM	H2 MFC set to  500.000000
12/17/2010	2:48:08 PM	BCl3 MFC set to  0.000000
12/17/2010	2:48:08 PM	PHl3 MFC set to  0.000000
12/17/2010	2:48:08 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:48:08 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:48:08 PM	Tube furnace set to 0
12/17/2010	2:49:27 PM	Helium valve closed
12/17/2010	2:49:27 PM	BCl3 valve closed
12/17/2010	2:49:27 PM	PH3 valve closed
12/17/2010	2:49:27 PM	SiCl4 pre valve closed
12/17/2010	2:49:27 PM	SiCl4 post valve closed
12/17/2010	2:49:27 PM	Main Vac valve closed
12/17/2010	2:49:27 PM	Bypass valve closed
12/17/2010	2:49:27 PM	H2 valve opened
12/17/2010	2:49:27 PM	Bubbler valve opened
12/17/2010	2:49:27 PM	Helium MFC set to  0.000000
12/17/2010	2:49:27 PM	H2 MFC set to  500.000000
12/17/2010	2:49:27 PM	BCl3 MFC set to  0.000000
12/17/2010	2:49:27 PM	PHl3 MFC set to  0.000000
12/17/2010	2:49:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	2:49:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	2:49:27 PM	Tube furnace set to 1000
12/17/2010	3:09:27 PM	Helium valve closed
12/17/2010	3:09:27 PM	PH3 valve closed
12/17/2010	3:09:27 PM	Main Vac valve closed
12/17/2010	3:09:27 PM	Bypass valve closed
12/17/2010	3:09:27 PM	H2 valve opened
12/17/2010	3:09:27 PM	BCl3 valve opened
12/17/2010	3:09:27 PM	SiCl4 pre valve opened
12/17/2010	3:09:27 PM	SiCl4 post valve opened
12/17/2010	3:09:27 PM	Bubbler valve opened
12/17/2010	3:09:27 PM	Helium MFC set to  0.000000
12/17/2010	3:09:27 PM	H2 MFC set to  500.000000
12/17/2010	3:09:27 PM	BCl3 MFC set to  12.000000
12/17/2010	3:09:27 PM	PHl3 MFC set to  0.000000
12/17/2010	3:09:27 PM	SiCl4 MFC set to  50.000000
12/17/2010	3:09:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	3:09:27 PM	Tube furnace set to 1000
12/17/2010	3:39:27 PM	H2 valve closed
12/17/2010	3:39:27 PM	BCl3 valve closed
12/17/2010	3:39:27 PM	PH3 valve closed
12/17/2010	3:39:27 PM	SiCl4 pre valve closed
12/17/2010	3:39:27 PM	SiCl4 post valve closed
12/17/2010	3:39:27 PM	Main Vac valve closed
12/17/2010	3:39:27 PM	Bypass valve closed
12/17/2010	3:39:27 PM	Helium valve opened
12/17/2010	3:39:27 PM	Bubbler valve opened
12/17/2010	3:39:27 PM	Helium MFC set to  500.000000
12/17/2010	3:39:27 PM	H2 MFC set to  0.000000
12/17/2010	3:39:27 PM	BCl3 MFC set to  0.000000
12/17/2010	3:39:27 PM	PHl3 MFC set to  0.000000
12/17/2010	3:39:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	3:39:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	3:39:27 PM	Tube furnace set to 0
12/17/2010	3:59:27 PM	Helium valve closed
12/17/2010	3:59:27 PM	H2 valve closed
12/17/2010	3:59:27 PM	BCl3 valve closed
12/17/2010	3:59:27 PM	PH3 valve closed
12/17/2010	3:59:27 PM	SiCl4 pre valve closed
12/17/2010	3:59:27 PM	SiCl4 post valve closed
12/17/2010	3:59:27 PM	Main Vac valve closed
12/17/2010	3:59:27 PM	Bypass valve closed
12/17/2010	3:59:27 PM	Bubbler valve closed
12/17/2010	3:59:27 PM	Helium MFC set to  0.000000
12/17/2010	3:59:27 PM	H2 MFC set to  0.000000
12/17/2010	3:59:27 PM	BCl3 MFC set to  0.000000
12/17/2010	3:59:27 PM	PHl3 MFC set to  0.000000
12/17/2010	3:59:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	3:59:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	3:59:28 PM	Tube furnace set to 0
12/17/2010	3:59:28 PM	Run finished at 3:59 PM
12/17/2010	4:23:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	4:23:38 PM	Recipe started at 4:23 PM
12/17/2010	4:23:38 PM	Helium valve closed
12/17/2010	4:23:38 PM	H2 valve closed
12/17/2010	4:23:38 PM	BCl3 valve closed
12/17/2010	4:23:38 PM	PH3 valve closed
12/17/2010	4:23:38 PM	SiCl4 pre valve closed
12/17/2010	4:23:38 PM	SiCl4 post valve closed
12/17/2010	4:23:38 PM	Main Vac valve closed
12/17/2010	4:23:38 PM	Bubbler valve closed
12/17/2010	4:23:38 PM	Bypass valve opened
12/17/2010	4:23:38 PM	Helium MFC set to  0.000000
12/17/2010	4:23:38 PM	H2 MFC set to  0.000000
12/17/2010	4:23:38 PM	BCl3 MFC set to  0.000000
12/17/2010	4:23:38 PM	PHl3 MFC set to  0.000000
12/17/2010	4:23:38 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:23:38 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:23:38 PM	Tube furnace set to 0
12/17/2010	4:24:37 PM	Helium valve closed
12/17/2010	4:24:37 PM	H2 valve closed
12/17/2010	4:24:37 PM	BCl3 valve closed
12/17/2010	4:24:37 PM	PH3 valve closed
12/17/2010	4:24:37 PM	SiCl4 pre valve closed
12/17/2010	4:24:37 PM	SiCl4 post valve closed
12/17/2010	4:24:37 PM	Bubbler valve closed
12/17/2010	4:24:37 PM	Main Vac valve opened
12/17/2010	4:24:37 PM	Bypass valve opened
12/17/2010	4:24:37 PM	Helium MFC set to  0.000000
12/17/2010	4:24:37 PM	H2 MFC set to  0.000000
12/17/2010	4:24:37 PM	BCl3 MFC set to  0.000000
12/17/2010	4:24:37 PM	PHl3 MFC set to  0.000000
12/17/2010	4:24:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:24:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:24:37 PM	Tube furnace set to 0
12/17/2010	4:24:38 PM	Run finished at 4:24 PM
12/17/2010	4:24:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	4:24:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	4:24:54 PM	Recipe started at 4:24 PM
12/17/2010	4:24:54 PM	Helium valve closed
12/17/2010	4:24:54 PM	H2 valve closed
12/17/2010	4:24:54 PM	BCl3 valve closed
12/17/2010	4:24:54 PM	PH3 valve closed
12/17/2010	4:24:54 PM	SiCl4 pre valve closed
12/17/2010	4:24:54 PM	SiCl4 post valve closed
12/17/2010	4:24:54 PM	Main Vac valve closed
12/17/2010	4:24:54 PM	Bubbler valve closed
12/17/2010	4:24:54 PM	Bypass valve opened
12/17/2010	4:24:54 PM	Helium MFC set to  0.000000
12/17/2010	4:24:54 PM	H2 MFC set to  0.000000
12/17/2010	4:24:54 PM	BCl3 MFC set to  0.000000
12/17/2010	4:24:54 PM	PHl3 MFC set to  0.000000
12/17/2010	4:24:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:24:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:24:54 PM	Tube furnace set to 0
12/17/2010	4:24:54 PM	Helium valve closed
12/17/2010	4:24:54 PM	H2 valve closed
12/17/2010	4:24:54 PM	BCl3 valve closed
12/17/2010	4:24:54 PM	PH3 valve closed
12/17/2010	4:24:54 PM	SiCl4 pre valve closed
12/17/2010	4:24:54 PM	SiCl4 post valve closed
12/17/2010	4:24:54 PM	Bubbler valve closed
12/17/2010	4:24:54 PM	Main Vac valve opened
12/17/2010	4:24:54 PM	Bypass valve opened
12/17/2010	4:24:54 PM	Helium MFC set to  0.000000
12/17/2010	4:24:54 PM	H2 MFC set to  0.000000
12/17/2010	4:24:54 PM	BCl3 MFC set to  0.000000
12/17/2010	4:24:54 PM	PHl3 MFC set to  0.000000
12/17/2010	4:24:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:24:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:24:55 PM	Tube furnace set to 0
12/17/2010	4:25:55 PM	H2 valve closed
12/17/2010	4:25:55 PM	BCl3 valve closed
12/17/2010	4:25:55 PM	PH3 valve closed
12/17/2010	4:25:55 PM	SiCl4 pre valve closed
12/17/2010	4:25:55 PM	SiCl4 post valve closed
12/17/2010	4:25:55 PM	Bubbler valve closed
12/17/2010	4:25:55 PM	Helium valve opened
12/17/2010	4:25:55 PM	Main Vac valve opened
12/17/2010	4:25:55 PM	Bypass valve opened
12/17/2010	4:25:55 PM	Helium MFC set to  100.000000
12/17/2010	4:25:55 PM	H2 MFC set to  0.000000
12/17/2010	4:25:55 PM	BCl3 MFC set to  0.000000
12/17/2010	4:25:55 PM	PHl3 MFC set to  0.000000
12/17/2010	4:25:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:25:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:25:55 PM	Tube furnace set to 0
12/17/2010	4:26:55 PM	Helium valve closed
12/17/2010	4:26:55 PM	H2 valve closed
12/17/2010	4:26:55 PM	BCl3 valve closed
12/17/2010	4:26:55 PM	PH3 valve closed
12/17/2010	4:26:55 PM	SiCl4 pre valve closed
12/17/2010	4:26:55 PM	SiCl4 post valve closed
12/17/2010	4:26:55 PM	Bubbler valve closed
12/17/2010	4:26:55 PM	Main Vac valve opened
12/17/2010	4:26:55 PM	Bypass valve opened
12/17/2010	4:26:55 PM	Helium MFC set to  0.000000
12/17/2010	4:26:55 PM	H2 MFC set to  0.000000
12/17/2010	4:26:55 PM	BCl3 MFC set to  0.000000
12/17/2010	4:26:55 PM	PHl3 MFC set to  0.000000
12/17/2010	4:26:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:26:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:26:55 PM	Tube furnace set to 0
12/17/2010	4:27:55 PM	H2 valve closed
12/17/2010	4:27:55 PM	BCl3 valve closed
12/17/2010	4:27:55 PM	PH3 valve closed
12/17/2010	4:27:55 PM	SiCl4 pre valve closed
12/17/2010	4:27:55 PM	SiCl4 post valve closed
12/17/2010	4:27:55 PM	Bubbler valve closed
12/17/2010	4:27:55 PM	Helium valve opened
12/17/2010	4:27:55 PM	Main Vac valve opened
12/17/2010	4:27:55 PM	Bypass valve opened
12/17/2010	4:27:55 PM	Helium MFC set to  100.000000
12/17/2010	4:27:55 PM	H2 MFC set to  0.000000
12/17/2010	4:27:55 PM	BCl3 MFC set to  0.000000
12/17/2010	4:27:55 PM	PHl3 MFC set to  0.000000
12/17/2010	4:27:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:27:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:27:55 PM	Tube furnace set to 0
12/17/2010	4:28:55 PM	Helium valve closed
12/17/2010	4:28:55 PM	H2 valve closed
12/17/2010	4:28:55 PM	BCl3 valve closed
12/17/2010	4:28:55 PM	PH3 valve closed
12/17/2010	4:28:55 PM	SiCl4 pre valve closed
12/17/2010	4:28:55 PM	SiCl4 post valve closed
12/17/2010	4:28:55 PM	Bubbler valve closed
12/17/2010	4:28:55 PM	Main Vac valve opened
12/17/2010	4:28:55 PM	Bypass valve opened
12/17/2010	4:28:55 PM	Helium MFC set to  0.000000
12/17/2010	4:28:55 PM	H2 MFC set to  0.000000
12/17/2010	4:28:55 PM	BCl3 MFC set to  0.000000
12/17/2010	4:28:55 PM	PHl3 MFC set to  0.000000
12/17/2010	4:28:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:28:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:28:55 PM	Tube furnace set to 0
12/17/2010	4:29:55 PM	H2 valve closed
12/17/2010	4:29:55 PM	BCl3 valve closed
12/17/2010	4:29:55 PM	PH3 valve closed
12/17/2010	4:29:55 PM	SiCl4 pre valve closed
12/17/2010	4:29:55 PM	SiCl4 post valve closed
12/17/2010	4:29:55 PM	Bubbler valve closed
12/17/2010	4:29:55 PM	Helium valve opened
12/17/2010	4:29:55 PM	Main Vac valve opened
12/17/2010	4:29:55 PM	Bypass valve opened
12/17/2010	4:29:55 PM	Helium MFC set to  100.000000
12/17/2010	4:29:55 PM	H2 MFC set to  0.000000
12/17/2010	4:29:55 PM	BCl3 MFC set to  0.000000
12/17/2010	4:29:55 PM	PHl3 MFC set to  0.000000
12/17/2010	4:29:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:29:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:29:56 PM	Tube furnace set to 0
12/17/2010	4:30:56 PM	Helium valve closed
12/17/2010	4:30:56 PM	H2 valve closed
12/17/2010	4:30:56 PM	BCl3 valve closed
12/17/2010	4:30:56 PM	PH3 valve closed
12/17/2010	4:30:56 PM	SiCl4 pre valve closed
12/17/2010	4:30:56 PM	SiCl4 post valve closed
12/17/2010	4:30:56 PM	Bubbler valve closed
12/17/2010	4:30:56 PM	Main Vac valve opened
12/17/2010	4:30:56 PM	Bypass valve opened
12/17/2010	4:30:56 PM	Helium MFC set to  0.000000
12/17/2010	4:30:56 PM	H2 MFC set to  0.000000
12/17/2010	4:30:56 PM	BCl3 MFC set to  0.000000
12/17/2010	4:30:56 PM	PHl3 MFC set to  0.000000
12/17/2010	4:30:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:30:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:30:56 PM	Tube furnace set to 0
12/17/2010	4:31:56 PM	H2 valve closed
12/17/2010	4:31:56 PM	BCl3 valve closed
12/17/2010	4:31:56 PM	PH3 valve closed
12/17/2010	4:31:56 PM	SiCl4 pre valve closed
12/17/2010	4:31:56 PM	SiCl4 post valve closed
12/17/2010	4:31:56 PM	Bubbler valve closed
12/17/2010	4:31:56 PM	Helium valve opened
12/17/2010	4:31:56 PM	Main Vac valve opened
12/17/2010	4:31:56 PM	Bypass valve opened
12/17/2010	4:31:56 PM	Helium MFC set to  100.000000
12/17/2010	4:31:56 PM	H2 MFC set to  0.000000
12/17/2010	4:31:56 PM	BCl3 MFC set to  0.000000
12/17/2010	4:31:56 PM	PHl3 MFC set to  0.000000
12/17/2010	4:31:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:31:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:31:56 PM	Tube furnace set to 0
12/17/2010	4:32:56 PM	Helium valve closed
12/17/2010	4:32:56 PM	H2 valve closed
12/17/2010	4:32:56 PM	BCl3 valve closed
12/17/2010	4:32:56 PM	PH3 valve closed
12/17/2010	4:32:56 PM	SiCl4 pre valve closed
12/17/2010	4:32:56 PM	SiCl4 post valve closed
12/17/2010	4:32:56 PM	Bubbler valve closed
12/17/2010	4:32:56 PM	Main Vac valve opened
12/17/2010	4:32:56 PM	Bypass valve opened
12/17/2010	4:32:56 PM	Helium MFC set to  0.000000
12/17/2010	4:32:56 PM	H2 MFC set to  0.000000
12/17/2010	4:32:56 PM	BCl3 MFC set to  0.000000
12/17/2010	4:32:56 PM	PHl3 MFC set to  0.000000
12/17/2010	4:32:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:32:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:32:56 PM	Tube furnace set to 0
12/17/2010	4:33:56 PM	H2 valve closed
12/17/2010	4:33:56 PM	BCl3 valve closed
12/17/2010	4:33:56 PM	PH3 valve closed
12/17/2010	4:33:56 PM	SiCl4 pre valve closed
12/17/2010	4:33:56 PM	SiCl4 post valve closed
12/17/2010	4:33:56 PM	Bubbler valve closed
12/17/2010	4:33:56 PM	Helium valve opened
12/17/2010	4:33:56 PM	Main Vac valve opened
12/17/2010	4:33:56 PM	Bypass valve opened
12/17/2010	4:33:56 PM	Helium MFC set to  100.000000
12/17/2010	4:33:56 PM	H2 MFC set to  0.000000
12/17/2010	4:33:56 PM	BCl3 MFC set to  0.000000
12/17/2010	4:33:56 PM	PHl3 MFC set to  0.000000
12/17/2010	4:33:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:33:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:33:56 PM	Tube furnace set to 0
12/17/2010	4:34:44 PM	Run aborted at 4:34 PM
12/17/2010	4:34:44 PM	Helium valve closed
12/17/2010	4:34:44 PM	H2 valve closed
12/17/2010	4:34:44 PM	BCl3 valve closed
12/17/2010	4:34:44 PM	PH3 valve closed
12/17/2010	4:34:44 PM	SiCl4 pre valve closed
12/17/2010	4:34:44 PM	SiCl4 post valve closed
12/17/2010	4:34:44 PM	Bypass valve closed
12/17/2010	4:34:44 PM	Main Vac valve closed
12/17/2010	4:34:44 PM	Bubbler valve closed
12/17/2010	4:34:44 PM	Helium MFC set to  0.000000
12/17/2010	4:34:44 PM	H2 MFC set to  0.000000
12/17/2010	4:34:44 PM	BCl3 MFC set to  0.000000
12/17/2010	4:34:44 PM	PHl3 MFC set to  0.000000
12/17/2010	4:34:44 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:34:44 PM	Tube furnace set to 0
12/17/2010	4:34:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	4:34:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	4:34:47 PM	Recipe started at 4:34 PM
12/17/2010	4:34:47 PM	Helium valve closed
12/17/2010	4:34:47 PM	H2 valve closed
12/17/2010	4:34:47 PM	BCl3 valve closed
12/17/2010	4:34:47 PM	PH3 valve closed
12/17/2010	4:34:47 PM	SiCl4 pre valve closed
12/17/2010	4:34:47 PM	SiCl4 post valve closed
12/17/2010	4:34:47 PM	Main Vac valve closed
12/17/2010	4:34:47 PM	Bubbler valve closed
12/17/2010	4:34:47 PM	Bypass valve opened
12/17/2010	4:34:47 PM	Helium MFC set to  0.000000
12/17/2010	4:34:47 PM	H2 MFC set to  0.000000
12/17/2010	4:34:47 PM	BCl3 MFC set to  0.000000
12/17/2010	4:34:47 PM	PHl3 MFC set to  0.000000
12/17/2010	4:34:47 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:34:47 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:34:47 PM	Tube furnace set to 0
12/17/2010	4:34:47 PM	Helium valve closed
12/17/2010	4:34:47 PM	H2 valve closed
12/17/2010	4:34:47 PM	BCl3 valve closed
12/17/2010	4:34:47 PM	PH3 valve closed
12/17/2010	4:34:47 PM	SiCl4 pre valve closed
12/17/2010	4:34:47 PM	SiCl4 post valve closed
12/17/2010	4:34:47 PM	Bubbler valve closed
12/17/2010	4:34:47 PM	Main Vac valve opened
12/17/2010	4:34:47 PM	Bypass valve opened
12/17/2010	4:34:47 PM	Helium MFC set to  0.000000
12/17/2010	4:34:47 PM	H2 MFC set to  0.000000
12/17/2010	4:34:47 PM	BCl3 MFC set to  0.000000
12/17/2010	4:34:47 PM	PHl3 MFC set to  0.000000
12/17/2010	4:34:47 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:34:47 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:34:48 PM	Tube furnace set to 0
12/17/2010	4:34:48 PM	Run finished at 4:34 PM
12/17/2010	4:34:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	4:35:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	4:35:16 PM	Recipe started at 4:35 PM
12/17/2010	4:35:17 PM	Helium valve closed
12/17/2010	4:35:17 PM	H2 valve closed
12/17/2010	4:35:17 PM	BCl3 valve closed
12/17/2010	4:35:17 PM	PH3 valve closed
12/17/2010	4:35:17 PM	SiCl4 pre valve closed
12/17/2010	4:35:17 PM	SiCl4 post valve closed
12/17/2010	4:35:17 PM	Main Vac valve closed
12/17/2010	4:35:17 PM	Bubbler valve closed
12/17/2010	4:35:17 PM	Bypass valve opened
12/17/2010	4:35:17 PM	Helium MFC set to  0.000000
12/17/2010	4:35:17 PM	H2 MFC set to  0.000000
12/17/2010	4:35:17 PM	BCl3 MFC set to  0.000000
12/17/2010	4:35:17 PM	PHl3 MFC set to  0.000000
12/17/2010	4:35:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:35:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:35:17 PM	Tube furnace set to 0
12/17/2010	4:35:17 PM	Helium valve closed
12/17/2010	4:35:17 PM	H2 valve closed
12/17/2010	4:35:17 PM	BCl3 valve closed
12/17/2010	4:35:17 PM	PH3 valve closed
12/17/2010	4:35:17 PM	SiCl4 pre valve closed
12/17/2010	4:35:17 PM	SiCl4 post valve closed
12/17/2010	4:35:17 PM	Bubbler valve closed
12/17/2010	4:35:17 PM	Main Vac valve opened
12/17/2010	4:35:17 PM	Bypass valve opened
12/17/2010	4:35:17 PM	Helium MFC set to  0.000000
12/17/2010	4:35:17 PM	H2 MFC set to  0.000000
12/17/2010	4:35:17 PM	BCl3 MFC set to  0.000000
12/17/2010	4:35:17 PM	PHl3 MFC set to  0.000000
12/17/2010	4:35:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:35:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:35:17 PM	Tube furnace set to 0
12/17/2010	4:36:17 PM	H2 valve closed
12/17/2010	4:36:17 PM	BCl3 valve closed
12/17/2010	4:36:17 PM	PH3 valve closed
12/17/2010	4:36:17 PM	SiCl4 pre valve closed
12/17/2010	4:36:17 PM	SiCl4 post valve closed
12/17/2010	4:36:17 PM	Bubbler valve closed
12/17/2010	4:36:17 PM	Helium valve opened
12/17/2010	4:36:17 PM	Main Vac valve opened
12/17/2010	4:36:17 PM	Bypass valve opened
12/17/2010	4:36:17 PM	Helium MFC set to  100.000000
12/17/2010	4:36:17 PM	H2 MFC set to  0.000000
12/17/2010	4:36:17 PM	BCl3 MFC set to  0.000000
12/17/2010	4:36:17 PM	PHl3 MFC set to  0.000000
12/17/2010	4:36:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:36:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:36:17 PM	Tube furnace set to 0
12/17/2010	4:37:17 PM	Helium valve closed
12/17/2010	4:37:17 PM	H2 valve closed
12/17/2010	4:37:17 PM	BCl3 valve closed
12/17/2010	4:37:17 PM	PH3 valve closed
12/17/2010	4:37:17 PM	SiCl4 pre valve closed
12/17/2010	4:37:17 PM	SiCl4 post valve closed
12/17/2010	4:37:17 PM	Bubbler valve closed
12/17/2010	4:37:17 PM	Main Vac valve opened
12/17/2010	4:37:17 PM	Bypass valve opened
12/17/2010	4:37:17 PM	Helium MFC set to  0.000000
12/17/2010	4:37:17 PM	H2 MFC set to  0.000000
12/17/2010	4:37:17 PM	BCl3 MFC set to  0.000000
12/17/2010	4:37:17 PM	PHl3 MFC set to  0.000000
12/17/2010	4:37:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:37:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:37:18 PM	Tube furnace set to 0
12/17/2010	4:38:18 PM	H2 valve closed
12/17/2010	4:38:18 PM	BCl3 valve closed
12/17/2010	4:38:18 PM	PH3 valve closed
12/17/2010	4:38:18 PM	SiCl4 pre valve closed
12/17/2010	4:38:18 PM	SiCl4 post valve closed
12/17/2010	4:38:18 PM	Bubbler valve closed
12/17/2010	4:38:18 PM	Helium valve opened
12/17/2010	4:38:18 PM	Main Vac valve opened
12/17/2010	4:38:18 PM	Bypass valve opened
12/17/2010	4:38:18 PM	Helium MFC set to  100.000000
12/17/2010	4:38:18 PM	H2 MFC set to  0.000000
12/17/2010	4:38:18 PM	BCl3 MFC set to  0.000000
12/17/2010	4:38:18 PM	PHl3 MFC set to  0.000000
12/17/2010	4:38:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:38:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:38:18 PM	Tube furnace set to 0
12/17/2010	4:39:18 PM	Helium valve closed
12/17/2010	4:39:18 PM	H2 valve closed
12/17/2010	4:39:18 PM	BCl3 valve closed
12/17/2010	4:39:18 PM	PH3 valve closed
12/17/2010	4:39:18 PM	SiCl4 pre valve closed
12/17/2010	4:39:18 PM	SiCl4 post valve closed
12/17/2010	4:39:18 PM	Bubbler valve closed
12/17/2010	4:39:18 PM	Main Vac valve opened
12/17/2010	4:39:18 PM	Bypass valve opened
12/17/2010	4:39:18 PM	Helium MFC set to  0.000000
12/17/2010	4:39:18 PM	H2 MFC set to  0.000000
12/17/2010	4:39:18 PM	BCl3 MFC set to  0.000000
12/17/2010	4:39:18 PM	PHl3 MFC set to  0.000000
12/17/2010	4:39:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:39:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:39:18 PM	Tube furnace set to 0
12/17/2010	4:40:18 PM	H2 valve closed
12/17/2010	4:40:18 PM	BCl3 valve closed
12/17/2010	4:40:18 PM	PH3 valve closed
12/17/2010	4:40:18 PM	SiCl4 pre valve closed
12/17/2010	4:40:18 PM	SiCl4 post valve closed
12/17/2010	4:40:18 PM	Bubbler valve closed
12/17/2010	4:40:18 PM	Helium valve opened
12/17/2010	4:40:18 PM	Main Vac valve opened
12/17/2010	4:40:18 PM	Bypass valve opened
12/17/2010	4:40:18 PM	Helium MFC set to  100.000000
12/17/2010	4:40:18 PM	H2 MFC set to  0.000000
12/17/2010	4:40:18 PM	BCl3 MFC set to  0.000000
12/17/2010	4:40:18 PM	PHl3 MFC set to  0.000000
12/17/2010	4:40:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:40:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:40:18 PM	Tube furnace set to 0
12/17/2010	4:41:18 PM	Helium valve closed
12/17/2010	4:41:18 PM	H2 valve closed
12/17/2010	4:41:18 PM	BCl3 valve closed
12/17/2010	4:41:18 PM	PH3 valve closed
12/17/2010	4:41:18 PM	SiCl4 pre valve closed
12/17/2010	4:41:18 PM	SiCl4 post valve closed
12/17/2010	4:41:18 PM	Bubbler valve closed
12/17/2010	4:41:18 PM	Main Vac valve opened
12/17/2010	4:41:18 PM	Bypass valve opened
12/17/2010	4:41:18 PM	Helium MFC set to  0.000000
12/17/2010	4:41:18 PM	H2 MFC set to  0.000000
12/17/2010	4:41:18 PM	BCl3 MFC set to  0.000000
12/17/2010	4:41:18 PM	PHl3 MFC set to  0.000000
12/17/2010	4:41:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:41:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:41:18 PM	Tube furnace set to 0
12/17/2010	4:42:18 PM	H2 valve closed
12/17/2010	4:42:18 PM	BCl3 valve closed
12/17/2010	4:42:18 PM	PH3 valve closed
12/17/2010	4:42:18 PM	SiCl4 pre valve closed
12/17/2010	4:42:18 PM	SiCl4 post valve closed
12/17/2010	4:42:18 PM	Bubbler valve closed
12/17/2010	4:42:18 PM	Helium valve opened
12/17/2010	4:42:18 PM	Main Vac valve opened
12/17/2010	4:42:18 PM	Bypass valve opened
12/17/2010	4:42:18 PM	Helium MFC set to  100.000000
12/17/2010	4:42:18 PM	H2 MFC set to  0.000000
12/17/2010	4:42:18 PM	BCl3 MFC set to  0.000000
12/17/2010	4:42:18 PM	PHl3 MFC set to  0.000000
12/17/2010	4:42:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:42:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:42:19 PM	Tube furnace set to 0
12/17/2010	4:43:19 PM	Helium valve closed
12/17/2010	4:43:19 PM	H2 valve closed
12/17/2010	4:43:19 PM	BCl3 valve closed
12/17/2010	4:43:19 PM	PH3 valve closed
12/17/2010	4:43:19 PM	SiCl4 pre valve closed
12/17/2010	4:43:19 PM	SiCl4 post valve closed
12/17/2010	4:43:19 PM	Bubbler valve closed
12/17/2010	4:43:19 PM	Main Vac valve opened
12/17/2010	4:43:19 PM	Bypass valve opened
12/17/2010	4:43:19 PM	Helium MFC set to  0.000000
12/17/2010	4:43:19 PM	H2 MFC set to  0.000000
12/17/2010	4:43:19 PM	BCl3 MFC set to  0.000000
12/17/2010	4:43:19 PM	PHl3 MFC set to  0.000000
12/17/2010	4:43:19 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:43:19 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:43:19 PM	Tube furnace set to 0
12/17/2010	4:44:19 PM	H2 valve closed
12/17/2010	4:44:19 PM	BCl3 valve closed
12/17/2010	4:44:19 PM	PH3 valve closed
12/17/2010	4:44:19 PM	SiCl4 pre valve closed
12/17/2010	4:44:19 PM	SiCl4 post valve closed
12/17/2010	4:44:19 PM	Bubbler valve closed
12/17/2010	4:44:19 PM	Helium valve opened
12/17/2010	4:44:19 PM	Main Vac valve opened
12/17/2010	4:44:19 PM	Bypass valve opened
12/17/2010	4:44:19 PM	Helium MFC set to  100.000000
12/17/2010	4:44:19 PM	H2 MFC set to  0.000000
12/17/2010	4:44:19 PM	BCl3 MFC set to  0.000000
12/17/2010	4:44:19 PM	PHl3 MFC set to  0.000000
12/17/2010	4:44:19 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:44:19 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:44:19 PM	Tube furnace set to 0
12/17/2010	4:45:19 PM	Helium valve closed
12/17/2010	4:45:19 PM	H2 valve closed
12/17/2010	4:45:19 PM	BCl3 valve closed
12/17/2010	4:45:19 PM	PH3 valve closed
12/17/2010	4:45:19 PM	SiCl4 pre valve closed
12/17/2010	4:45:19 PM	SiCl4 post valve closed
12/17/2010	4:45:19 PM	Bubbler valve closed
12/17/2010	4:45:19 PM	Main Vac valve opened
12/17/2010	4:45:19 PM	Bypass valve opened
12/17/2010	4:45:19 PM	Helium MFC set to  0.000000
12/17/2010	4:45:19 PM	H2 MFC set to  0.000000
12/17/2010	4:45:19 PM	BCl3 MFC set to  0.000000
12/17/2010	4:45:19 PM	PHl3 MFC set to  0.000000
12/17/2010	4:45:19 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:45:19 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:45:19 PM	Tube furnace set to 0
12/17/2010	4:46:19 PM	H2 valve closed
12/17/2010	4:46:19 PM	BCl3 valve closed
12/17/2010	4:46:19 PM	PH3 valve closed
12/17/2010	4:46:19 PM	SiCl4 pre valve closed
12/17/2010	4:46:19 PM	SiCl4 post valve closed
12/17/2010	4:46:19 PM	Bubbler valve closed
12/17/2010	4:46:19 PM	Helium valve opened
12/17/2010	4:46:19 PM	Main Vac valve opened
12/17/2010	4:46:19 PM	Bypass valve opened
12/17/2010	4:46:19 PM	Helium MFC set to  100.000000
12/17/2010	4:46:19 PM	H2 MFC set to  0.000000
12/17/2010	4:46:19 PM	BCl3 MFC set to  0.000000
12/17/2010	4:46:19 PM	PHl3 MFC set to  0.000000
12/17/2010	4:46:19 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:46:19 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:46:19 PM	Tube furnace set to 0
12/17/2010	4:47:19 PM	Helium valve closed
12/17/2010	4:47:19 PM	H2 valve closed
12/17/2010	4:47:19 PM	BCl3 valve closed
12/17/2010	4:47:19 PM	PH3 valve closed
12/17/2010	4:47:19 PM	SiCl4 pre valve closed
12/17/2010	4:47:19 PM	SiCl4 post valve closed
12/17/2010	4:47:19 PM	Bubbler valve closed
12/17/2010	4:47:19 PM	Main Vac valve opened
12/17/2010	4:47:19 PM	Bypass valve opened
12/17/2010	4:47:19 PM	Helium MFC set to  0.000000
12/17/2010	4:47:19 PM	H2 MFC set to  0.000000
12/17/2010	4:47:19 PM	BCl3 MFC set to  0.000000
12/17/2010	4:47:19 PM	PHl3 MFC set to  0.000000
12/17/2010	4:47:19 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:47:19 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:47:20 PM	Tube furnace set to 0
12/17/2010	4:48:20 PM	H2 valve closed
12/17/2010	4:48:20 PM	BCl3 valve closed
12/17/2010	4:48:20 PM	PH3 valve closed
12/17/2010	4:48:20 PM	SiCl4 pre valve closed
12/17/2010	4:48:20 PM	SiCl4 post valve closed
12/17/2010	4:48:20 PM	Bubbler valve closed
12/17/2010	4:48:20 PM	Helium valve opened
12/17/2010	4:48:20 PM	Main Vac valve opened
12/17/2010	4:48:20 PM	Bypass valve opened
12/17/2010	4:48:20 PM	Helium MFC set to  100.000000
12/17/2010	4:48:20 PM	H2 MFC set to  0.000000
12/17/2010	4:48:20 PM	BCl3 MFC set to  0.000000
12/17/2010	4:48:20 PM	PHl3 MFC set to  0.000000
12/17/2010	4:48:20 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:48:20 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:48:20 PM	Tube furnace set to 0
12/17/2010	4:49:20 PM	Helium valve closed
12/17/2010	4:49:20 PM	H2 valve closed
12/17/2010	4:49:20 PM	BCl3 valve closed
12/17/2010	4:49:20 PM	PH3 valve closed
12/17/2010	4:49:20 PM	SiCl4 pre valve closed
12/17/2010	4:49:20 PM	SiCl4 post valve closed
12/17/2010	4:49:20 PM	Bubbler valve closed
12/17/2010	4:49:20 PM	Main Vac valve opened
12/17/2010	4:49:20 PM	Bypass valve opened
12/17/2010	4:49:20 PM	Helium MFC set to  0.000000
12/17/2010	4:49:20 PM	H2 MFC set to  0.000000
12/17/2010	4:49:20 PM	BCl3 MFC set to  0.000000
12/17/2010	4:49:20 PM	PHl3 MFC set to  0.000000
12/17/2010	4:49:20 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:49:20 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:49:20 PM	Tube furnace set to 0
12/17/2010	4:50:20 PM	H2 valve closed
12/17/2010	4:50:20 PM	BCl3 valve closed
12/17/2010	4:50:20 PM	PH3 valve closed
12/17/2010	4:50:20 PM	SiCl4 pre valve closed
12/17/2010	4:50:20 PM	SiCl4 post valve closed
12/17/2010	4:50:20 PM	Bubbler valve closed
12/17/2010	4:50:20 PM	Helium valve opened
12/17/2010	4:50:20 PM	Main Vac valve opened
12/17/2010	4:50:20 PM	Bypass valve opened
12/17/2010	4:50:20 PM	Helium MFC set to  100.000000
12/17/2010	4:50:20 PM	H2 MFC set to  0.000000
12/17/2010	4:50:20 PM	BCl3 MFC set to  0.000000
12/17/2010	4:50:20 PM	PHl3 MFC set to  0.000000
12/17/2010	4:50:20 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:50:20 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:50:20 PM	Tube furnace set to 0
12/17/2010	4:51:20 PM	Helium valve closed
12/17/2010	4:51:20 PM	H2 valve closed
12/17/2010	4:51:20 PM	BCl3 valve closed
12/17/2010	4:51:20 PM	PH3 valve closed
12/17/2010	4:51:20 PM	SiCl4 pre valve closed
12/17/2010	4:51:20 PM	SiCl4 post valve closed
12/17/2010	4:51:20 PM	Bubbler valve closed
12/17/2010	4:51:20 PM	Main Vac valve opened
12/17/2010	4:51:20 PM	Bypass valve opened
12/17/2010	4:51:20 PM	Helium MFC set to  0.000000
12/17/2010	4:51:20 PM	H2 MFC set to  0.000000
12/17/2010	4:51:20 PM	BCl3 MFC set to  0.000000
12/17/2010	4:51:20 PM	PHl3 MFC set to  0.000000
12/17/2010	4:51:20 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:51:20 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:51:20 PM	Tube furnace set to 0
12/17/2010	4:52:20 PM	H2 valve closed
12/17/2010	4:52:20 PM	BCl3 valve closed
12/17/2010	4:52:20 PM	PH3 valve closed
12/17/2010	4:52:20 PM	SiCl4 pre valve closed
12/17/2010	4:52:20 PM	SiCl4 post valve closed
12/17/2010	4:52:20 PM	Bubbler valve closed
12/17/2010	4:52:20 PM	Helium valve opened
12/17/2010	4:52:20 PM	Main Vac valve opened
12/17/2010	4:52:20 PM	Bypass valve opened
12/17/2010	4:52:20 PM	Helium MFC set to  100.000000
12/17/2010	4:52:20 PM	H2 MFC set to  0.000000
12/17/2010	4:52:20 PM	BCl3 MFC set to  0.000000
12/17/2010	4:52:20 PM	PHl3 MFC set to  0.000000
12/17/2010	4:52:20 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:52:20 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:52:20 PM	Tube furnace set to 0
12/17/2010	4:53:21 PM	Helium valve closed
12/17/2010	4:53:21 PM	H2 valve closed
12/17/2010	4:53:21 PM	BCl3 valve closed
12/17/2010	4:53:21 PM	PH3 valve closed
12/17/2010	4:53:21 PM	SiCl4 pre valve closed
12/17/2010	4:53:21 PM	SiCl4 post valve closed
12/17/2010	4:53:21 PM	Bubbler valve closed
12/17/2010	4:53:21 PM	Main Vac valve opened
12/17/2010	4:53:21 PM	Bypass valve opened
12/17/2010	4:53:21 PM	Helium MFC set to  0.000000
12/17/2010	4:53:21 PM	H2 MFC set to  0.000000
12/17/2010	4:53:21 PM	BCl3 MFC set to  0.000000
12/17/2010	4:53:21 PM	PHl3 MFC set to  0.000000
12/17/2010	4:53:21 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:53:21 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:53:21 PM	Tube furnace set to 0
12/17/2010	4:54:21 PM	H2 valve closed
12/17/2010	4:54:21 PM	BCl3 valve closed
12/17/2010	4:54:21 PM	PH3 valve closed
12/17/2010	4:54:21 PM	SiCl4 pre valve closed
12/17/2010	4:54:21 PM	SiCl4 post valve closed
12/17/2010	4:54:21 PM	Bubbler valve closed
12/17/2010	4:54:21 PM	Helium valve opened
12/17/2010	4:54:21 PM	Main Vac valve opened
12/17/2010	4:54:21 PM	Bypass valve opened
12/17/2010	4:54:21 PM	Helium MFC set to  100.000000
12/17/2010	4:54:21 PM	H2 MFC set to  0.000000
12/17/2010	4:54:21 PM	BCl3 MFC set to  0.000000
12/17/2010	4:54:21 PM	PHl3 MFC set to  0.000000
12/17/2010	4:54:21 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:54:21 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:54:21 PM	Tube furnace set to 0
12/17/2010	4:55:21 PM	Helium valve closed
12/17/2010	4:55:21 PM	H2 valve closed
12/17/2010	4:55:21 PM	BCl3 valve closed
12/17/2010	4:55:21 PM	PH3 valve closed
12/17/2010	4:55:21 PM	SiCl4 pre valve closed
12/17/2010	4:55:21 PM	SiCl4 post valve closed
12/17/2010	4:55:21 PM	Bubbler valve closed
12/17/2010	4:55:21 PM	Main Vac valve opened
12/17/2010	4:55:21 PM	Bypass valve opened
12/17/2010	4:55:21 PM	Helium MFC set to  0.000000
12/17/2010	4:55:21 PM	H2 MFC set to  0.000000
12/17/2010	4:55:21 PM	BCl3 MFC set to  0.000000
12/17/2010	4:55:21 PM	PHl3 MFC set to  0.000000
12/17/2010	4:55:21 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:55:21 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:55:21 PM	Tube furnace set to 0
12/17/2010	4:55:22 PM	Run finished at 4:55 PM
12/17/2010	4:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	4:57:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	4:57:26 PM	Recipe started at 4:57 PM
12/17/2010	4:57:26 PM	Helium valve closed
12/17/2010	4:57:26 PM	H2 valve closed
12/17/2010	4:57:26 PM	BCl3 valve closed
12/17/2010	4:57:26 PM	PH3 valve closed
12/17/2010	4:57:26 PM	SiCl4 pre valve closed
12/17/2010	4:57:26 PM	SiCl4 post valve closed
12/17/2010	4:57:26 PM	Main Vac valve closed
12/17/2010	4:57:26 PM	Bubbler valve closed
12/17/2010	4:57:26 PM	Bypass valve opened
12/17/2010	4:57:26 PM	Helium MFC set to  0.000000
12/17/2010	4:57:26 PM	H2 MFC set to  0.000000
12/17/2010	4:57:26 PM	BCl3 MFC set to  0.000000
12/17/2010	4:57:26 PM	PHl3 MFC set to  0.000000
12/17/2010	4:57:26 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:57:26 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:57:26 PM	Tube furnace set to 0
12/17/2010	4:57:26 PM	Helium valve closed
12/17/2010	4:57:26 PM	H2 valve closed
12/17/2010	4:57:26 PM	BCl3 valve closed
12/17/2010	4:57:26 PM	PH3 valve closed
12/17/2010	4:57:26 PM	SiCl4 pre valve closed
12/17/2010	4:57:26 PM	SiCl4 post valve closed
12/17/2010	4:57:26 PM	Bubbler valve closed
12/17/2010	4:57:26 PM	Main Vac valve opened
12/17/2010	4:57:26 PM	Bypass valve opened
12/17/2010	4:57:26 PM	Helium MFC set to  0.000000
12/17/2010	4:57:26 PM	H2 MFC set to  0.000000
12/17/2010	4:57:26 PM	BCl3 MFC set to  0.000000
12/17/2010	4:57:26 PM	PHl3 MFC set to  0.000000
12/17/2010	4:57:26 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:57:26 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:57:26 PM	Tube furnace set to 0
12/17/2010	4:58:26 PM	H2 valve closed
12/17/2010	4:58:26 PM	BCl3 valve closed
12/17/2010	4:58:26 PM	PH3 valve closed
12/17/2010	4:58:26 PM	SiCl4 pre valve closed
12/17/2010	4:58:26 PM	SiCl4 post valve closed
12/17/2010	4:58:26 PM	Bubbler valve closed
12/17/2010	4:58:26 PM	Helium valve opened
12/17/2010	4:58:26 PM	Main Vac valve opened
12/17/2010	4:58:26 PM	Bypass valve opened
12/17/2010	4:58:26 PM	Helium MFC set to  100.000000
12/17/2010	4:58:26 PM	H2 MFC set to  0.000000
12/17/2010	4:58:26 PM	BCl3 MFC set to  0.000000
12/17/2010	4:58:26 PM	PHl3 MFC set to  0.000000
12/17/2010	4:58:26 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:58:26 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:58:27 PM	Tube furnace set to 0
12/17/2010	4:59:27 PM	Helium valve closed
12/17/2010	4:59:27 PM	H2 valve closed
12/17/2010	4:59:27 PM	BCl3 valve closed
12/17/2010	4:59:27 PM	PH3 valve closed
12/17/2010	4:59:27 PM	SiCl4 pre valve closed
12/17/2010	4:59:27 PM	SiCl4 post valve closed
12/17/2010	4:59:27 PM	Bubbler valve closed
12/17/2010	4:59:27 PM	Main Vac valve opened
12/17/2010	4:59:27 PM	Bypass valve opened
12/17/2010	4:59:27 PM	Helium MFC set to  0.000000
12/17/2010	4:59:27 PM	H2 MFC set to  0.000000
12/17/2010	4:59:27 PM	BCl3 MFC set to  0.000000
12/17/2010	4:59:27 PM	PHl3 MFC set to  0.000000
12/17/2010	4:59:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	4:59:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	4:59:27 PM	Tube furnace set to 0
12/17/2010	5:00:27 PM	H2 valve closed
12/17/2010	5:00:27 PM	BCl3 valve closed
12/17/2010	5:00:27 PM	PH3 valve closed
12/17/2010	5:00:27 PM	SiCl4 pre valve closed
12/17/2010	5:00:27 PM	SiCl4 post valve closed
12/17/2010	5:00:27 PM	Bubbler valve closed
12/17/2010	5:00:27 PM	Helium valve opened
12/17/2010	5:00:27 PM	Main Vac valve opened
12/17/2010	5:00:27 PM	Bypass valve opened
12/17/2010	5:00:27 PM	Helium MFC set to  100.000000
12/17/2010	5:00:27 PM	H2 MFC set to  0.000000
12/17/2010	5:00:27 PM	BCl3 MFC set to  0.000000
12/17/2010	5:00:27 PM	PHl3 MFC set to  0.000000
12/17/2010	5:00:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:00:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:00:27 PM	Tube furnace set to 0
12/17/2010	5:01:27 PM	Helium valve closed
12/17/2010	5:01:27 PM	H2 valve closed
12/17/2010	5:01:27 PM	BCl3 valve closed
12/17/2010	5:01:27 PM	PH3 valve closed
12/17/2010	5:01:27 PM	SiCl4 pre valve closed
12/17/2010	5:01:27 PM	SiCl4 post valve closed
12/17/2010	5:01:27 PM	Bubbler valve closed
12/17/2010	5:01:27 PM	Main Vac valve opened
12/17/2010	5:01:27 PM	Bypass valve opened
12/17/2010	5:01:27 PM	Helium MFC set to  0.000000
12/17/2010	5:01:27 PM	H2 MFC set to  0.000000
12/17/2010	5:01:27 PM	BCl3 MFC set to  0.000000
12/17/2010	5:01:27 PM	PHl3 MFC set to  0.000000
12/17/2010	5:01:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:01:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:01:27 PM	Tube furnace set to 0
12/17/2010	5:02:27 PM	H2 valve closed
12/17/2010	5:02:27 PM	BCl3 valve closed
12/17/2010	5:02:27 PM	PH3 valve closed
12/17/2010	5:02:27 PM	SiCl4 pre valve closed
12/17/2010	5:02:27 PM	SiCl4 post valve closed
12/17/2010	5:02:27 PM	Bubbler valve closed
12/17/2010	5:02:27 PM	Helium valve opened
12/17/2010	5:02:27 PM	Main Vac valve opened
12/17/2010	5:02:27 PM	Bypass valve opened
12/17/2010	5:02:27 PM	Helium MFC set to  100.000000
12/17/2010	5:02:27 PM	H2 MFC set to  0.000000
12/17/2010	5:02:27 PM	BCl3 MFC set to  0.000000
12/17/2010	5:02:27 PM	PHl3 MFC set to  0.000000
12/17/2010	5:02:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:02:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:02:27 PM	Tube furnace set to 0
12/17/2010	5:03:27 PM	Helium valve closed
12/17/2010	5:03:27 PM	H2 valve closed
12/17/2010	5:03:27 PM	BCl3 valve closed
12/17/2010	5:03:27 PM	PH3 valve closed
12/17/2010	5:03:27 PM	SiCl4 pre valve closed
12/17/2010	5:03:27 PM	SiCl4 post valve closed
12/17/2010	5:03:27 PM	Bubbler valve closed
12/17/2010	5:03:27 PM	Main Vac valve opened
12/17/2010	5:03:27 PM	Bypass valve opened
12/17/2010	5:03:27 PM	Helium MFC set to  0.000000
12/17/2010	5:03:27 PM	H2 MFC set to  0.000000
12/17/2010	5:03:27 PM	BCl3 MFC set to  0.000000
12/17/2010	5:03:27 PM	PHl3 MFC set to  0.000000
12/17/2010	5:03:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:03:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:03:28 PM	Tube furnace set to 0
12/17/2010	5:03:30 PM	Run aborted at 5:03 PM
12/17/2010	5:03:30 PM	Helium valve closed
12/17/2010	5:03:30 PM	H2 valve closed
12/17/2010	5:03:30 PM	BCl3 valve closed
12/17/2010	5:03:30 PM	PH3 valve closed
12/17/2010	5:03:30 PM	SiCl4 pre valve closed
12/17/2010	5:03:30 PM	SiCl4 post valve closed
12/17/2010	5:03:30 PM	Bypass valve closed
12/17/2010	5:03:30 PM	Main Vac valve closed
12/17/2010	5:03:30 PM	Bubbler valve closed
12/17/2010	5:03:30 PM	Helium MFC set to  0.000000
12/17/2010	5:03:30 PM	H2 MFC set to  0.000000
12/17/2010	5:03:30 PM	BCl3 MFC set to  0.000000
12/17/2010	5:03:30 PM	PHl3 MFC set to  0.000000
12/17/2010	5:03:30 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:03:30 PM	Tube furnace set to 0
12/17/2010	5:03:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	5:03:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	5:03:34 PM	Recipe started at 5:03 PM
12/17/2010	5:03:34 PM	Helium valve closed
12/17/2010	5:03:34 PM	H2 valve closed
12/17/2010	5:03:34 PM	BCl3 valve closed
12/17/2010	5:03:34 PM	PH3 valve closed
12/17/2010	5:03:34 PM	SiCl4 pre valve closed
12/17/2010	5:03:34 PM	SiCl4 post valve closed
12/17/2010	5:03:34 PM	Main Vac valve closed
12/17/2010	5:03:34 PM	Bubbler valve closed
12/17/2010	5:03:34 PM	Bypass valve opened
12/17/2010	5:03:34 PM	Helium MFC set to  0.000000
12/17/2010	5:03:34 PM	H2 MFC set to  0.000000
12/17/2010	5:03:34 PM	BCl3 MFC set to  0.000000
12/17/2010	5:03:34 PM	PHl3 MFC set to  0.000000
12/17/2010	5:03:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:03:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:03:34 PM	Tube furnace set to 0
12/17/2010	5:03:34 PM	Helium valve closed
12/17/2010	5:03:34 PM	H2 valve closed
12/17/2010	5:03:34 PM	BCl3 valve closed
12/17/2010	5:03:34 PM	PH3 valve closed
12/17/2010	5:03:34 PM	SiCl4 pre valve closed
12/17/2010	5:03:34 PM	SiCl4 post valve closed
12/17/2010	5:03:34 PM	Bubbler valve closed
12/17/2010	5:03:34 PM	Main Vac valve opened
12/17/2010	5:03:34 PM	Bypass valve opened
12/17/2010	5:03:34 PM	Helium MFC set to  0.000000
12/17/2010	5:03:34 PM	H2 MFC set to  0.000000
12/17/2010	5:03:34 PM	BCl3 MFC set to  0.000000
12/17/2010	5:03:34 PM	PHl3 MFC set to  0.000000
12/17/2010	5:03:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:03:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:03:34 PM	Tube furnace set to 0
12/17/2010	5:03:35 PM	Run finished at 5:03 PM
12/17/2010	5:03:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	5:04:15 PM	Recipe started at 5:04 PM
12/17/2010	5:04:15 PM	Helium valve closed
12/17/2010	5:04:15 PM	BCl3 valve closed
12/17/2010	5:04:15 PM	PH3 valve closed
12/17/2010	5:04:15 PM	SiCl4 pre valve closed
12/17/2010	5:04:15 PM	SiCl4 post valve closed
12/17/2010	5:04:16 PM	Main Vac valve closed
12/17/2010	5:04:16 PM	Bypass valve closed
12/17/2010	5:04:16 PM	Bubbler valve closed
12/17/2010	5:04:16 PM	H2 valve opened
12/17/2010	5:04:16 PM	Helium MFC set to  0.000000
12/17/2010	5:04:16 PM	H2 MFC set to  500.000000
12/17/2010	5:04:16 PM	BCl3 MFC set to  0.000000
12/17/2010	5:04:16 PM	PHl3 MFC set to  0.000000
12/17/2010	5:04:16 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:04:16 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:04:16 PM	Tube furnace set to 0
12/17/2010	5:05:33 PM	Helium valve closed
12/17/2010	5:05:33 PM	BCl3 valve closed
12/17/2010	5:05:33 PM	PH3 valve closed
12/17/2010	5:05:33 PM	SiCl4 pre valve closed
12/17/2010	5:05:33 PM	SiCl4 post valve closed
12/17/2010	5:05:33 PM	Main Vac valve closed
12/17/2010	5:05:33 PM	Bypass valve closed
12/17/2010	5:05:33 PM	H2 valve opened
12/17/2010	5:05:33 PM	Bubbler valve opened
12/17/2010	5:05:33 PM	Helium MFC set to  0.000000
12/17/2010	5:05:33 PM	H2 MFC set to  500.000000
12/17/2010	5:05:33 PM	BCl3 MFC set to  0.000000
12/17/2010	5:05:33 PM	PHl3 MFC set to  0.000000
12/17/2010	5:05:33 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:05:33 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:05:34 PM	Tube furnace set to 1000
12/17/2010	5:25:34 PM	Helium valve closed
12/17/2010	5:25:34 PM	PH3 valve closed
12/17/2010	5:25:34 PM	Main Vac valve closed
12/17/2010	5:25:34 PM	Bypass valve closed
12/17/2010	5:25:34 PM	H2 valve opened
12/17/2010	5:25:34 PM	BCl3 valve opened
12/17/2010	5:25:34 PM	SiCl4 pre valve opened
12/17/2010	5:25:34 PM	SiCl4 post valve opened
12/17/2010	5:25:34 PM	Bubbler valve opened
12/17/2010	5:25:34 PM	Helium MFC set to  0.000000
12/17/2010	5:25:34 PM	H2 MFC set to  500.000000
12/17/2010	5:25:34 PM	BCl3 MFC set to  12.000000
12/17/2010	5:25:34 PM	PHl3 MFC set to  0.000000
12/17/2010	5:25:34 PM	SiCl4 MFC set to  50.000000
12/17/2010	5:25:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:25:34 PM	Tube furnace set to 1000
12/17/2010	5:55:34 PM	H2 valve closed
12/17/2010	5:55:34 PM	BCl3 valve closed
12/17/2010	5:55:34 PM	PH3 valve closed
12/17/2010	5:55:34 PM	SiCl4 pre valve closed
12/17/2010	5:55:34 PM	SiCl4 post valve closed
12/17/2010	5:55:34 PM	Main Vac valve closed
12/17/2010	5:55:34 PM	Bypass valve closed
12/17/2010	5:55:34 PM	Helium valve opened
12/17/2010	5:55:34 PM	Bubbler valve opened
12/17/2010	5:55:34 PM	Helium MFC set to  500.000000
12/17/2010	5:55:34 PM	H2 MFC set to  0.000000
12/17/2010	5:55:34 PM	BCl3 MFC set to  0.000000
12/17/2010	5:55:34 PM	PHl3 MFC set to  0.000000
12/17/2010	5:55:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	5:55:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	5:55:34 PM	Tube furnace set to 0
12/17/2010	6:15:34 PM	Helium valve closed
12/17/2010	6:15:34 PM	H2 valve closed
12/17/2010	6:15:34 PM	BCl3 valve closed
12/17/2010	6:15:34 PM	PH3 valve closed
12/17/2010	6:15:34 PM	SiCl4 pre valve closed
12/17/2010	6:15:34 PM	SiCl4 post valve closed
12/17/2010	6:15:34 PM	Main Vac valve closed
12/17/2010	6:15:34 PM	Bypass valve closed
12/17/2010	6:15:34 PM	Bubbler valve closed
12/17/2010	6:15:34 PM	Helium MFC set to  0.000000
12/17/2010	6:15:34 PM	H2 MFC set to  0.000000
12/17/2010	6:15:34 PM	BCl3 MFC set to  0.000000
12/17/2010	6:15:34 PM	PHl3 MFC set to  0.000000
12/17/2010	6:15:34 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:15:34 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:15:34 PM	Tube furnace set to 0
12/17/2010	6:15:34 PM	Run finished at 6:15 PM
12/17/2010	6:29:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	6:29:35 PM	Recipe started at 6:29 PM
12/17/2010	6:29:35 PM	Helium valve closed
12/17/2010	6:29:35 PM	H2 valve closed
12/17/2010	6:29:35 PM	BCl3 valve closed
12/17/2010	6:29:35 PM	PH3 valve closed
12/17/2010	6:29:35 PM	SiCl4 pre valve closed
12/17/2010	6:29:35 PM	SiCl4 post valve closed
12/17/2010	6:29:35 PM	Main Vac valve closed
12/17/2010	6:29:35 PM	Bubbler valve closed
12/17/2010	6:29:35 PM	Bypass valve opened
12/17/2010	6:29:35 PM	Helium MFC set to  0.000000
12/17/2010	6:29:35 PM	H2 MFC set to  0.000000
12/17/2010	6:29:35 PM	BCl3 MFC set to  0.000000
12/17/2010	6:29:35 PM	PHl3 MFC set to  0.000000
12/17/2010	6:29:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:29:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:29:35 PM	Tube furnace set to 0
12/17/2010	6:30:32 PM	Helium valve closed
12/17/2010	6:30:32 PM	H2 valve closed
12/17/2010	6:30:32 PM	BCl3 valve closed
12/17/2010	6:30:32 PM	PH3 valve closed
12/17/2010	6:30:32 PM	SiCl4 pre valve closed
12/17/2010	6:30:32 PM	SiCl4 post valve closed
12/17/2010	6:30:32 PM	Bubbler valve closed
12/17/2010	6:30:32 PM	Main Vac valve opened
12/17/2010	6:30:32 PM	Bypass valve opened
12/17/2010	6:30:32 PM	Helium MFC set to  0.000000
12/17/2010	6:30:32 PM	H2 MFC set to  0.000000
12/17/2010	6:30:32 PM	BCl3 MFC set to  0.000000
12/17/2010	6:30:32 PM	PHl3 MFC set to  0.000000
12/17/2010	6:30:32 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:30:32 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:30:32 PM	Tube furnace set to 0
12/17/2010	6:30:32 PM	Run finished at 6:30 PM
12/17/2010	6:30:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	6:37:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	6:37:55 PM	Recipe started at 6:37 PM
12/17/2010	6:37:55 PM	H2 valve closed
12/17/2010	6:37:55 PM	BCl3 valve closed
12/17/2010	6:37:55 PM	PH3 valve closed
12/17/2010	6:37:55 PM	SiCl4 pre valve closed
12/17/2010	6:37:55 PM	SiCl4 post valve closed
12/17/2010	6:37:55 PM	Main Vac valve closed
12/17/2010	6:37:55 PM	Bypass valve closed
12/17/2010	6:37:55 PM	Bubbler valve closed
12/17/2010	6:37:55 PM	Helium valve opened
12/17/2010	6:37:55 PM	Helium MFC set to  500.000000
12/17/2010	6:37:55 PM	H2 MFC set to  0.000000
12/17/2010	6:37:55 PM	BCl3 MFC set to  0.000000
12/17/2010	6:37:55 PM	PHl3 MFC set to  0.000000
12/17/2010	6:37:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:37:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:37:55 PM	Tube furnace set to 0
12/17/2010	6:39:10 PM	Helium valve closed
12/17/2010	6:39:10 PM	H2 valve closed
12/17/2010	6:39:10 PM	BCl3 valve closed
12/17/2010	6:39:10 PM	PH3 valve closed
12/17/2010	6:39:10 PM	SiCl4 pre valve closed
12/17/2010	6:39:10 PM	SiCl4 post valve closed
12/17/2010	6:39:10 PM	Main Vac valve closed
12/17/2010	6:39:10 PM	Bypass valve closed
12/17/2010	6:39:10 PM	Bubbler valve closed
12/17/2010	6:39:10 PM	Helium MFC set to  0.000000
12/17/2010	6:39:10 PM	H2 MFC set to  0.000000
12/17/2010	6:39:10 PM	BCl3 MFC set to  0.000000
12/17/2010	6:39:10 PM	PHl3 MFC set to  0.000000
12/17/2010	6:39:10 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:39:10 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:39:10 PM	Tube furnace set to 0
12/17/2010	6:39:11 PM	Run finished at 6:39 PM
12/17/2010	6:39:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	6:49:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	6:49:52 PM	Recipe started at 6:49 PM
12/17/2010	6:49:52 PM	Helium valve closed
12/17/2010	6:49:52 PM	H2 valve closed
12/17/2010	6:49:52 PM	BCl3 valve closed
12/17/2010	6:49:52 PM	PH3 valve closed
12/17/2010	6:49:52 PM	SiCl4 pre valve closed
12/17/2010	6:49:52 PM	SiCl4 post valve closed
12/17/2010	6:49:52 PM	Main Vac valve closed
12/17/2010	6:49:52 PM	Bubbler valve closed
12/17/2010	6:49:52 PM	Bypass valve opened
12/17/2010	6:49:52 PM	Helium MFC set to  0.000000
12/17/2010	6:49:52 PM	H2 MFC set to  0.000000
12/17/2010	6:49:52 PM	BCl3 MFC set to  0.000000
12/17/2010	6:49:52 PM	PHl3 MFC set to  0.000000
12/17/2010	6:49:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:49:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:49:53 PM	Tube furnace set to 0
12/17/2010	6:50:48 PM	Helium valve closed
12/17/2010	6:50:48 PM	H2 valve closed
12/17/2010	6:50:48 PM	BCl3 valve closed
12/17/2010	6:50:48 PM	PH3 valve closed
12/17/2010	6:50:48 PM	SiCl4 pre valve closed
12/17/2010	6:50:48 PM	SiCl4 post valve closed
12/17/2010	6:50:48 PM	Bubbler valve closed
12/17/2010	6:50:48 PM	Main Vac valve opened
12/17/2010	6:50:48 PM	Bypass valve opened
12/17/2010	6:50:48 PM	Helium MFC set to  0.000000
12/17/2010	6:50:48 PM	H2 MFC set to  0.000000
12/17/2010	6:50:48 PM	BCl3 MFC set to  0.000000
12/17/2010	6:50:48 PM	PHl3 MFC set to  0.000000
12/17/2010	6:50:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:50:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:50:48 PM	Tube furnace set to 0
12/17/2010	6:50:48 PM	Run finished at 6:50 PM
12/17/2010	6:50:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	6:53:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/17/2010	6:53:12 PM	Recipe started at 6:53 PM
12/17/2010	6:53:12 PM	Helium valve closed
12/17/2010	6:53:12 PM	H2 valve closed
12/17/2010	6:53:12 PM	BCl3 valve closed
12/17/2010	6:53:12 PM	PH3 valve closed
12/17/2010	6:53:12 PM	SiCl4 pre valve closed
12/17/2010	6:53:12 PM	SiCl4 post valve closed
12/17/2010	6:53:12 PM	Main Vac valve closed
12/17/2010	6:53:12 PM	Bypass valve closed
12/17/2010	6:53:12 PM	Bubbler valve closed
12/17/2010	6:53:12 PM	Helium MFC set to  0.000000
12/17/2010	6:53:12 PM	H2 MFC set to  0.000000
12/17/2010	6:53:12 PM	BCl3 MFC set to  0.000000
12/17/2010	6:53:12 PM	PHl3 MFC set to  0.000000
12/17/2010	6:53:12 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:53:12 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:53:12 PM	Tube furnace set to 0
12/17/2010	6:53:12 PM	Run finished at 6:53 PM
12/17/2010	6:53:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/17/2010	6:53:44 PM	Bypass valve opened
12/17/2010	6:53:44 PM	Main Vac valve opened
12/17/2010	6:54:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	6:54:13 PM	Recipe started at 6:54 PM
12/17/2010	6:54:13 PM	Helium valve closed
12/17/2010	6:54:13 PM	H2 valve closed
12/17/2010	6:54:13 PM	BCl3 valve closed
12/17/2010	6:54:13 PM	PH3 valve closed
12/17/2010	6:54:13 PM	SiCl4 pre valve closed
12/17/2010	6:54:13 PM	SiCl4 post valve closed
12/17/2010	6:54:13 PM	Main Vac valve closed
12/17/2010	6:54:13 PM	Bubbler valve closed
12/17/2010	6:54:13 PM	Bypass valve opened
12/17/2010	6:54:13 PM	Helium MFC set to  0.000000
12/17/2010	6:54:13 PM	H2 MFC set to  0.000000
12/17/2010	6:54:13 PM	BCl3 MFC set to  0.000000
12/17/2010	6:54:13 PM	PHl3 MFC set to  0.000000
12/17/2010	6:54:13 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:54:13 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:54:13 PM	Tube furnace set to 0
12/17/2010	6:54:13 PM	Helium valve closed
12/17/2010	6:54:13 PM	H2 valve closed
12/17/2010	6:54:13 PM	BCl3 valve closed
12/17/2010	6:54:13 PM	PH3 valve closed
12/17/2010	6:54:13 PM	SiCl4 pre valve closed
12/17/2010	6:54:13 PM	SiCl4 post valve closed
12/17/2010	6:54:13 PM	Bubbler valve closed
12/17/2010	6:54:13 PM	Main Vac valve opened
12/17/2010	6:54:13 PM	Bypass valve opened
12/17/2010	6:54:13 PM	Helium MFC set to  0.000000
12/17/2010	6:54:13 PM	H2 MFC set to  0.000000
12/17/2010	6:54:13 PM	BCl3 MFC set to  0.000000
12/17/2010	6:54:13 PM	PHl3 MFC set to  0.000000
12/17/2010	6:54:13 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:54:13 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:54:14 PM	Tube furnace set to 0
12/17/2010	6:55:14 PM	H2 valve closed
12/17/2010	6:55:14 PM	BCl3 valve closed
12/17/2010	6:55:14 PM	PH3 valve closed
12/17/2010	6:55:14 PM	SiCl4 pre valve closed
12/17/2010	6:55:14 PM	SiCl4 post valve closed
12/17/2010	6:55:14 PM	Bubbler valve closed
12/17/2010	6:55:14 PM	Helium valve opened
12/17/2010	6:55:14 PM	Main Vac valve opened
12/17/2010	6:55:14 PM	Bypass valve opened
12/17/2010	6:55:14 PM	Helium MFC set to  100.000000
12/17/2010	6:55:14 PM	H2 MFC set to  0.000000
12/17/2010	6:55:14 PM	BCl3 MFC set to  0.000000
12/17/2010	6:55:14 PM	PHl3 MFC set to  0.000000
12/17/2010	6:55:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:55:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:55:14 PM	Tube furnace set to 0
12/17/2010	6:56:14 PM	Helium valve closed
12/17/2010	6:56:14 PM	H2 valve closed
12/17/2010	6:56:14 PM	BCl3 valve closed
12/17/2010	6:56:14 PM	PH3 valve closed
12/17/2010	6:56:14 PM	SiCl4 pre valve closed
12/17/2010	6:56:14 PM	SiCl4 post valve closed
12/17/2010	6:56:14 PM	Bubbler valve closed
12/17/2010	6:56:14 PM	Main Vac valve opened
12/17/2010	6:56:14 PM	Bypass valve opened
12/17/2010	6:56:14 PM	Helium MFC set to  0.000000
12/17/2010	6:56:14 PM	H2 MFC set to  0.000000
12/17/2010	6:56:14 PM	BCl3 MFC set to  0.000000
12/17/2010	6:56:14 PM	PHl3 MFC set to  0.000000
12/17/2010	6:56:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:56:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:56:14 PM	Tube furnace set to 0
12/17/2010	6:57:14 PM	H2 valve closed
12/17/2010	6:57:14 PM	BCl3 valve closed
12/17/2010	6:57:14 PM	PH3 valve closed
12/17/2010	6:57:14 PM	SiCl4 pre valve closed
12/17/2010	6:57:14 PM	SiCl4 post valve closed
12/17/2010	6:57:14 PM	Bubbler valve closed
12/17/2010	6:57:14 PM	Helium valve opened
12/17/2010	6:57:14 PM	Main Vac valve opened
12/17/2010	6:57:14 PM	Bypass valve opened
12/17/2010	6:57:14 PM	Helium MFC set to  100.000000
12/17/2010	6:57:14 PM	H2 MFC set to  0.000000
12/17/2010	6:57:14 PM	BCl3 MFC set to  0.000000
12/17/2010	6:57:14 PM	PHl3 MFC set to  0.000000
12/17/2010	6:57:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:57:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:57:14 PM	Tube furnace set to 0
12/17/2010	6:58:14 PM	Helium valve closed
12/17/2010	6:58:14 PM	H2 valve closed
12/17/2010	6:58:14 PM	BCl3 valve closed
12/17/2010	6:58:14 PM	PH3 valve closed
12/17/2010	6:58:14 PM	SiCl4 pre valve closed
12/17/2010	6:58:14 PM	SiCl4 post valve closed
12/17/2010	6:58:14 PM	Bubbler valve closed
12/17/2010	6:58:14 PM	Main Vac valve opened
12/17/2010	6:58:14 PM	Bypass valve opened
12/17/2010	6:58:14 PM	Helium MFC set to  0.000000
12/17/2010	6:58:14 PM	H2 MFC set to  0.000000
12/17/2010	6:58:14 PM	BCl3 MFC set to  0.000000
12/17/2010	6:58:14 PM	PHl3 MFC set to  0.000000
12/17/2010	6:58:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:58:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:58:14 PM	Tube furnace set to 0
12/17/2010	6:59:14 PM	H2 valve closed
12/17/2010	6:59:14 PM	BCl3 valve closed
12/17/2010	6:59:14 PM	PH3 valve closed
12/17/2010	6:59:14 PM	SiCl4 pre valve closed
12/17/2010	6:59:14 PM	SiCl4 post valve closed
12/17/2010	6:59:14 PM	Bubbler valve closed
12/17/2010	6:59:14 PM	Helium valve opened
12/17/2010	6:59:14 PM	Main Vac valve opened
12/17/2010	6:59:14 PM	Bypass valve opened
12/17/2010	6:59:14 PM	Helium MFC set to  100.000000
12/17/2010	6:59:14 PM	H2 MFC set to  0.000000
12/17/2010	6:59:14 PM	BCl3 MFC set to  0.000000
12/17/2010	6:59:14 PM	PHl3 MFC set to  0.000000
12/17/2010	6:59:14 PM	SiCl4 MFC set to  0.000000
12/17/2010	6:59:14 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	6:59:15 PM	Tube furnace set to 0
12/17/2010	7:00:15 PM	Helium valve closed
12/17/2010	7:00:15 PM	H2 valve closed
12/17/2010	7:00:15 PM	BCl3 valve closed
12/17/2010	7:00:15 PM	PH3 valve closed
12/17/2010	7:00:15 PM	SiCl4 pre valve closed
12/17/2010	7:00:15 PM	SiCl4 post valve closed
12/17/2010	7:00:15 PM	Bubbler valve closed
12/17/2010	7:00:15 PM	Main Vac valve opened
12/17/2010	7:00:15 PM	Bypass valve opened
12/17/2010	7:00:15 PM	Helium MFC set to  0.000000
12/17/2010	7:00:15 PM	H2 MFC set to  0.000000
12/17/2010	7:00:15 PM	BCl3 MFC set to  0.000000
12/17/2010	7:00:15 PM	PHl3 MFC set to  0.000000
12/17/2010	7:00:15 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:00:15 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:00:15 PM	Tube furnace set to 0
12/17/2010	7:01:15 PM	H2 valve closed
12/17/2010	7:01:15 PM	BCl3 valve closed
12/17/2010	7:01:15 PM	PH3 valve closed
12/17/2010	7:01:15 PM	SiCl4 pre valve closed
12/17/2010	7:01:15 PM	SiCl4 post valve closed
12/17/2010	7:01:15 PM	Bubbler valve closed
12/17/2010	7:01:15 PM	Helium valve opened
12/17/2010	7:01:15 PM	Main Vac valve opened
12/17/2010	7:01:15 PM	Bypass valve opened
12/17/2010	7:01:15 PM	Helium MFC set to  100.000000
12/17/2010	7:01:15 PM	H2 MFC set to  0.000000
12/17/2010	7:01:15 PM	BCl3 MFC set to  0.000000
12/17/2010	7:01:15 PM	PHl3 MFC set to  0.000000
12/17/2010	7:01:15 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:01:15 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:01:15 PM	Tube furnace set to 0
12/17/2010	7:02:15 PM	Helium valve closed
12/17/2010	7:02:15 PM	H2 valve closed
12/17/2010	7:02:15 PM	BCl3 valve closed
12/17/2010	7:02:15 PM	PH3 valve closed
12/17/2010	7:02:15 PM	SiCl4 pre valve closed
12/17/2010	7:02:15 PM	SiCl4 post valve closed
12/17/2010	7:02:15 PM	Bubbler valve closed
12/17/2010	7:02:15 PM	Main Vac valve opened
12/17/2010	7:02:15 PM	Bypass valve opened
12/17/2010	7:02:15 PM	Helium MFC set to  0.000000
12/17/2010	7:02:15 PM	H2 MFC set to  0.000000
12/17/2010	7:02:15 PM	BCl3 MFC set to  0.000000
12/17/2010	7:02:15 PM	PHl3 MFC set to  0.000000
12/17/2010	7:02:15 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:02:15 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:02:15 PM	Tube furnace set to 0
12/17/2010	7:03:15 PM	H2 valve closed
12/17/2010	7:03:15 PM	BCl3 valve closed
12/17/2010	7:03:15 PM	PH3 valve closed
12/17/2010	7:03:15 PM	SiCl4 pre valve closed
12/17/2010	7:03:15 PM	SiCl4 post valve closed
12/17/2010	7:03:15 PM	Bubbler valve closed
12/17/2010	7:03:15 PM	Helium valve opened
12/17/2010	7:03:15 PM	Main Vac valve opened
12/17/2010	7:03:15 PM	Bypass valve opened
12/17/2010	7:03:15 PM	Helium MFC set to  100.000000
12/17/2010	7:03:15 PM	H2 MFC set to  0.000000
12/17/2010	7:03:15 PM	BCl3 MFC set to  0.000000
12/17/2010	7:03:15 PM	PHl3 MFC set to  0.000000
12/17/2010	7:03:15 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:03:15 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:03:15 PM	Tube furnace set to 0
12/17/2010	7:04:15 PM	Helium valve closed
12/17/2010	7:04:15 PM	H2 valve closed
12/17/2010	7:04:15 PM	BCl3 valve closed
12/17/2010	7:04:15 PM	PH3 valve closed
12/17/2010	7:04:15 PM	SiCl4 pre valve closed
12/17/2010	7:04:15 PM	SiCl4 post valve closed
12/17/2010	7:04:15 PM	Bubbler valve closed
12/17/2010	7:04:15 PM	Main Vac valve opened
12/17/2010	7:04:15 PM	Bypass valve opened
12/17/2010	7:04:15 PM	Helium MFC set to  0.000000
12/17/2010	7:04:15 PM	H2 MFC set to  0.000000
12/17/2010	7:04:15 PM	BCl3 MFC set to  0.000000
12/17/2010	7:04:15 PM	PHl3 MFC set to  0.000000
12/17/2010	7:04:15 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:04:15 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:04:15 PM	Tube furnace set to 0
12/17/2010	7:05:16 PM	H2 valve closed
12/17/2010	7:05:16 PM	BCl3 valve closed
12/17/2010	7:05:16 PM	PH3 valve closed
12/17/2010	7:05:16 PM	SiCl4 pre valve closed
12/17/2010	7:05:16 PM	SiCl4 post valve closed
12/17/2010	7:05:16 PM	Bubbler valve closed
12/17/2010	7:05:16 PM	Helium valve opened
12/17/2010	7:05:16 PM	Main Vac valve opened
12/17/2010	7:05:16 PM	Bypass valve opened
12/17/2010	7:05:16 PM	Helium MFC set to  100.000000
12/17/2010	7:05:16 PM	H2 MFC set to  0.000000
12/17/2010	7:05:16 PM	BCl3 MFC set to  0.000000
12/17/2010	7:05:16 PM	PHl3 MFC set to  0.000000
12/17/2010	7:05:16 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:05:16 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:05:16 PM	Tube furnace set to 0
12/17/2010	7:06:16 PM	Helium valve closed
12/17/2010	7:06:16 PM	H2 valve closed
12/17/2010	7:06:16 PM	BCl3 valve closed
12/17/2010	7:06:16 PM	PH3 valve closed
12/17/2010	7:06:16 PM	SiCl4 pre valve closed
12/17/2010	7:06:16 PM	SiCl4 post valve closed
12/17/2010	7:06:16 PM	Bubbler valve closed
12/17/2010	7:06:16 PM	Main Vac valve opened
12/17/2010	7:06:16 PM	Bypass valve opened
12/17/2010	7:06:16 PM	Helium MFC set to  0.000000
12/17/2010	7:06:16 PM	H2 MFC set to  0.000000
12/17/2010	7:06:16 PM	BCl3 MFC set to  0.000000
12/17/2010	7:06:16 PM	PHl3 MFC set to  0.000000
12/17/2010	7:06:16 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:06:16 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:06:16 PM	Tube furnace set to 0
12/17/2010	7:07:16 PM	H2 valve closed
12/17/2010	7:07:16 PM	BCl3 valve closed
12/17/2010	7:07:16 PM	PH3 valve closed
12/17/2010	7:07:16 PM	SiCl4 pre valve closed
12/17/2010	7:07:16 PM	SiCl4 post valve closed
12/17/2010	7:07:16 PM	Bubbler valve closed
12/17/2010	7:07:16 PM	Helium valve opened
12/17/2010	7:07:16 PM	Main Vac valve opened
12/17/2010	7:07:16 PM	Bypass valve opened
12/17/2010	7:07:16 PM	Helium MFC set to  100.000000
12/17/2010	7:07:16 PM	H2 MFC set to  0.000000
12/17/2010	7:07:16 PM	BCl3 MFC set to  0.000000
12/17/2010	7:07:16 PM	PHl3 MFC set to  0.000000
12/17/2010	7:07:16 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:07:16 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:07:16 PM	Tube furnace set to 0
12/17/2010	7:08:16 PM	Helium valve closed
12/17/2010	7:08:16 PM	H2 valve closed
12/17/2010	7:08:16 PM	BCl3 valve closed
12/17/2010	7:08:16 PM	PH3 valve closed
12/17/2010	7:08:16 PM	SiCl4 pre valve closed
12/17/2010	7:08:16 PM	SiCl4 post valve closed
12/17/2010	7:08:16 PM	Bubbler valve closed
12/17/2010	7:08:16 PM	Main Vac valve opened
12/17/2010	7:08:16 PM	Bypass valve opened
12/17/2010	7:08:16 PM	Helium MFC set to  0.000000
12/17/2010	7:08:16 PM	H2 MFC set to  0.000000
12/17/2010	7:08:16 PM	BCl3 MFC set to  0.000000
12/17/2010	7:08:16 PM	PHl3 MFC set to  0.000000
12/17/2010	7:08:16 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:08:16 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:08:16 PM	Tube furnace set to 0
12/17/2010	7:09:16 PM	H2 valve closed
12/17/2010	7:09:16 PM	BCl3 valve closed
12/17/2010	7:09:16 PM	PH3 valve closed
12/17/2010	7:09:16 PM	SiCl4 pre valve closed
12/17/2010	7:09:16 PM	SiCl4 post valve closed
12/17/2010	7:09:16 PM	Bubbler valve closed
12/17/2010	7:09:17 PM	Helium valve opened
12/17/2010	7:09:17 PM	Main Vac valve opened
12/17/2010	7:09:17 PM	Bypass valve opened
12/17/2010	7:09:17 PM	Helium MFC set to  100.000000
12/17/2010	7:09:17 PM	H2 MFC set to  0.000000
12/17/2010	7:09:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:09:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:09:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:09:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:09:17 PM	Tube furnace set to 0
12/17/2010	7:10:17 PM	Helium valve closed
12/17/2010	7:10:17 PM	H2 valve closed
12/17/2010	7:10:17 PM	BCl3 valve closed
12/17/2010	7:10:17 PM	PH3 valve closed
12/17/2010	7:10:17 PM	SiCl4 pre valve closed
12/17/2010	7:10:17 PM	SiCl4 post valve closed
12/17/2010	7:10:17 PM	Bubbler valve closed
12/17/2010	7:10:17 PM	Main Vac valve opened
12/17/2010	7:10:17 PM	Bypass valve opened
12/17/2010	7:10:17 PM	Helium MFC set to  0.000000
12/17/2010	7:10:17 PM	H2 MFC set to  0.000000
12/17/2010	7:10:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:10:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:10:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:10:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:10:17 PM	Tube furnace set to 0
12/17/2010	7:11:17 PM	H2 valve closed
12/17/2010	7:11:17 PM	BCl3 valve closed
12/17/2010	7:11:17 PM	PH3 valve closed
12/17/2010	7:11:17 PM	SiCl4 pre valve closed
12/17/2010	7:11:17 PM	SiCl4 post valve closed
12/17/2010	7:11:17 PM	Bubbler valve closed
12/17/2010	7:11:17 PM	Helium valve opened
12/17/2010	7:11:17 PM	Main Vac valve opened
12/17/2010	7:11:17 PM	Bypass valve opened
12/17/2010	7:11:17 PM	Helium MFC set to  100.000000
12/17/2010	7:11:17 PM	H2 MFC set to  0.000000
12/17/2010	7:11:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:11:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:11:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:11:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:11:17 PM	Tube furnace set to 0
12/17/2010	7:12:17 PM	Helium valve closed
12/17/2010	7:12:17 PM	H2 valve closed
12/17/2010	7:12:17 PM	BCl3 valve closed
12/17/2010	7:12:17 PM	PH3 valve closed
12/17/2010	7:12:17 PM	SiCl4 pre valve closed
12/17/2010	7:12:17 PM	SiCl4 post valve closed
12/17/2010	7:12:17 PM	Bubbler valve closed
12/17/2010	7:12:17 PM	Main Vac valve opened
12/17/2010	7:12:17 PM	Bypass valve opened
12/17/2010	7:12:17 PM	Helium MFC set to  0.000000
12/17/2010	7:12:17 PM	H2 MFC set to  0.000000
12/17/2010	7:12:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:12:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:12:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:12:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:12:17 PM	Tube furnace set to 0
12/17/2010	7:13:17 PM	H2 valve closed
12/17/2010	7:13:17 PM	BCl3 valve closed
12/17/2010	7:13:17 PM	PH3 valve closed
12/17/2010	7:13:17 PM	SiCl4 pre valve closed
12/17/2010	7:13:17 PM	SiCl4 post valve closed
12/17/2010	7:13:17 PM	Bubbler valve closed
12/17/2010	7:13:17 PM	Helium valve opened
12/17/2010	7:13:17 PM	Main Vac valve opened
12/17/2010	7:13:17 PM	Bypass valve opened
12/17/2010	7:13:17 PM	Helium MFC set to  100.000000
12/17/2010	7:13:17 PM	H2 MFC set to  0.000000
12/17/2010	7:13:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:13:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:13:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:13:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:13:17 PM	Tube furnace set to 0
12/17/2010	7:14:18 PM	Helium valve closed
12/17/2010	7:14:18 PM	H2 valve closed
12/17/2010	7:14:18 PM	BCl3 valve closed
12/17/2010	7:14:18 PM	PH3 valve closed
12/17/2010	7:14:18 PM	SiCl4 pre valve closed
12/17/2010	7:14:18 PM	SiCl4 post valve closed
12/17/2010	7:14:18 PM	Bubbler valve closed
12/17/2010	7:14:18 PM	Main Vac valve opened
12/17/2010	7:14:18 PM	Bypass valve opened
12/17/2010	7:14:18 PM	Helium MFC set to  0.000000
12/17/2010	7:14:18 PM	H2 MFC set to  0.000000
12/17/2010	7:14:18 PM	BCl3 MFC set to  0.000000
12/17/2010	7:14:18 PM	PHl3 MFC set to  0.000000
12/17/2010	7:14:18 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:14:18 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:14:18 PM	Tube furnace set to 0
12/17/2010	7:14:19 PM	Run finished at 7:14 PM
12/17/2010	7:14:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	7:15:53 PM	Bypass valve closed
12/17/2010	7:15:53 PM	Main Vac valve closed
12/17/2010	7:16:14 PM	Main Vac valve opened
12/17/2010	7:16:14 PM	Bypass valve opened
12/17/2010	7:17:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	7:17:17 PM	Recipe started at 7:17 PM
12/17/2010	7:17:17 PM	H2 valve closed
12/17/2010	7:17:17 PM	BCl3 valve closed
12/17/2010	7:17:17 PM	PH3 valve closed
12/17/2010	7:17:17 PM	SiCl4 pre valve closed
12/17/2010	7:17:17 PM	SiCl4 post valve closed
12/17/2010	7:17:17 PM	Main Vac valve closed
12/17/2010	7:17:17 PM	Bypass valve closed
12/17/2010	7:17:17 PM	Bubbler valve closed
12/17/2010	7:17:17 PM	Helium valve opened
12/17/2010	7:17:17 PM	Helium MFC set to  500.000000
12/17/2010	7:17:17 PM	H2 MFC set to  0.000000
12/17/2010	7:17:17 PM	BCl3 MFC set to  0.000000
12/17/2010	7:17:17 PM	PHl3 MFC set to  0.000000
12/17/2010	7:17:17 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:17:17 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:17:17 PM	Tube furnace set to 0
12/17/2010	7:18:32 PM	Helium valve closed
12/17/2010	7:18:32 PM	H2 valve closed
12/17/2010	7:18:32 PM	BCl3 valve closed
12/17/2010	7:18:32 PM	PH3 valve closed
12/17/2010	7:18:32 PM	SiCl4 pre valve closed
12/17/2010	7:18:32 PM	SiCl4 post valve closed
12/17/2010	7:18:32 PM	Main Vac valve closed
12/17/2010	7:18:32 PM	Bypass valve closed
12/17/2010	7:18:32 PM	Bubbler valve closed
12/17/2010	7:18:32 PM	Helium MFC set to  0.000000
12/17/2010	7:18:32 PM	H2 MFC set to  0.000000
12/17/2010	7:18:32 PM	BCl3 MFC set to  0.000000
12/17/2010	7:18:32 PM	PHl3 MFC set to  0.000000
12/17/2010	7:18:32 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:18:32 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:18:33 PM	Tube furnace set to 0
12/17/2010	7:18:33 PM	Run finished at 7:18 PM
12/17/2010	7:18:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	7:27:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	7:27:04 PM	Recipe started at 7:27 PM
12/17/2010	7:27:04 PM	Helium valve closed
12/17/2010	7:27:04 PM	H2 valve closed
12/17/2010	7:27:04 PM	BCl3 valve closed
12/17/2010	7:27:04 PM	PH3 valve closed
12/17/2010	7:27:04 PM	SiCl4 pre valve closed
12/17/2010	7:27:04 PM	SiCl4 post valve closed
12/17/2010	7:27:04 PM	Main Vac valve closed
12/17/2010	7:27:04 PM	Bubbler valve closed
12/17/2010	7:27:04 PM	Bypass valve opened
12/17/2010	7:27:04 PM	Helium MFC set to  0.000000
12/17/2010	7:27:04 PM	H2 MFC set to  0.000000
12/17/2010	7:27:04 PM	BCl3 MFC set to  0.000000
12/17/2010	7:27:04 PM	PHl3 MFC set to  0.000000
12/17/2010	7:27:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:27:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:27:05 PM	Tube furnace set to 0
12/17/2010	7:28:01 PM	Helium valve closed
12/17/2010	7:28:01 PM	H2 valve closed
12/17/2010	7:28:01 PM	BCl3 valve closed
12/17/2010	7:28:01 PM	PH3 valve closed
12/17/2010	7:28:01 PM	SiCl4 pre valve closed
12/17/2010	7:28:01 PM	SiCl4 post valve closed
12/17/2010	7:28:01 PM	Bubbler valve closed
12/17/2010	7:28:01 PM	Main Vac valve opened
12/17/2010	7:28:01 PM	Bypass valve opened
12/17/2010	7:28:01 PM	Helium MFC set to  0.000000
12/17/2010	7:28:01 PM	H2 MFC set to  0.000000
12/17/2010	7:28:01 PM	BCl3 MFC set to  0.000000
12/17/2010	7:28:01 PM	PHl3 MFC set to  0.000000
12/17/2010	7:28:01 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:28:01 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:28:01 PM	Tube furnace set to 0
12/17/2010	7:28:02 PM	Run finished at 7:28 PM
12/17/2010	7:28:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	7:28:42 PM	Bypass valve closed
12/17/2010	7:28:42 PM	Main Vac valve closed
12/17/2010	7:28:54 PM	Main Vac valve opened
12/17/2010	7:28:54 PM	Bypass valve opened
12/17/2010	7:29:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	7:29:27 PM	Recipe started at 7:29 PM
12/17/2010	7:29:27 PM	Helium valve closed
12/17/2010	7:29:27 PM	H2 valve closed
12/17/2010	7:29:27 PM	BCl3 valve closed
12/17/2010	7:29:27 PM	PH3 valve closed
12/17/2010	7:29:27 PM	SiCl4 pre valve closed
12/17/2010	7:29:27 PM	SiCl4 post valve closed
12/17/2010	7:29:27 PM	Main Vac valve closed
12/17/2010	7:29:27 PM	Bubbler valve closed
12/17/2010	7:29:27 PM	Bypass valve opened
12/17/2010	7:29:27 PM	Helium MFC set to  0.000000
12/17/2010	7:29:27 PM	H2 MFC set to  0.000000
12/17/2010	7:29:27 PM	BCl3 MFC set to  0.000000
12/17/2010	7:29:27 PM	PHl3 MFC set to  0.000000
12/17/2010	7:29:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:29:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:29:27 PM	Tube furnace set to 0
12/17/2010	7:29:27 PM	Helium valve closed
12/17/2010	7:29:27 PM	H2 valve closed
12/17/2010	7:29:27 PM	BCl3 valve closed
12/17/2010	7:29:27 PM	PH3 valve closed
12/17/2010	7:29:27 PM	SiCl4 pre valve closed
12/17/2010	7:29:27 PM	SiCl4 post valve closed
12/17/2010	7:29:27 PM	Bubbler valve closed
12/17/2010	7:29:27 PM	Main Vac valve opened
12/17/2010	7:29:27 PM	Bypass valve opened
12/17/2010	7:29:27 PM	Helium MFC set to  0.000000
12/17/2010	7:29:27 PM	H2 MFC set to  0.000000
12/17/2010	7:29:27 PM	BCl3 MFC set to  0.000000
12/17/2010	7:29:27 PM	PHl3 MFC set to  0.000000
12/17/2010	7:29:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:29:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:29:27 PM	Tube furnace set to 0
12/17/2010	7:30:27 PM	H2 valve closed
12/17/2010	7:30:27 PM	BCl3 valve closed
12/17/2010	7:30:27 PM	PH3 valve closed
12/17/2010	7:30:27 PM	SiCl4 pre valve closed
12/17/2010	7:30:27 PM	SiCl4 post valve closed
12/17/2010	7:30:27 PM	Bubbler valve closed
12/17/2010	7:30:27 PM	Helium valve opened
12/17/2010	7:30:27 PM	Main Vac valve opened
12/17/2010	7:30:27 PM	Bypass valve opened
12/17/2010	7:30:27 PM	Helium MFC set to  100.000000
12/17/2010	7:30:27 PM	H2 MFC set to  0.000000
12/17/2010	7:30:27 PM	BCl3 MFC set to  0.000000
12/17/2010	7:30:27 PM	PHl3 MFC set to  0.000000
12/17/2010	7:30:27 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:30:27 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:30:27 PM	Tube furnace set to 0
12/17/2010	7:31:28 PM	Helium valve closed
12/17/2010	7:31:28 PM	H2 valve closed
12/17/2010	7:31:28 PM	BCl3 valve closed
12/17/2010	7:31:28 PM	PH3 valve closed
12/17/2010	7:31:28 PM	SiCl4 pre valve closed
12/17/2010	7:31:28 PM	SiCl4 post valve closed
12/17/2010	7:31:28 PM	Bubbler valve closed
12/17/2010	7:31:28 PM	Main Vac valve opened
12/17/2010	7:31:28 PM	Bypass valve opened
12/17/2010	7:31:28 PM	Helium MFC set to  0.000000
12/17/2010	7:31:28 PM	H2 MFC set to  0.000000
12/17/2010	7:31:28 PM	BCl3 MFC set to  0.000000
12/17/2010	7:31:28 PM	PHl3 MFC set to  0.000000
12/17/2010	7:31:28 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:31:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:31:28 PM	Tube furnace set to 0
12/17/2010	7:32:28 PM	H2 valve closed
12/17/2010	7:32:28 PM	BCl3 valve closed
12/17/2010	7:32:28 PM	PH3 valve closed
12/17/2010	7:32:28 PM	SiCl4 pre valve closed
12/17/2010	7:32:28 PM	SiCl4 post valve closed
12/17/2010	7:32:28 PM	Bubbler valve closed
12/17/2010	7:32:28 PM	Helium valve opened
12/17/2010	7:32:28 PM	Main Vac valve opened
12/17/2010	7:32:28 PM	Bypass valve opened
12/17/2010	7:32:28 PM	Helium MFC set to  100.000000
12/17/2010	7:32:28 PM	H2 MFC set to  0.000000
12/17/2010	7:32:28 PM	BCl3 MFC set to  0.000000
12/17/2010	7:32:28 PM	PHl3 MFC set to  0.000000
12/17/2010	7:32:28 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:32:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:32:28 PM	Tube furnace set to 0
12/17/2010	7:33:28 PM	Helium valve closed
12/17/2010	7:33:28 PM	H2 valve closed
12/17/2010	7:33:28 PM	BCl3 valve closed
12/17/2010	7:33:28 PM	PH3 valve closed
12/17/2010	7:33:28 PM	SiCl4 pre valve closed
12/17/2010	7:33:28 PM	SiCl4 post valve closed
12/17/2010	7:33:28 PM	Bubbler valve closed
12/17/2010	7:33:28 PM	Main Vac valve opened
12/17/2010	7:33:28 PM	Bypass valve opened
12/17/2010	7:33:28 PM	Helium MFC set to  0.000000
12/17/2010	7:33:28 PM	H2 MFC set to  0.000000
12/17/2010	7:33:28 PM	BCl3 MFC set to  0.000000
12/17/2010	7:33:28 PM	PHl3 MFC set to  0.000000
12/17/2010	7:33:28 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:33:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:33:28 PM	Tube furnace set to 0
12/17/2010	7:34:28 PM	H2 valve closed
12/17/2010	7:34:28 PM	BCl3 valve closed
12/17/2010	7:34:28 PM	PH3 valve closed
12/17/2010	7:34:28 PM	SiCl4 pre valve closed
12/17/2010	7:34:28 PM	SiCl4 post valve closed
12/17/2010	7:34:28 PM	Bubbler valve closed
12/17/2010	7:34:28 PM	Helium valve opened
12/17/2010	7:34:28 PM	Main Vac valve opened
12/17/2010	7:34:28 PM	Bypass valve opened
12/17/2010	7:34:28 PM	Helium MFC set to  100.000000
12/17/2010	7:34:28 PM	H2 MFC set to  0.000000
12/17/2010	7:34:28 PM	BCl3 MFC set to  0.000000
12/17/2010	7:34:28 PM	PHl3 MFC set to  0.000000
12/17/2010	7:34:28 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:34:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:34:29 PM	Tube furnace set to 0
12/17/2010	7:35:29 PM	Helium valve closed
12/17/2010	7:35:29 PM	H2 valve closed
12/17/2010	7:35:29 PM	BCl3 valve closed
12/17/2010	7:35:29 PM	PH3 valve closed
12/17/2010	7:35:29 PM	SiCl4 pre valve closed
12/17/2010	7:35:29 PM	SiCl4 post valve closed
12/17/2010	7:35:29 PM	Bubbler valve closed
12/17/2010	7:35:29 PM	Main Vac valve opened
12/17/2010	7:35:29 PM	Bypass valve opened
12/17/2010	7:35:29 PM	Helium MFC set to  0.000000
12/17/2010	7:35:29 PM	H2 MFC set to  0.000000
12/17/2010	7:35:29 PM	BCl3 MFC set to  0.000000
12/17/2010	7:35:29 PM	PHl3 MFC set to  0.000000
12/17/2010	7:35:29 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:35:29 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:35:29 PM	Tube furnace set to 0
12/17/2010	7:36:29 PM	H2 valve closed
12/17/2010	7:36:29 PM	BCl3 valve closed
12/17/2010	7:36:29 PM	PH3 valve closed
12/17/2010	7:36:29 PM	SiCl4 pre valve closed
12/17/2010	7:36:29 PM	SiCl4 post valve closed
12/17/2010	7:36:29 PM	Bubbler valve closed
12/17/2010	7:36:29 PM	Helium valve opened
12/17/2010	7:36:29 PM	Main Vac valve opened
12/17/2010	7:36:29 PM	Bypass valve opened
12/17/2010	7:36:29 PM	Helium MFC set to  100.000000
12/17/2010	7:36:29 PM	H2 MFC set to  0.000000
12/17/2010	7:36:29 PM	BCl3 MFC set to  0.000000
12/17/2010	7:36:29 PM	PHl3 MFC set to  0.000000
12/17/2010	7:36:29 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:36:29 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:36:29 PM	Tube furnace set to 0
12/17/2010	7:37:29 PM	Helium valve closed
12/17/2010	7:37:29 PM	H2 valve closed
12/17/2010	7:37:29 PM	BCl3 valve closed
12/17/2010	7:37:29 PM	PH3 valve closed
12/17/2010	7:37:29 PM	SiCl4 pre valve closed
12/17/2010	7:37:29 PM	SiCl4 post valve closed
12/17/2010	7:37:29 PM	Bubbler valve closed
12/17/2010	7:37:29 PM	Main Vac valve opened
12/17/2010	7:37:29 PM	Bypass valve opened
12/17/2010	7:37:29 PM	Helium MFC set to  0.000000
12/17/2010	7:37:29 PM	H2 MFC set to  0.000000
12/17/2010	7:37:29 PM	BCl3 MFC set to  0.000000
12/17/2010	7:37:29 PM	PHl3 MFC set to  0.000000
12/17/2010	7:37:29 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:37:29 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:37:29 PM	Tube furnace set to 0
12/17/2010	7:38:30 PM	H2 valve closed
12/17/2010	7:38:30 PM	BCl3 valve closed
12/17/2010	7:38:30 PM	PH3 valve closed
12/17/2010	7:38:30 PM	SiCl4 pre valve closed
12/17/2010	7:38:30 PM	SiCl4 post valve closed
12/17/2010	7:38:30 PM	Bubbler valve closed
12/17/2010	7:38:30 PM	Helium valve opened
12/17/2010	7:38:30 PM	Main Vac valve opened
12/17/2010	7:38:30 PM	Bypass valve opened
12/17/2010	7:38:30 PM	Helium MFC set to  100.000000
12/17/2010	7:38:30 PM	H2 MFC set to  0.000000
12/17/2010	7:38:30 PM	BCl3 MFC set to  0.000000
12/17/2010	7:38:30 PM	PHl3 MFC set to  0.000000
12/17/2010	7:38:30 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:38:30 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:38:30 PM	Tube furnace set to 0
12/17/2010	7:39:30 PM	Helium valve closed
12/17/2010	7:39:30 PM	H2 valve closed
12/17/2010	7:39:30 PM	BCl3 valve closed
12/17/2010	7:39:30 PM	PH3 valve closed
12/17/2010	7:39:30 PM	SiCl4 pre valve closed
12/17/2010	7:39:30 PM	SiCl4 post valve closed
12/17/2010	7:39:30 PM	Bubbler valve closed
12/17/2010	7:39:30 PM	Main Vac valve opened
12/17/2010	7:39:30 PM	Bypass valve opened
12/17/2010	7:39:30 PM	Helium MFC set to  0.000000
12/17/2010	7:39:30 PM	H2 MFC set to  0.000000
12/17/2010	7:39:30 PM	BCl3 MFC set to  0.000000
12/17/2010	7:39:30 PM	PHl3 MFC set to  0.000000
12/17/2010	7:39:30 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:39:30 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:39:30 PM	Tube furnace set to 0
12/17/2010	7:40:30 PM	H2 valve closed
12/17/2010	7:40:30 PM	BCl3 valve closed
12/17/2010	7:40:30 PM	PH3 valve closed
12/17/2010	7:40:30 PM	SiCl4 pre valve closed
12/17/2010	7:40:30 PM	SiCl4 post valve closed
12/17/2010	7:40:30 PM	Bubbler valve closed
12/17/2010	7:40:30 PM	Helium valve opened
12/17/2010	7:40:30 PM	Main Vac valve opened
12/17/2010	7:40:30 PM	Bypass valve opened
12/17/2010	7:40:30 PM	Helium MFC set to  100.000000
12/17/2010	7:40:30 PM	H2 MFC set to  0.000000
12/17/2010	7:40:30 PM	BCl3 MFC set to  0.000000
12/17/2010	7:40:30 PM	PHl3 MFC set to  0.000000
12/17/2010	7:40:30 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:40:30 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:40:30 PM	Tube furnace set to 0
12/17/2010	7:41:30 PM	Helium valve closed
12/17/2010	7:41:30 PM	H2 valve closed
12/17/2010	7:41:30 PM	BCl3 valve closed
12/17/2010	7:41:30 PM	PH3 valve closed
12/17/2010	7:41:30 PM	SiCl4 pre valve closed
12/17/2010	7:41:30 PM	SiCl4 post valve closed
12/17/2010	7:41:30 PM	Bubbler valve closed
12/17/2010	7:41:30 PM	Main Vac valve opened
12/17/2010	7:41:30 PM	Bypass valve opened
12/17/2010	7:41:30 PM	Helium MFC set to  0.000000
12/17/2010	7:41:30 PM	H2 MFC set to  0.000000
12/17/2010	7:41:30 PM	BCl3 MFC set to  0.000000
12/17/2010	7:41:30 PM	PHl3 MFC set to  0.000000
12/17/2010	7:41:30 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:41:30 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:41:30 PM	Tube furnace set to 0
12/17/2010	7:42:30 PM	H2 valve closed
12/17/2010	7:42:30 PM	BCl3 valve closed
12/17/2010	7:42:30 PM	PH3 valve closed
12/17/2010	7:42:30 PM	SiCl4 pre valve closed
12/17/2010	7:42:30 PM	SiCl4 post valve closed
12/17/2010	7:42:30 PM	Bubbler valve closed
12/17/2010	7:42:31 PM	Helium valve opened
12/17/2010	7:42:31 PM	Main Vac valve opened
12/17/2010	7:42:31 PM	Bypass valve opened
12/17/2010	7:42:31 PM	Helium MFC set to  100.000000
12/17/2010	7:42:31 PM	H2 MFC set to  0.000000
12/17/2010	7:42:31 PM	BCl3 MFC set to  0.000000
12/17/2010	7:42:31 PM	PHl3 MFC set to  0.000000
12/17/2010	7:42:31 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:42:31 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:42:31 PM	Tube furnace set to 0
12/17/2010	7:43:31 PM	Helium valve closed
12/17/2010	7:43:31 PM	H2 valve closed
12/17/2010	7:43:31 PM	BCl3 valve closed
12/17/2010	7:43:31 PM	PH3 valve closed
12/17/2010	7:43:31 PM	SiCl4 pre valve closed
12/17/2010	7:43:31 PM	SiCl4 post valve closed
12/17/2010	7:43:31 PM	Bubbler valve closed
12/17/2010	7:43:31 PM	Main Vac valve opened
12/17/2010	7:43:31 PM	Bypass valve opened
12/17/2010	7:43:31 PM	Helium MFC set to  0.000000
12/17/2010	7:43:31 PM	H2 MFC set to  0.000000
12/17/2010	7:43:31 PM	BCl3 MFC set to  0.000000
12/17/2010	7:43:31 PM	PHl3 MFC set to  0.000000
12/17/2010	7:43:31 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:43:31 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:43:31 PM	Tube furnace set to 0
12/17/2010	7:43:59 PM	H2 valve closed
12/17/2010	7:43:59 PM	BCl3 valve closed
12/17/2010	7:43:59 PM	PH3 valve closed
12/17/2010	7:43:59 PM	SiCl4 pre valve closed
12/17/2010	7:43:59 PM	SiCl4 post valve closed
12/17/2010	7:43:59 PM	Bubbler valve closed
12/17/2010	7:43:59 PM	Helium valve opened
12/17/2010	7:43:59 PM	Main Vac valve opened
12/17/2010	7:43:59 PM	Bypass valve opened
12/17/2010	7:43:59 PM	Helium MFC set to  100.000000
12/17/2010	7:43:59 PM	H2 MFC set to  0.000000
12/17/2010	7:43:59 PM	BCl3 MFC set to  0.000000
12/17/2010	7:43:59 PM	PHl3 MFC set to  0.000000
12/17/2010	7:43:59 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:43:59 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:43:59 PM	Tube furnace set to 0
12/17/2010	7:44:00 PM	Helium valve closed
12/17/2010	7:44:00 PM	H2 valve closed
12/17/2010	7:44:00 PM	BCl3 valve closed
12/17/2010	7:44:00 PM	PH3 valve closed
12/17/2010	7:44:00 PM	SiCl4 pre valve closed
12/17/2010	7:44:00 PM	SiCl4 post valve closed
12/17/2010	7:44:00 PM	Bubbler valve closed
12/17/2010	7:44:00 PM	Main Vac valve opened
12/17/2010	7:44:00 PM	Bypass valve opened
12/17/2010	7:44:00 PM	Helium MFC set to  0.000000
12/17/2010	7:44:00 PM	H2 MFC set to  0.000000
12/17/2010	7:44:00 PM	BCl3 MFC set to  0.000000
12/17/2010	7:44:00 PM	PHl3 MFC set to  0.000000
12/17/2010	7:44:00 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:44:00 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:44:00 PM	Tube furnace set to 0
12/17/2010	7:44:01 PM	H2 valve closed
12/17/2010	7:44:01 PM	BCl3 valve closed
12/17/2010	7:44:01 PM	PH3 valve closed
12/17/2010	7:44:01 PM	SiCl4 pre valve closed
12/17/2010	7:44:01 PM	SiCl4 post valve closed
12/17/2010	7:44:01 PM	Bubbler valve closed
12/17/2010	7:44:01 PM	Helium valve opened
12/17/2010	7:44:01 PM	Main Vac valve opened
12/17/2010	7:44:01 PM	Bypass valve opened
12/17/2010	7:44:01 PM	Helium MFC set to  100.000000
12/17/2010	7:44:01 PM	H2 MFC set to  0.000000
12/17/2010	7:44:01 PM	BCl3 MFC set to  0.000000
12/17/2010	7:44:01 PM	PHl3 MFC set to  0.000000
12/17/2010	7:44:01 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:44:01 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:44:01 PM	Tube furnace set to 0
12/17/2010	7:44:02 PM	Helium valve closed
12/17/2010	7:44:02 PM	H2 valve closed
12/17/2010	7:44:02 PM	BCl3 valve closed
12/17/2010	7:44:02 PM	PH3 valve closed
12/17/2010	7:44:02 PM	SiCl4 pre valve closed
12/17/2010	7:44:02 PM	SiCl4 post valve closed
12/17/2010	7:44:02 PM	Bubbler valve closed
12/17/2010	7:44:02 PM	Main Vac valve opened
12/17/2010	7:44:02 PM	Bypass valve opened
12/17/2010	7:44:02 PM	Helium MFC set to  0.000000
12/17/2010	7:44:02 PM	H2 MFC set to  0.000000
12/17/2010	7:44:02 PM	BCl3 MFC set to  0.000000
12/17/2010	7:44:02 PM	PHl3 MFC set to  0.000000
12/17/2010	7:44:02 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:44:02 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:44:02 PM	Tube furnace set to 0
12/17/2010	7:44:03 PM	H2 valve closed
12/17/2010	7:44:03 PM	BCl3 valve closed
12/17/2010	7:44:03 PM	PH3 valve closed
12/17/2010	7:44:03 PM	SiCl4 pre valve closed
12/17/2010	7:44:03 PM	SiCl4 post valve closed
12/17/2010	7:44:03 PM	Bubbler valve closed
12/17/2010	7:44:03 PM	Helium valve opened
12/17/2010	7:44:03 PM	Main Vac valve opened
12/17/2010	7:44:03 PM	Bypass valve opened
12/17/2010	7:44:03 PM	Helium MFC set to  100.000000
12/17/2010	7:44:03 PM	H2 MFC set to  0.000000
12/17/2010	7:44:03 PM	BCl3 MFC set to  0.000000
12/17/2010	7:44:03 PM	PHl3 MFC set to  0.000000
12/17/2010	7:44:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:44:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:44:03 PM	Tube furnace set to 0
12/17/2010	7:45:03 PM	Helium valve closed
12/17/2010	7:45:03 PM	H2 valve closed
12/17/2010	7:45:03 PM	BCl3 valve closed
12/17/2010	7:45:03 PM	PH3 valve closed
12/17/2010	7:45:03 PM	SiCl4 pre valve closed
12/17/2010	7:45:03 PM	SiCl4 post valve closed
12/17/2010	7:45:03 PM	Bubbler valve closed
12/17/2010	7:45:03 PM	Main Vac valve opened
12/17/2010	7:45:03 PM	Bypass valve opened
12/17/2010	7:45:03 PM	Helium MFC set to  0.000000
12/17/2010	7:45:03 PM	H2 MFC set to  0.000000
12/17/2010	7:45:03 PM	BCl3 MFC set to  0.000000
12/17/2010	7:45:03 PM	PHl3 MFC set to  0.000000
12/17/2010	7:45:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:45:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:45:03 PM	Tube furnace set to 0
12/17/2010	7:45:04 PM	Run finished at 7:45 PM
12/17/2010	7:45:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	7:46:03 PM	Bypass valve closed
12/17/2010	7:46:03 PM	Main Vac valve closed
12/17/2010	7:46:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	7:46:39 PM	Recipe started at 7:46 PM
12/17/2010	7:46:39 PM	Helium valve closed
12/17/2010	7:46:39 PM	H2 valve closed
12/17/2010	7:46:39 PM	BCl3 valve closed
12/17/2010	7:46:39 PM	PH3 valve closed
12/17/2010	7:46:39 PM	SiCl4 pre valve closed
12/17/2010	7:46:39 PM	SiCl4 post valve closed
12/17/2010	7:46:39 PM	Main Vac valve closed
12/17/2010	7:46:39 PM	Bubbler valve closed
12/17/2010	7:46:39 PM	Bypass valve opened
12/17/2010	7:46:39 PM	Helium MFC set to  0.000000
12/17/2010	7:46:39 PM	H2 MFC set to  0.000000
12/17/2010	7:46:39 PM	BCl3 MFC set to  0.000000
12/17/2010	7:46:39 PM	PHl3 MFC set to  0.000000
12/17/2010	7:46:39 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:46:39 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:46:39 PM	Tube furnace set to 0
12/17/2010	7:46:39 PM	Helium valve closed
12/17/2010	7:46:39 PM	H2 valve closed
12/17/2010	7:46:39 PM	BCl3 valve closed
12/17/2010	7:46:39 PM	PH3 valve closed
12/17/2010	7:46:39 PM	SiCl4 pre valve closed
12/17/2010	7:46:39 PM	SiCl4 post valve closed
12/17/2010	7:46:39 PM	Bubbler valve closed
12/17/2010	7:46:39 PM	Main Vac valve opened
12/17/2010	7:46:39 PM	Bypass valve opened
12/17/2010	7:46:39 PM	Helium MFC set to  0.000000
12/17/2010	7:46:39 PM	H2 MFC set to  0.000000
12/17/2010	7:46:39 PM	BCl3 MFC set to  0.000000
12/17/2010	7:46:39 PM	PHl3 MFC set to  0.000000
12/17/2010	7:46:39 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:46:39 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:46:39 PM	Tube furnace set to 0
12/17/2010	7:47:39 PM	H2 valve closed
12/17/2010	7:47:39 PM	BCl3 valve closed
12/17/2010	7:47:39 PM	PH3 valve closed
12/17/2010	7:47:39 PM	SiCl4 pre valve closed
12/17/2010	7:47:39 PM	SiCl4 post valve closed
12/17/2010	7:47:39 PM	Bubbler valve closed
12/17/2010	7:47:39 PM	Helium valve opened
12/17/2010	7:47:39 PM	Main Vac valve opened
12/17/2010	7:47:39 PM	Bypass valve opened
12/17/2010	7:47:39 PM	Helium MFC set to  100.000000
12/17/2010	7:47:39 PM	H2 MFC set to  0.000000
12/17/2010	7:47:39 PM	BCl3 MFC set to  0.000000
12/17/2010	7:47:39 PM	PHl3 MFC set to  0.000000
12/17/2010	7:47:39 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:47:39 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:47:39 PM	Tube furnace set to 0
12/17/2010	7:48:40 PM	Helium valve closed
12/17/2010	7:48:40 PM	H2 valve closed
12/17/2010	7:48:40 PM	BCl3 valve closed
12/17/2010	7:48:40 PM	PH3 valve closed
12/17/2010	7:48:40 PM	SiCl4 pre valve closed
12/17/2010	7:48:40 PM	SiCl4 post valve closed
12/17/2010	7:48:40 PM	Bubbler valve closed
12/17/2010	7:48:40 PM	Main Vac valve opened
12/17/2010	7:48:40 PM	Bypass valve opened
12/17/2010	7:48:40 PM	Helium MFC set to  0.000000
12/17/2010	7:48:40 PM	H2 MFC set to  0.000000
12/17/2010	7:48:40 PM	BCl3 MFC set to  0.000000
12/17/2010	7:48:40 PM	PHl3 MFC set to  0.000000
12/17/2010	7:48:40 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:48:40 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:48:40 PM	Tube furnace set to 0
12/17/2010	7:49:40 PM	H2 valve closed
12/17/2010	7:49:40 PM	BCl3 valve closed
12/17/2010	7:49:40 PM	PH3 valve closed
12/17/2010	7:49:40 PM	SiCl4 pre valve closed
12/17/2010	7:49:40 PM	SiCl4 post valve closed
12/17/2010	7:49:40 PM	Bubbler valve closed
12/17/2010	7:49:40 PM	Helium valve opened
12/17/2010	7:49:40 PM	Main Vac valve opened
12/17/2010	7:49:40 PM	Bypass valve opened
12/17/2010	7:49:40 PM	Helium MFC set to  100.000000
12/17/2010	7:49:40 PM	H2 MFC set to  0.000000
12/17/2010	7:49:40 PM	BCl3 MFC set to  0.000000
12/17/2010	7:49:40 PM	PHl3 MFC set to  0.000000
12/17/2010	7:49:40 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:49:40 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:49:40 PM	Tube furnace set to 0
12/17/2010	7:50:40 PM	Helium valve closed
12/17/2010	7:50:40 PM	H2 valve closed
12/17/2010	7:50:40 PM	BCl3 valve closed
12/17/2010	7:50:40 PM	PH3 valve closed
12/17/2010	7:50:40 PM	SiCl4 pre valve closed
12/17/2010	7:50:40 PM	SiCl4 post valve closed
12/17/2010	7:50:40 PM	Bubbler valve closed
12/17/2010	7:50:40 PM	Main Vac valve opened
12/17/2010	7:50:40 PM	Bypass valve opened
12/17/2010	7:50:40 PM	Helium MFC set to  0.000000
12/17/2010	7:50:40 PM	H2 MFC set to  0.000000
12/17/2010	7:50:40 PM	BCl3 MFC set to  0.000000
12/17/2010	7:50:40 PM	PHl3 MFC set to  0.000000
12/17/2010	7:50:40 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:50:40 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:50:40 PM	Tube furnace set to 0
12/17/2010	7:51:40 PM	H2 valve closed
12/17/2010	7:51:40 PM	BCl3 valve closed
12/17/2010	7:51:40 PM	PH3 valve closed
12/17/2010	7:51:40 PM	SiCl4 pre valve closed
12/17/2010	7:51:40 PM	SiCl4 post valve closed
12/17/2010	7:51:40 PM	Bubbler valve closed
12/17/2010	7:51:40 PM	Helium valve opened
12/17/2010	7:51:40 PM	Main Vac valve opened
12/17/2010	7:51:40 PM	Bypass valve opened
12/17/2010	7:51:40 PM	Helium MFC set to  100.000000
12/17/2010	7:51:40 PM	H2 MFC set to  0.000000
12/17/2010	7:51:40 PM	BCl3 MFC set to  0.000000
12/17/2010	7:51:40 PM	PHl3 MFC set to  0.000000
12/17/2010	7:51:40 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:51:40 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:51:40 PM	Tube furnace set to 0
12/17/2010	7:52:41 PM	Helium valve closed
12/17/2010	7:52:41 PM	H2 valve closed
12/17/2010	7:52:41 PM	BCl3 valve closed
12/17/2010	7:52:41 PM	PH3 valve closed
12/17/2010	7:52:41 PM	SiCl4 pre valve closed
12/17/2010	7:52:41 PM	SiCl4 post valve closed
12/17/2010	7:52:41 PM	Bubbler valve closed
12/17/2010	7:52:41 PM	Main Vac valve opened
12/17/2010	7:52:41 PM	Bypass valve opened
12/17/2010	7:52:41 PM	Helium MFC set to  0.000000
12/17/2010	7:52:41 PM	H2 MFC set to  0.000000
12/17/2010	7:52:41 PM	BCl3 MFC set to  0.000000
12/17/2010	7:52:41 PM	PHl3 MFC set to  0.000000
12/17/2010	7:52:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:52:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:52:41 PM	Tube furnace set to 0
12/17/2010	7:53:41 PM	H2 valve closed
12/17/2010	7:53:41 PM	BCl3 valve closed
12/17/2010	7:53:41 PM	PH3 valve closed
12/17/2010	7:53:41 PM	SiCl4 pre valve closed
12/17/2010	7:53:41 PM	SiCl4 post valve closed
12/17/2010	7:53:41 PM	Bubbler valve closed
12/17/2010	7:53:41 PM	Helium valve opened
12/17/2010	7:53:41 PM	Main Vac valve opened
12/17/2010	7:53:41 PM	Bypass valve opened
12/17/2010	7:53:41 PM	Helium MFC set to  100.000000
12/17/2010	7:53:41 PM	H2 MFC set to  0.000000
12/17/2010	7:53:41 PM	BCl3 MFC set to  0.000000
12/17/2010	7:53:41 PM	PHl3 MFC set to  0.000000
12/17/2010	7:53:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:53:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:53:41 PM	Tube furnace set to 0
12/17/2010	7:54:41 PM	Helium valve closed
12/17/2010	7:54:41 PM	H2 valve closed
12/17/2010	7:54:41 PM	BCl3 valve closed
12/17/2010	7:54:41 PM	PH3 valve closed
12/17/2010	7:54:41 PM	SiCl4 pre valve closed
12/17/2010	7:54:41 PM	SiCl4 post valve closed
12/17/2010	7:54:41 PM	Bubbler valve closed
12/17/2010	7:54:41 PM	Main Vac valve opened
12/17/2010	7:54:41 PM	Bypass valve opened
12/17/2010	7:54:41 PM	Helium MFC set to  0.000000
12/17/2010	7:54:41 PM	H2 MFC set to  0.000000
12/17/2010	7:54:41 PM	BCl3 MFC set to  0.000000
12/17/2010	7:54:41 PM	PHl3 MFC set to  0.000000
12/17/2010	7:54:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:54:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:54:41 PM	Tube furnace set to 0
12/17/2010	7:55:41 PM	H2 valve closed
12/17/2010	7:55:41 PM	BCl3 valve closed
12/17/2010	7:55:41 PM	PH3 valve closed
12/17/2010	7:55:41 PM	SiCl4 pre valve closed
12/17/2010	7:55:41 PM	SiCl4 post valve closed
12/17/2010	7:55:41 PM	Bubbler valve closed
12/17/2010	7:55:41 PM	Helium valve opened
12/17/2010	7:55:41 PM	Main Vac valve opened
12/17/2010	7:55:41 PM	Bypass valve opened
12/17/2010	7:55:41 PM	Helium MFC set to  100.000000
12/17/2010	7:55:41 PM	H2 MFC set to  0.000000
12/17/2010	7:55:41 PM	BCl3 MFC set to  0.000000
12/17/2010	7:55:41 PM	PHl3 MFC set to  0.000000
12/17/2010	7:55:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:55:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:55:41 PM	Tube furnace set to 0
12/17/2010	7:56:41 PM	Helium valve closed
12/17/2010	7:56:41 PM	H2 valve closed
12/17/2010	7:56:41 PM	BCl3 valve closed
12/17/2010	7:56:41 PM	PH3 valve closed
12/17/2010	7:56:41 PM	SiCl4 pre valve closed
12/17/2010	7:56:41 PM	SiCl4 post valve closed
12/17/2010	7:56:41 PM	Bubbler valve closed
12/17/2010	7:56:41 PM	Main Vac valve opened
12/17/2010	7:56:41 PM	Bypass valve opened
12/17/2010	7:56:41 PM	Helium MFC set to  0.000000
12/17/2010	7:56:41 PM	H2 MFC set to  0.000000
12/17/2010	7:56:41 PM	BCl3 MFC set to  0.000000
12/17/2010	7:56:41 PM	PHl3 MFC set to  0.000000
12/17/2010	7:56:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:56:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:56:42 PM	Tube furnace set to 0
12/17/2010	7:57:42 PM	H2 valve closed
12/17/2010	7:57:42 PM	BCl3 valve closed
12/17/2010	7:57:42 PM	PH3 valve closed
12/17/2010	7:57:42 PM	SiCl4 pre valve closed
12/17/2010	7:57:42 PM	SiCl4 post valve closed
12/17/2010	7:57:42 PM	Bubbler valve closed
12/17/2010	7:57:42 PM	Helium valve opened
12/17/2010	7:57:42 PM	Main Vac valve opened
12/17/2010	7:57:42 PM	Bypass valve opened
12/17/2010	7:57:42 PM	Helium MFC set to  100.000000
12/17/2010	7:57:42 PM	H2 MFC set to  0.000000
12/17/2010	7:57:42 PM	BCl3 MFC set to  0.000000
12/17/2010	7:57:42 PM	PHl3 MFC set to  0.000000
12/17/2010	7:57:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:57:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:57:42 PM	Tube furnace set to 0
12/17/2010	7:58:42 PM	Helium valve closed
12/17/2010	7:58:42 PM	H2 valve closed
12/17/2010	7:58:42 PM	BCl3 valve closed
12/17/2010	7:58:42 PM	PH3 valve closed
12/17/2010	7:58:42 PM	SiCl4 pre valve closed
12/17/2010	7:58:42 PM	SiCl4 post valve closed
12/17/2010	7:58:42 PM	Bubbler valve closed
12/17/2010	7:58:42 PM	Main Vac valve opened
12/17/2010	7:58:42 PM	Bypass valve opened
12/17/2010	7:58:42 PM	Helium MFC set to  0.000000
12/17/2010	7:58:42 PM	H2 MFC set to  0.000000
12/17/2010	7:58:42 PM	BCl3 MFC set to  0.000000
12/17/2010	7:58:42 PM	PHl3 MFC set to  0.000000
12/17/2010	7:58:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:58:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:58:42 PM	Tube furnace set to 0
12/17/2010	7:59:42 PM	H2 valve closed
12/17/2010	7:59:42 PM	BCl3 valve closed
12/17/2010	7:59:42 PM	PH3 valve closed
12/17/2010	7:59:42 PM	SiCl4 pre valve closed
12/17/2010	7:59:42 PM	SiCl4 post valve closed
12/17/2010	7:59:42 PM	Bubbler valve closed
12/17/2010	7:59:42 PM	Helium valve opened
12/17/2010	7:59:42 PM	Main Vac valve opened
12/17/2010	7:59:42 PM	Bypass valve opened
12/17/2010	7:59:42 PM	Helium MFC set to  100.000000
12/17/2010	7:59:42 PM	H2 MFC set to  0.000000
12/17/2010	7:59:42 PM	BCl3 MFC set to  0.000000
12/17/2010	7:59:42 PM	PHl3 MFC set to  0.000000
12/17/2010	7:59:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	7:59:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	7:59:42 PM	Tube furnace set to 0
12/17/2010	8:00:42 PM	Helium valve closed
12/17/2010	8:00:42 PM	H2 valve closed
12/17/2010	8:00:42 PM	BCl3 valve closed
12/17/2010	8:00:42 PM	PH3 valve closed
12/17/2010	8:00:42 PM	SiCl4 pre valve closed
12/17/2010	8:00:42 PM	SiCl4 post valve closed
12/17/2010	8:00:42 PM	Bubbler valve closed
12/17/2010	8:00:42 PM	Main Vac valve opened
12/17/2010	8:00:42 PM	Bypass valve opened
12/17/2010	8:00:42 PM	Helium MFC set to  0.000000
12/17/2010	8:00:42 PM	H2 MFC set to  0.000000
12/17/2010	8:00:42 PM	BCl3 MFC set to  0.000000
12/17/2010	8:00:42 PM	PHl3 MFC set to  0.000000
12/17/2010	8:00:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:00:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:00:42 PM	Tube furnace set to 0
12/17/2010	8:01:42 PM	H2 valve closed
12/17/2010	8:01:42 PM	BCl3 valve closed
12/17/2010	8:01:42 PM	PH3 valve closed
12/17/2010	8:01:42 PM	SiCl4 pre valve closed
12/17/2010	8:01:42 PM	SiCl4 post valve closed
12/17/2010	8:01:42 PM	Bubbler valve closed
12/17/2010	8:01:42 PM	Helium valve opened
12/17/2010	8:01:42 PM	Main Vac valve opened
12/17/2010	8:01:42 PM	Bypass valve opened
12/17/2010	8:01:42 PM	Helium MFC set to  100.000000
12/17/2010	8:01:42 PM	H2 MFC set to  0.000000
12/17/2010	8:01:42 PM	BCl3 MFC set to  0.000000
12/17/2010	8:01:42 PM	PHl3 MFC set to  0.000000
12/17/2010	8:01:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:01:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:01:43 PM	Tube furnace set to 0
12/17/2010	8:02:43 PM	Helium valve closed
12/17/2010	8:02:43 PM	H2 valve closed
12/17/2010	8:02:43 PM	BCl3 valve closed
12/17/2010	8:02:43 PM	PH3 valve closed
12/17/2010	8:02:43 PM	SiCl4 pre valve closed
12/17/2010	8:02:43 PM	SiCl4 post valve closed
12/17/2010	8:02:43 PM	Bubbler valve closed
12/17/2010	8:02:43 PM	Main Vac valve opened
12/17/2010	8:02:43 PM	Bypass valve opened
12/17/2010	8:02:43 PM	Helium MFC set to  0.000000
12/17/2010	8:02:43 PM	H2 MFC set to  0.000000
12/17/2010	8:02:43 PM	BCl3 MFC set to  0.000000
12/17/2010	8:02:43 PM	PHl3 MFC set to  0.000000
12/17/2010	8:02:43 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:02:43 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:02:43 PM	Tube furnace set to 0
12/17/2010	8:03:43 PM	H2 valve closed
12/17/2010	8:03:43 PM	BCl3 valve closed
12/17/2010	8:03:43 PM	PH3 valve closed
12/17/2010	8:03:43 PM	SiCl4 pre valve closed
12/17/2010	8:03:43 PM	SiCl4 post valve closed
12/17/2010	8:03:43 PM	Bubbler valve closed
12/17/2010	8:03:43 PM	Helium valve opened
12/17/2010	8:03:43 PM	Main Vac valve opened
12/17/2010	8:03:43 PM	Bypass valve opened
12/17/2010	8:03:43 PM	Helium MFC set to  100.000000
12/17/2010	8:03:43 PM	H2 MFC set to  0.000000
12/17/2010	8:03:43 PM	BCl3 MFC set to  0.000000
12/17/2010	8:03:43 PM	PHl3 MFC set to  0.000000
12/17/2010	8:03:43 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:03:43 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:03:43 PM	Tube furnace set to 0
12/17/2010	8:04:43 PM	Helium valve closed
12/17/2010	8:04:43 PM	H2 valve closed
12/17/2010	8:04:43 PM	BCl3 valve closed
12/17/2010	8:04:43 PM	PH3 valve closed
12/17/2010	8:04:43 PM	SiCl4 pre valve closed
12/17/2010	8:04:43 PM	SiCl4 post valve closed
12/17/2010	8:04:43 PM	Bubbler valve closed
12/17/2010	8:04:43 PM	Main Vac valve opened
12/17/2010	8:04:43 PM	Bypass valve opened
12/17/2010	8:04:43 PM	Helium MFC set to  0.000000
12/17/2010	8:04:43 PM	H2 MFC set to  0.000000
12/17/2010	8:04:43 PM	BCl3 MFC set to  0.000000
12/17/2010	8:04:43 PM	PHl3 MFC set to  0.000000
12/17/2010	8:04:43 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:04:43 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:04:43 PM	Tube furnace set to 0
12/17/2010	8:05:43 PM	H2 valve closed
12/17/2010	8:05:43 PM	BCl3 valve closed
12/17/2010	8:05:43 PM	PH3 valve closed
12/17/2010	8:05:43 PM	SiCl4 pre valve closed
12/17/2010	8:05:43 PM	SiCl4 post valve closed
12/17/2010	8:05:43 PM	Bubbler valve closed
12/17/2010	8:05:43 PM	Helium valve opened
12/17/2010	8:05:43 PM	Main Vac valve opened
12/17/2010	8:05:43 PM	Bypass valve opened
12/17/2010	8:05:43 PM	Helium MFC set to  100.000000
12/17/2010	8:05:43 PM	H2 MFC set to  0.000000
12/17/2010	8:05:43 PM	BCl3 MFC set to  0.000000
12/17/2010	8:05:43 PM	PHl3 MFC set to  0.000000
12/17/2010	8:05:43 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:05:43 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:05:43 PM	Tube furnace set to 0
12/17/2010	8:06:44 PM	Helium valve closed
12/17/2010	8:06:44 PM	H2 valve closed
12/17/2010	8:06:44 PM	BCl3 valve closed
12/17/2010	8:06:44 PM	PH3 valve closed
12/17/2010	8:06:44 PM	SiCl4 pre valve closed
12/17/2010	8:06:44 PM	SiCl4 post valve closed
12/17/2010	8:06:44 PM	Bubbler valve closed
12/17/2010	8:06:44 PM	Main Vac valve opened
12/17/2010	8:06:44 PM	Bypass valve opened
12/17/2010	8:06:44 PM	Helium MFC set to  0.000000
12/17/2010	8:06:44 PM	H2 MFC set to  0.000000
12/17/2010	8:06:44 PM	BCl3 MFC set to  0.000000
12/17/2010	8:06:44 PM	PHl3 MFC set to  0.000000
12/17/2010	8:06:44 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:06:44 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:06:44 PM	Tube furnace set to 0
12/17/2010	8:06:45 PM	Run finished at 8:06 PM
12/17/2010	8:06:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	8:08:18 PM	Bypass valve closed
12/17/2010	8:08:18 PM	Main Vac valve closed
12/17/2010	8:08:44 PM	Main Vac valve opened
12/17/2010	8:08:44 PM	Bypass valve opened
12/17/2010	8:08:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	8:09:05 PM	Recipe started at 8:08 PM
12/17/2010	8:09:05 PM	Helium valve closed
12/17/2010	8:09:05 PM	H2 valve closed
12/17/2010	8:09:05 PM	BCl3 valve closed
12/17/2010	8:09:05 PM	PH3 valve closed
12/17/2010	8:09:05 PM	SiCl4 pre valve closed
12/17/2010	8:09:05 PM	SiCl4 post valve closed
12/17/2010	8:09:05 PM	Main Vac valve closed
12/17/2010	8:09:05 PM	Bubbler valve closed
12/17/2010	8:09:05 PM	Bypass valve opened
12/17/2010	8:09:05 PM	Helium MFC set to  0.000000
12/17/2010	8:09:05 PM	H2 MFC set to  0.000000
12/17/2010	8:09:05 PM	BCl3 MFC set to  0.000000
12/17/2010	8:09:05 PM	PHl3 MFC set to  0.000000
12/17/2010	8:09:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:09:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:09:05 PM	Tube furnace set to 0
12/17/2010	8:09:05 PM	Helium valve closed
12/17/2010	8:09:05 PM	H2 valve closed
12/17/2010	8:09:05 PM	BCl3 valve closed
12/17/2010	8:09:05 PM	PH3 valve closed
12/17/2010	8:09:05 PM	SiCl4 pre valve closed
12/17/2010	8:09:05 PM	SiCl4 post valve closed
12/17/2010	8:09:05 PM	Bubbler valve closed
12/17/2010	8:09:05 PM	Main Vac valve opened
12/17/2010	8:09:05 PM	Bypass valve opened
12/17/2010	8:09:05 PM	Helium MFC set to  0.000000
12/17/2010	8:09:05 PM	H2 MFC set to  0.000000
12/17/2010	8:09:05 PM	BCl3 MFC set to  0.000000
12/17/2010	8:09:05 PM	PHl3 MFC set to  0.000000
12/17/2010	8:09:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:09:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:09:05 PM	Tube furnace set to 0
12/17/2010	8:10:05 PM	H2 valve closed
12/17/2010	8:10:05 PM	BCl3 valve closed
12/17/2010	8:10:05 PM	PH3 valve closed
12/17/2010	8:10:05 PM	SiCl4 pre valve closed
12/17/2010	8:10:05 PM	SiCl4 post valve closed
12/17/2010	8:10:05 PM	Bubbler valve closed
12/17/2010	8:10:05 PM	Helium valve opened
12/17/2010	8:10:05 PM	Main Vac valve opened
12/17/2010	8:10:05 PM	Bypass valve opened
12/17/2010	8:10:05 PM	Helium MFC set to  100.000000
12/17/2010	8:10:05 PM	H2 MFC set to  0.000000
12/17/2010	8:10:05 PM	BCl3 MFC set to  0.000000
12/17/2010	8:10:05 PM	PHl3 MFC set to  0.000000
12/17/2010	8:10:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:10:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:10:06 PM	Tube furnace set to 0
12/17/2010	8:11:06 PM	Helium valve closed
12/17/2010	8:11:06 PM	H2 valve closed
12/17/2010	8:11:06 PM	BCl3 valve closed
12/17/2010	8:11:06 PM	PH3 valve closed
12/17/2010	8:11:06 PM	SiCl4 pre valve closed
12/17/2010	8:11:06 PM	SiCl4 post valve closed
12/17/2010	8:11:06 PM	Bubbler valve closed
12/17/2010	8:11:06 PM	Main Vac valve opened
12/17/2010	8:11:06 PM	Bypass valve opened
12/17/2010	8:11:06 PM	Helium MFC set to  0.000000
12/17/2010	8:11:06 PM	H2 MFC set to  0.000000
12/17/2010	8:11:06 PM	BCl3 MFC set to  0.000000
12/17/2010	8:11:06 PM	PHl3 MFC set to  0.000000
12/17/2010	8:11:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:11:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:11:06 PM	Tube furnace set to 0
12/17/2010	8:12:06 PM	H2 valve closed
12/17/2010	8:12:06 PM	BCl3 valve closed
12/17/2010	8:12:06 PM	PH3 valve closed
12/17/2010	8:12:06 PM	SiCl4 pre valve closed
12/17/2010	8:12:06 PM	SiCl4 post valve closed
12/17/2010	8:12:06 PM	Bubbler valve closed
12/17/2010	8:12:06 PM	Helium valve opened
12/17/2010	8:12:06 PM	Main Vac valve opened
12/17/2010	8:12:06 PM	Bypass valve opened
12/17/2010	8:12:06 PM	Helium MFC set to  100.000000
12/17/2010	8:12:06 PM	H2 MFC set to  0.000000
12/17/2010	8:12:06 PM	BCl3 MFC set to  0.000000
12/17/2010	8:12:06 PM	PHl3 MFC set to  0.000000
12/17/2010	8:12:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:12:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:12:06 PM	Tube furnace set to 0
12/17/2010	8:13:06 PM	Helium valve closed
12/17/2010	8:13:06 PM	H2 valve closed
12/17/2010	8:13:06 PM	BCl3 valve closed
12/17/2010	8:13:06 PM	PH3 valve closed
12/17/2010	8:13:06 PM	SiCl4 pre valve closed
12/17/2010	8:13:06 PM	SiCl4 post valve closed
12/17/2010	8:13:06 PM	Bubbler valve closed
12/17/2010	8:13:06 PM	Main Vac valve opened
12/17/2010	8:13:06 PM	Bypass valve opened
12/17/2010	8:13:06 PM	Helium MFC set to  0.000000
12/17/2010	8:13:06 PM	H2 MFC set to  0.000000
12/17/2010	8:13:06 PM	BCl3 MFC set to  0.000000
12/17/2010	8:13:06 PM	PHl3 MFC set to  0.000000
12/17/2010	8:13:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:13:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:13:06 PM	Tube furnace set to 0
12/17/2010	8:14:06 PM	H2 valve closed
12/17/2010	8:14:06 PM	BCl3 valve closed
12/17/2010	8:14:06 PM	PH3 valve closed
12/17/2010	8:14:06 PM	SiCl4 pre valve closed
12/17/2010	8:14:06 PM	SiCl4 post valve closed
12/17/2010	8:14:06 PM	Bubbler valve closed
12/17/2010	8:14:06 PM	Helium valve opened
12/17/2010	8:14:06 PM	Main Vac valve opened
12/17/2010	8:14:06 PM	Bypass valve opened
12/17/2010	8:14:06 PM	Helium MFC set to  100.000000
12/17/2010	8:14:06 PM	H2 MFC set to  0.000000
12/17/2010	8:14:06 PM	BCl3 MFC set to  0.000000
12/17/2010	8:14:06 PM	PHl3 MFC set to  0.000000
12/17/2010	8:14:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:14:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:14:06 PM	Tube furnace set to 0
12/17/2010	8:15:06 PM	Helium valve closed
12/17/2010	8:15:06 PM	H2 valve closed
12/17/2010	8:15:06 PM	BCl3 valve closed
12/17/2010	8:15:06 PM	PH3 valve closed
12/17/2010	8:15:06 PM	SiCl4 pre valve closed
12/17/2010	8:15:06 PM	SiCl4 post valve closed
12/17/2010	8:15:06 PM	Bubbler valve closed
12/17/2010	8:15:06 PM	Main Vac valve opened
12/17/2010	8:15:06 PM	Bypass valve opened
12/17/2010	8:15:06 PM	Helium MFC set to  0.000000
12/17/2010	8:15:06 PM	H2 MFC set to  0.000000
12/17/2010	8:15:06 PM	BCl3 MFC set to  0.000000
12/17/2010	8:15:06 PM	PHl3 MFC set to  0.000000
12/17/2010	8:15:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:15:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:15:07 PM	Tube furnace set to 0
12/17/2010	8:16:07 PM	H2 valve closed
12/17/2010	8:16:07 PM	BCl3 valve closed
12/17/2010	8:16:07 PM	PH3 valve closed
12/17/2010	8:16:07 PM	SiCl4 pre valve closed
12/17/2010	8:16:07 PM	SiCl4 post valve closed
12/17/2010	8:16:07 PM	Bubbler valve closed
12/17/2010	8:16:07 PM	Helium valve opened
12/17/2010	8:16:07 PM	Main Vac valve opened
12/17/2010	8:16:07 PM	Bypass valve opened
12/17/2010	8:16:07 PM	Helium MFC set to  100.000000
12/17/2010	8:16:07 PM	H2 MFC set to  0.000000
12/17/2010	8:16:07 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:07 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:07 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:07 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:07 PM	Tube furnace set to 0
12/17/2010	8:16:35 PM	Helium valve closed
12/17/2010	8:16:35 PM	H2 valve closed
12/17/2010	8:16:35 PM	BCl3 valve closed
12/17/2010	8:16:35 PM	PH3 valve closed
12/17/2010	8:16:35 PM	SiCl4 pre valve closed
12/17/2010	8:16:35 PM	SiCl4 post valve closed
12/17/2010	8:16:35 PM	Bubbler valve closed
12/17/2010	8:16:35 PM	Main Vac valve opened
12/17/2010	8:16:35 PM	Bypass valve opened
12/17/2010	8:16:35 PM	Helium MFC set to  0.000000
12/17/2010	8:16:35 PM	H2 MFC set to  0.000000
12/17/2010	8:16:35 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:35 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:35 PM	Tube furnace set to 0
12/17/2010	8:16:35 PM	H2 valve closed
12/17/2010	8:16:35 PM	BCl3 valve closed
12/17/2010	8:16:35 PM	PH3 valve closed
12/17/2010	8:16:35 PM	SiCl4 pre valve closed
12/17/2010	8:16:35 PM	SiCl4 post valve closed
12/17/2010	8:16:35 PM	Bubbler valve closed
12/17/2010	8:16:35 PM	Helium valve opened
12/17/2010	8:16:35 PM	Main Vac valve opened
12/17/2010	8:16:35 PM	Bypass valve opened
12/17/2010	8:16:35 PM	Helium MFC set to  100.000000
12/17/2010	8:16:35 PM	H2 MFC set to  0.000000
12/17/2010	8:16:35 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:35 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:35 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:35 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:36 PM	Tube furnace set to 0
12/17/2010	8:16:36 PM	Helium valve closed
12/17/2010	8:16:36 PM	H2 valve closed
12/17/2010	8:16:36 PM	BCl3 valve closed
12/17/2010	8:16:36 PM	PH3 valve closed
12/17/2010	8:16:36 PM	SiCl4 pre valve closed
12/17/2010	8:16:36 PM	SiCl4 post valve closed
12/17/2010	8:16:36 PM	Bubbler valve closed
12/17/2010	8:16:36 PM	Main Vac valve opened
12/17/2010	8:16:36 PM	Bypass valve opened
12/17/2010	8:16:36 PM	Helium MFC set to  0.000000
12/17/2010	8:16:36 PM	H2 MFC set to  0.000000
12/17/2010	8:16:36 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:36 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:36 PM	Tube furnace set to 0
12/17/2010	8:16:36 PM	H2 valve closed
12/17/2010	8:16:36 PM	BCl3 valve closed
12/17/2010	8:16:36 PM	PH3 valve closed
12/17/2010	8:16:36 PM	SiCl4 pre valve closed
12/17/2010	8:16:36 PM	SiCl4 post valve closed
12/17/2010	8:16:36 PM	Bubbler valve closed
12/17/2010	8:16:36 PM	Helium valve opened
12/17/2010	8:16:36 PM	Main Vac valve opened
12/17/2010	8:16:36 PM	Bypass valve opened
12/17/2010	8:16:36 PM	Helium MFC set to  100.000000
12/17/2010	8:16:36 PM	H2 MFC set to  0.000000
12/17/2010	8:16:36 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:36 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:36 PM	Tube furnace set to 0
12/17/2010	8:16:37 PM	Helium valve closed
12/17/2010	8:16:37 PM	H2 valve closed
12/17/2010	8:16:37 PM	BCl3 valve closed
12/17/2010	8:16:37 PM	PH3 valve closed
12/17/2010	8:16:37 PM	SiCl4 pre valve closed
12/17/2010	8:16:37 PM	SiCl4 post valve closed
12/17/2010	8:16:37 PM	Bubbler valve closed
12/17/2010	8:16:37 PM	Main Vac valve opened
12/17/2010	8:16:37 PM	Bypass valve opened
12/17/2010	8:16:37 PM	Helium MFC set to  0.000000
12/17/2010	8:16:37 PM	H2 MFC set to  0.000000
12/17/2010	8:16:37 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:37 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:37 PM	Tube furnace set to 0
12/17/2010	8:16:37 PM	H2 valve closed
12/17/2010	8:16:37 PM	BCl3 valve closed
12/17/2010	8:16:37 PM	PH3 valve closed
12/17/2010	8:16:37 PM	SiCl4 pre valve closed
12/17/2010	8:16:37 PM	SiCl4 post valve closed
12/17/2010	8:16:37 PM	Bubbler valve closed
12/17/2010	8:16:37 PM	Helium valve opened
12/17/2010	8:16:37 PM	Main Vac valve opened
12/17/2010	8:16:37 PM	Bypass valve opened
12/17/2010	8:16:37 PM	Helium MFC set to  100.000000
12/17/2010	8:16:37 PM	H2 MFC set to  0.000000
12/17/2010	8:16:37 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:37 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:37 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:37 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:38 PM	Tube furnace set to 0
12/17/2010	8:16:40 PM	Helium valve closed
12/17/2010	8:16:40 PM	H2 valve closed
12/17/2010	8:16:40 PM	BCl3 valve closed
12/17/2010	8:16:40 PM	PH3 valve closed
12/17/2010	8:16:40 PM	SiCl4 pre valve closed
12/17/2010	8:16:40 PM	SiCl4 post valve closed
12/17/2010	8:16:40 PM	Bubbler valve closed
12/17/2010	8:16:40 PM	Main Vac valve opened
12/17/2010	8:16:40 PM	Bypass valve opened
12/17/2010	8:16:40 PM	Helium MFC set to  0.000000
12/17/2010	8:16:40 PM	H2 MFC set to  0.000000
12/17/2010	8:16:40 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:40 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:40 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:40 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:40 PM	Tube furnace set to 0
12/17/2010	8:16:41 PM	H2 valve closed
12/17/2010	8:16:41 PM	BCl3 valve closed
12/17/2010	8:16:41 PM	PH3 valve closed
12/17/2010	8:16:41 PM	SiCl4 pre valve closed
12/17/2010	8:16:41 PM	SiCl4 post valve closed
12/17/2010	8:16:41 PM	Bubbler valve closed
12/17/2010	8:16:41 PM	Helium valve opened
12/17/2010	8:16:41 PM	Main Vac valve opened
12/17/2010	8:16:41 PM	Bypass valve opened
12/17/2010	8:16:41 PM	Helium MFC set to  100.000000
12/17/2010	8:16:41 PM	H2 MFC set to  0.000000
12/17/2010	8:16:41 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:41 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:41 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:41 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:41 PM	Tube furnace set to 0
12/17/2010	8:16:41 PM	Helium valve closed
12/17/2010	8:16:41 PM	H2 valve closed
12/17/2010	8:16:41 PM	BCl3 valve closed
12/17/2010	8:16:41 PM	PH3 valve closed
12/17/2010	8:16:41 PM	SiCl4 pre valve closed
12/17/2010	8:16:42 PM	SiCl4 post valve closed
12/17/2010	8:16:42 PM	Bubbler valve closed
12/17/2010	8:16:42 PM	Main Vac valve opened
12/17/2010	8:16:42 PM	Bypass valve opened
12/17/2010	8:16:42 PM	Helium MFC set to  0.000000
12/17/2010	8:16:42 PM	H2 MFC set to  0.000000
12/17/2010	8:16:42 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:42 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:42 PM	Tube furnace set to 0
12/17/2010	8:16:42 PM	H2 valve closed
12/17/2010	8:16:42 PM	BCl3 valve closed
12/17/2010	8:16:42 PM	PH3 valve closed
12/17/2010	8:16:42 PM	SiCl4 pre valve closed
12/17/2010	8:16:42 PM	SiCl4 post valve closed
12/17/2010	8:16:42 PM	Bubbler valve closed
12/17/2010	8:16:42 PM	Helium valve opened
12/17/2010	8:16:42 PM	Main Vac valve opened
12/17/2010	8:16:42 PM	Bypass valve opened
12/17/2010	8:16:42 PM	Helium MFC set to  100.000000
12/17/2010	8:16:42 PM	H2 MFC set to  0.000000
12/17/2010	8:16:42 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:42 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:42 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:42 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:42 PM	Tube furnace set to 0
12/17/2010	8:16:43 PM	Helium valve closed
12/17/2010	8:16:43 PM	H2 valve closed
12/17/2010	8:16:43 PM	BCl3 valve closed
12/17/2010	8:16:43 PM	PH3 valve closed
12/17/2010	8:16:43 PM	SiCl4 pre valve closed
12/17/2010	8:16:43 PM	SiCl4 post valve closed
12/17/2010	8:16:43 PM	Bubbler valve closed
12/17/2010	8:16:43 PM	Main Vac valve opened
12/17/2010	8:16:43 PM	Bypass valve opened
12/17/2010	8:16:43 PM	Helium MFC set to  0.000000
12/17/2010	8:16:43 PM	H2 MFC set to  0.000000
12/17/2010	8:16:43 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:43 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:43 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:43 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:43 PM	Tube furnace set to 0
12/17/2010	8:16:44 PM	H2 valve closed
12/17/2010	8:16:44 PM	BCl3 valve closed
12/17/2010	8:16:44 PM	PH3 valve closed
12/17/2010	8:16:44 PM	SiCl4 pre valve closed
12/17/2010	8:16:44 PM	SiCl4 post valve closed
12/17/2010	8:16:44 PM	Bubbler valve closed
12/17/2010	8:16:44 PM	Helium valve opened
12/17/2010	8:16:44 PM	Main Vac valve opened
12/17/2010	8:16:44 PM	Bypass valve opened
12/17/2010	8:16:44 PM	Helium MFC set to  100.000000
12/17/2010	8:16:44 PM	H2 MFC set to  0.000000
12/17/2010	8:16:44 PM	BCl3 MFC set to  0.000000
12/17/2010	8:16:44 PM	PHl3 MFC set to  0.000000
12/17/2010	8:16:44 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:16:44 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:16:45 PM	Tube furnace set to 0
12/17/2010	8:17:45 PM	Helium valve closed
12/17/2010	8:17:45 PM	H2 valve closed
12/17/2010	8:17:45 PM	BCl3 valve closed
12/17/2010	8:17:45 PM	PH3 valve closed
12/17/2010	8:17:45 PM	SiCl4 pre valve closed
12/17/2010	8:17:45 PM	SiCl4 post valve closed
12/17/2010	8:17:45 PM	Bubbler valve closed
12/17/2010	8:17:45 PM	Main Vac valve opened
12/17/2010	8:17:45 PM	Bypass valve opened
12/17/2010	8:17:45 PM	Helium MFC set to  0.000000
12/17/2010	8:17:45 PM	H2 MFC set to  0.000000
12/17/2010	8:17:45 PM	BCl3 MFC set to  0.000000
12/17/2010	8:17:45 PM	PHl3 MFC set to  0.000000
12/17/2010	8:17:45 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:17:45 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:17:45 PM	Tube furnace set to 0
12/17/2010	8:17:46 PM	Run finished at 8:17 PM
12/17/2010	8:17:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	8:18:45 PM	Recipe started at 8:18 PM
12/17/2010	8:18:45 PM	Helium valve closed
12/17/2010	8:18:45 PM	BCl3 valve closed
12/17/2010	8:18:45 PM	PH3 valve closed
12/17/2010	8:18:45 PM	SiCl4 pre valve closed
12/17/2010	8:18:45 PM	SiCl4 post valve closed
12/17/2010	8:18:45 PM	Main Vac valve closed
12/17/2010	8:18:45 PM	Bypass valve closed
12/17/2010	8:18:45 PM	Bubbler valve closed
12/17/2010	8:18:45 PM	H2 valve opened
12/17/2010	8:18:45 PM	Helium MFC set to  0.000000
12/17/2010	8:18:45 PM	H2 MFC set to  500.000000
12/17/2010	8:18:45 PM	BCl3 MFC set to  0.000000
12/17/2010	8:18:45 PM	PHl3 MFC set to  0.000000
12/17/2010	8:18:45 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:18:45 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:18:45 PM	Tube furnace set to 0
12/17/2010	8:20:05 PM	Helium valve closed
12/17/2010	8:20:05 PM	BCl3 valve closed
12/17/2010	8:20:05 PM	PH3 valve closed
12/17/2010	8:20:05 PM	SiCl4 pre valve closed
12/17/2010	8:20:05 PM	SiCl4 post valve closed
12/17/2010	8:20:05 PM	Main Vac valve closed
12/17/2010	8:20:05 PM	Bypass valve closed
12/17/2010	8:20:05 PM	H2 valve opened
12/17/2010	8:20:05 PM	Bubbler valve opened
12/17/2010	8:20:05 PM	Helium MFC set to  0.000000
12/17/2010	8:20:05 PM	H2 MFC set to  500.000000
12/17/2010	8:20:05 PM	BCl3 MFC set to  0.000000
12/17/2010	8:20:05 PM	PHl3 MFC set to  0.000000
12/17/2010	8:20:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	8:20:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:20:05 PM	Tube furnace set to 1000
12/17/2010	8:40:05 PM	Helium valve closed
12/17/2010	8:40:05 PM	BCl3 valve closed
12/17/2010	8:40:05 PM	Main Vac valve closed
12/17/2010	8:40:05 PM	Bypass valve closed
12/17/2010	8:40:05 PM	H2 valve opened
12/17/2010	8:40:05 PM	PH3 valve opened
12/17/2010	8:40:05 PM	SiCl4 pre valve opened
12/17/2010	8:40:05 PM	SiCl4 post valve opened
12/17/2010	8:40:05 PM	Bubbler valve opened
12/17/2010	8:40:05 PM	Helium MFC set to  0.000000
12/17/2010	8:40:05 PM	H2 MFC set to  500.000000
12/17/2010	8:40:05 PM	BCl3 MFC set to  0.000000
12/17/2010	8:40:05 PM	PHl3 MFC set to  1.000000
12/17/2010	8:40:05 PM	SiCl4 MFC set to  50.000000
12/17/2010	8:40:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	8:40:05 PM	Tube furnace set to 1000
12/17/2010	9:00:05 PM	H2 valve closed
12/17/2010	9:00:05 PM	BCl3 valve closed
12/17/2010	9:00:05 PM	PH3 valve closed
12/17/2010	9:00:05 PM	SiCl4 pre valve closed
12/17/2010	9:00:05 PM	SiCl4 post valve closed
12/17/2010	9:00:05 PM	Main Vac valve closed
12/17/2010	9:00:05 PM	Bypass valve closed
12/17/2010	9:00:05 PM	Helium valve opened
12/17/2010	9:00:05 PM	Bubbler valve opened
12/17/2010	9:00:05 PM	Helium MFC set to  500.000000
12/17/2010	9:00:05 PM	H2 MFC set to  0.000000
12/17/2010	9:00:05 PM	BCl3 MFC set to  0.000000
12/17/2010	9:00:05 PM	PHl3 MFC set to  0.000000
12/17/2010	9:00:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:00:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:00:05 PM	Tube furnace set to 0
12/17/2010	9:20:05 PM	Helium valve closed
12/17/2010	9:20:05 PM	H2 valve closed
12/17/2010	9:20:05 PM	BCl3 valve closed
12/17/2010	9:20:05 PM	PH3 valve closed
12/17/2010	9:20:05 PM	SiCl4 pre valve closed
12/17/2010	9:20:05 PM	SiCl4 post valve closed
12/17/2010	9:20:05 PM	Main Vac valve closed
12/17/2010	9:20:05 PM	Bypass valve closed
12/17/2010	9:20:05 PM	Bubbler valve closed
12/17/2010	9:20:05 PM	Helium MFC set to  0.000000
12/17/2010	9:20:05 PM	H2 MFC set to  0.000000
12/17/2010	9:20:05 PM	BCl3 MFC set to  0.000000
12/17/2010	9:20:05 PM	PHl3 MFC set to  0.000000
12/17/2010	9:20:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:20:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:20:05 PM	Tube furnace set to 0
12/17/2010	9:20:06 PM	Run finished at 9:20 PM
12/17/2010	9:29:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:29:28 PM	Recipe started at 9:29 PM
12/17/2010	9:29:28 PM	H2 valve closed
12/17/2010	9:29:28 PM	BCl3 valve closed
12/17/2010	9:29:28 PM	PH3 valve closed
12/17/2010	9:29:28 PM	SiCl4 pre valve closed
12/17/2010	9:29:28 PM	SiCl4 post valve closed
12/17/2010	9:29:28 PM	Main Vac valve closed
12/17/2010	9:29:28 PM	Bypass valve closed
12/17/2010	9:29:28 PM	Bubbler valve closed
12/17/2010	9:29:28 PM	Helium valve opened
12/17/2010	9:29:28 PM	Helium MFC set to  500.000000
12/17/2010	9:29:28 PM	H2 MFC set to  0.000000
12/17/2010	9:29:28 PM	BCl3 MFC set to  0.000000
12/17/2010	9:29:28 PM	PHl3 MFC set to  0.000000
12/17/2010	9:29:28 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:29:28 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:29:28 PM	Tube furnace set to 0
12/17/2010	9:29:32 PM	Helium valve closed
12/17/2010	9:29:32 PM	H2 valve closed
12/17/2010	9:29:32 PM	BCl3 valve closed
12/17/2010	9:29:32 PM	PH3 valve closed
12/17/2010	9:29:32 PM	SiCl4 pre valve closed
12/17/2010	9:29:32 PM	SiCl4 post valve closed
12/17/2010	9:29:32 PM	Main Vac valve closed
12/17/2010	9:29:32 PM	Bypass valve closed
12/17/2010	9:29:32 PM	Bubbler valve closed
12/17/2010	9:29:32 PM	Helium MFC set to  0.000000
12/17/2010	9:29:32 PM	H2 MFC set to  0.000000
12/17/2010	9:29:32 PM	BCl3 MFC set to  0.000000
12/17/2010	9:29:32 PM	PHl3 MFC set to  0.000000
12/17/2010	9:29:32 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:29:32 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:29:32 PM	Tube furnace set to 0
12/17/2010	9:29:32 PM	Run finished at 9:29 PM
12/17/2010	9:29:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	9:33:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:33:11 PM	Recipe started at 9:33 PM
12/17/2010	9:33:11 PM	Helium valve closed
12/17/2010	9:33:11 PM	H2 valve closed
12/17/2010	9:33:11 PM	BCl3 valve closed
12/17/2010	9:33:11 PM	PH3 valve closed
12/17/2010	9:33:11 PM	SiCl4 pre valve closed
12/17/2010	9:33:11 PM	SiCl4 post valve closed
12/17/2010	9:33:11 PM	Main Vac valve closed
12/17/2010	9:33:11 PM	Bubbler valve closed
12/17/2010	9:33:11 PM	Bypass valve opened
12/17/2010	9:33:11 PM	Helium MFC set to  0.000000
12/17/2010	9:33:11 PM	H2 MFC set to  0.000000
12/17/2010	9:33:11 PM	BCl3 MFC set to  0.000000
12/17/2010	9:33:11 PM	PHl3 MFC set to  0.000000
12/17/2010	9:33:11 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:33:11 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:33:11 PM	Tube furnace set to 0
12/17/2010	9:34:07 PM	Helium valve closed
12/17/2010	9:34:07 PM	H2 valve closed
12/17/2010	9:34:07 PM	BCl3 valve closed
12/17/2010	9:34:07 PM	PH3 valve closed
12/17/2010	9:34:07 PM	SiCl4 pre valve closed
12/17/2010	9:34:07 PM	SiCl4 post valve closed
12/17/2010	9:34:07 PM	Bubbler valve closed
12/17/2010	9:34:07 PM	Main Vac valve opened
12/17/2010	9:34:07 PM	Bypass valve opened
12/17/2010	9:34:07 PM	Helium MFC set to  0.000000
12/17/2010	9:34:07 PM	H2 MFC set to  0.000000
12/17/2010	9:34:07 PM	BCl3 MFC set to  0.000000
12/17/2010	9:34:07 PM	PHl3 MFC set to  0.000000
12/17/2010	9:34:07 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:34:07 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:34:07 PM	Tube furnace set to 0
12/17/2010	9:34:07 PM	Run finished at 9:34 PM
12/17/2010	9:34:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	9:35:19 PM	Bypass valve closed
12/17/2010	9:35:19 PM	Main Vac valve closed
12/17/2010	9:35:30 PM	Main Vac valve opened
12/17/2010	9:35:31 PM	Bypass valve opened
12/17/2010	9:35:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:35:47 PM	Recipe started at 9:35 PM
12/17/2010	9:35:47 PM	Helium valve closed
12/17/2010	9:35:47 PM	H2 valve closed
12/17/2010	9:35:47 PM	BCl3 valve closed
12/17/2010	9:35:47 PM	PH3 valve closed
12/17/2010	9:35:47 PM	SiCl4 pre valve closed
12/17/2010	9:35:47 PM	SiCl4 post valve closed
12/17/2010	9:35:47 PM	Main Vac valve closed
12/17/2010	9:35:47 PM	Bubbler valve closed
12/17/2010	9:35:47 PM	Bypass valve opened
12/17/2010	9:35:47 PM	Helium MFC set to  0.000000
12/17/2010	9:35:47 PM	H2 MFC set to  0.000000
12/17/2010	9:35:47 PM	BCl3 MFC set to  0.000000
12/17/2010	9:35:47 PM	PHl3 MFC set to  0.000000
12/17/2010	9:35:47 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:35:47 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:35:47 PM	Tube furnace set to 0
12/17/2010	9:35:47 PM	Helium valve closed
12/17/2010	9:35:47 PM	H2 valve closed
12/17/2010	9:35:47 PM	BCl3 valve closed
12/17/2010	9:35:47 PM	PH3 valve closed
12/17/2010	9:35:47 PM	SiCl4 pre valve closed
12/17/2010	9:35:47 PM	SiCl4 post valve closed
12/17/2010	9:35:47 PM	Bubbler valve closed
12/17/2010	9:35:47 PM	Main Vac valve opened
12/17/2010	9:35:47 PM	Bypass valve opened
12/17/2010	9:35:47 PM	Helium MFC set to  0.000000
12/17/2010	9:35:47 PM	H2 MFC set to  0.000000
12/17/2010	9:35:47 PM	BCl3 MFC set to  0.000000
12/17/2010	9:35:47 PM	PHl3 MFC set to  0.000000
12/17/2010	9:35:47 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:35:47 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:35:47 PM	Tube furnace set to 0
12/17/2010	9:36:48 PM	H2 valve closed
12/17/2010	9:36:48 PM	BCl3 valve closed
12/17/2010	9:36:48 PM	PH3 valve closed
12/17/2010	9:36:48 PM	SiCl4 pre valve closed
12/17/2010	9:36:48 PM	SiCl4 post valve closed
12/17/2010	9:36:48 PM	Bubbler valve closed
12/17/2010	9:36:48 PM	Helium valve opened
12/17/2010	9:36:48 PM	Main Vac valve opened
12/17/2010	9:36:48 PM	Bypass valve opened
12/17/2010	9:36:48 PM	Helium MFC set to  100.000000
12/17/2010	9:36:48 PM	H2 MFC set to  0.000000
12/17/2010	9:36:48 PM	BCl3 MFC set to  0.000000
12/17/2010	9:36:48 PM	PHl3 MFC set to  0.000000
12/17/2010	9:36:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:36:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:36:48 PM	Tube furnace set to 0
12/17/2010	9:37:48 PM	Helium valve closed
12/17/2010	9:37:48 PM	H2 valve closed
12/17/2010	9:37:48 PM	BCl3 valve closed
12/17/2010	9:37:48 PM	PH3 valve closed
12/17/2010	9:37:48 PM	SiCl4 pre valve closed
12/17/2010	9:37:48 PM	SiCl4 post valve closed
12/17/2010	9:37:48 PM	Bubbler valve closed
12/17/2010	9:37:48 PM	Main Vac valve opened
12/17/2010	9:37:48 PM	Bypass valve opened
12/17/2010	9:37:48 PM	Helium MFC set to  0.000000
12/17/2010	9:37:48 PM	H2 MFC set to  0.000000
12/17/2010	9:37:48 PM	BCl3 MFC set to  0.000000
12/17/2010	9:37:48 PM	PHl3 MFC set to  0.000000
12/17/2010	9:37:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:37:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:37:48 PM	Tube furnace set to 0
12/17/2010	9:38:48 PM	H2 valve closed
12/17/2010	9:38:48 PM	BCl3 valve closed
12/17/2010	9:38:48 PM	PH3 valve closed
12/17/2010	9:38:48 PM	SiCl4 pre valve closed
12/17/2010	9:38:48 PM	SiCl4 post valve closed
12/17/2010	9:38:48 PM	Bubbler valve closed
12/17/2010	9:38:48 PM	Helium valve opened
12/17/2010	9:38:48 PM	Main Vac valve opened
12/17/2010	9:38:48 PM	Bypass valve opened
12/17/2010	9:38:48 PM	Helium MFC set to  100.000000
12/17/2010	9:38:48 PM	H2 MFC set to  0.000000
12/17/2010	9:38:48 PM	BCl3 MFC set to  0.000000
12/17/2010	9:38:48 PM	PHl3 MFC set to  0.000000
12/17/2010	9:38:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:38:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:38:48 PM	Tube furnace set to 0
12/17/2010	9:39:48 PM	Helium valve closed
12/17/2010	9:39:48 PM	H2 valve closed
12/17/2010	9:39:48 PM	BCl3 valve closed
12/17/2010	9:39:48 PM	PH3 valve closed
12/17/2010	9:39:48 PM	SiCl4 pre valve closed
12/17/2010	9:39:48 PM	SiCl4 post valve closed
12/17/2010	9:39:48 PM	Bubbler valve closed
12/17/2010	9:39:48 PM	Main Vac valve opened
12/17/2010	9:39:48 PM	Bypass valve opened
12/17/2010	9:39:48 PM	Helium MFC set to  0.000000
12/17/2010	9:39:48 PM	H2 MFC set to  0.000000
12/17/2010	9:39:48 PM	BCl3 MFC set to  0.000000
12/17/2010	9:39:48 PM	PHl3 MFC set to  0.000000
12/17/2010	9:39:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:39:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:39:48 PM	Tube furnace set to 0
12/17/2010	9:40:48 PM	H2 valve closed
12/17/2010	9:40:48 PM	BCl3 valve closed
12/17/2010	9:40:48 PM	PH3 valve closed
12/17/2010	9:40:48 PM	SiCl4 pre valve closed
12/17/2010	9:40:48 PM	SiCl4 post valve closed
12/17/2010	9:40:48 PM	Bubbler valve closed
12/17/2010	9:40:48 PM	Helium valve opened
12/17/2010	9:40:48 PM	Main Vac valve opened
12/17/2010	9:40:48 PM	Bypass valve opened
12/17/2010	9:40:48 PM	Helium MFC set to  100.000000
12/17/2010	9:40:48 PM	H2 MFC set to  0.000000
12/17/2010	9:40:48 PM	BCl3 MFC set to  0.000000
12/17/2010	9:40:48 PM	PHl3 MFC set to  0.000000
12/17/2010	9:40:48 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:40:48 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:40:48 PM	Tube furnace set to 0
12/17/2010	9:41:49 PM	Helium valve closed
12/17/2010	9:41:49 PM	H2 valve closed
12/17/2010	9:41:49 PM	BCl3 valve closed
12/17/2010	9:41:49 PM	PH3 valve closed
12/17/2010	9:41:49 PM	SiCl4 pre valve closed
12/17/2010	9:41:49 PM	SiCl4 post valve closed
12/17/2010	9:41:49 PM	Bubbler valve closed
12/17/2010	9:41:49 PM	Main Vac valve opened
12/17/2010	9:41:49 PM	Bypass valve opened
12/17/2010	9:41:49 PM	Helium MFC set to  0.000000
12/17/2010	9:41:49 PM	H2 MFC set to  0.000000
12/17/2010	9:41:49 PM	BCl3 MFC set to  0.000000
12/17/2010	9:41:49 PM	PHl3 MFC set to  0.000000
12/17/2010	9:41:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:41:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:41:49 PM	Tube furnace set to 0
12/17/2010	9:42:49 PM	H2 valve closed
12/17/2010	9:42:49 PM	BCl3 valve closed
12/17/2010	9:42:49 PM	PH3 valve closed
12/17/2010	9:42:49 PM	SiCl4 pre valve closed
12/17/2010	9:42:49 PM	SiCl4 post valve closed
12/17/2010	9:42:49 PM	Bubbler valve closed
12/17/2010	9:42:49 PM	Helium valve opened
12/17/2010	9:42:49 PM	Main Vac valve opened
12/17/2010	9:42:49 PM	Bypass valve opened
12/17/2010	9:42:49 PM	Helium MFC set to  100.000000
12/17/2010	9:42:49 PM	H2 MFC set to  0.000000
12/17/2010	9:42:49 PM	BCl3 MFC set to  0.000000
12/17/2010	9:42:49 PM	PHl3 MFC set to  0.000000
12/17/2010	9:42:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:42:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:42:49 PM	Tube furnace set to 0
12/17/2010	9:43:49 PM	Helium valve closed
12/17/2010	9:43:49 PM	H2 valve closed
12/17/2010	9:43:49 PM	BCl3 valve closed
12/17/2010	9:43:49 PM	PH3 valve closed
12/17/2010	9:43:49 PM	SiCl4 pre valve closed
12/17/2010	9:43:49 PM	SiCl4 post valve closed
12/17/2010	9:43:49 PM	Bubbler valve closed
12/17/2010	9:43:49 PM	Main Vac valve opened
12/17/2010	9:43:49 PM	Bypass valve opened
12/17/2010	9:43:49 PM	Helium MFC set to  0.000000
12/17/2010	9:43:49 PM	H2 MFC set to  0.000000
12/17/2010	9:43:49 PM	BCl3 MFC set to  0.000000
12/17/2010	9:43:49 PM	PHl3 MFC set to  0.000000
12/17/2010	9:43:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:43:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:43:49 PM	Tube furnace set to 0
12/17/2010	9:44:49 PM	H2 valve closed
12/17/2010	9:44:49 PM	BCl3 valve closed
12/17/2010	9:44:49 PM	PH3 valve closed
12/17/2010	9:44:49 PM	SiCl4 pre valve closed
12/17/2010	9:44:49 PM	SiCl4 post valve closed
12/17/2010	9:44:49 PM	Bubbler valve closed
12/17/2010	9:44:49 PM	Helium valve opened
12/17/2010	9:44:49 PM	Main Vac valve opened
12/17/2010	9:44:49 PM	Bypass valve opened
12/17/2010	9:44:49 PM	Helium MFC set to  100.000000
12/17/2010	9:44:49 PM	H2 MFC set to  0.000000
12/17/2010	9:44:49 PM	BCl3 MFC set to  0.000000
12/17/2010	9:44:49 PM	PHl3 MFC set to  0.000000
12/17/2010	9:44:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:44:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:44:49 PM	Tube furnace set to 0
12/17/2010	9:45:49 PM	Helium valve closed
12/17/2010	9:45:49 PM	H2 valve closed
12/17/2010	9:45:49 PM	BCl3 valve closed
12/17/2010	9:45:49 PM	PH3 valve closed
12/17/2010	9:45:49 PM	SiCl4 pre valve closed
12/17/2010	9:45:49 PM	SiCl4 post valve closed
12/17/2010	9:45:49 PM	Bubbler valve closed
12/17/2010	9:45:49 PM	Main Vac valve opened
12/17/2010	9:45:49 PM	Bypass valve opened
12/17/2010	9:45:49 PM	Helium MFC set to  0.000000
12/17/2010	9:45:49 PM	H2 MFC set to  0.000000
12/17/2010	9:45:49 PM	BCl3 MFC set to  0.000000
12/17/2010	9:45:49 PM	PHl3 MFC set to  0.000000
12/17/2010	9:45:49 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:45:49 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:45:49 PM	Tube furnace set to 0
12/17/2010	9:46:49 PM	H2 valve closed
12/17/2010	9:46:49 PM	BCl3 valve closed
12/17/2010	9:46:49 PM	PH3 valve closed
12/17/2010	9:46:49 PM	SiCl4 pre valve closed
12/17/2010	9:46:49 PM	SiCl4 post valve closed
12/17/2010	9:46:49 PM	Bubbler valve closed
12/17/2010	9:46:50 PM	Helium valve opened
12/17/2010	9:46:50 PM	Main Vac valve opened
12/17/2010	9:46:50 PM	Bypass valve opened
12/17/2010	9:46:50 PM	Helium MFC set to  100.000000
12/17/2010	9:46:50 PM	H2 MFC set to  0.000000
12/17/2010	9:46:50 PM	BCl3 MFC set to  0.000000
12/17/2010	9:46:50 PM	PHl3 MFC set to  0.000000
12/17/2010	9:46:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:46:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:46:50 PM	Tube furnace set to 0
12/17/2010	9:47:50 PM	Helium valve closed
12/17/2010	9:47:50 PM	H2 valve closed
12/17/2010	9:47:50 PM	BCl3 valve closed
12/17/2010	9:47:50 PM	PH3 valve closed
12/17/2010	9:47:50 PM	SiCl4 pre valve closed
12/17/2010	9:47:50 PM	SiCl4 post valve closed
12/17/2010	9:47:50 PM	Bubbler valve closed
12/17/2010	9:47:50 PM	Main Vac valve opened
12/17/2010	9:47:50 PM	Bypass valve opened
12/17/2010	9:47:50 PM	Helium MFC set to  0.000000
12/17/2010	9:47:50 PM	H2 MFC set to  0.000000
12/17/2010	9:47:50 PM	BCl3 MFC set to  0.000000
12/17/2010	9:47:50 PM	PHl3 MFC set to  0.000000
12/17/2010	9:47:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:47:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:47:50 PM	Tube furnace set to 0
12/17/2010	9:48:50 PM	H2 valve closed
12/17/2010	9:48:50 PM	BCl3 valve closed
12/17/2010	9:48:50 PM	PH3 valve closed
12/17/2010	9:48:50 PM	SiCl4 pre valve closed
12/17/2010	9:48:50 PM	SiCl4 post valve closed
12/17/2010	9:48:50 PM	Bubbler valve closed
12/17/2010	9:48:50 PM	Helium valve opened
12/17/2010	9:48:50 PM	Main Vac valve opened
12/17/2010	9:48:50 PM	Bypass valve opened
12/17/2010	9:48:50 PM	Helium MFC set to  100.000000
12/17/2010	9:48:50 PM	H2 MFC set to  0.000000
12/17/2010	9:48:50 PM	BCl3 MFC set to  0.000000
12/17/2010	9:48:50 PM	PHl3 MFC set to  0.000000
12/17/2010	9:48:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:48:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:48:50 PM	Tube furnace set to 0
12/17/2010	9:49:50 PM	Helium valve closed
12/17/2010	9:49:50 PM	H2 valve closed
12/17/2010	9:49:50 PM	BCl3 valve closed
12/17/2010	9:49:50 PM	PH3 valve closed
12/17/2010	9:49:50 PM	SiCl4 pre valve closed
12/17/2010	9:49:50 PM	SiCl4 post valve closed
12/17/2010	9:49:50 PM	Bubbler valve closed
12/17/2010	9:49:50 PM	Main Vac valve opened
12/17/2010	9:49:50 PM	Bypass valve opened
12/17/2010	9:49:50 PM	Helium MFC set to  0.000000
12/17/2010	9:49:50 PM	H2 MFC set to  0.000000
12/17/2010	9:49:50 PM	BCl3 MFC set to  0.000000
12/17/2010	9:49:50 PM	PHl3 MFC set to  0.000000
12/17/2010	9:49:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:49:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:49:50 PM	Tube furnace set to 0
12/17/2010	9:50:50 PM	H2 valve closed
12/17/2010	9:50:50 PM	BCl3 valve closed
12/17/2010	9:50:50 PM	PH3 valve closed
12/17/2010	9:50:50 PM	SiCl4 pre valve closed
12/17/2010	9:50:50 PM	SiCl4 post valve closed
12/17/2010	9:50:50 PM	Bubbler valve closed
12/17/2010	9:50:50 PM	Helium valve opened
12/17/2010	9:50:50 PM	Main Vac valve opened
12/17/2010	9:50:50 PM	Bypass valve opened
12/17/2010	9:50:50 PM	Helium MFC set to  100.000000
12/17/2010	9:50:50 PM	H2 MFC set to  0.000000
12/17/2010	9:50:50 PM	BCl3 MFC set to  0.000000
12/17/2010	9:50:50 PM	PHl3 MFC set to  0.000000
12/17/2010	9:50:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:50:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:50:50 PM	Tube furnace set to 0
12/17/2010	9:51:50 PM	Helium valve closed
12/17/2010	9:51:50 PM	H2 valve closed
12/17/2010	9:51:50 PM	BCl3 valve closed
12/17/2010	9:51:50 PM	PH3 valve closed
12/17/2010	9:51:50 PM	SiCl4 pre valve closed
12/17/2010	9:51:50 PM	SiCl4 post valve closed
12/17/2010	9:51:50 PM	Bubbler valve closed
12/17/2010	9:51:50 PM	Main Vac valve opened
12/17/2010	9:51:50 PM	Bypass valve opened
12/17/2010	9:51:50 PM	Helium MFC set to  0.000000
12/17/2010	9:51:51 PM	H2 MFC set to  0.000000
12/17/2010	9:51:51 PM	BCl3 MFC set to  0.000000
12/17/2010	9:51:51 PM	PHl3 MFC set to  0.000000
12/17/2010	9:51:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:51:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:51:51 PM	Tube furnace set to 0
12/17/2010	9:52:51 PM	H2 valve closed
12/17/2010	9:52:51 PM	BCl3 valve closed
12/17/2010	9:52:51 PM	PH3 valve closed
12/17/2010	9:52:51 PM	SiCl4 pre valve closed
12/17/2010	9:52:51 PM	SiCl4 post valve closed
12/17/2010	9:52:51 PM	Bubbler valve closed
12/17/2010	9:52:51 PM	Helium valve opened
12/17/2010	9:52:51 PM	Main Vac valve opened
12/17/2010	9:52:51 PM	Bypass valve opened
12/17/2010	9:52:51 PM	Helium MFC set to  100.000000
12/17/2010	9:52:51 PM	H2 MFC set to  0.000000
12/17/2010	9:52:51 PM	BCl3 MFC set to  0.000000
12/17/2010	9:52:51 PM	PHl3 MFC set to  0.000000
12/17/2010	9:52:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:52:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:52:51 PM	Tube furnace set to 0
12/17/2010	9:53:51 PM	Helium valve closed
12/17/2010	9:53:51 PM	H2 valve closed
12/17/2010	9:53:51 PM	BCl3 valve closed
12/17/2010	9:53:51 PM	PH3 valve closed
12/17/2010	9:53:51 PM	SiCl4 pre valve closed
12/17/2010	9:53:51 PM	SiCl4 post valve closed
12/17/2010	9:53:51 PM	Bubbler valve closed
12/17/2010	9:53:51 PM	Main Vac valve opened
12/17/2010	9:53:51 PM	Bypass valve opened
12/17/2010	9:53:51 PM	Helium MFC set to  0.000000
12/17/2010	9:53:51 PM	H2 MFC set to  0.000000
12/17/2010	9:53:51 PM	BCl3 MFC set to  0.000000
12/17/2010	9:53:51 PM	PHl3 MFC set to  0.000000
12/17/2010	9:53:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:53:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:53:51 PM	Tube furnace set to 0
12/17/2010	9:54:51 PM	H2 valve closed
12/17/2010	9:54:51 PM	BCl3 valve closed
12/17/2010	9:54:51 PM	PH3 valve closed
12/17/2010	9:54:51 PM	SiCl4 pre valve closed
12/17/2010	9:54:51 PM	SiCl4 post valve closed
12/17/2010	9:54:51 PM	Bubbler valve closed
12/17/2010	9:54:51 PM	Helium valve opened
12/17/2010	9:54:51 PM	Main Vac valve opened
12/17/2010	9:54:51 PM	Bypass valve opened
12/17/2010	9:54:51 PM	Helium MFC set to  100.000000
12/17/2010	9:54:51 PM	H2 MFC set to  0.000000
12/17/2010	9:54:51 PM	BCl3 MFC set to  0.000000
12/17/2010	9:54:51 PM	PHl3 MFC set to  0.000000
12/17/2010	9:54:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:54:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:54:51 PM	Tube furnace set to 0
12/17/2010	9:55:51 PM	Helium valve closed
12/17/2010	9:55:51 PM	H2 valve closed
12/17/2010	9:55:51 PM	BCl3 valve closed
12/17/2010	9:55:51 PM	PH3 valve closed
12/17/2010	9:55:51 PM	SiCl4 pre valve closed
12/17/2010	9:55:51 PM	SiCl4 post valve closed
12/17/2010	9:55:51 PM	Bubbler valve closed
12/17/2010	9:55:51 PM	Main Vac valve opened
12/17/2010	9:55:51 PM	Bypass valve opened
12/17/2010	9:55:51 PM	Helium MFC set to  0.000000
12/17/2010	9:55:51 PM	H2 MFC set to  0.000000
12/17/2010	9:55:51 PM	BCl3 MFC set to  0.000000
12/17/2010	9:55:51 PM	PHl3 MFC set to  0.000000
12/17/2010	9:55:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:55:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:55:51 PM	Tube furnace set to 0
12/17/2010	9:55:52 PM	Run finished at 9:55 PM
12/17/2010	9:55:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:56:22 PM	Bypass valve closed
12/17/2010	9:56:23 PM	Main Vac valve closed
12/17/2010	9:56:47 PM	Main Vac valve opened
12/17/2010	9:56:47 PM	Bypass valve opened
12/17/2010	9:56:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	9:57:03 PM	Recipe started at 9:56 PM
12/17/2010	9:57:03 PM	Helium valve closed
12/17/2010	9:57:03 PM	H2 valve closed
12/17/2010	9:57:03 PM	BCl3 valve closed
12/17/2010	9:57:03 PM	PH3 valve closed
12/17/2010	9:57:03 PM	SiCl4 pre valve closed
12/17/2010	9:57:03 PM	SiCl4 post valve closed
12/17/2010	9:57:03 PM	Main Vac valve closed
12/17/2010	9:57:03 PM	Bubbler valve closed
12/17/2010	9:57:03 PM	Bypass valve opened
12/17/2010	9:57:03 PM	Helium MFC set to  0.000000
12/17/2010	9:57:03 PM	H2 MFC set to  0.000000
12/17/2010	9:57:03 PM	BCl3 MFC set to  0.000000
12/17/2010	9:57:03 PM	PHl3 MFC set to  0.000000
12/17/2010	9:57:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:57:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:57:03 PM	Tube furnace set to 0
12/17/2010	9:57:04 PM	Helium valve closed
12/17/2010	9:57:04 PM	H2 valve closed
12/17/2010	9:57:04 PM	BCl3 valve closed
12/17/2010	9:57:04 PM	PH3 valve closed
12/17/2010	9:57:04 PM	SiCl4 pre valve closed
12/17/2010	9:57:04 PM	SiCl4 post valve closed
12/17/2010	9:57:04 PM	Bubbler valve closed
12/17/2010	9:57:04 PM	Main Vac valve opened
12/17/2010	9:57:04 PM	Bypass valve opened
12/17/2010	9:57:04 PM	Helium MFC set to  0.000000
12/17/2010	9:57:04 PM	H2 MFC set to  0.000000
12/17/2010	9:57:04 PM	BCl3 MFC set to  0.000000
12/17/2010	9:57:04 PM	PHl3 MFC set to  0.000000
12/17/2010	9:57:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:57:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:57:04 PM	Tube furnace set to 0
12/17/2010	9:58:04 PM	H2 valve closed
12/17/2010	9:58:04 PM	BCl3 valve closed
12/17/2010	9:58:04 PM	PH3 valve closed
12/17/2010	9:58:04 PM	SiCl4 pre valve closed
12/17/2010	9:58:04 PM	SiCl4 post valve closed
12/17/2010	9:58:04 PM	Bubbler valve closed
12/17/2010	9:58:04 PM	Helium valve opened
12/17/2010	9:58:04 PM	Main Vac valve opened
12/17/2010	9:58:04 PM	Bypass valve opened
12/17/2010	9:58:04 PM	Helium MFC set to  100.000000
12/17/2010	9:58:04 PM	H2 MFC set to  0.000000
12/17/2010	9:58:04 PM	BCl3 MFC set to  0.000000
12/17/2010	9:58:04 PM	PHl3 MFC set to  0.000000
12/17/2010	9:58:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:58:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:58:04 PM	Tube furnace set to 0
12/17/2010	9:59:04 PM	Helium valve closed
12/17/2010	9:59:04 PM	H2 valve closed
12/17/2010	9:59:04 PM	BCl3 valve closed
12/17/2010	9:59:04 PM	PH3 valve closed
12/17/2010	9:59:04 PM	SiCl4 pre valve closed
12/17/2010	9:59:04 PM	SiCl4 post valve closed
12/17/2010	9:59:04 PM	Bubbler valve closed
12/17/2010	9:59:04 PM	Main Vac valve opened
12/17/2010	9:59:04 PM	Bypass valve opened
12/17/2010	9:59:04 PM	Helium MFC set to  0.000000
12/17/2010	9:59:04 PM	H2 MFC set to  0.000000
12/17/2010	9:59:04 PM	BCl3 MFC set to  0.000000
12/17/2010	9:59:04 PM	PHl3 MFC set to  0.000000
12/17/2010	9:59:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	9:59:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	9:59:04 PM	Tube furnace set to 0
12/17/2010	10:00:04 PM	H2 valve closed
12/17/2010	10:00:04 PM	BCl3 valve closed
12/17/2010	10:00:04 PM	PH3 valve closed
12/17/2010	10:00:04 PM	SiCl4 pre valve closed
12/17/2010	10:00:04 PM	SiCl4 post valve closed
12/17/2010	10:00:04 PM	Bubbler valve closed
12/17/2010	10:00:04 PM	Helium valve opened
12/17/2010	10:00:04 PM	Main Vac valve opened
12/17/2010	10:00:04 PM	Bypass valve opened
12/17/2010	10:00:04 PM	Helium MFC set to  100.000000
12/17/2010	10:00:04 PM	H2 MFC set to  0.000000
12/17/2010	10:00:04 PM	BCl3 MFC set to  0.000000
12/17/2010	10:00:04 PM	PHl3 MFC set to  0.000000
12/17/2010	10:00:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:00:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:00:04 PM	Tube furnace set to 0
12/17/2010	10:01:04 PM	Helium valve closed
12/17/2010	10:01:04 PM	H2 valve closed
12/17/2010	10:01:04 PM	BCl3 valve closed
12/17/2010	10:01:04 PM	PH3 valve closed
12/17/2010	10:01:04 PM	SiCl4 pre valve closed
12/17/2010	10:01:04 PM	SiCl4 post valve closed
12/17/2010	10:01:04 PM	Bubbler valve closed
12/17/2010	10:01:04 PM	Main Vac valve opened
12/17/2010	10:01:04 PM	Bypass valve opened
12/17/2010	10:01:04 PM	Helium MFC set to  0.000000
12/17/2010	10:01:04 PM	H2 MFC set to  0.000000
12/17/2010	10:01:04 PM	BCl3 MFC set to  0.000000
12/17/2010	10:01:04 PM	PHl3 MFC set to  0.000000
12/17/2010	10:01:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:01:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:01:05 PM	Tube furnace set to 0
12/17/2010	10:02:05 PM	H2 valve closed
12/17/2010	10:02:05 PM	BCl3 valve closed
12/17/2010	10:02:05 PM	PH3 valve closed
12/17/2010	10:02:05 PM	SiCl4 pre valve closed
12/17/2010	10:02:05 PM	SiCl4 post valve closed
12/17/2010	10:02:05 PM	Bubbler valve closed
12/17/2010	10:02:05 PM	Helium valve opened
12/17/2010	10:02:05 PM	Main Vac valve opened
12/17/2010	10:02:05 PM	Bypass valve opened
12/17/2010	10:02:05 PM	Helium MFC set to  100.000000
12/17/2010	10:02:05 PM	H2 MFC set to  0.000000
12/17/2010	10:02:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:02:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:02:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:02:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:02:05 PM	Tube furnace set to 0
12/17/2010	10:03:05 PM	Helium valve closed
12/17/2010	10:03:05 PM	H2 valve closed
12/17/2010	10:03:05 PM	BCl3 valve closed
12/17/2010	10:03:05 PM	PH3 valve closed
12/17/2010	10:03:05 PM	SiCl4 pre valve closed
12/17/2010	10:03:05 PM	SiCl4 post valve closed
12/17/2010	10:03:05 PM	Bubbler valve closed
12/17/2010	10:03:05 PM	Main Vac valve opened
12/17/2010	10:03:05 PM	Bypass valve opened
12/17/2010	10:03:05 PM	Helium MFC set to  0.000000
12/17/2010	10:03:05 PM	H2 MFC set to  0.000000
12/17/2010	10:03:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:03:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:03:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:03:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:03:05 PM	Tube furnace set to 0
12/17/2010	10:04:05 PM	H2 valve closed
12/17/2010	10:04:05 PM	BCl3 valve closed
12/17/2010	10:04:05 PM	PH3 valve closed
12/17/2010	10:04:05 PM	SiCl4 pre valve closed
12/17/2010	10:04:05 PM	SiCl4 post valve closed
12/17/2010	10:04:05 PM	Bubbler valve closed
12/17/2010	10:04:05 PM	Helium valve opened
12/17/2010	10:04:05 PM	Main Vac valve opened
12/17/2010	10:04:05 PM	Bypass valve opened
12/17/2010	10:04:05 PM	Helium MFC set to  100.000000
12/17/2010	10:04:05 PM	H2 MFC set to  0.000000
12/17/2010	10:04:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:04:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:04:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:04:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:04:05 PM	Tube furnace set to 0
12/17/2010	10:05:05 PM	Helium valve closed
12/17/2010	10:05:05 PM	H2 valve closed
12/17/2010	10:05:05 PM	BCl3 valve closed
12/17/2010	10:05:05 PM	PH3 valve closed
12/17/2010	10:05:05 PM	SiCl4 pre valve closed
12/17/2010	10:05:05 PM	SiCl4 post valve closed
12/17/2010	10:05:05 PM	Bubbler valve closed
12/17/2010	10:05:05 PM	Main Vac valve opened
12/17/2010	10:05:05 PM	Bypass valve opened
12/17/2010	10:05:05 PM	Helium MFC set to  0.000000
12/17/2010	10:05:05 PM	H2 MFC set to  0.000000
12/17/2010	10:05:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:05:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:05:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:05:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:05:05 PM	Tube furnace set to 0
12/17/2010	10:06:05 PM	H2 valve closed
12/17/2010	10:06:05 PM	BCl3 valve closed
12/17/2010	10:06:05 PM	PH3 valve closed
12/17/2010	10:06:05 PM	SiCl4 pre valve closed
12/17/2010	10:06:05 PM	SiCl4 post valve closed
12/17/2010	10:06:05 PM	Bubbler valve closed
12/17/2010	10:06:05 PM	Helium valve opened
12/17/2010	10:06:05 PM	Main Vac valve opened
12/17/2010	10:06:05 PM	Bypass valve opened
12/17/2010	10:06:05 PM	Helium MFC set to  100.000000
12/17/2010	10:06:05 PM	H2 MFC set to  0.000000
12/17/2010	10:06:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:06:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:06:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:06:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:06:06 PM	Tube furnace set to 0
12/17/2010	10:07:06 PM	Helium valve closed
12/17/2010	10:07:06 PM	H2 valve closed
12/17/2010	10:07:06 PM	BCl3 valve closed
12/17/2010	10:07:06 PM	PH3 valve closed
12/17/2010	10:07:06 PM	SiCl4 pre valve closed
12/17/2010	10:07:06 PM	SiCl4 post valve closed
12/17/2010	10:07:06 PM	Bubbler valve closed
12/17/2010	10:07:06 PM	Main Vac valve opened
12/17/2010	10:07:06 PM	Bypass valve opened
12/17/2010	10:07:06 PM	Helium MFC set to  0.000000
12/17/2010	10:07:06 PM	H2 MFC set to  0.000000
12/17/2010	10:07:06 PM	BCl3 MFC set to  0.000000
12/17/2010	10:07:06 PM	PHl3 MFC set to  0.000000
12/17/2010	10:07:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:07:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:07:06 PM	Tube furnace set to 0
12/17/2010	10:08:06 PM	H2 valve closed
12/17/2010	10:08:06 PM	BCl3 valve closed
12/17/2010	10:08:06 PM	PH3 valve closed
12/17/2010	10:08:06 PM	SiCl4 pre valve closed
12/17/2010	10:08:06 PM	SiCl4 post valve closed
12/17/2010	10:08:06 PM	Bubbler valve closed
12/17/2010	10:08:06 PM	Helium valve opened
12/17/2010	10:08:06 PM	Main Vac valve opened
12/17/2010	10:08:06 PM	Bypass valve opened
12/17/2010	10:08:06 PM	Helium MFC set to  100.000000
12/17/2010	10:08:06 PM	H2 MFC set to  0.000000
12/17/2010	10:08:06 PM	BCl3 MFC set to  0.000000
12/17/2010	10:08:06 PM	PHl3 MFC set to  0.000000
12/17/2010	10:08:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:08:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:08:06 PM	Tube furnace set to 0
12/17/2010	10:09:04 PM	Helium valve closed
12/17/2010	10:09:04 PM	H2 valve closed
12/17/2010	10:09:04 PM	BCl3 valve closed
12/17/2010	10:09:04 PM	PH3 valve closed
12/17/2010	10:09:04 PM	SiCl4 pre valve closed
12/17/2010	10:09:04 PM	SiCl4 post valve closed
12/17/2010	10:09:04 PM	Bubbler valve closed
12/17/2010	10:09:04 PM	Main Vac valve opened
12/17/2010	10:09:04 PM	Bypass valve opened
12/17/2010	10:09:04 PM	Helium MFC set to  0.000000
12/17/2010	10:09:04 PM	H2 MFC set to  0.000000
12/17/2010	10:09:04 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:04 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:04 PM	Tube furnace set to 0
12/17/2010	10:09:04 PM	H2 valve closed
12/17/2010	10:09:04 PM	BCl3 valve closed
12/17/2010	10:09:04 PM	PH3 valve closed
12/17/2010	10:09:04 PM	SiCl4 pre valve closed
12/17/2010	10:09:04 PM	SiCl4 post valve closed
12/17/2010	10:09:04 PM	Bubbler valve closed
12/17/2010	10:09:04 PM	Helium valve opened
12/17/2010	10:09:04 PM	Main Vac valve opened
12/17/2010	10:09:04 PM	Bypass valve opened
12/17/2010	10:09:04 PM	Helium MFC set to  100.000000
12/17/2010	10:09:04 PM	H2 MFC set to  0.000000
12/17/2010	10:09:04 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:04 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:04 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:04 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:05 PM	Tube furnace set to 0
12/17/2010	10:09:05 PM	Helium valve closed
12/17/2010	10:09:05 PM	H2 valve closed
12/17/2010	10:09:05 PM	BCl3 valve closed
12/17/2010	10:09:05 PM	PH3 valve closed
12/17/2010	10:09:05 PM	SiCl4 pre valve closed
12/17/2010	10:09:05 PM	SiCl4 post valve closed
12/17/2010	10:09:05 PM	Bubbler valve closed
12/17/2010	10:09:05 PM	Main Vac valve opened
12/17/2010	10:09:05 PM	Bypass valve opened
12/17/2010	10:09:05 PM	Helium MFC set to  0.000000
12/17/2010	10:09:05 PM	H2 MFC set to  0.000000
12/17/2010	10:09:05 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:05 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:05 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:05 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:05 PM	Tube furnace set to 0
12/17/2010	10:09:06 PM	H2 valve closed
12/17/2010	10:09:06 PM	BCl3 valve closed
12/17/2010	10:09:06 PM	PH3 valve closed
12/17/2010	10:09:06 PM	SiCl4 pre valve closed
12/17/2010	10:09:06 PM	SiCl4 post valve closed
12/17/2010	10:09:06 PM	Bubbler valve closed
12/17/2010	10:09:06 PM	Helium valve opened
12/17/2010	10:09:06 PM	Main Vac valve opened
12/17/2010	10:09:06 PM	Bypass valve opened
12/17/2010	10:09:06 PM	Helium MFC set to  100.000000
12/17/2010	10:09:06 PM	H2 MFC set to  0.000000
12/17/2010	10:09:06 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:06 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:06 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:06 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:06 PM	Tube furnace set to 0
12/17/2010	10:09:07 PM	Helium valve closed
12/17/2010	10:09:07 PM	H2 valve closed
12/17/2010	10:09:07 PM	BCl3 valve closed
12/17/2010	10:09:07 PM	PH3 valve closed
12/17/2010	10:09:07 PM	SiCl4 pre valve closed
12/17/2010	10:09:07 PM	SiCl4 post valve closed
12/17/2010	10:09:07 PM	Bubbler valve closed
12/17/2010	10:09:07 PM	Main Vac valve opened
12/17/2010	10:09:07 PM	Bypass valve opened
12/17/2010	10:09:07 PM	Helium MFC set to  0.000000
12/17/2010	10:09:07 PM	H2 MFC set to  0.000000
12/17/2010	10:09:07 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:07 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:07 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:07 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:07 PM	Tube furnace set to 0
12/17/2010	10:09:07 PM	H2 valve closed
12/17/2010	10:09:07 PM	BCl3 valve closed
12/17/2010	10:09:07 PM	PH3 valve closed
12/17/2010	10:09:08 PM	SiCl4 pre valve closed
12/17/2010	10:09:08 PM	SiCl4 post valve closed
12/17/2010	10:09:08 PM	Bubbler valve closed
12/17/2010	10:09:08 PM	Helium valve opened
12/17/2010	10:09:08 PM	Main Vac valve opened
12/17/2010	10:09:08 PM	Bypass valve opened
12/17/2010	10:09:08 PM	Helium MFC set to  100.000000
12/17/2010	10:09:08 PM	H2 MFC set to  0.000000
12/17/2010	10:09:08 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:08 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:08 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:08 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:08 PM	Tube furnace set to 0
12/17/2010	10:09:09 PM	Helium valve closed
12/17/2010	10:09:09 PM	H2 valve closed
12/17/2010	10:09:09 PM	BCl3 valve closed
12/17/2010	10:09:09 PM	PH3 valve closed
12/17/2010	10:09:09 PM	SiCl4 pre valve closed
12/17/2010	10:09:09 PM	SiCl4 post valve closed
12/17/2010	10:09:09 PM	Bubbler valve closed
12/17/2010	10:09:09 PM	Main Vac valve opened
12/17/2010	10:09:09 PM	Bypass valve opened
12/17/2010	10:09:09 PM	Helium MFC set to  0.000000
12/17/2010	10:09:09 PM	H2 MFC set to  0.000000
12/17/2010	10:09:09 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:09 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:09 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:09 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:09 PM	Tube furnace set to 0
12/17/2010	10:09:10 PM	H2 valve closed
12/17/2010	10:09:10 PM	BCl3 valve closed
12/17/2010	10:09:10 PM	PH3 valve closed
12/17/2010	10:09:10 PM	SiCl4 pre valve closed
12/17/2010	10:09:10 PM	SiCl4 post valve closed
12/17/2010	10:09:10 PM	Bubbler valve closed
12/17/2010	10:09:10 PM	Helium valve opened
12/17/2010	10:09:10 PM	Main Vac valve opened
12/17/2010	10:09:10 PM	Bypass valve opened
12/17/2010	10:09:10 PM	Helium MFC set to  100.000000
12/17/2010	10:09:10 PM	H2 MFC set to  0.000000
12/17/2010	10:09:10 PM	BCl3 MFC set to  0.000000
12/17/2010	10:09:10 PM	PHl3 MFC set to  0.000000
12/17/2010	10:09:10 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:09:10 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:09:11 PM	Tube furnace set to 0
12/17/2010	10:10:11 PM	Helium valve closed
12/17/2010	10:10:11 PM	H2 valve closed
12/17/2010	10:10:11 PM	BCl3 valve closed
12/17/2010	10:10:11 PM	PH3 valve closed
12/17/2010	10:10:11 PM	SiCl4 pre valve closed
12/17/2010	10:10:11 PM	SiCl4 post valve closed
12/17/2010	10:10:11 PM	Bubbler valve closed
12/17/2010	10:10:11 PM	Main Vac valve opened
12/17/2010	10:10:11 PM	Bypass valve opened
12/17/2010	10:10:11 PM	Helium MFC set to  0.000000
12/17/2010	10:10:11 PM	H2 MFC set to  0.000000
12/17/2010	10:10:11 PM	BCl3 MFC set to  0.000000
12/17/2010	10:10:11 PM	PHl3 MFC set to  0.000000
12/17/2010	10:10:11 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:10:11 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:10:11 PM	Tube furnace set to 0
12/17/2010	10:10:12 PM	Run finished at 10:10 PM
12/17/2010	10:10:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:11:12 PM	Bypass valve closed
12/17/2010	10:11:13 PM	Main Vac valve closed
12/17/2010	10:11:35 PM	Main Vac valve opened
12/17/2010	10:11:36 PM	Bypass valve opened
12/17/2010	10:11:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:11:50 PM	Recipe started at 10:11 PM
12/17/2010	10:11:50 PM	Helium valve closed
12/17/2010	10:11:50 PM	H2 valve closed
12/17/2010	10:11:50 PM	BCl3 valve closed
12/17/2010	10:11:50 PM	PH3 valve closed
12/17/2010	10:11:50 PM	SiCl4 pre valve closed
12/17/2010	10:11:50 PM	SiCl4 post valve closed
12/17/2010	10:11:50 PM	Main Vac valve closed
12/17/2010	10:11:50 PM	Bubbler valve closed
12/17/2010	10:11:50 PM	Bypass valve opened
12/17/2010	10:11:50 PM	Helium MFC set to  0.000000
12/17/2010	10:11:50 PM	H2 MFC set to  0.000000
12/17/2010	10:11:50 PM	BCl3 MFC set to  0.000000
12/17/2010	10:11:50 PM	PHl3 MFC set to  0.000000
12/17/2010	10:11:50 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:11:50 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:11:50 PM	Tube furnace set to 0
12/17/2010	10:11:51 PM	Helium valve closed
12/17/2010	10:11:51 PM	H2 valve closed
12/17/2010	10:11:51 PM	BCl3 valve closed
12/17/2010	10:11:51 PM	PH3 valve closed
12/17/2010	10:11:51 PM	SiCl4 pre valve closed
12/17/2010	10:11:51 PM	SiCl4 post valve closed
12/17/2010	10:11:51 PM	Bubbler valve closed
12/17/2010	10:11:51 PM	Main Vac valve opened
12/17/2010	10:11:51 PM	Bypass valve opened
12/17/2010	10:11:51 PM	Helium MFC set to  0.000000
12/17/2010	10:11:51 PM	H2 MFC set to  0.000000
12/17/2010	10:11:51 PM	BCl3 MFC set to  0.000000
12/17/2010	10:11:51 PM	PHl3 MFC set to  0.000000
12/17/2010	10:11:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:11:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:11:51 PM	Tube furnace set to 0
12/17/2010	10:12:51 PM	H2 valve closed
12/17/2010	10:12:51 PM	BCl3 valve closed
12/17/2010	10:12:51 PM	PH3 valve closed
12/17/2010	10:12:51 PM	SiCl4 pre valve closed
12/17/2010	10:12:51 PM	SiCl4 post valve closed
12/17/2010	10:12:51 PM	Bubbler valve closed
12/17/2010	10:12:51 PM	Helium valve opened
12/17/2010	10:12:51 PM	Main Vac valve opened
12/17/2010	10:12:51 PM	Bypass valve opened
12/17/2010	10:12:51 PM	Helium MFC set to  100.000000
12/17/2010	10:12:51 PM	H2 MFC set to  0.000000
12/17/2010	10:12:51 PM	BCl3 MFC set to  0.000000
12/17/2010	10:12:51 PM	PHl3 MFC set to  0.000000
12/17/2010	10:12:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:12:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:12:51 PM	Tube furnace set to 0
12/17/2010	10:13:51 PM	Helium valve closed
12/17/2010	10:13:51 PM	H2 valve closed
12/17/2010	10:13:51 PM	BCl3 valve closed
12/17/2010	10:13:51 PM	PH3 valve closed
12/17/2010	10:13:51 PM	SiCl4 pre valve closed
12/17/2010	10:13:51 PM	SiCl4 post valve closed
12/17/2010	10:13:51 PM	Bubbler valve closed
12/17/2010	10:13:51 PM	Main Vac valve opened
12/17/2010	10:13:51 PM	Bypass valve opened
12/17/2010	10:13:51 PM	Helium MFC set to  0.000000
12/17/2010	10:13:51 PM	H2 MFC set to  0.000000
12/17/2010	10:13:51 PM	BCl3 MFC set to  0.000000
12/17/2010	10:13:51 PM	PHl3 MFC set to  0.000000
12/17/2010	10:13:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:13:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:13:51 PM	Tube furnace set to 0
12/17/2010	10:14:51 PM	H2 valve closed
12/17/2010	10:14:51 PM	BCl3 valve closed
12/17/2010	10:14:51 PM	PH3 valve closed
12/17/2010	10:14:51 PM	SiCl4 pre valve closed
12/17/2010	10:14:51 PM	SiCl4 post valve closed
12/17/2010	10:14:51 PM	Bubbler valve closed
12/17/2010	10:14:51 PM	Helium valve opened
12/17/2010	10:14:51 PM	Main Vac valve opened
12/17/2010	10:14:51 PM	Bypass valve opened
12/17/2010	10:14:51 PM	Helium MFC set to  100.000000
12/17/2010	10:14:51 PM	H2 MFC set to  0.000000
12/17/2010	10:14:51 PM	BCl3 MFC set to  0.000000
12/17/2010	10:14:51 PM	PHl3 MFC set to  0.000000
12/17/2010	10:14:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:14:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:14:51 PM	Tube furnace set to 0
12/17/2010	10:15:51 PM	Helium valve closed
12/17/2010	10:15:51 PM	H2 valve closed
12/17/2010	10:15:51 PM	BCl3 valve closed
12/17/2010	10:15:51 PM	PH3 valve closed
12/17/2010	10:15:51 PM	SiCl4 pre valve closed
12/17/2010	10:15:51 PM	SiCl4 post valve closed
12/17/2010	10:15:51 PM	Bubbler valve closed
12/17/2010	10:15:51 PM	Main Vac valve opened
12/17/2010	10:15:51 PM	Bypass valve opened
12/17/2010	10:15:51 PM	Helium MFC set to  0.000000
12/17/2010	10:15:51 PM	H2 MFC set to  0.000000
12/17/2010	10:15:51 PM	BCl3 MFC set to  0.000000
12/17/2010	10:15:51 PM	PHl3 MFC set to  0.000000
12/17/2010	10:15:51 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:15:51 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:15:52 PM	Tube furnace set to 0
12/17/2010	10:16:52 PM	H2 valve closed
12/17/2010	10:16:52 PM	BCl3 valve closed
12/17/2010	10:16:52 PM	PH3 valve closed
12/17/2010	10:16:52 PM	SiCl4 pre valve closed
12/17/2010	10:16:52 PM	SiCl4 post valve closed
12/17/2010	10:16:52 PM	Bubbler valve closed
12/17/2010	10:16:52 PM	Helium valve opened
12/17/2010	10:16:52 PM	Main Vac valve opened
12/17/2010	10:16:52 PM	Bypass valve opened
12/17/2010	10:16:52 PM	Helium MFC set to  100.000000
12/17/2010	10:16:52 PM	H2 MFC set to  0.000000
12/17/2010	10:16:52 PM	BCl3 MFC set to  0.000000
12/17/2010	10:16:52 PM	PHl3 MFC set to  0.000000
12/17/2010	10:16:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:16:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:16:52 PM	Tube furnace set to 0
12/17/2010	10:17:52 PM	Helium valve closed
12/17/2010	10:17:52 PM	H2 valve closed
12/17/2010	10:17:52 PM	BCl3 valve closed
12/17/2010	10:17:52 PM	PH3 valve closed
12/17/2010	10:17:52 PM	SiCl4 pre valve closed
12/17/2010	10:17:52 PM	SiCl4 post valve closed
12/17/2010	10:17:52 PM	Bubbler valve closed
12/17/2010	10:17:52 PM	Main Vac valve opened
12/17/2010	10:17:52 PM	Bypass valve opened
12/17/2010	10:17:52 PM	Helium MFC set to  0.000000
12/17/2010	10:17:52 PM	H2 MFC set to  0.000000
12/17/2010	10:17:52 PM	BCl3 MFC set to  0.000000
12/17/2010	10:17:52 PM	PHl3 MFC set to  0.000000
12/17/2010	10:17:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:17:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:17:52 PM	Tube furnace set to 0
12/17/2010	10:18:52 PM	H2 valve closed
12/17/2010	10:18:52 PM	BCl3 valve closed
12/17/2010	10:18:52 PM	PH3 valve closed
12/17/2010	10:18:52 PM	SiCl4 pre valve closed
12/17/2010	10:18:52 PM	SiCl4 post valve closed
12/17/2010	10:18:52 PM	Bubbler valve closed
12/17/2010	10:18:52 PM	Helium valve opened
12/17/2010	10:18:52 PM	Main Vac valve opened
12/17/2010	10:18:52 PM	Bypass valve opened
12/17/2010	10:18:52 PM	Helium MFC set to  100.000000
12/17/2010	10:18:52 PM	H2 MFC set to  0.000000
12/17/2010	10:18:52 PM	BCl3 MFC set to  0.000000
12/17/2010	10:18:52 PM	PHl3 MFC set to  0.000000
12/17/2010	10:18:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:18:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:18:52 PM	Tube furnace set to 0
12/17/2010	10:19:52 PM	Helium valve closed
12/17/2010	10:19:52 PM	H2 valve closed
12/17/2010	10:19:52 PM	BCl3 valve closed
12/17/2010	10:19:52 PM	PH3 valve closed
12/17/2010	10:19:52 PM	SiCl4 pre valve closed
12/17/2010	10:19:52 PM	SiCl4 post valve closed
12/17/2010	10:19:52 PM	Bubbler valve closed
12/17/2010	10:19:52 PM	Main Vac valve opened
12/17/2010	10:19:52 PM	Bypass valve opened
12/17/2010	10:19:52 PM	Helium MFC set to  0.000000
12/17/2010	10:19:52 PM	H2 MFC set to  0.000000
12/17/2010	10:19:52 PM	BCl3 MFC set to  0.000000
12/17/2010	10:19:52 PM	PHl3 MFC set to  0.000000
12/17/2010	10:19:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:19:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:19:52 PM	Tube furnace set to 0
12/17/2010	10:20:52 PM	H2 valve closed
12/17/2010	10:20:52 PM	BCl3 valve closed
12/17/2010	10:20:52 PM	PH3 valve closed
12/17/2010	10:20:52 PM	SiCl4 pre valve closed
12/17/2010	10:20:52 PM	SiCl4 post valve closed
12/17/2010	10:20:52 PM	Bubbler valve closed
12/17/2010	10:20:52 PM	Helium valve opened
12/17/2010	10:20:52 PM	Main Vac valve opened
12/17/2010	10:20:52 PM	Bypass valve opened
12/17/2010	10:20:52 PM	Helium MFC set to  100.000000
12/17/2010	10:20:52 PM	H2 MFC set to  0.000000
12/17/2010	10:20:52 PM	BCl3 MFC set to  0.000000
12/17/2010	10:20:52 PM	PHl3 MFC set to  0.000000
12/17/2010	10:20:52 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:20:52 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:20:53 PM	Tube furnace set to 0
12/17/2010	10:21:53 PM	Helium valve closed
12/17/2010	10:21:53 PM	H2 valve closed
12/17/2010	10:21:53 PM	BCl3 valve closed
12/17/2010	10:21:53 PM	PH3 valve closed
12/17/2010	10:21:53 PM	SiCl4 pre valve closed
12/17/2010	10:21:53 PM	SiCl4 post valve closed
12/17/2010	10:21:53 PM	Bubbler valve closed
12/17/2010	10:21:53 PM	Main Vac valve opened
12/17/2010	10:21:53 PM	Bypass valve opened
12/17/2010	10:21:53 PM	Helium MFC set to  0.000000
12/17/2010	10:21:53 PM	H2 MFC set to  0.000000
12/17/2010	10:21:53 PM	BCl3 MFC set to  0.000000
12/17/2010	10:21:53 PM	PHl3 MFC set to  0.000000
12/17/2010	10:21:53 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:21:53 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:21:53 PM	Tube furnace set to 0
12/17/2010	10:22:53 PM	H2 valve closed
12/17/2010	10:22:53 PM	BCl3 valve closed
12/17/2010	10:22:53 PM	PH3 valve closed
12/17/2010	10:22:53 PM	SiCl4 pre valve closed
12/17/2010	10:22:53 PM	SiCl4 post valve closed
12/17/2010	10:22:53 PM	Bubbler valve closed
12/17/2010	10:22:53 PM	Helium valve opened
12/17/2010	10:22:53 PM	Main Vac valve opened
12/17/2010	10:22:53 PM	Bypass valve opened
12/17/2010	10:22:53 PM	Helium MFC set to  100.000000
12/17/2010	10:22:53 PM	H2 MFC set to  0.000000
12/17/2010	10:22:53 PM	BCl3 MFC set to  0.000000
12/17/2010	10:22:53 PM	PHl3 MFC set to  0.000000
12/17/2010	10:22:53 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:22:53 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:22:53 PM	Tube furnace set to 0
12/17/2010	10:23:53 PM	Helium valve closed
12/17/2010	10:23:53 PM	H2 valve closed
12/17/2010	10:23:53 PM	BCl3 valve closed
12/17/2010	10:23:53 PM	PH3 valve closed
12/17/2010	10:23:53 PM	SiCl4 pre valve closed
12/17/2010	10:23:53 PM	SiCl4 post valve closed
12/17/2010	10:23:53 PM	Bubbler valve closed
12/17/2010	10:23:53 PM	Main Vac valve opened
12/17/2010	10:23:53 PM	Bypass valve opened
12/17/2010	10:23:53 PM	Helium MFC set to  0.000000
12/17/2010	10:23:53 PM	H2 MFC set to  0.000000
12/17/2010	10:23:53 PM	BCl3 MFC set to  0.000000
12/17/2010	10:23:53 PM	PHl3 MFC set to  0.000000
12/17/2010	10:23:53 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:23:53 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:23:53 PM	Tube furnace set to 0
12/17/2010	10:24:53 PM	H2 valve closed
12/17/2010	10:24:53 PM	BCl3 valve closed
12/17/2010	10:24:53 PM	PH3 valve closed
12/17/2010	10:24:53 PM	SiCl4 pre valve closed
12/17/2010	10:24:53 PM	SiCl4 post valve closed
12/17/2010	10:24:53 PM	Bubbler valve closed
12/17/2010	10:24:53 PM	Helium valve opened
12/17/2010	10:24:53 PM	Main Vac valve opened
12/17/2010	10:24:53 PM	Bypass valve opened
12/17/2010	10:24:53 PM	Helium MFC set to  100.000000
12/17/2010	10:24:53 PM	H2 MFC set to  0.000000
12/17/2010	10:24:53 PM	BCl3 MFC set to  0.000000
12/17/2010	10:24:53 PM	PHl3 MFC set to  0.000000
12/17/2010	10:24:53 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:24:53 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:24:53 PM	Tube furnace set to 0
12/17/2010	10:25:53 PM	Helium valve closed
12/17/2010	10:25:53 PM	H2 valve closed
12/17/2010	10:25:53 PM	BCl3 valve closed
12/17/2010	10:25:53 PM	PH3 valve closed
12/17/2010	10:25:53 PM	SiCl4 pre valve closed
12/17/2010	10:25:53 PM	SiCl4 post valve closed
12/17/2010	10:25:53 PM	Bubbler valve closed
12/17/2010	10:25:53 PM	Main Vac valve opened
12/17/2010	10:25:53 PM	Bypass valve opened
12/17/2010	10:25:53 PM	Helium MFC set to  0.000000
12/17/2010	10:25:53 PM	H2 MFC set to  0.000000
12/17/2010	10:25:53 PM	BCl3 MFC set to  0.000000
12/17/2010	10:25:53 PM	PHl3 MFC set to  0.000000
12/17/2010	10:25:53 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:25:53 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:25:54 PM	Tube furnace set to 0
12/17/2010	10:26:54 PM	H2 valve closed
12/17/2010	10:26:54 PM	BCl3 valve closed
12/17/2010	10:26:54 PM	PH3 valve closed
12/17/2010	10:26:54 PM	SiCl4 pre valve closed
12/17/2010	10:26:54 PM	SiCl4 post valve closed
12/17/2010	10:26:54 PM	Bubbler valve closed
12/17/2010	10:26:54 PM	Helium valve opened
12/17/2010	10:26:54 PM	Main Vac valve opened
12/17/2010	10:26:54 PM	Bypass valve opened
12/17/2010	10:26:54 PM	Helium MFC set to  100.000000
12/17/2010	10:26:54 PM	H2 MFC set to  0.000000
12/17/2010	10:26:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:26:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:26:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:26:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:26:54 PM	Tube furnace set to 0
12/17/2010	10:27:54 PM	Helium valve closed
12/17/2010	10:27:54 PM	H2 valve closed
12/17/2010	10:27:54 PM	BCl3 valve closed
12/17/2010	10:27:54 PM	PH3 valve closed
12/17/2010	10:27:54 PM	SiCl4 pre valve closed
12/17/2010	10:27:54 PM	SiCl4 post valve closed
12/17/2010	10:27:54 PM	Bubbler valve closed
12/17/2010	10:27:54 PM	Main Vac valve opened
12/17/2010	10:27:54 PM	Bypass valve opened
12/17/2010	10:27:54 PM	Helium MFC set to  0.000000
12/17/2010	10:27:54 PM	H2 MFC set to  0.000000
12/17/2010	10:27:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:27:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:27:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:27:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:27:54 PM	Tube furnace set to 0
12/17/2010	10:28:54 PM	H2 valve closed
12/17/2010	10:28:54 PM	BCl3 valve closed
12/17/2010	10:28:54 PM	PH3 valve closed
12/17/2010	10:28:54 PM	SiCl4 pre valve closed
12/17/2010	10:28:54 PM	SiCl4 post valve closed
12/17/2010	10:28:54 PM	Bubbler valve closed
12/17/2010	10:28:54 PM	Helium valve opened
12/17/2010	10:28:54 PM	Main Vac valve opened
12/17/2010	10:28:54 PM	Bypass valve opened
12/17/2010	10:28:54 PM	Helium MFC set to  100.000000
12/17/2010	10:28:54 PM	H2 MFC set to  0.000000
12/17/2010	10:28:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:28:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:28:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:28:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:28:54 PM	Tube furnace set to 0
12/17/2010	10:29:54 PM	Helium valve closed
12/17/2010	10:29:54 PM	H2 valve closed
12/17/2010	10:29:54 PM	BCl3 valve closed
12/17/2010	10:29:54 PM	PH3 valve closed
12/17/2010	10:29:54 PM	SiCl4 pre valve closed
12/17/2010	10:29:54 PM	SiCl4 post valve closed
12/17/2010	10:29:54 PM	Bubbler valve closed
12/17/2010	10:29:54 PM	Main Vac valve opened
12/17/2010	10:29:54 PM	Bypass valve opened
12/17/2010	10:29:54 PM	Helium MFC set to  0.000000
12/17/2010	10:29:54 PM	H2 MFC set to  0.000000
12/17/2010	10:29:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:29:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:29:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:29:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:29:54 PM	Tube furnace set to 0
12/17/2010	10:30:54 PM	H2 valve closed
12/17/2010	10:30:54 PM	BCl3 valve closed
12/17/2010	10:30:54 PM	PH3 valve closed
12/17/2010	10:30:54 PM	SiCl4 pre valve closed
12/17/2010	10:30:54 PM	SiCl4 post valve closed
12/17/2010	10:30:54 PM	Bubbler valve closed
12/17/2010	10:30:54 PM	Helium valve opened
12/17/2010	10:30:54 PM	Main Vac valve opened
12/17/2010	10:30:54 PM	Bypass valve opened
12/17/2010	10:30:54 PM	Helium MFC set to  100.000000
12/17/2010	10:30:54 PM	H2 MFC set to  0.000000
12/17/2010	10:30:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:30:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:30:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:30:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:30:55 PM	Tube furnace set to 0
12/17/2010	10:31:55 PM	Helium valve closed
12/17/2010	10:31:55 PM	H2 valve closed
12/17/2010	10:31:55 PM	BCl3 valve closed
12/17/2010	10:31:55 PM	PH3 valve closed
12/17/2010	10:31:55 PM	SiCl4 pre valve closed
12/17/2010	10:31:55 PM	SiCl4 post valve closed
12/17/2010	10:31:55 PM	Bubbler valve closed
12/17/2010	10:31:55 PM	Main Vac valve opened
12/17/2010	10:31:55 PM	Bypass valve opened
12/17/2010	10:31:55 PM	Helium MFC set to  0.000000
12/17/2010	10:31:55 PM	H2 MFC set to  0.000000
12/17/2010	10:31:55 PM	BCl3 MFC set to  0.000000
12/17/2010	10:31:55 PM	PHl3 MFC set to  0.000000
12/17/2010	10:31:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:31:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:31:55 PM	Tube furnace set to 0
12/17/2010	10:31:56 PM	Run finished at 10:31 PM
12/17/2010	10:31:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	10:36:36 PM	Recipe started at 10:36 PM
12/17/2010	10:36:36 PM	Helium valve closed
12/17/2010	10:36:36 PM	BCl3 valve closed
12/17/2010	10:36:36 PM	PH3 valve closed
12/17/2010	10:36:36 PM	SiCl4 pre valve closed
12/17/2010	10:36:36 PM	SiCl4 post valve closed
12/17/2010	10:36:36 PM	Main Vac valve closed
12/17/2010	10:36:36 PM	Bypass valve closed
12/17/2010	10:36:36 PM	Bubbler valve closed
12/17/2010	10:36:36 PM	H2 valve opened
12/17/2010	10:36:36 PM	Helium MFC set to  0.000000
12/17/2010	10:36:36 PM	H2 MFC set to  500.000000
12/17/2010	10:36:36 PM	BCl3 MFC set to  0.000000
12/17/2010	10:36:36 PM	PHl3 MFC set to  0.000000
12/17/2010	10:36:36 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:36:36 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:36:36 PM	Tube furnace set to 0
12/17/2010	10:37:54 PM	Helium valve closed
12/17/2010	10:37:54 PM	BCl3 valve closed
12/17/2010	10:37:54 PM	PH3 valve closed
12/17/2010	10:37:54 PM	SiCl4 pre valve closed
12/17/2010	10:37:54 PM	SiCl4 post valve closed
12/17/2010	10:37:54 PM	Main Vac valve closed
12/17/2010	10:37:54 PM	Bypass valve closed
12/17/2010	10:37:54 PM	H2 valve opened
12/17/2010	10:37:54 PM	Bubbler valve opened
12/17/2010	10:37:54 PM	Helium MFC set to  0.000000
12/17/2010	10:37:54 PM	H2 MFC set to  500.000000
12/17/2010	10:37:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:37:54 PM	PHl3 MFC set to  0.000000
12/17/2010	10:37:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	10:37:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:37:54 PM	Tube furnace set to 1000
12/17/2010	10:57:54 PM	Helium valve closed
12/17/2010	10:57:54 PM	BCl3 valve closed
12/17/2010	10:57:54 PM	Main Vac valve closed
12/17/2010	10:57:54 PM	Bypass valve closed
12/17/2010	10:57:54 PM	H2 valve opened
12/17/2010	10:57:54 PM	PH3 valve opened
12/17/2010	10:57:54 PM	SiCl4 pre valve opened
12/17/2010	10:57:54 PM	SiCl4 post valve opened
12/17/2010	10:57:54 PM	Bubbler valve opened
12/17/2010	10:57:54 PM	Helium MFC set to  0.000000
12/17/2010	10:57:54 PM	H2 MFC set to  500.000000
12/17/2010	10:57:54 PM	BCl3 MFC set to  0.000000
12/17/2010	10:57:54 PM	PHl3 MFC set to  1.000000
12/17/2010	10:57:54 PM	SiCl4 MFC set to  50.000000
12/17/2010	10:57:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	10:57:54 PM	Tube furnace set to 1000
12/17/2010	11:17:54 PM	H2 valve closed
12/17/2010	11:17:54 PM	BCl3 valve closed
12/17/2010	11:17:54 PM	PH3 valve closed
12/17/2010	11:17:54 PM	SiCl4 pre valve closed
12/17/2010	11:17:54 PM	SiCl4 post valve closed
12/17/2010	11:17:54 PM	Main Vac valve closed
12/17/2010	11:17:54 PM	Bypass valve closed
12/17/2010	11:17:54 PM	Helium valve opened
12/17/2010	11:17:54 PM	Bubbler valve opened
12/17/2010	11:17:54 PM	Helium MFC set to  500.000000
12/17/2010	11:17:54 PM	H2 MFC set to  0.000000
12/17/2010	11:17:54 PM	BCl3 MFC set to  0.000000
12/17/2010	11:17:54 PM	PHl3 MFC set to  0.000000
12/17/2010	11:17:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:17:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:17:54 PM	Tube furnace set to 0
12/17/2010	11:37:54 PM	Helium valve closed
12/17/2010	11:37:54 PM	H2 valve closed
12/17/2010	11:37:54 PM	BCl3 valve closed
12/17/2010	11:37:54 PM	PH3 valve closed
12/17/2010	11:37:54 PM	SiCl4 pre valve closed
12/17/2010	11:37:54 PM	SiCl4 post valve closed
12/17/2010	11:37:54 PM	Main Vac valve closed
12/17/2010	11:37:54 PM	Bypass valve closed
12/17/2010	11:37:54 PM	Bubbler valve closed
12/17/2010	11:37:54 PM	Helium MFC set to  0.000000
12/17/2010	11:37:54 PM	H2 MFC set to  0.000000
12/17/2010	11:37:54 PM	BCl3 MFC set to  0.000000
12/17/2010	11:37:54 PM	PHl3 MFC set to  0.000000
12/17/2010	11:37:54 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:37:54 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:37:54 PM	Tube furnace set to 0
12/17/2010	11:37:54 PM	Run finished at 11:37 PM
12/17/2010	11:44:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	11:44:22 PM	Recipe started at 11:44 PM
12/17/2010	11:44:22 PM	H2 valve closed
12/17/2010	11:44:22 PM	BCl3 valve closed
12/17/2010	11:44:22 PM	PH3 valve closed
12/17/2010	11:44:22 PM	SiCl4 pre valve closed
12/17/2010	11:44:22 PM	SiCl4 post valve closed
12/17/2010	11:44:22 PM	Main Vac valve closed
12/17/2010	11:44:22 PM	Bypass valve closed
12/17/2010	11:44:22 PM	Bubbler valve closed
12/17/2010	11:44:22 PM	Helium valve opened
12/17/2010	11:44:22 PM	Helium MFC set to  500.000000
12/17/2010	11:44:22 PM	H2 MFC set to  0.000000
12/17/2010	11:44:22 PM	BCl3 MFC set to  0.000000
12/17/2010	11:44:22 PM	PHl3 MFC set to  0.000000
12/17/2010	11:44:22 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:44:22 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:44:22 PM	Tube furnace set to 0
12/17/2010	11:44:25 PM	Helium valve closed
12/17/2010	11:44:25 PM	H2 valve closed
12/17/2010	11:44:25 PM	BCl3 valve closed
12/17/2010	11:44:25 PM	PH3 valve closed
12/17/2010	11:44:25 PM	SiCl4 pre valve closed
12/17/2010	11:44:25 PM	SiCl4 post valve closed
12/17/2010	11:44:25 PM	Main Vac valve closed
12/17/2010	11:44:25 PM	Bypass valve closed
12/17/2010	11:44:25 PM	Bubbler valve closed
12/17/2010	11:44:25 PM	Helium MFC set to  0.000000
12/17/2010	11:44:25 PM	H2 MFC set to  0.000000
12/17/2010	11:44:25 PM	BCl3 MFC set to  0.000000
12/17/2010	11:44:25 PM	PHl3 MFC set to  0.000000
12/17/2010	11:44:25 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:44:25 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:44:25 PM	Tube furnace set to 0
12/17/2010	11:44:25 PM	Run finished at 11:44 PM
12/17/2010	11:44:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/17/2010	11:50:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	11:50:03 PM	Recipe started at 11:50 PM
12/17/2010	11:50:03 PM	Helium valve closed
12/17/2010	11:50:03 PM	H2 valve closed
12/17/2010	11:50:03 PM	BCl3 valve closed
12/17/2010	11:50:03 PM	PH3 valve closed
12/17/2010	11:50:03 PM	SiCl4 pre valve closed
12/17/2010	11:50:03 PM	SiCl4 post valve closed
12/17/2010	11:50:03 PM	Main Vac valve closed
12/17/2010	11:50:03 PM	Bubbler valve closed
12/17/2010	11:50:03 PM	Bypass valve opened
12/17/2010	11:50:03 PM	Helium MFC set to  0.000000
12/17/2010	11:50:03 PM	H2 MFC set to  0.000000
12/17/2010	11:50:03 PM	BCl3 MFC set to  0.000000
12/17/2010	11:50:03 PM	PHl3 MFC set to  0.000000
12/17/2010	11:50:03 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:50:03 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:50:03 PM	Tube furnace set to 0
12/17/2010	11:51:00 PM	Helium valve closed
12/17/2010	11:51:00 PM	H2 valve closed
12/17/2010	11:51:00 PM	BCl3 valve closed
12/17/2010	11:51:00 PM	PH3 valve closed
12/17/2010	11:51:00 PM	SiCl4 pre valve closed
12/17/2010	11:51:00 PM	SiCl4 post valve closed
12/17/2010	11:51:00 PM	Bubbler valve closed
12/17/2010	11:51:00 PM	Main Vac valve opened
12/17/2010	11:51:00 PM	Bypass valve opened
12/17/2010	11:51:00 PM	Helium MFC set to  0.000000
12/17/2010	11:51:00 PM	H2 MFC set to  0.000000
12/17/2010	11:51:00 PM	BCl3 MFC set to  0.000000
12/17/2010	11:51:00 PM	PHl3 MFC set to  0.000000
12/17/2010	11:51:00 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:51:00 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:51:00 PM	Tube furnace set to 0
12/17/2010	11:51:00 PM	Run finished at 11:51 PM
12/17/2010	11:51:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/17/2010	11:51:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/17/2010	11:51:55 PM	Recipe started at 11:51 PM
12/17/2010	11:51:55 PM	Helium valve closed
12/17/2010	11:51:55 PM	H2 valve closed
12/17/2010	11:51:55 PM	BCl3 valve closed
12/17/2010	11:51:55 PM	PH3 valve closed
12/17/2010	11:51:55 PM	SiCl4 pre valve closed
12/17/2010	11:51:55 PM	SiCl4 post valve closed
12/17/2010	11:51:55 PM	Main Vac valve closed
12/17/2010	11:51:55 PM	Bubbler valve closed
12/17/2010	11:51:55 PM	Bypass valve opened
12/17/2010	11:51:55 PM	Helium MFC set to  0.000000
12/17/2010	11:51:55 PM	H2 MFC set to  0.000000
12/17/2010	11:51:55 PM	BCl3 MFC set to  0.000000
12/17/2010	11:51:55 PM	PHl3 MFC set to  0.000000
12/17/2010	11:51:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:51:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:51:55 PM	Tube furnace set to 0
12/17/2010	11:51:55 PM	Helium valve closed
12/17/2010	11:51:55 PM	H2 valve closed
12/17/2010	11:51:55 PM	BCl3 valve closed
12/17/2010	11:51:55 PM	PH3 valve closed
12/17/2010	11:51:55 PM	SiCl4 pre valve closed
12/17/2010	11:51:55 PM	SiCl4 post valve closed
12/17/2010	11:51:55 PM	Bubbler valve closed
12/17/2010	11:51:55 PM	Main Vac valve opened
12/17/2010	11:51:55 PM	Bypass valve opened
12/17/2010	11:51:55 PM	Helium MFC set to  0.000000
12/17/2010	11:51:55 PM	H2 MFC set to  0.000000
12/17/2010	11:51:55 PM	BCl3 MFC set to  0.000000
12/17/2010	11:51:55 PM	PHl3 MFC set to  0.000000
12/17/2010	11:51:55 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:51:55 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:51:55 PM	Tube furnace set to 0
12/17/2010	11:52:56 PM	H2 valve closed
12/17/2010	11:52:56 PM	BCl3 valve closed
12/17/2010	11:52:56 PM	PH3 valve closed
12/17/2010	11:52:56 PM	SiCl4 pre valve closed
12/17/2010	11:52:56 PM	SiCl4 post valve closed
12/17/2010	11:52:56 PM	Bubbler valve closed
12/17/2010	11:52:56 PM	Helium valve opened
12/17/2010	11:52:56 PM	Main Vac valve opened
12/17/2010	11:52:56 PM	Bypass valve opened
12/17/2010	11:52:56 PM	Helium MFC set to  100.000000
12/17/2010	11:52:56 PM	H2 MFC set to  0.000000
12/17/2010	11:52:56 PM	BCl3 MFC set to  0.000000
12/17/2010	11:52:56 PM	PHl3 MFC set to  0.000000
12/17/2010	11:52:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:52:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:52:56 PM	Tube furnace set to 0
12/17/2010	11:53:56 PM	Helium valve closed
12/17/2010	11:53:56 PM	H2 valve closed
12/17/2010	11:53:56 PM	BCl3 valve closed
12/17/2010	11:53:56 PM	PH3 valve closed
12/17/2010	11:53:56 PM	SiCl4 pre valve closed
12/17/2010	11:53:56 PM	SiCl4 post valve closed
12/17/2010	11:53:56 PM	Bubbler valve closed
12/17/2010	11:53:56 PM	Main Vac valve opened
12/17/2010	11:53:56 PM	Bypass valve opened
12/17/2010	11:53:56 PM	Helium MFC set to  0.000000
12/17/2010	11:53:56 PM	H2 MFC set to  0.000000
12/17/2010	11:53:56 PM	BCl3 MFC set to  0.000000
12/17/2010	11:53:56 PM	PHl3 MFC set to  0.000000
12/17/2010	11:53:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:53:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:53:56 PM	Tube furnace set to 0
12/17/2010	11:54:56 PM	H2 valve closed
12/17/2010	11:54:56 PM	BCl3 valve closed
12/17/2010	11:54:56 PM	PH3 valve closed
12/17/2010	11:54:56 PM	SiCl4 pre valve closed
12/17/2010	11:54:56 PM	SiCl4 post valve closed
12/17/2010	11:54:56 PM	Bubbler valve closed
12/17/2010	11:54:56 PM	Helium valve opened
12/17/2010	11:54:56 PM	Main Vac valve opened
12/17/2010	11:54:56 PM	Bypass valve opened
12/17/2010	11:54:56 PM	Helium MFC set to  100.000000
12/17/2010	11:54:56 PM	H2 MFC set to  0.000000
12/17/2010	11:54:56 PM	BCl3 MFC set to  0.000000
12/17/2010	11:54:56 PM	PHl3 MFC set to  0.000000
12/17/2010	11:54:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:54:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:54:56 PM	Tube furnace set to 0
12/17/2010	11:55:56 PM	Helium valve closed
12/17/2010	11:55:56 PM	H2 valve closed
12/17/2010	11:55:56 PM	BCl3 valve closed
12/17/2010	11:55:56 PM	PH3 valve closed
12/17/2010	11:55:56 PM	SiCl4 pre valve closed
12/17/2010	11:55:56 PM	SiCl4 post valve closed
12/17/2010	11:55:56 PM	Bubbler valve closed
12/17/2010	11:55:56 PM	Main Vac valve opened
12/17/2010	11:55:56 PM	Bypass valve opened
12/17/2010	11:55:56 PM	Helium MFC set to  0.000000
12/17/2010	11:55:56 PM	H2 MFC set to  0.000000
12/17/2010	11:55:56 PM	BCl3 MFC set to  0.000000
12/17/2010	11:55:56 PM	PHl3 MFC set to  0.000000
12/17/2010	11:55:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:55:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:55:56 PM	Tube furnace set to 0
12/17/2010	11:56:56 PM	H2 valve closed
12/17/2010	11:56:56 PM	BCl3 valve closed
12/17/2010	11:56:56 PM	PH3 valve closed
12/17/2010	11:56:56 PM	SiCl4 pre valve closed
12/17/2010	11:56:56 PM	SiCl4 post valve closed
12/17/2010	11:56:56 PM	Bubbler valve closed
12/17/2010	11:56:56 PM	Helium valve opened
12/17/2010	11:56:56 PM	Main Vac valve opened
12/17/2010	11:56:56 PM	Bypass valve opened
12/17/2010	11:56:56 PM	Helium MFC set to  100.000000
12/17/2010	11:56:56 PM	H2 MFC set to  0.000000
12/17/2010	11:56:56 PM	BCl3 MFC set to  0.000000
12/17/2010	11:56:56 PM	PHl3 MFC set to  0.000000
12/17/2010	11:56:56 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:56:56 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:56:56 PM	Tube furnace set to 0
12/17/2010	11:57:56 PM	Helium valve closed
12/17/2010	11:57:56 PM	H2 valve closed
12/17/2010	11:57:56 PM	BCl3 valve closed
12/17/2010	11:57:56 PM	PH3 valve closed
12/17/2010	11:57:56 PM	SiCl4 pre valve closed
12/17/2010	11:57:56 PM	SiCl4 post valve closed
12/17/2010	11:57:56 PM	Bubbler valve closed
12/17/2010	11:57:56 PM	Main Vac valve opened
12/17/2010	11:57:56 PM	Bypass valve opened
12/17/2010	11:57:57 PM	Helium MFC set to  0.000000
12/17/2010	11:57:57 PM	H2 MFC set to  0.000000
12/17/2010	11:57:57 PM	BCl3 MFC set to  0.000000
12/17/2010	11:57:57 PM	PHl3 MFC set to  0.000000
12/17/2010	11:57:57 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:57:57 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:57:57 PM	Tube furnace set to 0
12/17/2010	11:58:57 PM	H2 valve closed
12/17/2010	11:58:57 PM	BCl3 valve closed
12/17/2010	11:58:57 PM	PH3 valve closed
12/17/2010	11:58:57 PM	SiCl4 pre valve closed
12/17/2010	11:58:57 PM	SiCl4 post valve closed
12/17/2010	11:58:57 PM	Bubbler valve closed
12/17/2010	11:58:57 PM	Helium valve opened
12/17/2010	11:58:57 PM	Main Vac valve opened
12/17/2010	11:58:57 PM	Bypass valve opened
12/17/2010	11:58:57 PM	Helium MFC set to  100.000000
12/17/2010	11:58:57 PM	H2 MFC set to  0.000000
12/17/2010	11:58:57 PM	BCl3 MFC set to  0.000000
12/17/2010	11:58:57 PM	PHl3 MFC set to  0.000000
12/17/2010	11:58:57 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:58:57 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:58:57 PM	Tube furnace set to 0
12/17/2010	11:59:57 PM	Helium valve closed
12/17/2010	11:59:57 PM	H2 valve closed
12/17/2010	11:59:57 PM	BCl3 valve closed
12/17/2010	11:59:57 PM	PH3 valve closed
12/17/2010	11:59:57 PM	SiCl4 pre valve closed
12/17/2010	11:59:57 PM	SiCl4 post valve closed
12/17/2010	11:59:57 PM	Bubbler valve closed
12/17/2010	11:59:57 PM	Main Vac valve opened
12/17/2010	11:59:57 PM	Bypass valve opened
12/17/2010	11:59:57 PM	Helium MFC set to  0.000000
12/17/2010	11:59:57 PM	H2 MFC set to  0.000000
12/17/2010	11:59:57 PM	BCl3 MFC set to  0.000000
12/17/2010	11:59:57 PM	PHl3 MFC set to  0.000000
12/17/2010	11:59:57 PM	SiCl4 MFC set to  0.000000
12/17/2010	11:59:57 PM	Bypass solenoid MFC set to  0.000000
12/17/2010	11:59:57 PM	Tube furnace set to 0
